CN110514595A - Optical measuring device with Beam Control function - Google Patents
Optical measuring device with Beam Control function Download PDFInfo
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- CN110514595A CN110514595A CN201910801027.3A CN201910801027A CN110514595A CN 110514595 A CN110514595 A CN 110514595A CN 201910801027 A CN201910801027 A CN 201910801027A CN 110514595 A CN110514595 A CN 110514595A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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Abstract
The present invention relates to a kind of optical measuring devices with Beam Control function, belong to optical non-linear measuring device technical field.Solve in the prior art the technical problems such as multiband optical non-linear measuring device is at high cost, and structure is complicated, and measurement error is big, further expansion measures spectral coverage range.Optical non-linear measuring device of the invention, including laser collimation system, beam splitter, Focused Optical system, electricity driving displacement platform, diaphragm piece, the first power meter, main control computer, data collecting instrument, the second power meter and the first lens.The optical non-linear measuring device can non-linear absorption coefficient to material and nonlinear refractive index carry out real-time measurement, measurement wavelength spectral coverage is wide, and principle is simple, and measurement accuracy is high, at low cost, while having the function of the measurement to the membrane system damage threshold of optical element.
Description
Technical field
The invention belongs to optical measuring device technical fields, and in particular to a kind of optical measurement with Beam Control function
Device.
Background technique
Nonlinear optical material has important application in lasing safety and optical Limiting field.Material nonlinearity characteristic is ground
Study carefully be current materialogy and related fields research hotspot, in the prior art, optical nonlinearity measuring technique has four wave of degeneracy mixed
Frequently, three wave mixing, triple-frequency harmonics method, nonlinear interference method, non linear elliptic Polarization Method, Mach-Zehnder interferometry, 4f phase phase
Dry imaging method, Z scanning method etc., wherein Z scanning method (M.Sheik-Bahae, A.A.Said, Tai-Hui Wei, David
J.Hagan,E.W.Van Stryland.Sensitive,measurement of optical nonlinearities
Using a single beam.IEEE J QuantumElect, 26,760-769 (1990)) it is relatively conventional, when measurement, it will survey
Test agent is placed on mobile platform, and laser is converged lens focus in test sample surface, then is divided into two beams by beam splitter, a branch of
Aperture Z scanning, carries out nonlinear absorption measuring, and a branch of closed pore Z scanning carries out nonlinear refraction measurement, surveyed by linear movement
Test agent can measure nonlinear characteristic of the material under different light intensity；This method principle is simple, it is easy to accomplish.
The measuring device about optical nonlinearity for disclosing report in the prior art is all made of the detection light source of single wavelength,
And it is more demanding to beam quality and light source stability, however in fields such as lasing safeties, it needs to carry out multiband for material
The nonlinear characteristic of laser measures, and therefore, existing non-linear measuring device is unable to meet demand.A kind of real-time height of Chinese patent
The non-linear spectral characteristic measuring device (Authorization Notice No. CN205301164 U) of effect is using a kind of white light laser and existing Z
The mode combined is scanned, non-linear absorption coefficient and nonlinear refraction system under multi-wavelength to material are realized by single pass
Several measurements, but the measuring device detects the multispectral information that white light laser includes, equipment cost using three spectrometers
Height, structure is complicated, and completes measurement of all wave bands to material nonlinearity parameter using single pass, and measurement data amount is big, this
Sample will increase single wave band to the measurement error of material nonlinearity parameter, also with the practical application scenes such as lasing safety and optical Limiting
It is not inconsistent.
Summary of the invention
In view of this, the present invention is that multiband optical non-linear measuring device is at high cost in the prior art for solution, structure is multiple
Miscellaneous, the technical problems such as measurement error is big, further expansion measures spectral coverage range, provides a kind of optics with Beam Control function
Measuring device.
It is as follows that the present invention solves the technical solution that above-mentioned technical problem is taken:
Optical measuring device with Beam Control function of the invention, including laser collimation system, beam splitter, focusing light
System, electricity driving displacement platform, diaphragm piece, the first power meter, main control computer, data collecting instrument, the second power meter and first
Lens；
The laser collimation system includes front lens group and rear microscope group, and front lens group is made of the second lens and the third lens, after
Microscope group is made of the 4th lens and the 5th lens, and the second lens, the third lens, the 4th lens and the 5th lens are along the propagation side of light
To being coaxially disposed from front to back, and the second lens and the third lens interval are fixed, and the 4th lens and the 5th lens separation are fixed, preceding
Microscope group can be moved axially integrally relative to rear microscope group；Laser collimation system emits incident laser alignment to beam splitter；
Laser through laser collimation system collimated incident is divided into two beams by the beam splitter, a branch of to converge to through the first lens
On second power meter, incident first power meter after another Shu Yici line focus optical lens, test sample, diaphragm piece；
The Focused Optical system includes zoom group, compensation group and focusing group, and zoom group is by the 6th lens and the 7th lens
Composition, compensation group are made of the 8th lens, the 9th lens and the tenth lens, and focusing group is by the 11st lens and the 12nd lens group
At the 6th lens, the 7th lens, the 8th lens, the 9th lens, the tenth lens, the 11st lens and the 12nd lens are along light
The direction of propagation is coaxially disposed from front to back, and the 6th lens and the 7th lens separation are fixed, the 8th lens, the 9th lens and the tenth
Lens separation is fixed, and the 11st lens and the 12nd lens separation are fixed, and zoom group, compensation group and focusing group are able to entirety
It is moved axially relative to rear microscope group；
The electricity driving displacement platform is able to drive test sample and moves in focal point along Z axis for fixing test sample,
The Z axis is optical axis；
The diaphragm piece is arranged between test sample and the first power meter, by adjusting diaphragm aperture size, can adjust
The spot size of whole diaphragm face and the size relation of diaphragm bore size；
The laser power of laser of the first power meter real-time detection after test sample；
The laser power for the laser that the first lens of the second power meter real-time detection are assembled；
The data collecting instrument is all connected with main control computer, the first power meter and the second power meter, acquires the first power
The laser power data of meter and the second power meter, and laser power data is transmitted to main control computer；
The main control computer is all connected with electricity driving displacement platform and data collecting instrument, and main control computer controls electricity driving displacement
Working platform receives the laser power data of data collecting instrument transmission, and carries out processing to laser power data and calculate test specimens
The non-linear absorption coefficient and nonlinear refractive index of product or determine test sample occur surface membrane system damage when, provide survey
The damage threshold of test agent surface membrane system.
Further, it is detector on-line water flushing or use that the method for surface membrane system damage, which occurs, for the determining test sample
Person passes through observation of use instrument test sample surface.
Further, the optical measuring device with Beam Control function further includes detector, detector and survey
The relative position of test agent is fixed, and detector is connect with main control computer, and detector gives detection data real-time Transmission to master control meter
Calculation machine, main control computer analyze received detection data, and whether discriminating test sample occurs the damage of surface membrane system, when sentencing
Determine test sample and the damage of surface membrane system occurs, provides the membrane system damage threshold of test sample.
Further, detector is fixed on electricity driving displacement platform.
Further, the beam splitter is half-reflecting half mirror, reflected light the first lens of incidence, transmitted light incidence focusing optics
System.
Further, the test sample is print or optical element.
Inventive principle of the invention: light source compresses the angle of divergence, collimation output, laser collimation system by laser collimation system
The collimation output to different optical characteristics light sources can be realized by microscope group position in regulating system；Collimated light is laggard by beam splitter
Enter into Focused Optical system, Focused Optical system is made of several pieces lens, and there are two effects for tool: first is that adapting to change laser light
Spot Entry pupil diameters, second is that the function of control focal beam spot position；It in this way can be right by laser collimation system and Focused Optical system
Focal beam spot size and focal beam spot position are accurately controlled, to adapt to the detection light source of different capacity, wavelength and beam divergence angle
And the optical material of different anti-saturation thresholds.Based on the Beam Control function, the present invention is substituted existing using two power meters
The non-linear measuring device of three power meters；Second power meter in real time detects laser power value, to eliminate laser power
The influence of saturated absorption and anti-saturated absorption caused by unstable；First power meter light intensity after sample for measurement, by
Focused Optical system control system focal length f, selective focus point position change the spot diameter irradiated to the first power meter target surface,
The measurement respectively of aperture, closed pore may be implemented, finally pass through main control computer data processing, obtain the non-linear absorption system of material
Several and nonlinear refractive index.And can by the way that laser is gradually increased to target power output or energy density, determine when optical element table
Face mask series damage, and then corresponding power or energy density values are optical element membrane system damage threshold.
Compared with prior art, beneficial effects of the present invention:
1, the optical measuring device provided by the invention with Beam Control function, Beam Control technology is integrated into non-thread
Property measuring device, by carrying out beam collimation to multi-wavelength's light source, focal diameter and focus position select, to adapt to difference
Wave band detects the optical characteristics of laser, can complete the Z scanning of a certain wave band of laser, realize that light sources with different wavelengths is non-thread to material
Property absorption coefficient and nonlinear refractive index real-time measurement, measurement wave band is wide, by Visible-to-Near InfaRed wave band, can be extended to
Wave is infrared, LONG WAVE INFRARED, and measurement accuracy is high.
2, the optical measuring device provided by the invention with Beam Control function, using detection light source and measuring device phase
Isolated mode without integrated detection light source, and utilizes light beam control method, Z can be achieved by the selection to focus position
Scanning aperture and closed pore measure respectively, substitute spectrometer using two laser power meters, can be realized using a power meter non-
The measurement of linear absorption coefficient and nonlinear refractive index, simplifies apparatus structure, reduces costs, be easier to realize miniaturization and
Programmed Design.
3, the optical measuring device provided by the invention with Beam Control function utilizes monitoring optical path real-time measurement laser
Power eliminates the influence of laser power unstable caused saturated absorption and anti-saturated absorption.
4, the optical measuring device provided by the invention with Beam Control function, can also be real by Beam Control technology
Now to the measurement function of optical element membrane system damage threshold, compared with existing membrane system damage threshold test device, device operation
Simply, measuring accuracy and accuracy are high.
Detailed description of the invention
It, below will be in specific embodiment in order to illustrate more clearly of the technical solution in the specific embodiment of the invention
Required attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some tools of the invention
Body embodiment for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other attached drawings.
Fig. 1 is the measuring principle schematic diagram of the optical measuring device with Beam Control function of the invention；
Fig. 2 is the structural representation of the laser collimation system of the optical measuring device with Beam Control function of the invention
Figure；
Fig. 3 is the structural representation of the Focused Optical system of the optical measuring device with Beam Control function of the invention
Figure；
In figure, 1, light source position, 2, laser collimation system, 2-1, the second lens, 2-2, the third lens, 2-3, the 4th are thoroughly
Mirror, 2-4, the 5th lens, 3, beam splitter, 4, Focused Optical system, 4-1, the 6th lens, 4-2, the 7th lens, 4-3, the 8th are thoroughly
Mirror, 4-4, the 9th lens, 4-5, the tenth lens, 4-6, the 11st lens, 4-7, the 12nd lens, 5, electricity driving displacement platform, 6,
Test sample, 7, diaphragm piece, the 8, first power meter, 9, main control computer, 10, data collecting instrument, the 11, second power meter, 12,
One lens, 13, detector；Round-trip optical path arrow indicates that the optical module is to be adjusted axially unit in figure.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, attached drawing makees the present invention below
Further it is discussed in detail.It is understood that these descriptions are only further explanation the features and advantages of the present invention, without
It is limiting to the claimed invention.
Term as used in the present invention generally has the normally understood meaning of those of ordinary skill in the art, unless
It is otherwise noted.
As shown in Figure 1-3, the optical measuring device with Beam Control function of the invention, including laser collimation system 2,
Beam splitter 3, Focused Optical system 4, electricity driving displacement platform 5, diaphragm piece 7, the first power meter 8, main control computer 9, data acquisition
Instrument 10, the second power meter 11 and the first lens 12.
Wherein, laser collimation system 2 includes front lens group and rear microscope group, and front lens group is by the second lens 2-1 and the third lens 2-2
Composition, rear microscope group are made of the 4th lens 2-3 and the 5th lens 2-4, the second lens 2-1, the third lens 2-2, the 4th lens 2-3
It is coaxially disposed from front to back with the 5th lens 2-4 along the direction of propagation of light, and between the second lens 2-1 and the third lens 2-2 air
Every fixation, the 4th lens 2-3 and the 5th airspace lens 2-4 are fixed, and front lens group integrally can be moved axially relative to rear microscope group
It is dynamic that (i.e. the second lens 2-1 and the relative position the third lens 2-2 are constant, and the 4th lens 2-3 and the 5th relative position lens 2-4 are not
Become, front lens group is moved integrally relative to rear microscope group).The effect of laser collimation system 2 is the compressed detected light source angle of departure, realizes laser
Collimation transmitting by being adjusted axially front lens group position, and then changes the spacing between front lens group and rear microscope group, may be implemented to not
The beam collimation of co-wavelength light source.
Laser through the collimation transmitting of laser collimation system 2 is divided into two beams by beam splitter 3, a branch of through 12 incidence of the second lens the
Two power meters 11, incident first power meter 8 after another Shu Yici line focus optical lens 4, test sample 6, diaphragm piece 7.Beam splitting
Mirror 3 can be commercially available, and structure is able to achieve above-mentioned function without particular/special requirement, generally use half-reflecting half mirror.Beam splitter
3 are demarcated in advance in use.The size for two beams that beam splitter 3 separates, the measurement with the first power meter 8 and the second power meter 11
Range is related, need to guarantee within the scope of measuring range, and the size of two beams separated can specifically be controlled by plated film mode.
Focused Optical system 4 includes zoom group, compensation group and focusing group, and zoom group is by the 6th lens 4-1 and the 7th lens
4-2 composition, compensation group are made of the 8th lens 4-3, the 9th lens 4-4 and the tenth lens 4-5, and focusing group is by the 11st lens 4-
6 and the 12nd lens 4-7 composition, the 6th lens 4-1, the 7th lens 4-2, the 8th lens 4-3, the 9th lens 4-4, the tenth lens
4-5, the 11st lens 4-6 and the 12nd lens 4-7 are coaxially disposed from front to back along the direction of propagation of light, and the 6th lens 4-1
It fixing with the 7th airspace lens 4-2, the 8th lens 4-3, the 9th lens 4-4 and the tenth airspace lens 4-5 are fixed, the
11 lens 4-6 and the 12nd airspace lens 4-7 are fixed, and zoom group, compensation group and focusing group are able to whole opposite
In the axial movement of rear microscope group, (i.e. the 6th lens 4-1 and the 7th relative position lens 4-2 are constant, the 8th lens 4-3, the 9th lens
4-4 and the tenth relative position lens 4-5 are constant, and the 11st lens 4-6 and the 12nd relative position lens 4-7 are constant, zoom group,
Compensation group and focusing group are able to axially move integrally relative to rear microscope group).Focused Optical system 4 assembles incident laser
To test sample 6, by moving zoom group, compensation group and focusing group respectively along axial direction, it can be achieved that light beam zoom, laser are assembled
Output and the selection of focus position.
Electricity driving displacement platform 5 is mobile for fixing test sample 6 and being able to drive test sample 6.Electricity driving displacement platform 5 will
Test sample 6 is adjusted to focal point, and it is mobile along Z axis (optical axis) to drive test sample 6 by control electricity driving displacement platform 5, and passes through
In focal point along Z axis mobile electric displacement platform 5, Z scanning is carried out to test sample 6.According to the difference of parameter to be tested, survey
Test agent 6 can be print or optical element, and optical element mainly includes optical window mouth mirror, lens, radome fairing etc..
Diaphragm piece 7 is arranged between test sample 6 and the first power meter 8, opposite by the spot size for observing diaphragm face
In the size of diaphragm bore size, closed pore Z scanning can be carried out to test sample 6 or aperture Z is scanned.Specifically, working as focal position
When far from the first power meter 8, Focused Optical system 4 is in short focus state, and beam divergence angle is big, adjusts diaphragm aperture size, makes diaphragm
The spot size in face is greater than diaphragm bore size, carries out closed pore Z scanning, measures the nonlinear refraction system of the material of test sample 6
Number；Similarly, when focal position is close to the first power meter 8, Focused Optical system 4 is in focal length state, and beam divergence angle is small, adjusts
Diaphragm aperture size makes the spot size of diaphragm face be less than diaphragm bore size, carries out aperture Z scanning, measurement test sample 6
The non-linear absorption coefficient of material.The regulative mode of diaphragm aperture can be divided into manual and electronic, two ways；Adjust diaphragm
Bore open size and front end Beam Control result (i.e. the adjusted result of laser collimation system 2 and Focused Optical system 4) related, needle
To the laser of different indexs, the size that diaphragm is opened is different.
Laser power of first power meter, 8 real-time detection after test sample 6.
Main control computer 9 is all connected with electricity driving displacement platform 5 and data collecting instrument.Main control computer 9 controls electricity driving displacement
Platform 5 works, and receives the laser power data that data collecting instrument 10 transmits, and carry out processing to laser power data and be calculated
The non-linear absorption coefficient and nonlinear refractive index of test sample 6 are handled by laser power data and calculate non-linear absorption
Coefficient and nonlinear refractive index are the prior arts；Or the laser power data that data collecting instrument 10 transmits is received, in determination
After the surface membrane system of test sample 6 is damaged, the damage threshold of the optical film of test sample 6 is provided.
Data collecting instrument 10 is all connected with main control computer 9, the first power meter 8 and the second power meter 11.Data collecting instrument
The laser power data of 10 acquisition the first power meters 8 and the second power meter 11, and laser power data is transmitted to master control and is calculated
Machine 9.Data collecting instrument 10 is those skilled in the art's common component, can be commercially available.
The laser power for the laser that second power meter, 11 the first lens of real-time detection 12 are assembled.Second power meter 11 can disappear
Except the influence of laser power unstable caused saturated absorption and anti-saturated absorption, if laser power is unstable, it may appear that survey
Obtain multiple extreme point situations；If power is excessively high suddenly, it just will appear an extreme point；Ideally, opening Z is swept
It retouches, extreme point only an extreme point should occur in focal point.
First lens 12 converge to a part light splitting of beam splitter 3 on second power meter 11.
In above-mentioned technical proposal, determine test sample 6 occur surface membrane system damage method be detector on-line water flushing or
User is by 6 surface of observation of use instrument test sample, preferably detector on-line water flushing, and present embodiment has light beam control at this time
The optical measuring device of function processed further includes detector 13, and detector 13 and the relative position of test sample 6 are fixed, and is usually detected
Device 13 is also secured on electricity driving displacement platform 5, and detector 13 is connect with main control computer 9, and detector 13 is real-time by detection data
It is transferred to main control computer 9,9 pairs of reception detection datas of main control computer are simultaneously analyzed, and whether discriminating test sample 6 occurs table
Face mask series damage damages when surface membrane system occurs for discriminating test sample 6, provides the membrane system damage threshold of test sample 6.This implementation
In mode, the on-line water flushing of detector 13 uses plasma flicker method, and plasma spark method refers to the material under laser action
The warm-up movement of particle aggravates, and strong collision occurs between particle, and the electronics in a large amount of atoms or molecule is knocked, when accumulation thermal effect
When temperature should be made sufficiently high, material is ionized；This highly ionized, the gas that is macroscopically in neutrality plasma,
It is characterized in glistening.
Optical measuring device with Beam Control function of the invention being capable of non-linear absorption coefficient to material and non-
The real-time measurement of linear refractive coefficient, test sample 6 is print at this time.The test process of device are as follows: will test light source and be placed in light
Source position 1, laser collimate transmitting after laser collimation system 2, (are demarcated in advance) by the light splitting of beam splitter 3, a portion laser
It is received after the convergence of the first lens 12 by the second power meter 11, irradiation exists after another part laser line focus optical system 4 is assembled
The surface of test sample 6 is received by the first power meter 8；Test sample 6 is fixed on electricity driving displacement platform 5, according to index request,
Be sequentially completed spot size, focal position, 7 diaphragm opening size of diaphragm piece adjust after (Focused Optical system 4 is in short focus shape
State, beam divergence angle is big, adjusts diaphragm aperture size, and the spot size of diaphragm face is made to be greater than diaphragm bore size；When focal position is leaned on
When nearly first power meter 8, Focused Optical system 4 is in focal length state, and beam divergence angle is small, adjusts diaphragm aperture size, makes diaphragm face
Spot size be less than diaphragm bore size), control electricity driving displacement platform 5 using main control computer 9 and test sample 6 be adjusted to focus
Place carries out Z scanning in focal point along Z axis moving displacement platform 5；Data collecting instrument 10 acquires the first power meter 8 and the second power
The laser power data of meter 11, and laser power data is transferred to main control computer 9, main control computer 9 by data into
Row fitting, processing, the symbol and size of the nonlinear factor of available test sample 6.
There is the present invention optical measuring device of Beam Control function can also measure optical element membrane system damage threshold, this
When test sample 6 be optical element.The test process of device are as follows: will test light source and be placed in light source position 1, laser is through laser alignment
Transmitting is collimated after system 2, by the light splitting of beam splitter 3 (in advance demarcate), a portion laser is after the convergence of the first lens 12 by the
Two power meters 11 receive, and the second power meter 11 can be used for laser power/energy that real-time monitoring reaches 6 surface of test sample；Separately
Irradiation is connect through laser by the first power meter 8 on the surface of test sample 6 after a part of laser line focus optical system 4 is assembled
It receives；Test sample 6 and detector 13 are fixed on electricity driving displacement platform 5, detector 13 and 6 position relationship of test sample, benefit
Electricity driving displacement platform 5 is controlled with main control computer 9 and is realized by adjusting laser collimation system 2 and Focused Optical system 4 to irradiation
To the accurate control of 6 surface spot diameter of test sample；By reducing spot diameter and improving power when test, it is gradually increased sharp
Light is to target power output or energy density, until 6 surface membrane system of test sample is damaged；By detector 13 to test sample 6 into
The online fault localization of row, determines when test sample surface membrane system is damaged, and provides test sample by main control computer 9
The damage threshold of surface membrane system.
Claims (6)
1. the optical measuring device with Beam Control function, which is characterized in that including laser collimation system (2), beam splitter
(3), Focused Optical system (4), electricity driving displacement platform (5), diaphragm piece (7), the first power meter (8), main control computer (9), number
According to Acquisition Instrument (10), the second power meter (11) and the first lens (12)；
The laser collimation system (2) includes front lens group and rear microscope group, and front lens group is by the second lens (2-1) and the third lens (2-
2) form, rear microscope group is made of the 4th lens (2-3) and the 5th lens (2-4), the second lens (2-1), the third lens (2-2),
4th lens (2-3) and the 5th lens (2-4) are coaxially disposed from front to back along the direction of propagation of light, and the second lens (2-1) and
The third lens (2-2) interval is fixed, and the 4th lens (2-3) and the 5th lens (2-4) interval are fixed, and front lens group can be integrally opposite
It is moved axially in rear microscope group；Laser collimation system (2) emits incident laser alignment to beam splitter (3)；
Laser through laser collimation system (2) collimated incident is divided into two beams by the beam splitter (3), a branch of through the first lens (12)
It converges on the second power meter (11), another Shu Yici line focus optical lens, test sample (6), diaphragm piece (7) afterwards incident the
One power meter (8)；
The Focused Optical system (4) includes zoom group, compensation group and focusing group, and zoom group is by the 6th lens (4-1) and the 7th
Lens (4-2) composition, compensation group is made of the 8th lens (4-3), the 9th lens (4-4) and the tenth lens (4-5), focusing group by
11st lens (4-6) and the 12nd lens (4-7) composition, the 6th lens (4-1), the 7th lens (4-2), the 8th lens (4-
3), the 9th lens (4-4), the tenth lens (4-5), the 11st lens (4-6) and the 12nd lens (4-7) are along the direction of propagation of light
It is coaxially disposed from front to back, and the 6th lens (4-1) and the 7th lens (4-2) interval are fixed, the 8th lens (4-3), the 9th are thoroughly
Mirror (4-4) and the tenth lens (4-5) interval are fixed, and the 11st lens (4-6) and the 12nd lens (4-7) interval are fixed, zoom
Group, compensation group and focusing group are able to whole relative to the axial movement of rear microscope group；
The electricity driving displacement platform (5) is able to drive test sample (6) in focal point along Z axis for fixing test sample (6)
Mobile, the Z axis is optical axis；
The diaphragm piece (7) is arranged between test sample (6) and the first power meter (8), by adjusting diaphragm aperture size, energy
Enough adjust the spot size of diaphragm face and the size relation of diaphragm bore size；
The laser power of laser of first power meter (8) real-time detection after test sample (6)；
The laser power for the laser that second power meter (11), first lens of real-time detection (12) are assembled；
The data collecting instrument (10) is all connected with main control computer (9), the first power meter (8) and the second power meter (11), adopts
Collect the laser power data of the first power meter (8) and the second power meter (11), and laser power data is transmitted to master control and is calculated
Machine (9)；
The main control computer (9) is all connected with electricity driving displacement platform (5) and data collecting instrument (10), main control computer (9) control
Electricity driving displacement platform (5) processed work, receives the laser power data of data collecting instrument (10) transmission, and to laser power data into
The non-linear absorption coefficient and nonlinear refractive index of row processing calculating test sample (6) are determining test sample (6) hair
When raw surface membrane system damage, the damage threshold of test sample (6) surface membrane system is provided.
2. the optical measuring device according to claim 1 with Beam Control function, which is characterized in that the determining survey
The method that membrane system damage in surface occurs for test agent (6) is that detector (13) on-line measurement or user pass through observation of use instrument test specimens
Product (6) surface.
3. the optical measuring device according to claim 1 or 2 with Beam Control function, which is characterized in that the tool
The optical measuring device for having Beam Control function further includes detector (13), the opposite position of detector (13) and test sample (6)
Fixation is set, detector (13) is connect with main control computer (9), and detector (13) is by detection data real-time Transmission to main control computer
(9), main control computer (9) analyzes received detection data, and whether discriminating test sample (6) occurs surface membrane system damage
Wound is damaged when surface membrane system occurs for discriminating test sample (6), provides the membrane system damage threshold of test sample (6).
4. the optical measuring device according to claim 3 with Beam Control function, which is characterized in that the detector
(13) it is fixed on electricity driving displacement platform (5).
5. the optical measuring device according to claim 1 or 2 with Beam Control function, which is characterized in that described point
Shu Jing (3) is half-reflecting half mirror, reflected light the first lens of incidence (12), transmitted light incidence Focused Optical system (4).
6. the optical measuring device according to claim 1 or 2 with Beam Control function, which is characterized in that the survey
Test agent (6) is print or optical element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910801027.3A CN110514595A (en) | 2019-08-28 | 2019-08-28 | Optical measuring device with Beam Control function |
Applications Claiming Priority (1)
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| CN113484326A (en) * | 2021-07-06 | 2021-10-08 | 南开大学 | Integrated laser damage surface observation system |
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