CN103954680A - Device and method for identifying laser damages to optical film - Google Patents
Device and method for identifying laser damages to optical film Download PDFInfo
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- CN103954680A CN103954680A CN201410200783.8A CN201410200783A CN103954680A CN 103954680 A CN103954680 A CN 103954680A CN 201410200783 A CN201410200783 A CN 201410200783A CN 103954680 A CN103954680 A CN 103954680A
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Abstract
The invention discloses a method and a device for identifying laser damages to an optical film. The types of elements contained in damaged materials can be determined by acquiring mass-to-charge ratio distribution and performing mass spectrometric analysis and element judgment through computer software, so that damages to the film can be judged accurately and rapidly on line. The device adopting the method consists of a test sample stage, a mass-to-charge ratio acquisition system and a computer operation system. By adopting the method and the device, the damage state of the film or an optical element under strong laser light can be judged rapidly and accurately on line in real time. By applying the method to laser damage threshold test, integration, automation and intelligence of a test system can be realized.
Description
Technical field
The invention belongs to optical thin film detection technique field, relate to the method for discrimination that a kind of optical thin film is injured, recognition device and recognition methods that particularly a kind of optical thin film laser is injured.
Background technology
In high energy laser system, exist various optical elements and thin-film device, it is inseparable with the normal effectively running of optical system that the anti-laser of these elements is injured performance.Laser damage threshold (LIDT) is the important indicator of weighing film and this performance of optical element, and at present the test of laser damage threshold is still existed to many problems.In laser damage threshold test process, how accurate, real-time, quick, online differentiation film is injured becomes the core of research one ring.Therefore, for obtaining the laser damage threshold of film, primary condition is whether film to be occurred under light laser effect to for damage make fast and accurately and to differentiate, and film what kind of occurs changes and just thinks and occurred to injure.
The method that differentiation film and optical element are injured at present mainly contains phase contrast microscopy, scattered light intensity detection method, plasma spark method, optoacoustic mensuration, photo-thermal method etc., and these methods respectively have its relative merits.Wherein phase contrast microscopy is a kind of detection method that international standard ISO11254 recommends, it is that the surface of 100-150 Normaski microscope doubly after to laser irradiation observed that this method adopts enlargement ratio, to differentiate film, whether injure, the subjectivity of the method is very strong, and working strength is large, testing efficiency is low, is difficult to realize the robotization of machine system.Scattered light intensity detects ratio juris: when laser is mapped on sample so that certain angle is oblique, if the reflection spot place on surface is without fault, reflected light, by the rule reflection providing by geometrical optics, if do not allow reflection chief ray enter photelectric receiver, does not just almost have electric signal output.When surperficial reflection spot place rough, or produced and injured after laser irradiation, in chief ray, considerable part energy can not orienting reflex, but generation scattering, corresponding photelectric receiver just has electric signal output, by surveying photelectric receiver, have or not electric signal to export, the variation that is actually exploring laser light radiation front and back electric signal just can judge whether illuminated laser spot place sample is injured, the method requires high to the smooth finish on sample surface, if laser emission front surface smooth finish is inadequate, even if having caused, laser emission injures, detector output electrical signals does not have too large variation yet, thereby can not injure exactly differentiation.
Plasma spark method is also to differentiate a kind of common method that laser is injured, and the mechanism of the method is ionization to be formed while interacting with optical surface based on high power laser light to the material of optical surface, thus generation free electron and ion, i.e. plasma.Plasma spark while therefore, interacting by light activated element exploring laser light and optical surface just can judge whether to exist to be injured.Conventionally, detection laser is monochromatic light (if the wavelength of He-Ne Lasers is 632.8nm), and plasma spark is polychromatic light, therefore needs spectrum corresponding to elimination effect laser, just can accurate detection to plasma spark, can differentiate and whether at optical surface, have the phenomenon of injuring.Conventional plasma spark diagnostic method is that a photoelectric receiving device is installed near optical surface, when there is flash of light, photoelectric receiving device will be exported a level signal, this is based on plasma spark, to differentiate the conventional method whether film is injured both at home and abroad at present, and the light intensity of usining changes as the criterion of whether damaging.Yet when sharp light intensity is enough high, atmosphere also can puncture, and occurs plasma spark phenomenon.When light laser acts on film surface and plasma spark occurs, in most of the cases, what obtain is the compound plasma of film and atmosphere, or what only obtain is atmosphere plasma flash of light, therefore, whether mode that adopt to survey light intensity is differentiated film and is injured, and causes " erroneous judgement " phenomenon of actual test inevitable.
Summary of the invention
The object of the invention is to overcome above-mentioned the problems of the prior art, the recognition device and the recognition methods that provide a kind of optical thin film laser to injure, this device and method can be applicable to the online differentiation on all kinds of optical elements and coated element surface, and have fast, high precision, feature accurately.
To achieve these goals, the technical solution adopted in the present invention is:
The recognition device that optical thin film laser is injured, comprises laser instrument and test sample; Test sample is installed on test sample stage, laser instrument is over against the surface to be measured of test sample, one side of test sample stage is provided with the particulate sputtering through laser irradiation sample for accelerating, and form the accelerating electrode of collimated particle bundle, and be also provided with for improving the electron source of ion concentration between test sample stage and accelerating electrode; The rear end of accelerating electrode arranges the magnetic field that ion is deflected, and a side parallel from accelerating electrode is provided with for receiving some receiving electrodes of the ion of different deflection radius; The output terminal of receiving electrode is all connected on the signal input part of A/D converter, and the signal output part of A/D converter is connected with for generating the computing machine of sputtering particle mass-to-charge ratio spectrogram.
The high-energy laser of described laser instrument for making test sample surface film injure.
Described sharp light wavelength is 1064nm, and pulsewidth is 10ns, and single pulse energy is 400mJ.
Described test sample stage is the two-dimensional movement platform by step motor control.
Described magnetic field is uniform magnetic field.
Described some receiving electrodes be arranged in parallel side by side.
In described computing machine, store the standard mass-to-charge ratio of element.
An optical thin film laser Damage recognition method, comprises the following steps:
1) first, installation testing device, the Laser emission of laser instrument is rectified being clamped in the test sample on test sample stage, then the side at test sample stage arranges accelerating field, electron source is placed between test sample stage and accelerating field, each receiving electrode all be arranged in parallel with accelerating electrode, and accelerating electrode is all adjacent with magnetic field with receiving electrode, finally connects successively receiving electrode, A/D converter and computing machine again;
2) then, open laser instrument and computing machine, the film surface of test sample is subject to after laser irradiation breakage, the particulate of damage zone is to space sputter, the particulate sputtering enters accelerating electrode after electron source, through the accelerating field between accelerating electrode, enter the magnetic field at accelerating electrode rear, thereby ion deflects ejaculation under the effect of magnetic field force, magnetic field is received by some receiving electrodes, receiving electrode converts the simulating signal receiving digital signal to and is transferred in computing machine through A/D converter, is generated the mass-to-charge ratio spectrogram of sputtering particle by computing machine;
3) according to the standard mass-to-charge ratio that is stored in element in computing machine, determine that the element of sputter thing forms, finally by contrast standard mass-to-charge ratio, just can directly judge test sample and whether occur to injure.
Described step 3), in, the method whether judgement test sample is injured is specially:
By step 2) in the quality spectrogram of the sputtering particle that obtains and the element in atmosphere contrast, if there is emerging element, this element does not belong to the element in atmosphere, tests sample and has occurred to injure; Otherwise, test sample intact.
Compared with prior art, the present invention has following beneficial effect:
The recognition device that optical thin film laser of the present invention is injured, adopt laser irradiation test sample surface, it is injured, and part can gasify or splash goes out particulate, after accelerating, accelerating electrode enters magnetic field, ion deflection penetrate magnetic field under the effect of magnetic field force, the receiving electrode that is arranged on outside, magnetic field receives, and produces pulse signal, pulse signal converts digital signal to and transfers to computing machine through A/D converter, finally obtains the mass-to-charge ratio spectrogram of sputter particulate.The present invention is not usingd the variation of optics or electrical signal as the criterion of injuring, but adopt the elementary composition comprising in mass spectrophotometry ejecta, traditional method of discrimination of comparing, not only discrimination precision is high, there is not " erroneous judgement " phenomenon, the test environment of vacuum has guaranteed that the interference of test is little, and distinguishing speed is fast, to the differentiation of laser damage in thin films, can in 1s, complete; Meanwhile, the present invention differentiates the kind wide ranges of film, no matter is that reflectance coating, anti-reflection film, film, thick film all can be realized high-precision differentiation.Finally, because major part in the particulate sputtering is ion, a part is neutral atom, in order to improve ion concentration, between accelerating electrode and test sample stage, electron source is set, the neutral atom sputtering is also ionized, thereby improved the ionization level of splash particulate.
The recognition methods that optical thin film laser of the present invention is injured, adopt the method for mass spectrum collection, analysis to determine the element kind comprising in material of injuring, rather than adopt photoelectric detector to accept light intensity or scattered signal, neither adopt CCD to gather image, the element kind and the atmospheric elements that collect are contrasted, and then can differentiate film surface and whether injure.Meanwhile, in test process, print position is fixed, and does not need to remove test, but online target acquisition, and real-time Transmission is to computing machine, and carries out analyzing and processing, reaches the accurate object that judges whether film is injured.
Further, the present invention adopts and to injure that film is differentiated in the mass spectrophotometry of sample element or whether optical element is injured, using the criterion whether " determine injure in body element distribute " injure as film or optical element, thus the interference of effectively despumation, dust or surrounding atmosphere.
Accompanying drawing explanation
Fig. 1 is the structural representation of optical thin film laser Damage recognition device of the present invention.
Wherein, 1 is laser instrument; 2 is test sample; 3 is electron source; 4 is accelerating electrode; 5 is magnetic field; 6 is receiving electrode; 7 is A/D converter; 8 is computing machine.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described in detail:
Referring to Fig. 1, the recognition device that optical thin film laser of the present invention is injured, comprises laser instrument 1 and test sample 2, laser instrument 1 is for making to test the high-energy laser that sample 2 surface films are injured, and sharp light wavelength is 1064nm, pulsewidth is 10ns, and maximum single pulse energy is 400mJ; Test sample 2 is installed on test sample stage 9, and test sample stage 9 is the two-dimensional movement platform by step motor control; Laser instrument 1 is over against the surface to be measured of test sample 2, one side of test sample stage 9 is provided with the particulate sputtering through laser irradiation sample for accelerating, and form the accelerating electrode 4 of collimated particle bundle, and be also provided with for improving the electron source 3 of ion concentration between test sample stage 9 and accelerating electrode 4; The rear end of accelerating electrode 4 arranges the magnetic field 5 that ion is deflected, and wherein, magnetic field 5 is uniform magnetic field.A side parallel from accelerating electrode 4 is provided with for receiving some receiving electrodes that be arranged in parallel side by side 6 of the ion of different deflection radius; The output terminal of receiving electrode 6 is all connected on the signal input part of A/D converter 7, and the signal output part of A/D converter 7 is connected with computing machine 8, and computing machine 8, according to the standard mass-to-charge ratio that is stored in its inner element, generates sputtering particle quality spectrogram.
The invention also discloses the recognition methods that a kind of optical thin film laser is injured, comprise the following steps:
1) first, installation testing device, the Laser emission of laser instrument is rectified being clamped in the test sample on test sample stage, then the side at test sample stage arranges accelerating field, electron source is placed between test sample stage and accelerating field, each receiving electrode all be arranged in parallel with accelerating electrode, and accelerating electrode is all adjacent with magnetic field with receiving electrode, finally connects successively receiving electrode, A/D converter and computing machine again;
2) then, open laser instrument and computing machine, the film surface of test sample is subject to after laser irradiation breakage, the particulate of damage zone is to space sputter, the particulate sputtering enters accelerating electrode after electron source, through the accelerating field between accelerating electrode, enter the magnetic field at accelerating electrode rear, ion deflects under the effect of magnetic field force, the final magnetic field of penetrating is received by some receiving electrodes, receiving electrode converts the pulse simulation signal receiving digital signal to and is transferred in computing machine through A/D converter, is generated the mass-to-charge ratio spectrogram of sputtering particle by computing machine;
3) according to the standard mass-to-charge ratio that is stored in element in computing machine, determine that the element of sputter thing forms, just can directly judge test sample and whether occur to injure.Concrete, by step 2) in the mass-to-charge ratio spectrogram of the sputtering particle that obtains and the element in atmosphere contrast, if there is the emerging element not belonging in atmosphere, tests sample and occurred to injure; Otherwise, test sample intact.
Principle of the present invention:
The method of discrimination that the film that the present invention adopts is injured, is different from conventional method of discrimination.The core of the method is, do not using the variation of optics or electrical signal as the criterion of injuring, but adopts the method for ultimate analysis, gathers mass spectrum and also analyzes the elementary composition comprising in splashings, just can directly judge whether sample has occurred to injure.The ultimate principle of its judgement is: under the radiation of high-power, high energy laser, in optical element or film surface microcell conventionally the utmost point in the short time (nanosecond order) assembled high energy (millijoule), thereby make the local violent gasification of material, when serious, also may flash.The particulate that gasification or splash go out, wherein major part is ion, a part is neutral atom.After electron source, neutral atom wherein also ionizes, thereby has improved the ionization level of splash particulate.Ion forms collimation ion beam after electric field, enters in uniform magnetic field.
If ion institute carried charge is q, quality is that m, speed are V, and it vertically enters in the magnetic field that magnetic induction density is B, and the circular motion radius of rotation is:
And the speed V of ion determines have by the voltage U of accelerating electrode
So
Because U and B are constant, so the circular motion radius of charged ion in magnetic field depends on the ratio of mass of ion and quantities of charge.As can be seen here, in uniform magnetic field, the ion with same mass-to-charge ratio rotates with same Radius, and the ion radius of turn of different mass-to-charge ratioes is not identical, thereby it is separated that various ions are occurred according to mass-to-charge ratio, and the receiving electrode that is distributed in diverse location can receive the ion of different radiuses of rotation.Therefore, according to the position of receiving electrode and size of current, just can determine the quality of ion, the element kind comprising in also just can clear and definite splashings.Atmosphere is as common external interference, and its element most possibly appears in mass spectrum, but it mainly contains the elements such as N, O, C, H, and the chemical composition of film or optical element is different from atmosphere, conventionally comprises the elements such as Si, Ti, Al, Mg, Zn, Zr.If the element that contains film or optical element in vapour (or splashings), so, just can conclude that sample laser has occurred and injured.
The process of method of testing of the present invention comprises:
First, adopt high-power, high-octane pulse laser to carry out irradiation to film or optical element surface, once sample is injured, the surface mass that forms film or optical element will be vaporized or excite, and with the form of atom and ion, splashes away.Secondly, adopt electron source to carry out ionization to the atom in splashings, the mass-to-charge ratio that closely gathers the ion that splashes distributes.Then, utilize computer software to analyze mass spectrum, according to the size of ion matter lotus number, determine the concrete element kind that gathers ion.Finally, and the element in atmosphere compares, if the unit in the particle collecting have from outside atmospheric elements, just can determine that film has occurred to injure.Adopt this method and apparatus, can realize the accurate differentiation that optical thin film is injured, finally by computer system, carry out computing, can provide fast the laser damage threshold of film.
Whether the present invention, by gathering the mass spectrum of splashings, determines the recognition methods of particle institute containing element, thereby differentiate dissimilar film sample, injure.For reaching, differentiate the object that laser injures and adopt following apparatus, this device forms by testing sample stage, mass-to-charge ratio acquisition system and Computing system.The present invention is surperficial to sample by superlaser irradiation, sample can be film, also can be the samples such as optical element, adopt the method for mass spectrum collection, analysis to determine the element kind comprising in material of injuring, method of discrimination is the distribution that gathers mass-to-charge ratio, by computer software, carry out mass spectrophotometry and element is differentiated, thereby accurately, whether online, Quick go out film and damage.
The course of work of the present invention:
As shown in Figure 1, effect laser is high-energy laser, can be any laser that film is injured.Test sample 2 is clamped on test board, when film surface is subject to Irradiation of High and after breakage, the particulate of damage zone is immediately to space sputter.The particulate sputtering comprises ion, electronics and part neutral atom.In order to improve its ionization level, sputter thing, after electron source 3 ejected electron ionizations, has improved the content of ion greatly.These ions, after accelerating electrode 4, enter in uniform magnetic field, and magnetic field force induced effect deflects.The radius of ion deflecting depends on the mass-to-charge ratio of ion.The receiving electrode 6 that is installed on diverse location can receive with the ion after different radii deflection, then through A/D converter 7, by analog-signal transitions, is digital signal and is transferred in computing machine 8, has just obtained the quality spectrogram of sputter thing.In computing machine, analyze the mass spectrum obtaining, according to the standard mass-to-charge ratio that is stored in element in computing machine, just can determine that the element of sputter thing forms.Therefore, as long as emerging element does not belong to the element (being mainly the element spectrum such as N, O, H, C, Ar) in atmosphere, can conclude that this element comes from film, thereby there is damage in explanation film.
Laser provided by the present invention injures discriminating gear and mass spectrometric analysis method is applicable to all kinds of optical elements and film surface, be applicable to various types of films and injure differentiation, and there is feature fast and accurately, realized the quick full-automatic process of whole damage from laser judgement system.The present invention, under the effect of superlaser, can online, in real time, fast, accurately obtain optical thin film and injure state, has eliminated current conventional film and has injured the inaccurate phenomenon of differentiation.The present invention calculates and analyzes through detailed theory, proves feasible, and functional, stable, in actual industrial production, has wide practical use.
When optical thin-film laser injure threshold is measured, whether accurate and Quick film is injured is the key that obtains correct result.During test sample, print is placed on the two-dimensional movement platform of step motor control.Effect laser is wavelength 1064 nm, pulsewidth 10 ns, the high energy laser of single pulse energy 400mJ.Adopt this laser print to be carried out to the irradiation of monopulse, if film is not injured, the atom of composition film or optical element, ion can sputters (gasification), and receiving electrode does not receive signal.If there is damage in film, in damage, moment there is strong splash phenomenon, the particulate of splash receives through further ionization, transmission final received electrode.The signal that computer processing system gathers according to diverse location receiving electrode, these signals are converted into mass spectrogram, and compare with the element standard mass-to-charge ratio of internal system storage, if there is new element (outside C, H, O, N), think that damage has appearred in film.As for TiO2/SiO2 membrane stack, in test, gather mass-to-charge ratio, when the mass-to-charge ratio collecting has 48 (or 24,16,12) and 28 (or 14,9.3,7), think that film has occurred to injure, because the mass-to-charge ratio that these mass-to-charge ratio numerical value are Ti or Si element.The method of this mass spectrophotometry, applicable equally for any film or optical element.
Above content is only explanation technological thought of the present invention; can not limit protection scope of the present invention with this; every technological thought proposing according to the present invention, any change of doing on technical scheme basis, within all falling into the protection domain of the claims in the present invention book.
Claims (9)
1. the recognition device that optical thin film laser is injured, is characterized in that: comprise laser instrument (1) and test sample (2); Test sample (2) is installed on test sample stage (9), laser instrument (1) is over against the surface to be measured of test sample (2), one side of test sample stage (9) is provided with the particulate sputtering through laser irradiation sample for accelerating, and form the accelerating electrode (4) of collimated particle bundle, and be also provided with the electron source (3) for improving ion concentration between test sample stage (9) and accelerating electrode (4); The rear end of accelerating electrode (4) arranges the magnetic field (5) that ion is deflected, and a side parallel from accelerating electrode (4) is provided with for receiving some receiving electrodes (6) of the ion of different deflection radius; The output terminal of receiving electrode (6) is all connected on the signal input part of A/D converter (7), and the signal output part of A/D converter (7) is connected with the computing machine (8) for generating sputtering particle mass-to-charge ratio spectrogram.
2. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: described laser instrument (1) is for making to test the high-energy laser that sample (2) surface film is injured.
3. the recognition device that optical thin film laser according to claim 1 and 2 is injured, is characterized in that: described sharp light wavelength is 1064nm, and pulsewidth is 10ns, and single pulse energy is 400mJ.
4. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: described test sample stage (9) is the two-dimensional movement platform by step motor control.
5. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: described magnetic field (5) are uniform magnetic field.
6. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: described some receiving electrodes (6) be arranged in parallel side by side.
7. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: the standard mass-to-charge ratio that stores element in described computing machine (8).
8. adopt a recognition methods for optical thin film laser Damage recognition device described in claim 1, it is characterized in that, comprise the following steps:
1) first, installation testing device, the Laser emission of laser instrument is rectified being clamped in the test sample on test sample stage, then the side at test sample stage arranges accelerating field, electron source is placed between test sample stage and accelerating field, each receiving electrode all be arranged in parallel with accelerating electrode, and accelerating electrode is all adjacent with magnetic field with receiving electrode, finally connects successively receiving electrode, A/D converter and computing machine again;
2) then, open laser instrument and computing machine, the film surface of test sample is subject to after laser irradiation breakage, the particulate of damage zone is to space sputter, the particulate sputtering enters accelerating electrode after electron source, through the accelerating field between accelerating electrode, enter the magnetic field at accelerating electrode rear, thereby ion deflects ejaculation under the effect of magnetic field force, magnetic field is received by some receiving electrodes, receiving electrode converts the simulating signal receiving digital signal to and is transferred in computing machine through A/D converter, is generated the mass-to-charge ratio spectrogram of sputtering particle by computing machine;
3) according to the standard mass-to-charge ratio that is stored in element in computing machine, determine that the element of sputter thing forms, finally by contrast standard mass-to-charge ratio, just can directly judge test sample and whether occur to injure.
9. optical thin film laser Damage recognition method according to claim 8, is characterized in that: described step 3), the method whether judgement test sample is injured is specially:
By step 2) in the quality spectrogram of the sputtering particle that obtains and the element in atmosphere contrast, if there is emerging element, this element does not belong to the element in atmosphere, tests sample and has occurred to injure; Otherwise, test sample intact.
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