CN114812432A - Rapid phase acquisition system and method applied to laser interference morphology detection - Google Patents
Rapid phase acquisition system and method applied to laser interference morphology detection Download PDFInfo
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Abstract
The invention provides a rapid phase acquisition system and a rapid phase acquisition method applied to laser interference morphology detection, wherein the system comprises a laser light source unit, a phase modulation unit, an image acquisition unit and a computer control end, wherein the laser light source unit comprises a solid laser, a rotary polarizer, a collimation beam expander and a non-polarization beam splitter; the phase modulation unit comprises a liquid crystal spatial light modulator; the image acquisition unit comprises an imaging lens and a CCD image acquisition device, phase modulation of a reference beam is realized through a liquid crystal spatial light modulator in the measurement process, an interference image sequence is generated between the reference beam and a test beam passing through a test piece, phase information is analyzed, and the surface morphology of the test piece is obtained. The system has the advantages of strong robustness, quick phase modulation response, high overall detection sensitivity, simple system light path construction and accurate and convenient detection process.
Description
Technical Field
The invention relates to the technical field of phase shift interferometry, in particular to a rapid phase acquisition system and method applied to laser interference morphology detection.
Background
With the development of science and technology and the improvement of production and manufacturing level, the ultra-precise optical detection instrument has extremely high integral system integration, is widely applied to detection links in various fields, and directly promotes the interferometry to enter the golden period of development. Phase Shift Interferometry (PSI) is a very representative technical means in the field, and the method achieves the purpose of acquiring wavefront phase information between a to-be-tested piece and a reference mirror by constructing various types of optical path systems by using different optical elements, solves the real surface morphology of a fitting test piece based on the acquired phase value, and is an ultra-high precision detection means with wavelength magnitude.
The phase shifter of the current interference detection device generally uses a piezoelectric ceramic device (PZT) which mainly transfers information according to the conversion process of mechanical energy and electric energy, although the technical means is developed more mature and widely used, the device shifts the phase of electric signal response by a mechanical device, therefore, the response speed of phase modulation is slower, the modulation time is longer, further the extraction time of the effective phase of the interference image by the whole system is longer, and a new environmental disturbance problem may occur in the test process; in addition, the wave front phase solving process uses an approximate substitution means to introduce a stepping phase shift amount, and the modulation phase is determined to have certain inaccuracy; meanwhile, in the phase shifting process of the PZT, the influence of micro vibration caused by mechanical motion on the detection process of the whole system is not negligible.
The other PSI technical means is spatial domain phase shift, the method depends on the development of a micro-polarization array manufacturing technology, and although the modulation precision of the existing micro-polarization array reaches the pixel level, the manufacturing process is complex and slow, the manufacturing cost is extremely high, and the method is difficult to be widely applied; meanwhile, after the device is manufactured, the polarization direction of each working unit in the array is determined, the application flexibility of the device is extremely poor due to the invariable characteristic, and if a small part of areas of the polarization units are damaged, the whole micro-polarization array cannot be used; finally, the optical path of the phase extraction device constructed based on the micro-polarization array is generally improved on the basis of a michelson interferometer or a tayman-green interferometer, and in order to ensure that an interference image has a good modulation degree, a plurality of polarizing plates are generally required to be assembled at the front end of the optical path for optical path correction, so that the adaptability of the interference detection device taking the micro-polarization array as a phase extraction core component is poor.
In the existing interference measurement equipment, an optical reference mirror is required to be arranged in the system light path of the existing interference measurement equipment, so as to generate a coherent light beam and record the coherent light beam by a CCD. However, the reference mirror is not absolutely flat, and the introduction of the element has certain errors, and meanwhile, the light path construction has certain complexity. Therefore, a non-reference mirror interference system is designed, phase modulation time is reduced, system measurement response sensitivity is enhanced, and rapid extraction of phase information is crucial to a high-precision interference detection device.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a rapid phase acquisition system and a rapid phase acquisition method applied to laser interference morphology detection.
In order to solve the problems, the technical scheme of the invention is as follows:
a rapid phase acquisition system applied to laser interference morphology detection comprises a laser light source unit, a phase modulation unit, an image acquisition unit and a computer control end, wherein the laser light source unit comprises a solid laser, a rotary polarizer, a collimation beam expander and a non-polarization beam splitter; the phase modulation unit comprises a liquid crystal spatial light modulator; the image acquisition unit comprises an imaging lens and a CCD image acquisition device, phase modulation of a reference beam is realized through a liquid crystal spatial light modulator in the measurement process, and phase information is analyzed with an interference image sequence generated by a test beam passing through a test piece, so that the surface morphology of the test piece is obtained.
Optionally, in the measurement process, after a laser sub-column output by the solid laser is adjusted by a rotating polarizer and corrected by a collimating beam expander, the laser sub-column is projected to a detection test piece and a liquid crystal spatial light modulator through a non-polarizing beam splitter, a test path light beam returns along an original path after passing through the detection test piece, a reference path light beam passes through the liquid crystal spatial light modulator, the phase of the incident laser sub-column before wave is modulated and interfered with the test path light beam based on the electric control effect of the modulator, a CCD image acquisition device records a corresponding interference image, and the real surface morphology of the detection test piece is determined by solving the acquired interference image.
Optionally, a band-pass filter is arranged at the front end of the liquid crystal spatial light modulator and used for eliminating the influence of natural light in a test environment on a detection result, the selection of the peak wavelength of the band-pass filter is consistent with the projection wavelength of the light source system, and the phase of the incident laser sub-column can be modulated after the influence of external parasitic light is filtered.
Optionally, an optical attenuation sheet is arranged at the front end of the test piece for controlling the light incoming energy of the test path.
Optionally, the polarization direction of the incident laser is adjusted to be consistent with the long axis direction of liquid crystal molecules of the liquid crystal spatial light modulator, so that the liquid crystal spatial light modulator is always in a pure phase modulation mode.
Optionally, the image acquisition unit calibrates the liquid crystal spatial light modulator before detection, and acquires interference phase information of the liquid crystal spatial light modulator after the liquid crystal spatial light modulator is loaded with a 0-order gray level image by using a standard reference member.
Optionally, the coherent light beam wavefront phase difference acquired by the system is effectively separated, the coupling phase difference is divided into an extraction phase, a modulation phase and an error phase, the modulation phase is a known adjustable parameter, the error phase is eliminated by using a calibration matrix, and the extraction phase only contains the surface topography information of the test piece.
Further, the invention also provides a rapid phase acquisition method applied to laser interference morphology detection, which comprises the following steps:
mounting a detection test piece at a detection position, drawing a phase modulation gray scale graph, and adjusting an optical attenuation sheet and a band-pass filter to control the energy of an incident beam;
starting a laser light source and a CCD image acquisition device, and adjusting a rotatable deflection mirror to enable the polarization direction of an incident beam to be consistent with the long axis direction of liquid crystal molecules;
calibrating the error phase of the liquid crystal spatial light modulator, loading a 0-order gray level image on the liquid crystal spatial light modulator to obtain an interference pattern I0, and determining a calibration error phase matrix;
the liquid crystal spatial light modulator loads four images with different gray values, and the CCD image acquisition device acquires four frames of interference images I1, I2, I3 and I4 with different phase modulation amounts;
the accuracy of the measurement result is judged by comprehensively considering the interference image of the reference area, and effective phase information is extracted through phase difference values of four frames of interference images I1, I2, I3 and I4 and an unmodulated interference image I0 by combining the phase modulation amount of the liquid crystal spatial light modulator.
Optionally, the step of extracting effective phase information through the phase difference value between the four frames of interference images I1, I2, I3, I4 and the unmodulated interference image I0 specifically includes: the four interference images I1, I2, I3 and I4 are respectively subtracted from the calibration value and are respectively represented by I' 1 ，I′ 2 ，I′ 3 ，I′ 4 Is expressed by the formula
Calculating phase information, wherein 0 And loading the interference phase regulated by the 0-order gray level image for the liquid crystal spatial light modulator.
Compared with the prior art, the rapid phase acquisition system applied to laser interference morphology detection has the advantages of short phase modulation time, high detection sensitivity and small influence by the outside, a coupling phase separation mode is provided only in the phase calculation stage, and errors caused by approximate calculation are avoided.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic structural diagram of a fast phase acquisition system applied to laser interference topography detection according to an embodiment of the present invention;
fig. 2 is a flowchart of a fast phase acquisition method applied to laser interference topography detection according to an embodiment of the present invention.
Detailed Description
The present invention is described in detail below with reference to specific examples, which will assist those skilled in the art in further understanding the present invention, but are not intended to limit the present invention in any way. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention.
Specifically, fig. 1 is a schematic structural diagram of a fast phase acquisition system applied to laser interference topography detection, as shown in fig. 1, the system includes a laser light source unit, a phase modulation unit, an image acquisition unit, and a computer control terminal 11. The laser light source unit comprises a solid laser 1, a rotatable polarizer 2, a collimation and beam expanding lens 3 and a non-polarization beam splitter 4. The phase modulation unit comprises a band-pass filter 7 and a liquid crystal spatial light modulator (LC-SLM) 8; the image acquisition unit comprises an imaging lens 9 and a CCD image acquisition device 10. In addition, the whole system also comprises an optical attenuation sheet 5, a detection test piece 6, a corresponding optical element bracket and the like.
The laser light source unit is characterized in that a solid laser 1 projects parallel laser sub-arrays, the polarization direction of the parallel laser sub-arrays is consistent with the long axis direction of liquid crystal molecules after passing through a rotatable polarizer 2, the parallel laser sub-arrays are expanded and collimated by a collimating beam expander 3 and then projected to a non-polarizing beam splitter 4, light beams are divided into two paths and respectively projected to a detection test piece 6 and a liquid crystal spatial light modulator 8, wherein the light beams of a test path firstly pass through an optical attenuator 5 to determine the incident light intensity and then pass through the detection test piece 6 and then return along the original path; the reference path light beam passes through a band-pass filter 7 and then irradiates a liquid crystal spatial light modulator 8 and is returned along the original path; the two return beams interfere and are recorded by an image acquisition device 10 after passing through an imaging lens 9. The phase information value of the tested piece can be extracted by calculating the four frames of interference images collected by the image collecting unit.
The solid laser 1 and the liquid crystal spatial light modulator 8 have good operation adaptability, the working wavelength of the solid laser 1 must be consistent with the wavelength of the modulation light beam of the liquid crystal spatial light modulator 8, meanwhile, the power selection of the solid laser is moderate, the CCD array and the modulator are easily damaged due to overlarge power, and the interference image fringe modulation is insufficient due to overlow power, so that the calculation is not facilitated.
Based on the working adaptability of the optical path and the liquid crystal spatial light modulator 8, the polarization direction of the incident laser sub-column is modulated at the front end of the optical path, and the polarization direction of the projection light beam is modulated only once in the whole detection process. The modulator is internally composed of nematic liquid crystal molecules, linearly polarized light with the wavelength of lambda passes through the uniaxial birefringent material to generate a birefringent effect, and the generated equivalent refractive index n between extraordinary light (e light) and ordinary light (o light) e (θ) and the phase retardation δ are:
wherein: ne is the extraordinary refractive index of the long axis of the liquid crystal molecules; no is the ordinary refractive index in the minor axis direction; theta is the included angle between the long axis of the liquid crystal molecules when no electric field is applied and the long axis of the liquid crystal molecules when the electric field is applied. Under the control of an electric drive signal which changes along with time, the inclination angle theta of the liquid crystal molecules can be correspondingly changed, the transformation relation between theta and a drive voltage V is as shown in formula (3), and the equivalent refractive index n of e light is as same as that of e light e The relationship between (θ) is as shown in formula (4):
meanwhile, the incident beam wavefront jones matrix can be expressed as formula (5):
in the formula (5), the reaction mixture is,
which represents the angle between the polarization direction of the incident light and the optical axis direction of the liquid crystal. The outgoing beam transmittance T and the phase retardation δ can be expressed by equations (6) and (7):
in the formula (7), β represents a birefringence coefficient,
indicating the angle of the polarizer relative to the liquid crystal optic axis.
The electro-optical characteristic can realize effective modulation on the wavefront phase, the light intensity (amplitude) and the polarization direction of an incident light beam. When the polarization direction of the incident beam is parallel to the long axis direction of the liquid crystal molecules, the intensity reflectivity and the phase retardation are respectively as follows:
T＝1δ＝2πd(n e (θ)-n o )/λ (8)
equation (8) shows that the LC-SLM does not modulate the beam intensity (amplitude) under this condition, and is in a pure phase modulation mode of operation. Meanwhile, based on the sensitivity of the LC-SLM to the polarization direction of an incident beam, in order to ensure that the polarization direction of the incident beam is always parallel to the long axis direction of liquid crystal molecules in the measurement process, only a single polarization modulation device is arranged on a light path of the system, namely a polarizer can be rotated, the polarization direction of the incident beam is determined at the front end of the light path and then used for completing the whole detection process, and other polarization initiating and detecting devices are not additionally arranged in the system.
In addition, a band-pass filter 7 is arranged at the front end of the liquid crystal spatial light modulator 8, in order to eliminate the influence of natural light in a test environment on a detection result, the selection of the peak wavelength of the band-pass filter 7 is consistent with the projection wavelength of a light source system, and the phase of an incident laser sub-column can be modulated after the influence of external parasitic light is filtered; meanwhile, an optical attenuation sheet 5 is arranged at the front end of the detection test piece 6 to control the light energy of the test path. After the laser beam of the test path is modulated by light intensity before being projected to the detection test mirror, the energy value of the laser beam of the test path is basically the same as that of the laser beam of the reference path, and interference fringes are ensured to have better contrast.
Fig. 2 is a flow chart of a fast phase acquisition method applied to laser interference topography detection, and as shown in fig. 2, the phase information extraction includes the following steps:
s1: mounting a detection test piece at a detection position, drawing a phase modulation gray scale graph, and adjusting an optical attenuation sheet and a band-pass filter to control the energy of an incident beam;
s2: starting a laser light source and a CCD image acquisition device, and adjusting a rotatable deflection mirror to enable the polarization direction of an incident beam to be consistent with the long axis direction of liquid crystal molecules;
s3: calibrating the error phase of the liquid crystal spatial light modulator, loading a 0-order gray level image on the liquid crystal spatial light modulator to obtain an interference pattern I0, and determining a calibration error phase matrix;
s4: the liquid crystal spatial light modulator loads four images with different gray values, and the CCD image acquisition device acquires four frames of interference images I1, I2, I3 and I4 with different phase modulation amounts;
s5: the accuracy of the measurement result is judged by comprehensively considering the interference image of the reference area, and effective phase information is extracted through phase difference values of four frames of interference images I1, I2, I3 and I4 and an unmodulated interference image I0 by combining the phase modulation amount of the liquid crystal spatial light modulator.
Specifically, the phase information extraction process is to utilize gray level images of different orders to realize the electric control effect on the LC-SLM, respectively utilize gray level images of 0 order, 64 order, 128 order and 192 order to realize the phase difference of 0 wave front,
π，
the modulated 4 frames of interference images are collected by the CCD array for phase extraction calculation (coherent light intensity is respectively represented by I1, I2, I3 and I4); meanwhile, a 0-order gray scale area with the length and the width of 100px is arranged at the upper left of the gray scale image, so that the phase extraction accuracy is verified; in addition, the pre-test CCD acquires a frame of interference image (represented by I0) without loading any gray scale pattern on the LC-SLM, and compensates for mirror error phase.
In general, the relationship between the reference wavefront and the measured wavefront in an interferometric device is:
in the formulae (9) and (10), a r (x, y) and a t (x, y) is the wavefront amplitude,
and
to the wavefront phase, δ (t) is the modulation phase shift amount. After the interference occurs, the expression of the wavefront intensity of the coherent light is as follows:
wherein; i' (x, y) ═ a r 2 (x，y)+a t 2 (x, y) represents the average intensity, I ″ (x, y) is 2a r (x，y)a t (x, y) represents a fringe or a light intensity modulation degree. Meanwhile, the coupling phase difference of the coherent light beam wavefront realizes effective separation and is divided into three parts of an extraction phase, a modulation phase and an error phase, and the expression is as follows:
the image acquisition system calibrates the LC-SLM before detection, and obtains the interference phase gamma regulated by loading the 0-order gray level image on the LC-SLM by adopting a standard reference piece 0 The expression is as follows:
I 0 (x，y，t)＝I'(x,y)+I″(x,y)cosγ 0 (13)
after different gray level images are loaded for modulation, the expressions of the four frames of interference images are respectively as follows:
order to
The four-frame interference image expression becomes:
by solving four frames of the modified interferogram, phase information can be extracted:
compared with the prior art, the rapid phase acquisition system applied to laser interference morphology detection has the advantages of short phase modulation time, high detection sensitivity and small influence by the outside, a coupling phase separation mode is provided only in the phase calculation stage, and errors caused by approximate calculation are avoided.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (9)
1. A rapid phase acquisition system applied to laser interference morphology detection is characterized by comprising a laser light source unit, a phase modulation unit, an image acquisition unit and a computer control end, wherein the laser light source unit comprises a solid laser, a rotary polarizer, a collimation beam expander and a non-polarization beam splitter; the phase modulation unit comprises a liquid crystal spatial light modulator; the image acquisition unit comprises an imaging lens and a CCD image acquisition device, phase modulation of a reference beam is realized through a liquid crystal spatial light modulator in the measurement process, an interference image sequence is generated between the reference beam and a test beam passing through a test piece, phase information is analyzed, and the surface morphology of the test piece is obtained.
2. The system of claim 1, wherein during measurement, the laser subline output by the solid laser is adjusted by a rotating polarizer and corrected by a collimating beam expander, and then projected to the test piece and the liquid crystal spatial light modulator through the non-polarizing beam splitter, the test path beam returns along the original path after passing through the test piece, the reference path beam passes through the liquid crystal spatial light modulator, the phase of the incident laser subline is modulated and interfered with the test path beam based on the electric control effect of the modulator, the CCD image acquisition device records the corresponding interference image, and the real surface morphology of the test piece is determined by solving the acquired interference image.
3. The system for rapidly acquiring the phase applied to the laser interference morphology detection according to claim 2, wherein a band-pass filter is arranged at the front end of the liquid crystal spatial light modulator and used for eliminating the influence of natural light in a test environment on a detection result, the peak wavelength of the band-pass filter is selected to be consistent with the projection wavelength of the light source system, and the phase of an incident laser sublist can be modulated after the influence of external parasitic light is filtered.
4. The system for rapidly acquiring the phase applied to the laser interference morphology detection as claimed in claim 2, wherein an optical attenuation sheet is arranged at the front end of the detection test piece for controlling the light incoming energy of the test path.
5. The system for rapidly acquiring the phase applied to the laser interference morphology detection according to claim 2, wherein the liquid crystal spatial light modulator is ensured to be always in a pure phase modulation mode by adjusting the polarization direction of the incident laser to be consistent with the long axis direction of the liquid crystal molecules of the liquid crystal spatial light modulator.
6. The system for rapidly acquiring the phase applied to laser interference morphology detection according to claim 1, wherein the image acquisition unit calibrates the liquid crystal spatial light modulator before detection, and acquires the interference phase matrix of the liquid crystal spatial light modulator after being regulated by a 0-order gray scale image loaded by the liquid crystal spatial light modulator by using a standard reference part.
7. The system for rapidly acquiring the phase applied to the laser interference morphology detection according to claim 1, wherein the coherent light beam wavefront phase difference acquired by the system is effectively separated, the coupling phase difference is divided into an extraction phase, a modulation phase and an error phase, the modulation phase is a known parameter, the error phase is eliminated by using a calibration matrix, and the extraction phase only contains the surface morphology information of the test piece.
8. A fast phase acquisition method applied to laser interference morphology detection is characterized by comprising the following steps:
mounting a detection test piece at a detection position, drawing a phase modulation gray scale graph, and adjusting an optical attenuation sheet and a band-pass filter to control the energy of an incident beam;
starting a laser light source and a CCD image acquisition device, and adjusting a rotatable deflection mirror to enable the polarization direction of an incident beam to be consistent with the long axis direction of liquid crystal molecules;
calibrating the error phase of the liquid crystal spatial light modulator, loading a 0-order gray level image on the liquid crystal spatial light modulator to obtain an interference pattern I0, and determining a calibration error phase matrix;
the liquid crystal spatial light modulator loads four images with different gray values, and the CCD image acquisition device acquires four frames of interference images I1, I2, I3 and I4 with different phase modulation amounts;
the accuracy of the measurement result is judged by comprehensively considering the interference image of the reference area, and effective phase information is extracted through phase difference values of four frames of interference images I1, I2, I3 and I4 and an unmodulated interference image I0 by combining the phase modulation amount of the liquid crystal spatial light modulator.
9. The fast phase acquisition method applied to laser interference morphology detection according to claim 8, wherein the step of extracting effective phase information through the phase difference values of the four frames of interference images I1, I2, I3, I4 and the unmodulated interference image I0 specifically comprises: the four interference images I1, I2, I3 and I4 are respectively subtracted from the calibration value and are respectively represented by I' 1 ，I′ 2 ，I′ 3 ，I′ 4 Is expressed by the formula
Calculating phase information, wherein 0 And loading the interference phase regulated by the 0-order gray level image for the liquid crystal spatial light modulator.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203365108U (en) * | 2013-07-08 | 2013-12-25 | 内蒙古工业大学 | Common-path interference measurement device for generated optical aberration of liquid-crystal spatial light modulator |
| CN107036552A (en) * | 2017-04-17 | 2017-08-11 | 湖北工业大学 | A kind of cross-scale surface topography measurement device and method based on optical phase shift |
| CN114812431A (en) * | 2022-03-11 | 2022-07-29 | 上海电机学院 | High-precision interference detection system and method applied to phase rapid extraction |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203365108U (en) * | 2013-07-08 | 2013-12-25 | 内蒙古工业大学 | Common-path interference measurement device for generated optical aberration of liquid-crystal spatial light modulator |
| CN107036552A (en) * | 2017-04-17 | 2017-08-11 | 湖北工业大学 | A kind of cross-scale surface topography measurement device and method based on optical phase shift |
| CN114812431A (en) * | 2022-03-11 | 2022-07-29 | 上海电机学院 | High-precision interference detection system and method applied to phase rapid extraction |
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