CN103454290B - A kind of bimirror formula detection analysis method of X-ray detection and imaging system - Google Patents
A kind of bimirror formula detection analysis method of X-ray detection and imaging system Download PDFInfo
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Abstract
A kind of bimirror formula detection analysis method of X-ray detection and imaging system, comprise the following steps: (1) first adjusts bimirror lens barrel, first X-ray combination refractor is moved into light path, and the X ray light beam irradiation allowing X ray light pipe send is to the incident bore place of the first X-ray combination refractor; Then, the X-ray detector entering X-ray detection and imaging system from the X ray beam Propagation of the first X-ray combination refractor outgoing carries out detection analysis, obtains Preliminary detection analysis result; (2) elementary detection analysis result is obtained through step (1); (3) adjust bimirror lens barrel, the first X-ray combination refractor is shifted out light path, an X ray cross connection type combination refractor is moved into light path simultaneously, repeat step (1) for the operation of the first X-ray combination refractor, obtain secondary detection result.While the present invention obtains high microcell resolution, resolution on-line control.
Description
Technical field
The present invention relates to X-ray detection and imaging field, the detection analysis method of especially a kind of X-ray detection and imaging system.
Background technology
Since roentgen in 1895 finds X ray, the characteristic of the uniqueness that X ray has just makes it play huge effect in medical science and industrial flaw detection field.The characteristic of the uniqueness that X ray has refers to: X-radiation photon energy is higher, and wavelength is shorter, and the resolution of its corresponding X-ray diagnostic system is higher; Simultaneously the large penetration depth that has of X ray, nondestructively can observe the opaque inner structure of various sample.In recent years, along with the development of x-ray radiation source and X ray optical component, X-ray detection and imaging technique are towards the future development of higher resolution and better non-destructive, such as, the XRF microbedding measured for Elemental redistribution in sample analyses experimental system (C.G.Schroer, Reconstructingx-ray fluorescence microtomograms, Appl.Phys.Lett., 79 (2001): 1912-1914), and for the X ray experimental system (S.Bohic of Single cell analysis, et al., Synchrontron hard x-ray microprobe:Fluorescence imagingof single cells, Appl.Phys.Lett., 78 (2001): 3544-3546) etc.X-ray detection and imaging device mainly comprise X-ray microscope, X ray microprobe, X-ray diffractometer, X ray scatterometer, X ray reflection instrument, X ray tomography, X ray projection lithography device etc.Will improve the resolution of above-mentioned detection and imaging system further, make it reach micron, sub-micron even nanometer scale, can realize the sub-micron even optical texture of nanometer scale X-ray detection focusing microbeam is Key technique problem.
Summary of the invention
In order to the microcell resolution of the detection analysis technology overcoming existing X-ray detection and imaging system is lower, resolution can not on-line control, the deficiency of hierarchical detection can not be realized, the invention provides a kind of obtain high microcell resolution while, the X-ray detection of resolution on-line control and the bimirror formula detection analysis method of imaging system.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of bimirror formula detection analysis method of X-ray detection and imaging system, the bimirror formula detection optics realizing the method comprises bimirror lens barrel, X ray cross connection type combination refractor and the first X-ray combination refractor, described X ray cross connection type combination refractor comprises the second X-ray combination refractor and the 3rd X-ray combination refractor, described second X-ray combination refractor has identical incident bore with described first X-ray combination refractor, described second X-ray combination refractor exit end is connected with the incidence end of described 3rd X-ray combination refractor, described X ray cross connection type combination refractor, the first X-ray combination refractor are positioned at described bimirror lens barrel, the optical axis of described X ray cross connection type combination refractor is parallel with the optical axis of the first X-ray combination refractor, and the focused spot size of described X ray cross connection type combination refractor is less than the focused spot size of the first X-ray combination refractor, described bimirror formula detection analysis method comprises the following steps:
(1) first bimirror lens barrel is adjusted, described first X-ray combination refractor is moved into light path, the optical axis of the X ray light beam that the X ray light pipe of X-ray detection and imaging system is sent and the optical axis coincidence of the first X-ray combination refractor, the X ray light beam irradiation allowing X ray light pipe send is to the incident bore place of the first X-ray combination refractor;
Then, the X-ray detector entering X-ray detection and imaging system from the X ray beam Propagation of described first X-ray combination refractor outgoing carries out detection analysis, obtains Preliminary detection analysis result;
(2) obtain elementary detection analysis result through step (1), judge whether the detection analysis needing target to be carried out to fine structure, if needed, enter step (3);
(3) bimirror lens barrel is adjusted, described first X-ray combination refractor is shifted out light path, an X ray cross connection type combination refractor is moved into light path simultaneously, the optical axis of the X ray light beam that the X ray light pipe of X-ray detection and imaging system is sent and X ray cross connection type combine the optical axis coincidence of refractor, and the X ray light beam irradiation allowing X ray light pipe send is to the incident bore place of X ray cross connection type combination refractor;
Then, the X-ray detector entering X-ray detection and imaging system from the X ray beam Propagation of described X ray cross connection type combination refractor outgoing carries out detection analysis, obtains secondary detection result.
Further, at least two X ray cross connection type combination refractors and 1 the first X-ray combination refractor are installed in described bimirror lens barrel, the descending classification of focused spot size of at least two X ray cross connection type combination refractors; Described bimirror formula detection analysis method is further comprising the steps of:
(4) obtain secondary detection result through step (3), result is analyzed, judge whether to need to adjust different detection resolutions, tested target is further analyzed, if needed, enters step (5);
(5) bimirror lens barrel is adjusted, the focused spot size of another X ray cross connection type combination refractor is less than the focused spot size of described X ray cross connection type combination refractor, described X ray cross connection type combination refractor is shifted out light path, described another X ray cross connection type combination refractor is moved into light path simultaneously, repeat the operation of step (3) for described X ray cross connection type combination refractor, obtain three grades of testing results;
(6) the like increase detection resolution step by step, until detect the testing result obtaining satisfaction for tested target.
In described step (1), for X-ray fluorescence analyzing system, described first X-ray combination refractor focuses on the X ray light beam that X ray light pipe is launched, and forms detection hot spot and analyzes test sample.
In described step (1), for X ray microscopic system, tested target must be placed between X ray light pipe and X-ray combination refractor, utilize the optical principle of described first X-ray combination refractor to carry out micro-amplification.
Described bimirror formula detection optics also comprises bimirror mechanical adjusting mechanism, and described bimirror lens barrel is arranged in order to shift out or to move on the mechanical adjusting mechanism of X-ray detection and imaging system light path by X ray cross connection type combination refractor or the first X-ray combination refractor; In described step (3), shift out immigration action and precision is determined by described bimirror mechanical adjusting mechanism.
Technical conceive of the present invention is: X-ray combination refractor is a kind of New X ray focusing device based on refraction effect, its theoretical focused spot size can reach nanometer scale, actual test gained focused spot size is usually at several micron, and have that size is little, manufacture craft is simple, robustness is good, can the advantage of batch machining, be applicable to X-ray detection and the imaging system of high detection resolution; Secondly, the non-constant width of photon energy that X-ray combination refractor covers, therefore based on its framework X-ray detection and imaging system, is applicable to various application occasions; Last because it is based on refraction effect, therefore do not need light path of turning back when focusing on X-ray beam, therefore formed sniffer compact conformation, size are little, lightweight.
Beneficial effect of the present invention is mainly manifested in: 1, adopt X-ray combination refractor as focusing and image device, inherently can reach higher detection resolution, combine refractor with X ray cross connection type again to combine, the more high-precision fine-structure distribution to tested target can be realized; 2, by invention bimirror formula optical texture, X-ray detection and imaging system can realize the object simultaneously detected tested target macroscopic view and details; 3, achieve detection resolution to regulate in real time online; 4, detect bimirror based on refraction effect work, do not need light path of turning back when focusing on X-ray beam, therefore formed detection system compact conformation, size are little, lightweight.
Accompanying drawing explanation
Fig. 1-1 is the front elevation of a kind of detection of the bimirror formula for X-ray detection and imaging system of the present invention optics, and wherein, 1 is X-ray combination refractor, and 2 is X ray cross connection type combination refractors, and 3 is bimirror lens barrels, and 4 is bimirror mechanical adjusting mechanisms.
Fig. 1-2 is the vertical view of a kind of detection of the bimirror formula for X-ray detection and imaging system of the present invention optics.
Fig. 2 is the schematic diagram of X ray cross connection type combination refractor.
Fig. 3 is that the present invention is a kind of based on the bimirror formula detection X-ray detection of optical texture and the schematic diagram of imaging system, and wherein, 5 is X ray light pipes, and 6 is X-ray detectors.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to Fig. 1 ~ Fig. 3, a kind of bimirror formula detection analysis method of X-ray detection and imaging system, the bimirror formula detection optics realizing the method comprises bimirror lens barrel 3, X ray cross connection type combination refractor 2 and the first X-ray combination refractor 1, described X ray cross connection type combination refractor 2 comprises the second X-ray combination refractor and the 3rd X-ray combination refractor, described second X-ray combination refractor has identical incident bore with described first X-ray combination refractor, described second X-ray combination refractor exit end is connected with the incidence end of described 3rd X-ray combination refractor, described X ray cross connection type combination refractor 2, first X-ray combination refractor 1 is positioned at described bimirror lens barrel 3, the optical axis of described X ray cross connection type combination refractor 2 is parallel with the optical axis of the first X-ray combination refractor 1, and the focused spot size of described X ray cross connection type combination refractor 2 is less than the focused spot size of the first X-ray combination refractor 1, described bimirror formula detection analysis method, comprises the following steps:
(1) the X ray light sent from X ray light pipe 5 has the larger angle of divergence, therefore first bimirror lens barrel is adjusted, described first X-ray combination refractor 1 is moved into light path, the optical axis of the X ray light beam that X ray light pipe is sent and the optical axis coincidence of the first X-ray combination refractor 1, the X ray light beam irradiation allowing X ray light pipe send is to the incident bore place of the first X-ray combination refractor 1.Enter X-ray detector 6 from the X ray beam Propagation of described first X-ray combination refractor 1 outgoing and carry out detection analysis.For X-ray fluorescence analyzing system, the X ray light beam that the first X-ray combination refractor 1 pair X ray light pipe 5 is launched focuses on, and forms detection hot spot and analyzes test sample; For X ray microscopic system, tested target must be placed between X ray light pipe 5 and the first X-ray combination refractor 1, utilize the optical principle of X-ray combination refractor to carry out micro-amplification.
(2) obtain elementary detection analysis result through step (1), judge whether the detection analysis needing target to be carried out to fine structure, if needed, enter step (3).
(3) bimirror lens barrel 3 is adjusted, described first X-ray combination refractor 1 is shifted out light path, described X ray cross connection type combination refractor 2 is moved into light path simultaneously, shift out immigration action and precision is determined by described bimirror mechanical adjusting mechanism, repeat the operation of step (1) for described first X-ray combination refractor 1.
(4) obtain secondary detection result through step (3), result is analyzed, judge whether to need to adjust different detection resolutions, tested target is further analyzed, if needed, enters step (5).
(5) bimirror lens barrel 3 is adjusted, described X ray cross connection type combination refractor 2 is shifted out light path, described another X ray cross connection type combination refractor is moved into light path simultaneously, shift out immigration action and precision is determined by described bimirror mechanical adjusting mechanism, repeat the operation of step (1) for described X-ray combination refractor, until utilize different detection resolutions to detect the testing result of the satisfaction obtained for tested target.
Described detection analysis process, needs to use standard X-ray signal and information handling system to carry out analyzing and processing.
The described a kind of detection of the bimirror formula for X-ray detection and imaging system optical texture, can regulate along optical axis direction, form multiple image relation, to adapt to detection to tested target zones of different and imaging.
Described bimirror formula detection optics also comprises bimirror mechanical adjusting mechanism 4, and described bimirror lens barrel 3 is arranged in order to X ray cross connection type combination refractor 2 or the first X-ray combination refractor 1 are shifted out or to be moved on the mechanical adjusting mechanism 4 of X-ray detection and imaging system light path.
Further, described second X-ray combination refractor exit end is manufactured with microstructure brazing pin, the incident bore of described 3rd X-ray combination refractor mates with the outgoing bore of described second X-ray combination refractor, the incidence end of described 3rd X-ray combination refractor is manufactured with the pin-and-hole with described microstructure brazing pin adaptation, so that described second X-ray combination refractor and the 3rd X-ray combination refractor are continued.
Further again, at least two X ray cross connection type combination refractors 2 and a first X-ray combination refractor 1 are installed in described bimirror lens barrel 3.The focused spot size that such as can be configured to a first X-ray combination refractor 1 and three X ray cross connection type combination refractors, 2, three X ray cross connection type combination refractors 2 is in different brackets, certainly, other also can be adopted to combine.The descending classification of focused spot size of at least two X ray cross connection type combination refractors 2.
Further, the optical axis of at least two X ray cross connection type combination refractors and a first X-ray combination refractor is positioned on the concentric circles of described bimirror lens barrel 3, and described mechanical adjusting mechanism 4 links with the central shaft of bimirror lens barrel 3.Because X ray cross connection type combination refractor and the first X-ray combination refractor are positioned on concentric circles, by rotating, mutual position can be regulated, by bimirror lens barrel, X ray cross connection type combination refractor or the first X-ray combination refractor bimirror are shifted out or move into X-ray detection and imaging system light path; Certainly, other regulative mode can also be adopted.
In the present embodiment, the first X-ray combination refractor 1 and X ray cross connection type combination refractor 2 is adopted to form bimirror, described first X-ray combination refractor 1 focuses on and image device as initial X-ray, once focuses on the X ray light beam from X-ray source (comprising synchrotron radiation wire harness and X ray light pipe) outgoing, described X ray cross connection type combination refractor 2, continued by the second X-ray combination refractor and the 3rd X-ray combination refractor and form, described second X-ray combination refractor has identical incident bore with described X-ray combination refractor, outgoing bore end is manufactured with microstructure brazing pin, the incident bore of described 3rd X-ray combination refractor mates with the outgoing bore of described second X-ray combination refractor, entry port is manufactured with the pin-and-hole with described microstructure brazing pin adaptation, so that described second X-ray combination refractor and the 3rd X-ray combination refractor are continued.
Described bimirror lens barrel 3 is the mechanical devices for assembling described first X-ray combination refractor 1 and X ray cross connection type combination refractor 2.
Described bimirror mechanical adjusting mechanism 4, is connected with described bimirror lens barrel 3, for being rotated by machinery, described first X-ray combination refractor 1 or X ray cross connection type combination refractor 2 is shifted out or move into X-ray detection and imaging system light path.
The focused spot size of described first X-ray combination refractor 1 is greater than described X ray cross connection type combination refractor 2, namely, for X-ray fluorescence analyzing system, X ray cross connection type combination refractor 2 can analyze the sample microcell more small than described first X-ray combination refractor 1; For X ray microscopic system, X ray cross connection type combination refractor 2 can carry out micro-imaging to the object of smaller szie.
Optical parametric between described first X-ray combination refractor 1 and described X ray cross connection type combination refractor 2 must mate, to make the two combine measured target is carried out to the hierarchical detection of macroscopic view and details, described first X-ray combination refractor 1 realizes elementary detection, resolution is lower, described X ray cross connection type combination refractor 2 realizes fine structure and detects, and has higher resolution; Combination simultaneously can realize the online dynamic adjustments of detection resolution.
The following theoretical formula that fits through of described optical parametric carries out designing and calculating realization:
Focal distance f:
Focal beam spot Δ r:
Focal beam spot place's light distribution I (r):
The bore D of X-ray combination refractor
eff:
Wherein, at X ray wave band, the complex index of refraction of material is expressed as n=1-δ+i β, and the real part 1-δ of complex index of refraction represents refractive index, and imaginary part β represents absorptivity, and δ is refraction coefficient.Described X-ray combination refractor is made up of N number of identical refractive elements, and each refractive elements is all biconcave lenss, and its face type is parabola, and the radius-of-curvature at parabola vertex place is R, and on refractive elements, parabola opening size is R
0, λ represents wavelength, and r is the horizontal polar coordinates in image planes place, and I (0) represents the light intensity of initial position, and general value is 1.μ is the linear absorption coefficient of material,
A is intermediate parameters,
Further again, can install 2,4,6,8 or more first X-ray combination refractor 1 or X ray cross connection type combination refractor 2 in described bimirror lens barrel 3, the concept of described bimirror refers to the beneficial effect of the present invention that combination that a first X-ray combination refractor 1 and X ray cross connection type mated with its optical parametric combine refractor 2 reaches.As an example, 1 the first X-ray combination refractor and 3 X ray cross connection type combination refractors are placed in bimirror lens barrel of the present invention, described 1 the first X-ray combination refractor can with any 1 the composition bimirror in described 3 X ray cross connection types combination refractor, use in X-ray detection and imaging system, therefore altogether can form 3 bimirror structures to meet the different application demand of X-ray detection and imaging system.
The optical axis of described X-ray detection and imaging system and the optical axis of described first X-ray combination refractor 1 or X ray cross connection type combine the optical axis coincidence of refractor 2, instead of overlap with the machine center axle of bimirror lens barrel.
Claims (5)
1. the bimirror formula detection analysis method of an X-ray detection and imaging system, it is characterized in that: the bimirror formula detection optics realizing the method comprises bimirror lens barrel, X ray cross connection type combination refractor and the first X-ray combination refractor, described X ray cross connection type combination refractor comprises the second X-ray combination refractor and the 3rd X-ray combination refractor, described second X-ray combination refractor has identical incident bore with described first X-ray combination refractor, described second X-ray combination refractor exit end is connected with the incidence end of described 3rd X-ray combination refractor, described X ray cross connection type combination refractor, the first X-ray combination refractor are positioned at described bimirror lens barrel, the optical axis of described X ray cross connection type combination refractor is parallel with the optical axis of the first X-ray combination refractor, and the focused spot size of described X ray cross connection type combination refractor is less than the focused spot size of the first X-ray combination refractor, described bimirror formula detection analysis method comprises the following steps:
(1) first bimirror lens barrel is adjusted, described first X-ray combination refractor is moved into light path, the optical axis of the X ray light beam that the X ray light pipe of X-ray detection and imaging system is sent and the optical axis coincidence of the first X-ray combination refractor, the X ray light beam irradiation allowing X ray light pipe send is to the incident bore place of the first X-ray combination refractor;
Then, the X-ray detector entering X-ray detection and imaging system from the X ray beam Propagation of described first X-ray combination refractor outgoing carries out detection analysis, obtains Preliminary detection analysis result;
(2) obtain elementary detection analysis result through step (1), judge whether the detection analysis needing target to be carried out to fine structure, if needed, enter step (3);
(3) bimirror lens barrel is adjusted, described first X-ray combination refractor is shifted out light path, described X ray cross connection type combination refractor is moved into light path simultaneously, the optical axis of the X ray light beam that the X ray light pipe of X-ray detection and imaging system is sent and X ray cross connection type combine the optical axis coincidence of refractor, and the X ray light beam irradiation allowing X ray light pipe send is to the incident bore place of X ray cross connection type combination refractor;
Then, the X-ray detector entering X-ray detection and imaging system from the X ray beam Propagation of described X ray cross connection type combination refractor outgoing carries out detection analysis, obtains secondary detection result.
2.2
.the bimirror formula detection analysis method of X-ray detection as claimed in claim 1 and imaging system, it is characterized in that: 1 the first X-ray combination refractor and at least two X ray cross connection type combination refractors are installed, the descending classification of focused spot size of at least two X ray cross connection type combination refractors in described bimirror lens barrel; Described bimirror formula detection analysis method is further comprising the steps of:
(4) obtain secondary detection result through step (3), result is analyzed, judge whether to need to adjust different detection resolutions, tested target is further analyzed, if needed, enters step (5);
(5) bimirror lens barrel is adjusted, the focused spot size of another X ray cross connection type combination refractor is less than the focused spot size of described X ray cross connection type combination refractor, described X ray cross connection type combination refractor is shifted out light path, described another X ray cross connection type combination refractor is moved into light path simultaneously, repeat the operation of step (3) for described X ray cross connection type combination refractor, obtain three grades of testing results;
(6) the like, increase detection resolution step by step, until detect the testing result of the satisfaction obtained for tested target.
3.3
.the bimirror formula detection analysis method of X-ray detection as claimed in claim 1 or 2 and imaging system, it is characterized in that: in described step (1), for X-ray fluorescence analyzing system, described first X-ray combination refractor focuses on the X ray light beam that X ray light pipe is launched, and forms detection hot spot and analyzes test sample.
4.4
.the bimirror formula detection analysis method of X-ray detection as claimed in claim 1 or 2 and imaging system, it is characterized in that: in described step (1), for X ray microscopic system, tested target must be placed between X ray light pipe and X-ray combination refractor, utilize the optical principle of described first X-ray combination refractor to carry out micro-amplification.
5.5
.the bimirror formula detection analysis method of X-ray detection as claimed in claim 1 or 2 and imaging system, it is characterized in that: described bimirror formula detection optics also comprises bimirror mechanical adjusting mechanism, described bimirror lens barrel is arranged in order to shift out or to move on the bimirror mechanical adjusting mechanism of X-ray detection and imaging system light path by X ray cross connection type combination refractor or the first X-ray combination refractor; In described step (3), shift out immigration action and precision is determined by described bimirror mechanical adjusting mechanism.
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Effective date of registration: 20190620 Address after: 210038 Nanjing Economic and Technological Development Zone, Jiangsu Province (No. 2 Shenma Road, Ma Qun Science and Technology Park) Patentee after: Nanjing Huadong Electronic Group Medical Equipment LLC Address before: 310014 18 Chao Wang Road, Zhaohui six District, Hangzhou, Zhejiang Patentee before: Zhejiang University of Technology |