CN111076675A - Method and device for quickly adjusting plane wavefront zero compensation detection optical path of concave oblate sphere - Google Patents
Method and device for quickly adjusting plane wavefront zero compensation detection optical path of concave oblate sphere Download PDFInfo
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- CN111076675A CN111076675A CN201911419124.2A CN201911419124A CN111076675A CN 111076675 A CN111076675 A CN 111076675A CN 201911419124 A CN201911419124 A CN 201911419124A CN 111076675 A CN111076675 A CN 111076675A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
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- G—PHYSICS
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Abstract
The invention provides a method and a device for quickly adjusting a plane wavefront zero compensation detection light path of a concave oblate sphere, wherein the method makes an emergent light beam of a plane window of an interferometer parallel to a test reference platform; aligning the first mirror of the plane wave front compensator and the second mirror of the plane wave front compensator with the axis of a plane window of the interferometer; adjusting the pitch angle and the inclination angle of the reflector to be detected through a third five-dimensional adjusting frame according to a light beam convergence point P1 on the observation screen near the optical axis of the reflector to be detected, and adjusting the front-back distance of the reflector to be detected through the third five-dimensional adjusting frame; and adjusting the lifting and translation of the reflector to be detected through a third five-dimensional adjusting frame according to a light beam convergence point P2 on the observation screen near the optical axis of the reflector to be detected. The method and the device for quickly adjusting the detection light path are provided from the optical principle, the detection efficiency is improved, and the smooth development of optical element part processing is ensured.
Description
Technical Field
The invention particularly relates to a method and a device for quickly adjusting a plane wavefront zero compensation detection optical path of a concave oblate sphere, belongs to the field of optical ultra-precision machining and inspection, and is mainly applied to development and production of optical aspheric surface elements so as to meet application requirements of space remote sensing, ultrahigh-resolution imaging and the like.
Background
The surface shape error detection method of the concave oblate spherical optical surface mainly comprises a contour surface shape test method and an interference detection method. The compensation type interference detection method based on the zero lens has the advantages of low detection cost, easiness in preparation of the compensation lens, controllability in surface shape error and the like, and is widely adopted at present.
According to the basic principle of zero compensation detection, the light beam returns along the original light path after being reflected by the reflector to be detected in an auto-collimation manner. The spherical wavefront compensation detection optical path for detecting the oblate spheroidal optical surface has real image points, and is shown in fig. 1. The position of the real image point in the light path is not only the convergent point of the emergent light of the interferometer, but also the convergent point of the reflected light of the to-be-detected mirror. Therefore, the aperture diaphragm can be arranged at the real image point, and the spatial position of the reflector to be detected is adjusted according to the condition that the reflected image point deviates from the emergent image point. However, the position of the spherical wavefront compensator relative to the optical axis of the interferometer is sensitive and needs to be accurately adjusted to avoid affecting the result of the profile detection.
After the wave front of the optical compensator is designed to be a plane, the position relation between the compensator and the interferometer becomes insensitive, and the influence of the adjustment error of the compensator is reduced. However, there will be no real image point of the test beam in such an interference detection light path, as shown in fig. 2, thereby causing difficulty in adjusting the spatial position of the mirror to be inspected.
Disclosure of Invention
The invention mainly solves the problem that the plane wavefront zero position lens of the concave oblate optical aspheric surface is difficult to compensate the detection light path, provides a method and a device for quickly adjusting the detection light path from the optical principle, improves the detection efficiency and ensures the smooth development of the optical element part processing.
The invention provides a method for quickly adjusting a plane wavefront zero position lens compensation detection light path of a concave oblate sphere, which specifically comprises the following steps of:
(1) adjusting the first five-dimensional adjusting frame to enable the emergent light beam of the interferometer plane window to be parallel to the test reference platform;
(2) adjusting a second five-dimensional adjusting frame, and aligning the first mirror of the plane wave front compensator and the second mirror of the plane wave front compensator with the axis of the plane window of the interferometer;
(3) placing a reflector to be detected;
(4) adjusting the pitch angle and the inclination angle of the reflector to be detected through a third five-dimensional adjusting frame according to a light beam convergence point P1 on the observation screen near the optical axis of the reflector to be detected, so that the point P1 is close to the theoretical position;
(5) adjusting the front-back distance of the reflector to be detected through a third five-dimensional adjusting frame to enable the size of the point P1 to be close to the theoretical size;
(6) according to a light beam convergence point P2 on the observation screen near the optical axis of the reflector to be detected, the lifting and translation of the reflector to be detected are adjusted through a third five-dimensional adjusting frame, so that the point P2 is close to the theoretical position;
(7) and finishing the adjustment of the space position of the lens to be examined.
A detection device suitable for the concave oblate spheroid plane wavefront zero compensation detection optical path quick adjustment method comprises an interferometer plane window, a plane wavefront compensator first mirror, a plane wavefront compensator second mirror, an optical axis vicinity observation screen, an interferometer, a test reference platform, a first five-dimensional adjusting frame, a second five-dimensional adjusting frame and a third five-dimensional adjusting frame, wherein the first five-dimensional adjusting frame, the second five-dimensional adjusting frame and the third five-dimensional adjusting frame are placed on the test reference platform, the first five-dimensional adjusting frame, the second five-dimensional adjusting frame and the third five-dimensional adjusting frame are sequentially arranged from left to right along an optical path, the interferometer is placed on the first five-dimensional adjusting frame, the interferometer plane window is installed on the right side of the interferometer, the plane wavefront compensator first mirror and the plane wavefront compensator second mirror which are sequentially arranged from left to right are placed on the second five-dimensional adjusting frame, the reflector of waiting to examine is installed to the fifth dimension adjustment frame of third, be provided with near optical axis observation screen on the fifth dimension adjustment frame of third, near optical axis observation screen is coaxial with the optical axis, and the light beam convergence point P1 and the light beam convergence point P2 for receiving the reflected beam of action.
The invention relates to a method and a device for quickly adjusting a plane wavefront zero compensation detection optical path of a concave oblate spherical surface, which have the working principles that:
coherent imaging of the reference beam and the test beam is used to calculate the wavefront error of the test beam. According to the optical design method for compensation and detection, a test light beam passes through a first plane wavefront compensator mirror and a second plane wavefront compensator mirror, namely two zero compensation lenses, 2 times in sequence, and the test light beam is transmitted and reflected on the surfaces of the compensation lenses at the same time.
The invention provides a method and a device for quickly adjusting a wavefront zero compensation detection light path of a plane of a concave oblate sphere, which have the beneficial effects that:
1. the invention realizes the adjustment of the interference detection light path by using the non-interference imaging light beam, and provides a quick and effective solution to the problem that the detection position of the to-be-detected mirror in the plane wavefront oblate spherical optical aspheric zero lens compensation detection light path is difficult to adjust.
2. The invention enables the oblate spheroid off-axis optical aspheric surface to have the advantages of accurate positioning of the compensating lens and simple and convenient position adjustment of the reflector to be detected when the planar wavefront zero compensation lens is used for detecting surface shape errors, and has important effects on realizing the convenience of optical detection, guiding optical precision processing and improving the processing and detection efficiency.
Drawings
FIG. 1 is a schematic diagram of a spherical wavefront compensation detection optical path (with real image point) according to the background of the present invention;
FIG. 2 is a schematic diagram of a planar wavefront compensation detection optical path (without real image points) according to the background of the present invention;
FIG. 3 is a schematic diagram of a reflected beam on the surface of a compensation lens of the method for rapidly adjusting a compensation detection optical path of a planar wavefront null lens with a concave oblate spherical surface according to the present invention;
FIG. 4 is a diagram showing the positional relationship between the off-axis mirror to be inspected, P1, P2 and the optical axis in the method and apparatus for rapidly adjusting the wavefront zero compensation detection optical path of the oblate spheroidal surface according to the present invention, and FIG. 4 is a left side view of FIG. 3;
FIG. 5 is a complete detection optical path system diagram of the method and apparatus for fast adjustment of a flat wavefront zero compensation detection optical path according to the present invention;
FIG. 6 is a flow chart of a specific detection optical path adjusting method of the method and the device for rapidly adjusting a concave oblate spherical surface plane wavefront zero compensation detection optical path according to the present invention;
in the figure: 1-an interferometer spherical window, 2-a real image point, 3-a spherical wavefront compensator, 4-an optical axis, 5-detection light, 6-a reflector to be detected, 7-an interferometer plane window, 8-a plane wavefront compensator mirror, 9-a plane wavefront compensator mirror, 10-an off-axis part of the reflector to be detected 6, 11-an observation screen near the optical axis, 12-a light beam convergence point P1, 13-a light beam convergence point P2, 14-an interferometer, 15-a test reference platform, 16-a first five-dimensional adjusting frame, 17-a second five-dimensional adjusting frame and 18-a third five-dimensional adjusting frame.
Detailed Description
The following detailed description of embodiments of the invention is provided in conjunction with the appended drawings:
the first embodiment is as follows: based on the principle shown in fig. 3 and 4, referring to the detection optical path system shown in fig. 5, the specific detection optical path adjusting method flowchart in fig. 6 includes the following specific implementation:
the method for quickly adjusting the plane wavefront zero compensation detection optical path of the oblate spheroid concretely comprises the following steps:
(1) adjusting a first five-dimensional adjusting frame 16 to enable the emergent light beam of the interferometer plane window 7 to be parallel to a test reference platform 15;
(2) adjusting a second five-dimensional adjusting frame 17, and aligning the first plane wavefront compensator mirror 8 and the second plane wavefront compensator mirror 9 with the axis of the interferometer plane window 7;
(3) placing a reflector 6 to be detected;
(4) according to a light beam convergence point P112 on the observation screen 11 near the optical axis of the reflector 6 to be detected, the pitching angle and the inclination angle of the reflector 6 to be detected are adjusted through the third five-dimensional adjusting frame 18, so that the point P1 is close to the theoretical position;
(5) the front-back distance of the reflector to be detected is adjusted through the third five-dimensional adjusting frame 18, so that the size of the point P1 is close to the theoretical size;
(6) according to a light beam convergence point P213 on the observation screen 11 near the mirror optical axis of the reflector 6 to be detected, the lifting and translation of the reflector to be detected are adjusted through the third five-dimensional adjusting frame 18, so that the point P2 is close to the theoretical position;
(7) and finishing the adjustment of the space position of the lens to be examined.
A detection device suitable for the concave oblate spheroid plane wavefront zero compensation detection optical path quick adjustment method comprises an interferometer plane window 7, a plane wavefront compensator first mirror 8, a plane wavefront compensator second mirror 9, an optical axis nearby observation screen 11, an interferometer 14, a test reference platform 15, a first five-dimensional adjusting frame 16, a second five-dimensional adjusting frame 17 and a third five-dimensional adjusting frame 18, wherein the test reference platform 15 is provided with the first five-dimensional adjusting frame 16, the second five-dimensional adjusting frame 17 and the third five-dimensional adjusting frame 18, the first five-dimensional adjusting frame 16, the second five-dimensional adjusting frame 17 and the third five-dimensional adjusting frame 18 are sequentially arranged along an optical path from left to right, the interferometer 14 is arranged on the first five-dimensional adjusting frame 16, the interferometer plane window 7 is arranged on the right side of the interferometer 14, the plane wavefront compensator first mirror 8 and the plane wavefront compensator second mirror 9 which are sequentially arranged from left to right are arranged on the second five-dimensional adjusting frame 17, the reflector 6 is waited to examine in the installation on the third five-dimensional alignment jig 18, be provided with near observation screen 11 of optical axis on the third five-dimensional alignment jig 18, near observation screen 11 of optical axis is coaxial with optical axis 4, and the light beam convergence point P112 and the light beam convergence point P213 of effect for receiving the reflected beam.
In fig. 3, the interferometer plane window 7 is a plane wavefront standard mirror, and the emergent test beam passes through the first plane wavefront compensator mirror 8 and the second plane wavefront compensator mirror 9 and is collimated and reflected on the surface of the reflector 6 to be detected. The reflected beam returns along the original optical path and forms interference with the reference beam. The first plane wave-front compensator mirror 8 and the second plane wave-front compensator mirror 9 are both optical lenses. The reflector 6 to be tested is an optical element part needing to test surface shape errors.
The vicinity of the optical axis of the viewing screen 11 functions to receive the converging points P1 and P2 of the reflected light beams.
The interferometer 14 is a standard test device for the detection method of the present invention.
The first five-dimensional adjusting frame 16 plays a role in adjusting the direction of an emergent light beam of the window of the interferometer, the second five-dimensional adjusting frame 17 plays a role in adjusting the positions of the first mirror 8 and the second mirror 9 of the plane wavefront compensator, and the third five-dimensional adjusting frame 18 plays a role in adjusting the space position of the reflector to be detected.
When the planar wavefront zero compensation lens is used for detecting the surface shape error of the oblate aspheric optical surface, in order to realize the quick adjustment and positioning of the reflector to be detected, the invention provides a method for adjusting the light path by using the reflected light beam on the surface of the compensation lens. The mirror 6 to be inspected is rotationally symmetric around the optical axis 4, and for the purpose of principle analysis and observation, a part of the mirror surface (off-axis region 10, for example, as shown in fig. 3) of the mirror 6 to be inspected is used.
The 4 surfaces of the zero compensation lens, namely the first mirror 8 of the plane wavefront compensator and the second mirror 9 of the plane wavefront compensator, are sequentially defined as an R11 surface and an R12 surface belonging to the first mirror 8 of the plane wavefront compensator, an R21 surface and an R22 surface belonging to the second mirror 9 of the plane wavefront compensator from far to near from the to-be-inspected lens. Then from the optical reflection properties:
the light beam reflected by the mirror to be inspected forms a light beam convergence point P1 near the optical axis of the mirror to be inspected, after being reflected by the R22 surface.
The light beam reflected by the mirror to be inspected passes through the second mirror 9 of the plane wavefront compensator, is reflected by the R12 surface, and then passes through the second mirror 9 of the plane wavefront compensator, and forms a light beam convergence point P2 near the optical axis of the mirror to be inspected.
From the optical design simulation results, it can be seen that when the point P1 and the point P2 are both at the theoretical positions, the mirror to be inspected is already at the theoretical spatial position. As shown in fig. 4, the unique spatial position of the mirror to be examined is determined by the two reflected optical convergence points.
The above-mentioned embodiments further explain the objects, technical solutions and advantages of the present invention in detail. It should be understood that the above-mentioned embodiments are only examples of the present invention, and are not intended to limit the present invention, and that the reasonable combination of the features described in the above-mentioned embodiments can be made, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. A method for quickly adjusting a concave oblate sphere plane wavefront zero compensation detection optical path is characterized by comprising the following steps:
(1) adjusting a first five-dimensional adjusting frame (16) to enable an emergent light beam of the interferometer plane window (7) to be parallel to a test reference platform (15);
(2) adjusting a second five-dimensional adjusting frame (17), and aligning the first plane wave front compensator mirror (8) and the second plane wave front compensator mirror (9) with the axis of the plane window (7) of the interferometer;
(3) placing a reflector to be detected (6);
(4) according to a light beam convergence point P1(12) on an observation screen (11) near an optical axis of the reflector (6) to be detected, the pitching angle and the inclination angle of the reflector to be detected are adjusted through a third five-dimensional adjusting frame (18), so that the point P1 is close to the theoretical position;
(5) the front-back distance of the reflector (6) to be detected is adjusted through a third five-dimensional adjusting frame (18), so that the size of a point P1 is close to the theoretical size;
(6) according to a light beam convergence point P2(13) on the observation screen (11) near the mirror optical axis of the reflector (6) to be detected, the lifting and translation of the reflector to be detected are adjusted through a third five-dimensional adjusting frame (18), so that the point P2 is close to the theoretical position;
(7) and finishing the adjustment of the space position of the lens to be examined.
2. The method for rapidly adjusting the detection optical path for the plane wave-front zero compensation of the oblate spheroid surface according to claim 1, wherein the interferometer plane window (7) is a plane wave-front standard mirror.
3. The method for rapidly adjusting the detection optical path for the plane wavefront zero compensation of the oblate spheroid surface of claim 1, wherein the first lens (8) of the plane wavefront compensator and the second lens (9) of the plane wavefront compensator are both optical lenses.
4. A detection device suitable for the method for quickly adjusting the plane wavefront zero compensation detection optical path of the oblate spheroid according to any one of claims 1 to 3, which is characterized by comprising an interferometer plane window (7), a first plane wavefront compensator mirror (8), a second plane wavefront compensator mirror (9), an observation screen (11) near the optical axis, an interferometer (14), a test reference platform (15), a first five-dimensional adjusting frame (16), a second five-dimensional adjusting frame (17) and a third five-dimensional adjusting frame (18),
a first five-dimensional adjusting frame (16), a second five-dimensional adjusting frame (17) and a third five-dimensional adjusting frame (18) are placed on the test reference platform (15), the first five-dimensional adjusting frame (16), the second five-dimensional adjusting frame (17) and the third five-dimensional adjusting frame (18) are sequentially arranged along a light path from left to right, an interferometer (14) is placed on the first five-dimensional adjusting frame (16), an interferometer plane window (7) is installed on the right side of the interferometer (14), a first plane wave front compensator mirror (8) and a second plane wave front compensator mirror (9) are placed on the second five-dimensional adjusting frame (17) and sequentially arranged from left to right, a reflecting mirror (6) to be detected is installed on the third five-dimensional adjusting frame (18), an observation screen (11) near an optical axis is arranged on the third five-dimensional adjusting frame (18),
the observation screen (11) near the optical axis is coaxial with the optical axis (4) and functions as a light beam convergence point P1(12) and a light beam convergence point P2(13) for receiving the reflected light beams.
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