CN203881709U - Recognition device for laser-induced damage of optical thin film - Google Patents
Recognition device for laser-induced damage of optical thin film Download PDFInfo
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- CN203881709U CN203881709U CN201420243812.4U CN201420243812U CN203881709U CN 203881709 U CN203881709 U CN 203881709U CN 201420243812 U CN201420243812 U CN 201420243812U CN 203881709 U CN203881709 U CN 203881709U
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- 230000003287 optical effect Effects 0.000 title claims abstract description 40
- 239000010409 thin film Substances 0.000 title claims abstract description 23
- 238000012360 testing method Methods 0.000 claims abstract description 53
- 239000010408 film Substances 0.000 claims description 48
- 238000004544 sputter deposition Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 10
- 230000033001 locomotion Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 31
- 238000001819 mass spectrum Methods 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 5
- 238000004458 analytical method Methods 0.000 abstract description 4
- 230000010354 integration Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 33
- 230000004069 differentiation Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 230000007935 neutral effect Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000002309 gasification Methods 0.000 description 3
- 238000002798 spectrophotometry method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000002135 phase contrast microscopy Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002405 diagnostic procedure Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model discloses a recognition device for the laser-induced damage of an optical thin film. The device comprises a test sample stage, a mass-to-charge ratio acquisition system and a computer operating system. The varieties of elements included in a damage material are determined by adopting a mass spectrum acquisition and analysis method, a judgment method comprises the steps of acquiring the distribution of the mass-to-charge ratio and performing mass spectrum analysis and element judgment through computer software, so as to accurately and quickly judge whether the thin film has damage in an on-line manner. According to the recognition device, the damage status of the thin film or an optical element can be quickly and accurately judged under strong lasers in an on-line and real-time manner. The method is applied into testing of laser-induced damage thresholds, the integration, automation and intelligentization of a testing system can be realized. The method is high in judgment precision, and capable of effectively eliminating the impact of external interference on testing results.
Description
Technical field
The utility model belongs to optical thin film detection technique field, is specifically related to the recognition device that a kind of optical thin film laser is injured.
Background technology
In high energy laser system, exist various optical elements and thin-film device, it is inseparable with the normal effectively running of optical system that the anti-laser of these elements is injured performance.Laser damage threshold (LIDT) is the important indicator of weighing film and this performance of optical element, and at present the test of laser damage threshold is still existed to many problems.In laser damage threshold test process, how accurate, real-time, quick, online differentiation film is injured becomes the core of research one ring.Therefore, for obtaining the laser damage threshold of film, primary condition is whether film to be occurred under light laser effect to for damage make fast and accurately and to differentiate, and film what kind of occurs changes and just thinks and occurred to injure.
The method that differentiation film and optics are injured at present mainly contains phase contrast microscopy, scattered light intensity detection method, plasma spark method, optoacoustic mensuration, photo-thermal method etc., and these methods respectively have its relative merits.Wherein phase contrast microscopy is a kind of detection method that international standard ISO11254 recommends, it is that the surface of 100-150 Normaski microscope doubly after to laser irradiation observed that this method adopts enlargement ratio, to differentiate film, whether injure, the subjectivity of the method is very strong, and working strength is large, testing efficiency is low, is difficult to realize the robotization of machine system.Scattered light intensity detects ratio juris: when laser is mapped on sample so that certain angle is oblique, if the reflection spot place on surface is without fault, reflected light, by the rule reflection providing by geometrical optics, if do not allow reflection chief ray enter photelectric receiver, does not just almost have electric signal output.When surperficial reflection spot place rough, or produced and injured after laser irradiation, in chief ray, considerable part energy can not orienting reflex, but generation scattering, corresponding photelectric receiver just has electric signal output, by surveying photelectric receiver, have or not electric signal to export, the variation that is actually exploring laser light radiation front and back electric signal just can judge whether illuminated laser spot injures, the method requires high to the smooth finish on sample surface, if laser emission front surface smooth finish is inadequate, even if having caused, laser emission injures, detector output electrical signals does not have too large variation yet, thereby can not injure exactly differentiation.
Plasma spark method is also to differentiate a kind of common method that laser is injured, and the mechanism of the method is ionization to be formed while interacting with optical surface based on high power laser light to the material of optical surface, thus generation free electron and ion, i.e. plasma.Plasma spark while therefore, interacting by light activated element exploring laser light and optical surface just can judge whether to exist to be injured.Conventionally, detection laser is monochromatic light (if the wavelength of He-Ne Lasers is 632.8nm), and plasma spark is polychromatic light, therefore needs spectrum corresponding to elimination effect laser, just can accurate detection to plasma spark, can differentiate and whether at optical surface, have the phenomenon of injuring.Conventional plasma spark diagnostic method is that a photoelectric receiving device is installed near optical surface, when there is flash of light, photoelectric receiving device will be exported a level signal, this is based on plasma spark, to differentiate the unique method whether film is injured both at home and abroad at present, and the light intensity of usining changes as the criterion of whether damaging.Yet when sharp light intensity is enough high, atmosphere also can puncture, and occurs plasma spark phenomenon.When light laser acts on film surface and plasma spark occurs, in most of the cases, what obtain is the compound plasma of film and atmosphere, or what only obtain is atmosphere plasma flash of light, therefore, adopt the mode of conventional detection light intensity to differentiate film and whether injure, cause " erroneous judgement " phenomenon of actual test inevitable.
Utility model content
The purpose of this utility model is to overcome above-mentioned the problems of the prior art, the recognition device that provides a kind of optical thin film laser to injure, this device and method can be applicable to the online differentiation on all kinds of optical elements and coated element surface, and have fast, high precision, feature accurately.
To achieve these goals, the technical scheme that the utility model adopts is: comprise laser instrument and test sample; Test sample is installed on test sample stage, laser instrument is over against the surface to be measured of test sample, one side of test sample stage is provided with the particulate sputtering through laser irradiation sample for accelerating, and form the accelerating electrode of collimated particle bundle, and be also provided with for improving the electron source of ion concentration between test sample stage and accelerating electrode; The rear end of accelerating electrode arranges the magnetic field that ion is deflected, and a side parallel from accelerating electrode is provided with for receiving some receiving electrodes of the ion of different deflection radius; The output terminal of receiving electrode is all connected on the signal input part of A/D converter, and the signal output part of A/D converter is connected with for generating the computing machine of sputtering particle quality spectrogram.
The high-energy laser of described laser instrument for making test sample surface film injure.
Described sharp light wavelength is 1064nm, and pulsewidth is 10ns, and single pulse energy is 400mJ.
Described test sample stage is the two-dimensional movement platform by step motor control.
Described magnetic field is uniform magnetic field.
Described some receiving electrodes be arranged in parallel side by side.
In described computing machine, store the standard mass-to-charge ratio of element.
Compared with prior art, the utlity model has following beneficial effect:
The utility model adopts laser irradiation test sample surface, under the irradiation of laser, it injures that part can gasify or splash goes out particulate, after accelerating, accelerating electrode enters magnetic field, ion deflection penetrate magnetic field under the effect of magnetic field force, the receiving electrode that is arranged on outside, magnetic field receives, and producing pulse signal, pulse signal converts digital signal to and transfers to computing machine through A/D converter, finally obtains the mass-to-charge ratio spectrogram of sputter particulate.The utility model is not usingd the variation of optics or electrical signal as the criterion of injuring, adopt the elementary composition comprising in mass spectrophotometry ejecta, traditional method of discrimination of comparing, not only discrimination precision is high, there is not " erroneous judgement " phenomenon, the test environment of vacuum has guaranteed that the interference of test is little, and distinguishing speed is fast, to the differentiation of laser damage in thin films, can in 1s, complete; Meanwhile, the utility model is differentiated the kind wide ranges of film, no matter is that reflectance coating, anti-reflection film, film, thick film all can be realized high-precision differentiation.Finally, because major part in the particulate sputtering is ion, a part is neutral atom, in order to improve ion concentration, between accelerating electrode and test sample stage, electron source is set, the neutral atom sputtering is also ionized, form highdensity plasma, thereby improved the ionization level of splash particulate.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model optical thin film laser Damage recognition device.
Wherein, 1 is laser instrument; 2 is test sample; 3 is electron source; 4 is accelerating electrode; 5 is magnetic field; 6 is receiving electrode; 7 is A/D converter; 8 is computing machine.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in more detail:
Referring to Fig. 1, the recognition device that the utility model optical thin film laser is injured, comprises laser instrument 1 and test sample 2, laser instrument 1 is for making to test the high-energy laser that sample 2 surface films are injured, and sharp light wavelength is 1064nm, pulsewidth is 10ns, and maximum single pulse energy is 400mJ; Test sample 2 is installed on test sample stage 9, and test sample stage 9 is the two-dimensional movement platform by step motor control; Laser instrument 1 is over against the surface to be measured of test sample 2, one side of test sample stage 9 is provided with the particulate sputtering through laser irradiation sample for accelerating, and form the accelerating electrode 4 of collimated particle bundle, and be also provided with for improving the electron source 3 of ion concentration between test sample stage 9 and accelerating electrode 4; The rear end of accelerating electrode 4 arranges the magnetic field 5 that ion is deflected, and wherein, magnetic field 5 is uniform magnetic field.A side parallel from accelerating electrode 4 is provided with for receiving some receiving electrodes that be arranged in parallel side by side 6 of the ion of different deflection radius; The output terminal of receiving electrode 6 is all connected on the signal input part of A/D converter 7, and the signal output part of A/D converter 7 is connected with computing machine 8, and computing machine 8, according to the standard mass-to-charge ratio that is stored in its inner element, generates sputtering particle quality spectrogram.
The invention also discloses the recognition methods that a kind of optical thin film laser is injured, comprise the following steps:
1) first, installation testing device, the Laser emission of laser instrument is rectified being clamped in the test sample on test sample stage, then the side at test sample stage arranges accelerating field, electron source is placed between test sample stage and accelerating field, each receiving electrode all be arranged in parallel with accelerating electrode, and accelerating electrode is all adjacent with magnetic field with receiving electrode, finally connects successively receiving electrode, A/D converter and computing machine again;
2) then, open laser instrument and computing machine, the film surface of test sample is received after laser irradiation breakage, the particulate of damage zone is to space sputter, the particulate sputtering enters accelerating electrode after electron source, through the accelerating field between accelerating electrode, enter the magnetic field at accelerating electrode rear, ion penetrates magnetic field after deflecting under the effect of magnetic field force and is received by some receiving electrodes, receiving electrode converts the pulse signal receiving digital signal to and is transferred in computing machine through A/D converter, is generated the quality spectrogram of sputtering particle by computing machine;
3) according to the standard mass-to-charge ratio that is stored in element in computing machine, determine that the element of sputter thing forms, finally by contrast standard mass-to-charge ratio, just can directly judge test sample and whether occur to injure.Concrete, by step 2) in to the mass spectrogram of sputtering particle and the element in atmosphere contrast, if there is the emerging element not belonging in atmosphere, tests sample and occurred to injure; Otherwise, test sample intact.
The utility model adopts the method for mass spectrum collection, analysis to determine the element kind comprising in material of injuring, rather than adopt photoelectric detector to accept light intensity or scattered signal, neither adopt CCD to gather image, the element kind and the atmospheric elements that collect are contrasted, and then can differentiate film surface and whether injure.Meanwhile, in test process, print position is fixed, and does not need to remove test, but online target acquisition, and real-time Transmission is to computing machine, and carries out analyzing and processing, reaches the accurate object that judges whether film is injured.
Simultaneously, the utility model adopts injures that film is differentiated in the mass spectrophotometry of sample element or whether optical element is injured, using the criterion whether " determining the element kind of injuring in body " injure as film or optical element, thus the interference of effectively despumation, dust or surrounding atmosphere.
Principle of the present utility model:
The method of discrimination that the utility model adopts film to injure, is different from traditional method of discrimination.The core of the method is, do not using the variation of optics or electrical signal as the criterion of injuring, but adopts the method for ultimate analysis, gathers mass spectrum and also analyzes the elementary composition comprising in splashings, just can directly judge whether sample has occurred to injure.The ultimate principle of its judgement is: under the radiation of high-power, high energy laser, in optical element or film surface microcell conventionally the utmost point in the short time (nanosecond order) assembled high energy (millijoule), thereby make the local violent gasification of material, when serious, also may flash.The particulate that gasification or splash go out, wherein major part is ion, a part is neutral atom.After electron source, neutral atom wherein also ionizes, thereby has improved the ionization level of splash particulate.Ion forms collimation ion beam after electric field, enters in uniform magnetic field.
If ion with electric weight be q, quality is that m, speed are V, it vertically enters in the magnetic field that magnetic induction density is B, rotation circular motion radius be:
And the speed V of ion determines have by the voltage U of accelerating electrode
So
Because U and B are constant, so the circular motion radius of charged ion in magnetic field depends on the ratio of mass of ion and quantities of charge.As can be seen here, in uniform magnetic field, the ion with same mass-to-charge ratio rotates with same Radius, and the ion radius of turn of different mass-to-charge ratioes is not identical, thereby it is separated that various ions are occurred according to mass-to-charge ratio, and the receiving electrode that is distributed in diverse location can receive the ion of different radiuses of rotation.Therefore, according to the position of receiving electrode and size of current, just can determine the quality of ion, the element kind comprising in also just can clear and definite splashings.Atmosphere is as common external interference, and its element most possibly appears in mass spectrum, but it mainly contains the elements such as N, O, C, H, and the chemical composition of film or optical element is different from atmosphere, conventionally comprises the elements such as Si, Ti, Al, Mg, Zn, Zr.If the element that contains film or optical element in vapour (or splashings), so, just can conclude that sample laser has occurred and injured.
The process of the utility model method of testing comprises:
First, adopt high-power, high-octane pulse laser to carry out irradiation to film or optical element surface, once sample is injured, the surface mass that forms film or optical element will be vaporized or excite, and with the form of atom and ion, splashes away.Secondly, adopt electron source to carry out ionization to the atom in splashings, the mass-to-charge ratio that closely gathers the ion that splashes distributes.Then, utilize computer software to analyze mass spectrum, according to the size of ion matter lotus number, determine the concrete element kind that gathers ion.Finally, and the element in atmosphere compares, if the unit in the particle collecting have from outside atmospheric elements, just can determine that film has occurred to injure.Adopt this method and apparatus, can realize the accurate differentiation that optical thin film is injured, finally by computer system, carry out computing, can provide fast the laser damage threshold of film.
Whether the utility model, by gathering the mass spectrum of splashings, is determined the recognition methods of particle institute containing element, thereby differentiate dissimilar film sample, injure.For reaching, differentiate the object that laser injures and adopt following apparatus, this device forms by testing sample stage, mass-to-charge ratio acquisition system and Computing system.The utility model is surperficial to sample by superlaser irradiation, sample can be film, also can be the samples such as optical element, adopt the method for mass spectrum collection, analysis to determine the element kind comprising in material of injuring, thus accurately, online, whether Quick go out film and damage.
The course of work of the present utility model:
As shown in Figure 1, effect laser is high-energy laser, can be any laser that film is injured.Test sample 2 is clamped on test board, when film surface is subject to Irradiation of High and after breakage, the particulate of damage zone is immediately to space sputter.The particulate sputtering comprises ion, electronics and part neutral atom.In order to improve its ionization level, sputter thing, after electron source 3, forms highdensity plasma, thereby has greatly improved the content of ion.These ions, after accelerating electrode 4, enter in uniform magnetic field, and magnetic field force induced effect deflects.The radius of ion deflecting depends on the mass-to-charge ratio of ion.The receiving electrode 6 that is installed on diverse location can receive with the ion after different radii deflection, then through A/D converter 7, by analog-signal transitions, is digital signal and is transferred in computing machine 8, has just obtained the quality spectrogram of sputter thing.In computing machine, analyze the mass spectrum obtaining, according to the standard mass-to-charge ratio that is stored in the element in computing machine, just can determine that the element of sputter thing forms.Therefore, as long as emerging element does not belong to the element (being mainly the element spectrum such as N, O, H, C, Ar) in atmosphere, can conclude that this element comes from film, thereby there is damage in explanation film.
Laser provided by the utility model injures discriminating gear and mass spectrometric analysis method is applicable to all kinds of optical elements and film surface, be applicable to various types of films and injure differentiation, and there is feature fast and accurately, realized the quick full-automatic process of whole damage from laser judgement system.The utility model, under the effect of superlaser, can online, in real time, fast, accurately obtain optical thin film and injure state, has eliminated current conventional film and has injured the inaccurate phenomenon of differentiation.The utility model calculates and analyzes through detailed theory, has proved that this system is feasible, and functional, stable, in actual industrial production, has wide practical use.
When optical thin-film laser injure threshold is measured, whether accurate and Quick film is injured is the key that obtains correct result.During test sample, print is placed on the two-dimensional movement platform of step motor control.Effect laser is wavelength 1064nm, pulsewidth 10ns, the high energy laser of single pulse energy 400mJ.Adopt this laser print to be carried out to the irradiation of monopulse, if film is not injured, the atom of composition film or optical element, ion can sputters (gasification), and receiving electrode does not receive signal.If there is damage in film, in damage, moment there is strong splash phenomenon, the particulate of splash receives through further ionization, transmission final received electrode.The signal that computer processing system gathers according to diverse location receiving electrode, these signals are converted into mass spectrogram, and compare with the element standard mass-to-charge ratio of internal system storage, if there is new element (outside C, H, O, N), think that damage has appearred in film.As for TiO
2/ SiO
2membrane stack, gathers mass-to-charge ratio in test, when the mass-to-charge ratio collecting has 48 (or 24,16,12) and 28 (or 14,9.3,7), think that film has occurred to injure, because the mass-to-charge ratio that these mass-to-charge ratio numerical value are Ti or Si element.The method of this mass spectrophotometry, applicable equally for any film or optical element.
Above content is only explanation technological thought of the present utility model; can not limit protection domain of the present utility model with this; every technological thought according to the utility model proposes, any change of doing on technical scheme basis, within all falling into the protection domain of the utility model claims.
Claims (7)
1. the recognition device that optical thin film laser is injured, is characterized in that: comprise laser instrument (1) and test sample (2); Test sample (2) is installed on test sample stage (9), laser instrument (1) is over against the surface to be measured of test sample (2), one side of test sample stage (9) is provided with the particulate sputtering through laser irradiation sample for accelerating, and form the accelerating electrode (4) of collimated particle bundle, and be also provided with the electron source (3) for improving ion concentration between test sample stage (9) and accelerating electrode (4); The rear end of accelerating electrode (4) arranges the magnetic field (5) that ion is deflected, and a side parallel from accelerating electrode (4) is provided with for receiving some receiving electrodes (6) of the ion of different deflection radius; The output terminal of receiving electrode (6) is all connected on the signal input part of A/D converter (7), and the signal output part of A/D converter (7) is connected with the computing machine (8) for generating sputtering particle quality spectrogram.
2. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: described laser instrument (1) is for making to test the high-energy laser that sample (2) surface film is injured.
3. the recognition device that optical thin film laser according to claim 1 and 2 is injured, is characterized in that: described sharp light wavelength is 1064nm, and pulsewidth is 10ns, and single pulse energy is 400mJ.
4. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: described test sample stage (9) is the two-dimensional movement platform by step motor control.
5. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: described magnetic field (5) are uniform magnetic field.
6. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: described some receiving electrodes (6) be arranged in parallel side by side.
7. the recognition device that optical thin film laser according to claim 1 is injured, is characterized in that: the standard mass-to-charge ratio that stores element in described computing machine (8).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420243812.4U CN203881709U (en) | 2014-05-13 | 2014-05-13 | Recognition device for laser-induced damage of optical thin film |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420243812.4U CN203881709U (en) | 2014-05-13 | 2014-05-13 | Recognition device for laser-induced damage of optical thin film |
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| CN203881709U true CN203881709U (en) | 2014-10-15 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954680A (en) * | 2014-05-13 | 2014-07-30 | 西安工业大学 | Device and method for identifying laser damages to optical film |
| CN104407401A (en) * | 2014-11-18 | 2015-03-11 | 北京卫星环境工程研究所 | Middle and upper atmospheric composition temperature wind field detector |
| CN108352291A (en) * | 2015-10-23 | 2018-07-31 | 株式会社岛津制作所 | Flying time mass spectrum analysis device |
-
2014
- 2014-05-13 CN CN201420243812.4U patent/CN203881709U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954680A (en) * | 2014-05-13 | 2014-07-30 | 西安工业大学 | Device and method for identifying laser damages to optical film |
| CN104407401A (en) * | 2014-11-18 | 2015-03-11 | 北京卫星环境工程研究所 | Middle and upper atmospheric composition temperature wind field detector |
| CN108352291A (en) * | 2015-10-23 | 2018-07-31 | 株式会社岛津制作所 | Flying time mass spectrum analysis device |
| CN108352291B (en) * | 2015-10-23 | 2019-12-27 | 株式会社岛津制作所 | Time-of-flight mass spectrometer |
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Granted publication date: 20141015 |