CN205748297U - Vertical dress of optical system examines device - Google Patents

Vertical dress of optical system examines device Download PDF

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Publication number
CN205748297U
CN205748297U CN201620443723.3U CN201620443723U CN205748297U CN 205748297 U CN205748297 U CN 205748297U CN 201620443723 U CN201620443723 U CN 201620443723U CN 205748297 U CN205748297 U CN 205748297U
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CN
China
Prior art keywords
adjusting
guide rail
optical system
transverse guide
vertical
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Withdrawn - After Issue
Application number
CN201620443723.3U
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Chinese (zh)
Inventor
康晓鹏
付兴
李华
王鹏
刘军鹏
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Priority to CN201620443723.3U priority Critical patent/CN205748297U/en
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Publication of CN205748297U publication Critical patent/CN205748297U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a vertical assembling and inspecting device of an optical system, which belongs to the technical field of precision optics application, and comprises an adjusting turntable and 3 adjusting brackets which are arranged on the adjusting turntable from bottom to top in sequence; the adjusting rotary table is used for placing the parts to be inspected, 3 adjusting supports are arranged on a fixed mounting frame, and a compensating mirror adjusting support, an interferometer adjusting support and a self-aligning plane mirror adjusting support are respectively arranged from bottom to top; each of the 3 adjusting supports comprises a vertical guide rail and a transverse guide rail, the vertical guide rail is fixedly connected with the fixed mounting frame, and the transverse guide rails can slide up and down along the vertical guide rails; the utility model discloses can avoid because the shape of face problem that the gravity reason arouses, but the dress is examined the light path and is adjusted by the independent assortment, can satisfy different optical system's detection demand.

Description

Vertical dress of optical system examines device
Technical Field
The utility model belongs to the technical field of precision optics is used, a device is examined to vertical dress of optical system is related to, can be applied to precision optics and use technical field.
Background
With the development of scientific technology in China, large-caliber optical systems are widely applied in the fields of astronomical optics, space remote sensing optics, space foundation target detection and identification and the like. In the design process of the large-aperture optical system, in order to meet the requirements of high rigidity, high strength and light weight of the large-aperture optical system, special materials and structures are generally adopted to reduce the stress deformation of the mirror, reasonable supporting and matching structures are adopted to reduce the stress deformation of the mirror group system, and the consistency of the optical axis is improved. Meanwhile, a large-aperture optical system applied to space optics has strict requirements on optical assembly and inspection, and the final quality of an optical product is seriously influenced by a tiny optical axis consistency error and stress deformation of a mirror.
At present, a horizontal type assembly and inspection method is generally adopted, as shown in fig. 1, a common horizontal type detection light path diagram is shown, and the assembly and inspection are mainly used for ensuring the consistency of optical axes of detection light paths. If the actual use state of the lens group is not horizontal or when the lens group is applied to a gravity-free environment, the defects of the assembly and inspection method are obvious, namely, the matching clearance of the shaft holes and the non-uniformity of stress and deformation along the radial direction of the mirror surface are caused by the self gravity of the mirror, so that the consistency of the optical axis of the optical system and the surface shape of the mirror surface are influenced, the imaging defects of an optical product are caused, and the influence on a large-caliber optical system is more obvious.
As shown in fig. 2 (a), (b) and (c), the supporting means of the main mirror is commonly used, and the three supporting means all cause surface defects due to the gravity of the main mirror.
SUMMERY OF THE UTILITY MODEL
In order to avoid or reduce the shape of face defect because main mirror gravity arouses, the utility model provides a device and method are examined in vertical dress of optical system.
For solving the technical problem, the utility model discloses a following technical scheme is given:
a vertical type assembling and detecting device of an optical system is characterized in that: comprises an adjusting rotary table and 3 adjusting brackets which are arranged on the adjusting rotary table from bottom to top in sequence; the adjusting rotary table is used for placing the parts to be inspected, 3 adjusting supports are arranged on a fixed mounting frame, and a compensating mirror adjusting support, an interferometer adjusting support and a self-aligning plane mirror adjusting support are respectively arranged from bottom to top;
each of the 3 adjusting supports comprises a vertical guide rail and a transverse guide rail, the vertical guide rail is fixedly connected with the fixed mounting frame, and the transverse guide rails can slide up and down along the vertical guide rails;
the compensating mirror adjusting bracket also comprises a compensating mirror; the compensating mirrors are arranged on the corresponding transverse guide rails and can slide left and right along the transverse guide rails;
the interferometer adjusting bracket also comprises a laser interferometer; the laser interferometers are arranged on the corresponding transverse guide rails and can slide left and right along the transverse guide rails;
The self-aligning plane mirror adjusting bracket also comprises a self-aligning plane mirror; the self-aligning plane mirror is arranged on the corresponding transverse guide rail and can slide left and right along the transverse guide rail.
The vertical guide rail adopts a ball screw, the transverse guide rail is sleeved on the ball screw through a pipe type connecting part, and the vertical guide rails of the 3 adjusting supports are respectively driven by 3 motors.
The ball screws are two, and two ends of the transverse guide rail are respectively sleeved on the ball screws through the tubular connecting parts.
The transverse guide rails adopt ball screws, and the transverse guide rails of the 3 adjusting brackets are respectively driven by 3 motors.
The motor is a servo motor.
The adjusting rotary table and the fixed mounting frame are arranged on the buffer cushion.
The cushion pad is a vibration isolation sizing block.
The adjusting turntable is a five-dimensional turntable.
The method for assembling and inspecting by using the vertical assembling and inspecting device of the optical system is characterized in that: comprises the following steps of (a) carrying out,
1) adjusting the vertical axis of the adjusting turntable to be vertical to serve as the central line of the loading and inspection optical axis;
2) fixing the part to be inspected on an objective table of the adjusting turntable, so that the optical axis of the part to be inspected is superposed with the central line of the optical axis to be inspected;
3) adjusting the positions of the compensating mirror and the laser interferometer, checking the surface shape of the part to be inspected, and if the surface shape meets the requirement, performing the next step; if the surface shape does not meet the requirement, adjusting the position of the laser interferometer and/or the part to be inspected according to the surface shape feedback result to enable the surface shape to meet the requirement, and then carrying out the next step;
4) And assembling the part to be inspected on the premise of ensuring that the optical axis of the part to be inspected is coincident with the central line of the optical axis to be inspected, and finishing the inspection work.
Wherein,
the step 2) is realized by the following steps:
rotating the adjusting rotary table, enabling the part to be inspected to rotate along with the rotation of the adjusting rotary table, imaging the part to be inspected in the rotation process of the part to be inspected, observing the motion track of an imaging point, and if the motion track does not meet the requirement, continuously adjusting the adjusting rotary table until the motion track meets the requirement, wherein the optical axis of the part to be inspected is superposed with the central line of the optical axis to be inspected;
wherein, the part to be inspected is an optical system or an optical single mirror.
The utility model discloses following technological effect has:
the device and the method are simple and feasible, the surface shape problem caused by gravity in the existing installation and inspection technology is avoided, the installation and inspection light path can be freely combined and adjusted, and the detection requirements of different optical systems can be met;
the precision five-dimensional turntable can realize multi-dimensional adjustment of optical products, and is favorable for quick and precise adjustment of consistency of optical axes;
the two-dimensional combined servo control of the electric LM rolling guide rail can realize accurate positioning and adjustment, thereby ensuring the stability and the usability in the loading and inspection process;
Drawings
FIG. 1 is a horizontal detection light path diagram;
FIG. 2 is a schematic view of a primary mirror support;
wherein, fig. 2(a) is a schematic diagram of a primary mirror supporting mode, fig. 2(b) is a schematic diagram of a primary mirror supporting mode, fig. 2(c) is a schematic diagram of a primary mirror supporting mode, and fig. 2(c) is a schematic diagram of a primary mirror supporting mode, wherein the three supporting modes all cause surface shape defects due to the gravity of the primary mirror;
FIG. 3 is a vertical detection optical path (one);
FIG. 4 is a front view of the five-dimensional turret profile;
FIG. 5 is a front view in cross-section of a five-dimensional turret;
FIG. 6 is a top view of a five-dimensional turret;
FIG. 7 is a cross-sectional view taken along line A-A of FIG. 5;
FIG. 8 is a cross-sectional view taken along line B-B of FIG. 5 (i.e., a schematic view of the trimming assembly);
fig. 9 is a schematic azimuth view of the pitching and locking principle of the five-dimensional turntable;
FIG. 10 is a schematic azimuth view of translation and locking of a five-dimensional turntable;
FIG. 11 is a three-dimensional axial side view of a five-dimensional turret;
fig. 12 is a three-dimensional sectional view of a five-dimensional turret;
reference numbers in the figures: 111-adjusting the turntable; 211-a fixed mounting; 311-compensation mirror adjustment support; 411-interferometer adjustment mount; 511-self-aligning mirror adjustment mount; 611-self-collimating plane mirror; 711-a laser interferometer; 811-compensation mirror; 911-single lens for inspection; 101-set of test lens;
1-45 degree plane reflector, 2-leveling support base, 3-box, 4-square fixed shaft, 5-thrust ball bearing, 6-azimuth rotating shaft, 7-first angular contact ball bearing, 8-bearing distance ring, 10-torque motor, 11-bearing gland, 13-supporting platform, 14-first translation guide rail mounting disk, 15-track, 16-second translation guide rail mounting disk, 17-bearing seat, 18-second bearing, 19-pitch shaft, 20-transition frame, 21-object stage, 22-threaded rod, 23-adjusting nut, 24-first pitch adjusting ball hinge, 25-second pitch adjusting ball hinge, 26-first gear, 27-second gear, 28-bearing box, 29-worm gear, 30-worm, 31-eccentric shaft sleeve, 32-connecting flange, 33-worm shaft and 34-driving motor.
Detailed Description
As shown in fig. 3, the present invention includes an adjusting turntable 111 for placing the parts to be inspected; 3 adjusting brackets are sequentially arranged on the adjusting rotary table from bottom to top; the 3 adjusting brackets are arranged on a fixed mounting frame 211, and respectively comprise a compensating mirror adjusting bracket 311, an interferometer adjusting bracket 411 and a self-collimating plane mirror adjusting bracket from bottom to top; the fixed mounting frame is a truss structure which is formed by welding profile steels and has higher strength and rigidity;
each of the 3 adjusting supports comprises a vertical guide rail and a transverse guide rail, the vertical guide rail is fixedly connected with the fixed mounting frame, and the transverse guide rails can slide up and down along the vertical guide rails;
the compensating mirror adjusting bracket also comprises a compensating mirror 811; the compensating mirror is arranged on the transverse guide rail and can slide left and right along the transverse guide rail;
the interferometer adjusting bracket also comprises a laser interferometer; the laser interferometer 711 is arranged on the transverse guide rail and can slide left and right along the transverse guide rail;
the self-collimating plane mirror adjusting bracket further comprises a self-collimating plane mirror 611; the self-aligning plane mirror is arranged on the transverse guide rail and can slide left and right along the transverse guide rail.
The vertical guide rail adopts a ball screw, the transverse guide rail is sleeved on the ball screw through a tubular connecting part, and the vertical guide rails of the 3 adjusting supports are respectively driven by 3 motors; two ball screws can be arranged, and two ends of the transverse guide rail are respectively sleeved on the ball screws through tubular connecting parts;
The transverse guide rail can also adopt a ball screw, and the transverse guide rails of the 3 adjusting brackets are respectively driven by 3 motors; the motor is a servo motor.
The vertical guide rail and the transverse guide rail are driven by a servo motor to realize the adjustment of the compensating mirror and the laser interferometer along the X direction and the Y direction;
the adjusting rotary table and the fixed mounting frame can be arranged on the buffer cushion. The cushion pad can adopt a vibration isolation sizing block. The utility model is illustrated by taking a five-dimensional turntable as an example of an adjusting turntable, wherein the five-dimensional turntable comprises a vertical shaft system, a translation assembly, a pitching assembly and a fine adjustment assembly; the vertical shaft system comprises a 45-degree plane reflector 1, a leveling support base 2, a torque motor 10, a bearing gland 11, a support table 13, a box body 3, an azimuth fixing shaft 4, a thrust ball bearing 5, an azimuth rotating shaft 6, a first angular contact ball bearing 7 and a bearing distance ring 8, wherein the azimuth fixing shaft 4, the thrust ball bearing 5, the azimuth rotating shaft 6, the first angular contact ball bearing and the bearing distance ring are arranged in the box body;
the bottom of the box body is provided with a through hole, and the box body and the 45-degree plane reflector are fixed on the leveling support base; the 45-degree plane reflector is positioned in the through hole at the bottom of the box body; the side wall of the box body is provided with two through holes which are opposite, and the central axes of the two through holes penetrate through the 45-degree plane reflector;
the azimuth fixing shaft is tubular, is arranged at the bottom of the box body, and the central axis of the azimuth fixing shaft is superposed with the central axis of the through hole at the bottom of the box body; the azimuth rotating shaft is tubular and is sleeved on the azimuth fixing shaft, the first angular contact ball bearings are in a pair, the pair of angular contact ball bearings are arranged between the azimuth fixing shaft and the azimuth rotating shaft in a back-to-back mode, the inner diameter and the outer diameter of the pair of angular contact ball bearings are in matched connection with the azimuth fixing shaft, and the inner ring and the outer ring of the pair of angular contact ball bearings are respectively supported and connected by bearing distance rings; the azimuth fixing shaft and the azimuth rotating shaft are both provided with spigot bosses, and the inner diameter and the outer diameter of the angular contact ball bearing positioned at the bottom in a pair of angular contact ball bearings of the five-dimensional turntable are respectively supported and connected by the spigot bosses of the azimuth fixing shaft and the azimuth rotating shaft along the axial direction; in the pair of angular contact ball bearings, the inner and outer diameters of the upper angular contact ball bearing are pressed by the bearing gland; the bearing gland is fixedly connected with the azimuth rotating shaft and/or the azimuth fixing shaft through screws;
The thrust ball bearing is a one-way thrust ball bearing and is sleeved on the azimuth rotating shaft; the thrust ball bearing comprises an upper diameter ring and a lower diameter ring, the outer diameter of the lower diameter ring is larger than that of the upper diameter ring, and the lower diameter ring is in contact with the bottom of the box body;
the torque motor is arranged between the azimuth rotating shaft and the box body and is used for driving the azimuth rotating shaft to rotate; the supporting table is horizontally fixed on the azimuth rotating shaft, a through hole is formed in the center of the supporting table, and the central axis of the through hole coincides with the central axis of the through hole in the bottom of the box body.
The translation assembly comprises a first translation guide rail mounting plate 14 and a second translation guide rail mounting plate 16; the first translation guide rail mounting disc and the second translation guide rail mounting disc are sequentially mounted on the support table from bottom to top, through holes are formed in the first translation guide rail mounting disc and the second translation guide rail mounting disc, and the central axes of the two through holes are coincident with the central axis of the through hole in the bottom of the box body;
the second translation guide rail mounting disc is positioned on the first translation guide rail mounting disc and can slide on the first translation guide rail mounting disc, and the sliding route is in a cross shape.
The pitching assembly comprises a transition frame 20, an object stage 21, a bearing seat 17 and a second bearing 18 fixed on the bearing seat;
The number of the pitching shafts is 4, the 4 pitching shafts are uniformly arranged on the transition frame along the circumferential direction, and each pitching shaft comprises a vertical section and a transverse section; the vertical section is fixedly connected with the transition frame, the second bearing is sleeved on the transverse section, the number of the bearing seats is 4, two opposite bearing seats are fixed on the upper surface of the second translation guide rail mounting plate in the 4 bearing seats, and the other two opposite bearing seats are fixed on the lower surface of the objective table; the cross formed by connecting lines of two groups of opposite bearing seats is superposed with the sliding route of the second translation guide rail mounting disc on the first translation guide rail mounting disc.
The five-dimensional rotary table further comprises a fine adjustment assembly, wherein the fine adjustment assembly comprises a first gear 26, a second gear 27, a bearing box 28, a worm wheel 29, a worm 30, an eccentric shaft sleeve 31, a worm shaft 33 and a driving motor 34;
the first gear, the second gear, the bearing box body and the worm wheel are all positioned in the box body; the first gear is meshed with the second gear, the first gear is fixedly connected with the azimuth rotating shaft through a screw, the second gear and the worm gear are fixed on a bearing box, a positioning bearing is installed in the bearing box, and the bearing box is fixed on the inner wall of the box body;
the driving motor is positioned outside the box body, an output shaft of the driving motor is fixedly connected with one end of the worm shaft, the other end of the worm shaft is connected with the worm, the eccentric shaft sleeve is sleeved on the middle section of the worm shaft, and the adjustment of the distance between the worm and the worm gear, namely the use and the forbidding of a fine adjustment function, is realized by adjusting the eccentric amount of the eccentric shaft sleeve along the horizontal direction; the eccentric shaft sleeve is provided with a connecting flange which is fixedly arranged on the outer wall of the box body through screws; the worm wheel and the worm are meshed and separated through the eccentric sleeve, under the condition that the worm wheel is meshed with the worm, the driving motor drives the worm to rotate, the worm rotates to drive the worm wheel to rotate, the second gear drives the first gear to rotate, the position rotating shaft is driven to rotate, and the five-dimensional rotary table is rotated.
The pitching assembly further comprises a threaded rod 22, an adjusting nut 23, a first pitching adjusting spherical hinge 24 and a second pitching adjusting spherical hinge 25, 4 through holes are uniformly distributed along the circumference on the transition frame, the through holes are close to the bearing seat, the number of the threaded rods is 4, and each threaded rod penetrates through one through hole; the adjusting nuts are arranged at the upper end and the lower end of the threaded rod;
grooves are formed in the transition frames at the upper end and the lower end of the through hole, a first pitching adjusting spherical hinge and a second pitching adjusting spherical hinge are symmetrically arranged in the two grooves respectively, and the concave surface of the first pitching adjusting spherical hinge and the convex surface of the second pitching adjusting spherical hinge are assembled in a matched mode;
the bearing seat fixed on the upper surface of the second translation guide rail mounting disc is a first bearing seat, and the bearing seat fixed on the lower surface of the objective table is a second bearing seat;
the threaded rod close to the first bearing block is fixed on the lower surface of the objective table, and the threaded rod close to the second bearing block is fixed on the upper surface of the second translation guide rail mounting plate. The pitching adjustment of the objective table is realized by adjusting the position of the nut.
The first translation guide rail mounting disc is fixed on the supporting table, a first rail is mounted on the upper surface of the first translation guide rail mounting disc and is in a cross shape, the center of the first rail is located at the center of the first translation guide rail mounting disc, a second rail is mounted on the lower surface of the second translation guide rail mounting disc and is in a cross shape, the center of the second rail is located at the center of the second translation guide rail mounting disc, the first rail and the second rail are connected through a rolling guide rail sliding block, and positioning locking devices are arranged at the ends of the first rail and the second rail.
The second bearing can adopt an angular contact ball bearing, a strip-core ball bearing or a rolling ball bearing; the azimuth fixing shaft, the azimuth rotating shaft, the supporting table, the transition frame and/or the objective table are/is provided with lightening holes.
The box inner wall is equipped with first boss flange, and position rotation axis outer wall is equipped with second boss flange, and torque motor includes stationary ring and rotating ring, the stationary ring passes through screw fixed connection with first boss flange, and the rotating ring passes through screw fixed connection with second boss flange.
The table top of the five-dimensional turntable can rotate along the Y axis, can translate along the X axis and the Z axis, and can be adjusted in pitching around the X axis and the Z axis.
The method for assembling and inspecting the vertical assembling and inspecting device of the optical system of the utility model (as shown in figure 3) is utilized: the part to be inspected in fig. 3 is a single mirror; the specific assembling and detecting steps are as follows:
1. adjusting a vibration isolation sizing block, and adjusting a vertical shaft system of the five-dimensional turntable to be vertical to serve as a central line of a loading and inspection optical axis;
2. the single lens to be inspected is fixed on an objective table of the adjusting turntable by using a bolt, so that the optical axis of the single lens to be inspected is superposed with the central line of the optical axis to be inspected, and the method comprises the following steps: rotating the adjusting turntable, enabling the single lens to be inspected to rotate along with the rotation of the adjusting turntable, imaging the part to be inspected in the rotation process of the single lens to be inspected, observing the motion track of an imaging point, if the motion track does not meet the requirement, continuously adjusting the five-dimensional turntable, and performing translation adjustment and pitching adjustment along the X and Y directions through the five-dimensional turntable until the motion track meets the requirement, wherein the optical axis of the single lens to be inspected coincides with the central line of the optical axis to be inspected;
3. Adjusting the positions of the compensating mirror and the laser interferometer according to the optical detection optical path, completing the installation and detection optical path, checking the surface shape of the installed and detected single mirror, and if the surface shape meets the requirement, performing the next step; if the surface shape does not meet the requirement, adjusting the position of the laser interferometer and/or the part to be inspected according to the surface shape feedback result to enable the surface shape to meet the requirement, and then carrying out the next step;
4. on the premise of ensuring the consistency of the optical axis, namely on the premise that the optical axis of the part to be inspected is coincident with the central line of the optical axis to be inspected, the part to be inspected is assembled to complete the inspection work.

Claims (8)

1. The vertical dress of optical system examines device which characterized in that: comprises an adjusting rotary table and 3 adjusting brackets which are arranged on the adjusting rotary table from bottom to top in sequence; the adjusting rotary table is used for placing the parts to be inspected, 3 adjusting supports are arranged on a fixed mounting frame, and a compensating mirror adjusting support, an interferometer adjusting support and a self-aligning plane mirror adjusting support are respectively arranged from bottom to top;
each of the 3 adjusting supports comprises a vertical guide rail and a transverse guide rail, the vertical guide rail is fixedly connected with the fixed mounting frame, and the transverse guide rails can slide up and down along the vertical guide rails;
the compensating mirror adjusting bracket also comprises a compensating mirror; the compensating mirror is arranged on the transverse guide rail and can slide left and right along the transverse guide rail;
the interferometer adjusting bracket also comprises a laser interferometer; the laser interferometer is arranged on the transverse guide rail and can slide left and right along the transverse guide rail;
the self-aligning plane mirror adjusting bracket also comprises a self-aligning plane mirror; the self-aligning plane mirror is arranged on the transverse guide rail and can slide left and right along the transverse guide rail.
2. The optical system vertical inspection apparatus according to claim 1, wherein: the vertical guide rail adopts ball screw, and the horizontal guide rail passes through cast connecting portion and cup joints on ball screw, and 3 adjustment support's vertical guide rail is driven by 3 motors respectively.
3. The optical system vertical inspection apparatus according to claim 2, wherein: the ball screw has two, and the both ends of transverse guide are respectively through cast connecting portion cup joint on the ball screw.
4. The optical system vertical inspection apparatus according to claim 3, wherein: the transverse guide rail adopts a ball screw, and the transverse guide rails of the 3 adjusting brackets are respectively driven by 3 motors.
5. The optical system vertical inspection apparatus according to claim 4, wherein: the motor is a servo motor.
6. The optical system vertical inspection apparatus according to claim 5, wherein: the adjusting rotary table and the fixed mounting frame are both arranged on the buffer pad.
7. The optical system vertical inspection apparatus according to claim 6, wherein: the cushion pad is a vibration isolation sizing block.
8. The optical system vertical inspection apparatus according to claim 7, wherein: the adjusting turntable is a five-dimensional turntable.
CN201620443723.3U 2016-05-16 2016-05-16 Vertical dress of optical system examines device Withdrawn - After Issue CN205748297U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620443723.3U CN205748297U (en) 2016-05-16 2016-05-16 Vertical dress of optical system examines device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620443723.3U CN205748297U (en) 2016-05-16 2016-05-16 Vertical dress of optical system examines device

Publications (1)

Publication Number Publication Date
CN205748297U true CN205748297U (en) 2016-11-30

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CN201620443723.3U Withdrawn - After Issue CN205748297U (en) 2016-05-16 2016-05-16 Vertical dress of optical system examines device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106895795A (en) * 2017-02-16 2017-06-27 上海理工大学 Monocular vision measurement apparatus and its 3 d modeling system
CN105910552B (en) * 2016-05-16 2018-07-03 中国科学院西安光学精密机械研究所 Vertical type assembling and inspecting device and method for optical system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910552B (en) * 2016-05-16 2018-07-03 中国科学院西安光学精密机械研究所 Vertical type assembling and inspecting device and method for optical system
CN106895795A (en) * 2017-02-16 2017-06-27 上海理工大学 Monocular vision measurement apparatus and its 3 d modeling system

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