CN201622245U - Combined testing device for laser damage threshold of film and optical element - Google Patents
Combined testing device for laser damage threshold of film and optical element Download PDFInfo
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- CN201622245U CN201622245U CN2009202455716U CN200920245571U CN201622245U CN 201622245 U CN201622245 U CN 201622245U CN 2009202455716 U CN2009202455716 U CN 2009202455716U CN 200920245571 U CN200920245571 U CN 200920245571U CN 201622245 U CN201622245 U CN 201622245U
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Abstract
The utility model relates to a combined testing device for a laser damage threshold of a film and an optical element, aiming at solving the problems that the existing testing device has larger error in testing results, possible misjudgement and poor adaptability to various film materials, thus having poor practicability. The combined testing device comprises a testing assembly and a processing assembly, wherein the testing assembly comprises a Nd:YAG laser arranged on a primary optical axis, a switch baffle, an attenuator, a first beam splitter, a focusing lens, a second beam splitter and a sample wafer platform and also comprises a light beam analyzer, an energy meter, an auxiliary laser, a photoelectric diode array, a convergent lens, a photoelectric detector and a CCD camera, wherein the auxiliary laser is arranged by a mode of deviating from the primary optical axis, and transmitted light beams face to the sampler wafer platform; and the processing assembly comprises a computer. The combined testing device has extremely little error, no misjudgement, and strong adaptability and practicability.
Description
Technical field:
The utility model relates to a kind of film or optical element surface laser damage threshold proving installation technical field, particularly a kind of film and optical element laser damage threshold combined measuring device of being used for.
Technical background:
In the high-power high-energy laser system, there is a large amount of thin-film components, can the resisting laser damage ability of these elements and system normally effectively move closely related.There are some researches show that the destruction of thin-film component under light laser is determined by the anti-laser ability of element surface film fully.Therefore, along with the continuous expansion of superpower laser range of application, the importance of film resisting laser damage performance becomes increasingly conspicuous, so that laser damage threshold becomes the indispensable performance index of optical thin film element.Film must have the bottleneck that high laser damage threshold has become the anti-laser activity of optical element, and the application and the laser hardening that address this problem high-power laser system have great importance.And will address this problem, key is accurately to measure the laser damage threshold of film, thereby the test of optical thin-film laser injure threshold is also just become the technical matters that needs to be resolved hurrily.In the laser damage threshold test process, how online, differentiate core one ring that whether film damages becomes research in real time, fast and accurately.
For many years, external research to laser and optical medium film damage process and threshold testing method is one of focus all the time.2000, Comite Internationale de Normalisation issued ISO11254-1 and ISO11254-2, and this is that laser is caused the optical thin film damage and the international standard of formulation.But, until today, still there is not moulding testing tool and the equipment that meets corresponding international standard both at home and abroad, its main cause is in most cases, the phase contrast microscopy is adopted in differentiation to the film damage, and this method is mainly leaned on visual the realization, and testing efficiency is low, is difficult to realize robotization, intellectuality and measurement at a high speed.
About the laser damage threshold account form of film sample, that uses at present at most has R-on-1 and a 1-on-1 dual mode.Wherein R-on-1 damage test mode is meant for the same point on the sample, with the laser energy reirradiation sample that increases progressively, till producing damage.Require the damage threshold of initial laser energy during test, note the pulsed laser energy that causes sample damage, promptly think the damage threshold of this point much smaller than sample.Measure the damage threshold of a plurality of points on the same sample, obtain the damage threshold that mean value is sample.Therefore this kind method owing to will exist the laser pre-treated effect, so be difficult to measure the accurate damage threshold of sample to carrying out repeatedly laser radiation on the sample same point.1-on-1 is the zero probability damage method, promptly with m point of monopulse irradiation of same energy, notes the frequency n of damage.Each energy laser irradiation damage probability P=n/m then.Change energy, measure the damage probability under this energy again, comprise that damage probability is 0 and 100% energy point.With the laser energy is transverse axis, and damage probability is the longitudinal axis, draws the distribution of damage probability and laser energy point, and again with fitting a straight line and be extrapolated to zero damage probability, pairing laser energy value is damage threshold.
Yet what have at present bigger dispute is the discriminant approach that whether damage for film, and promptly film what kind of variation takes place is just thought damage has been taken place.The method of differentiating the film damage at present mainly contains phase contrast microscopy, scattered light intensity detection method, optoacoustic mensuration, photo-thermal method etc., and various decision methods respectively have its superiority-inferiority.Wherein the phase contrast microscopy is a kind of detection method that international standard ISO11254 is recommended, it is that the film print of 100-150 Normaski microscope doubly after to laser irradiation observed that this method adopts enlargement ratio, whether damage to differentiate film, the subjectivity of this method is very strong, because the difference of a body vision, different testers may obtain different differentiation results, thereby cause the distortion of membrane laser damage threshold net result, and this method working strength is big, testing efficiency is low, is difficult to realize the robotization of machine system; The principle of scattered light intensity method is: when laser with certain angle oblique incidence on sample the time, if the reflection spot place on surface does not have fault, then reflected light will reflect by the rule that geometrical optics provides, if do not allow the reflection chief ray enter photelectric receiver, just almost has electric signal output.When the reflection spot place on surface rough, or produced damage after the laser radiation, then the considerable part energy can not be directed in the chief ray, and to produce scattering, corresponding photelectric receiver just has electric signal output, have or not electric signal output by surveying photelectric receiver, the variation that is actually exploring laser light radiation front and back electric signal just can judge whether illuminated laser spot is damaged, the method has been eliminated the interference of human factor, but this method is not high for the print surface smoothness, under the lower feelings of surface reflectivity, differentiate the phenomenon that has bigger sum of errors erroneous judgement.Simultaneously, when the thickness of film was little, the sensitivity of light intensity scattering method was not high yet.The total problem that above-mentioned these two kinds of methods also exist is: to the type requirements height of film, bad adaptability, have only and just can test and provide the damage result clear and definite certain thin films, otherwise will there be bigger error in test result or provide the result of erroneous judgement, influence is used, such as the contrast difference after highly reflecting films and the anti-reflection film damage, the error size that the phase contrast microscopy is differentiated is also different; Scattered light is then very not obvious for the less film of thickness, this has just required corresponding instrument to test, after clear and definite kind, could select suitable method and apparatus to test, this is difficult to accomplish beyond doubt, increased a large amount of testing costs, so the application of said method and equipment is subjected to serious restriction.
The utility model content:
The purpose of this utility model is to provide a kind of film and optical element laser damage threshold combined measuring device, have bigger error to overcome the test result that prior art exists, exist erroneous judgement may and to various membraneous material bad adaptability, so problem of poor practicability.
Technical scheme provided by the utility model is: a kind of film and optical element laser damage threshold combined measuring device, comprise test suite and processing components, wherein test suite comprises and is arranged at a Nd:YAG laser instrument on the primary optical axis, the switch baffle plate, attenuator, first beam splitter, condenser lens, second beam splitter and print platform, also comprise beam analysis instrument and energy meter, its special character is, also comprise laser-assisted in the test suite, photodiode array, convergent lens, photoelectric detector and CCD camera, wherein laser-assisted departs from the primary optical axis setting, its emission light beam is towards the print platform, described CCD camera is arranged at the zone between laser-assisted folded light beam and the primary optical axis, described photodiode array is positioned at the cone angle of print surface normal 30～60 degree, described convergent lens and photoelectric detector are positioned on the mirror reflection light beam of laser-assisted successively, the central region of convergent lens is coated with the extinction film, extinction film overlay area should be greater than 2 times～5 times of laser-assisted output facula diameter, and processing components comprises computing machine.
The locus of above-mentioned photoelectric detector in the plane of auxiliary beam and normal, and with auxiliary light with the normal be the symmetry.
Above-mentioned laser-assisted departs from primary optical axis 45 degree and is provided with; Above-mentioned photodiode array is positioned at print surface normal 60 degree positions.
Extinction film overlay area should be 2 times of laser-assisted output facula diameter on the above-mentioned convergent lens.
Compared with prior art, the utility model has the advantages that:
1, error is minimum and do not have erroneous judgement and take place: the utility model is with the scattered light intensity method and be improved to the make a video recording phase contrast microscopy of micro-diagnostic method of CCD and introduce simultaneously, learns from other's strong points to offset one's weaknesses, and further the plasma probe method is introduced in the utility model.When the mechanism of ion detection method is based on high power laser light and optical surface interaction ionization is constituted the material of optical surface, thereby produce free electron and ion, it is plasma, it is widely used in the spectral analysis field of film at present, whether the utility model produces plasma and glistens to judge whether to exist and damage when judging that the light activated element exploring laser light interacts with optical surface.Improve at the scattered light intensity method simultaneously: because no matter whether film surface damages, the light intensity of mirror reflection direction is all maximum, therefore handle at the middle part that will assemble lens for the influence of eliminating mirror reflection light, middle part light can not be passed through, and the scattered light around only allowing evenly sees through, (do not have scattered light when film does not damage, photoelectric device is no-output then so just can to use photoelectric receiving device accurately to detect scattered light; After the film damage scattered light is arranged, photoelectric device has output), can differentiate the phenomenon whether damage is arranged at optical surface.
2, adaptability is strong: membrane laser damage threshold measurement mechanism provided by the utility model both can intuitively have been seen the mechanism of laser and material, can see the damage pattern in real time, can detect film again and damage caused optical property variation.Be applicable to all kinds of optical elements and film surface, can be used for differentiating various types of film damages, the kind wide ranges of film, no matter be that reflectance coating, anti-reflection film, film, thick film all can be realized high-precision differentiation, have characteristics quick, accurate, comprehensive monitoring, can realize full-automatic process.
3, practical: Theoretical Calculation and analysis that the utility model process is detailed, and experimentize, the result proves that this system is not only feasible, and functional.Its stably measured speed is fast, can finish in 100s the acquisition of membrane laser damage threshold; Highly sensitive, good reproducibility; Can realize intellectuality, therefore in actual industrial production, have wide practical use.
Description of drawings:
Fig. 1 is the structural representation of the utility model device.
The 1-Nd:YAG laser instrument, 2-switch baffle plate, 3-attenuator, 4-first beam splitter, 5-condenser lens, 6-second beam splitter, the 7-laser-assisted, 8-photodiode array, 9-print platform, the 10-convergent lens, the 11-photoelectric detector, 12-CCD camera, 13-beam analysis instrument, the 14-energy meter, the 15-computing machine.
Embodiment:
Below in conjunction with accompanying drawing, the utility model is described further.
Referring to Fig. 1, a kind of film and optical element laser damage threshold combined measuring device comprise test suite and processing components.Wherein test suite comprises and is arranged at Nd:YAG laser instrument 1, a switch baffle plate 2 on the primary optical axis, attenuator 3, the first beam splitters 4, condenser lens 5, second beam splitter 6, laser-assisted 7, photodiode array 8, print platform 9, convergent lens 10, photoelectric detector 11, CCD camera 12, beam analysis instrument 13 and energy meter 14.Wherein laser-assisted 7 departs from primary optical axis 45 degree settings, and its emission light beam is towards print platform 9, and said CCD camera 12 is arranged at the zone between laser-assisted 7 folded light beams and the primary optical axis; Said photodiode array 8 is positioned at the cone angle of print surface normal 60 degree; Said convergent lens 10 and photoelectric detector 11 are positioned on the folded light beam of laser-assisted 7 successively, and the central region of convergent lens 10 is coated with the extinction film, and extinction film overlay area is 2 times of laser-assisted output facula diameter.Said processing components comprises computing machine 15.
The test process of said apparatus is, at first utilize secondary light source in the test suite (He-Ne laser instrument) to send laser irradiation at sample surfaces, after testing laser (Nd:YAG laser instrument) acts on sample surfaces and causes the film damage, CCD camera 12, photodiode array 8 and photoelectric detector 11 are tested simultaneously, whether test result adopts make a video recording micro-diagnostic method, scattered light intensity method and plasma flicker method of CCD to differentiate dissimilar film samples and damage, and discrimination standard is one and shows that damage promptly determines.
When optical thin film and element surface laser damage threshold were measured, differentiating accurately and fast whether film damage was the key that obtains correct result.The course of work of this device is: the high energy laser (wavelength 1064nm, pulsewidth 12ns, single pulse energy are 400mJ) that is sent by Nd:YAG laser instrument 1 passes through switch baffle plate 2, attenuator 3, first beam splitter 4 behind the condenser lens 5 and second beam splitter 6, is focused on the sample stage 9.In order to obtain the laser pulse of stable output, the output when adopting switch baffle plate 2 to shelter from laser works just to have begun.Attenuator 3 adopts a polarizer and the delustring mode that analyzer makes up, to obtain the laser energy of different-energy output.First beam splitter 4 and second beam splitter 6 adopt 100: 1 splitting ratio, make the luminous energy that obtains on energy meter and the beam analysis instrument less.The effect of condenser lens 5 is hot spot is converged to the hot spot of 0.5mm, acts on film surface to assemble high power density.
After being subjected to laser irradiation about film surface, whether damage, adopt photodiode array detector to receive the illuminance of plasma flash of light, can improve the sensitivity of response time and detection.Be mounted with one-level amplification, the micro-combinative optical system of secondary in the CCD imaging system, enlargement ratio is 150 times.The photoelectric detector 11 that is used to detect scattered light intensity is highly sensitive silicon photocell (or selenium cell), and its front has convergent lens 10, and effect is that convergence of rays with the Vernonia parishii Hook angle in detector surface, further improves the sensitivity of surveying.Be coated with the extinction film in the lens center,, thereby guarantee to detect scattered light in order to the reflected light of absorption from mirror image.Print platform 7 has two little accurate locomotive functions, realizes moving automatically of test process.Total system is controlled automatically by computing machine, and computing machine is at first analyzed the signal of photodiode array 8, photoelectric detector 11, and the photo that CCD is taken passes to display in real time simultaneously, and the result is carried out Flame Image Process and analysis.As long as arbitrary road determines the film damage in three kinds of signals, think that promptly damage has taken place sample.The locus of photoelectric detector 11 should be placed in the plane of auxiliary beam and normal, and with auxiliary light with the normal be the symmetry.
Total system adopts computing machine to control automatically, and at first, computing machine sends to laser instrument with instruction and starts working, treat working stability after, pulse laser is exported in the unlatching of gauge tap baffle plate.According to the attenuator deflection angle of demarcating, regulate the analyzer angle and meet the requirements with the laser energy that guarantees output.After pulse action, energy is taken into account under the beam analysis instrument real time record when the energy of prepulse and the size of hot spot, and feeds back to computing machine.If three kinds of detecting devices respond one of at least, and electric signal is transferred to computing machine, think that promptly damage has taken place film surface.After computing machine carries out information processing, send next laser pulse, repeat the measurement that above process is carried out next point, up to the measurement of finishing 100 points of 10 energy levels.
This process is realized automatically by computer control fully.Computer system is carried out linear fit and data processing to these points, finally obtains the laser damage threshold of film, and fitting result is presented on the touch-screen, can also export from printer.
In the utility model various method of discrimination adopted " with " logical relation, promptly a method determines damage and takes place to think promptly that film damages.Because the scattered light intensity method is apparent in view when film thickness is big, and plasma flash of light rule is also very effective to very thin film, though the microscopic observation method is not influenced by these, but the Flame Image Process complexity, to differentiate speed slow, therefore as long as scattered light intensity method or plasma flicker method have determined the film damage, then do not carry out Flame Image Process.With the combination of this several method, further expanded damage differentiation scope, realized the intellectuality of whole test system, integrated and automation process.
Claims (4)
1. film and optical element laser damage threshold combined measuring device, comprise test suite and processing components, wherein test suite comprises and is arranged at a Nd:YAG laser instrument (1) on the primary optical axis, switch baffle plate (2), attenuator (3), first beam splitter (4), condenser lens (5), second beam splitter (6) and print platform (9), also comprise beam analysis instrument (13) and energy meter (14), it is characterized in that: also comprise laser-assisted (7) in the test suite, photodiode array (8), convergent lens (10), photoelectric detector (11) and CCD camera (12), wherein laser-assisted (7) departs from the primary optical axis setting, its emission light beam is towards print platform (9), described CCD camera (12) is arranged at the zone between laser-assisted (7) folded light beam and the primary optical axis, described photodiode array (8) is positioned at the cone angle of print surface normal 30～60 degree, described convergent lens (10) and photoelectric detector (11) are positioned on the mirror reflection light beam of laser-assisted (7) successively, the central region of convergent lens (10) is coated with the extinction film, extinction film overlay area should be greater than 2 times～5 times of laser-assisted output facula diameter, and processing components comprises computing machine (15).
2. film according to claim 1 and optical element laser damage threshold combined measuring device is characterized in that: the locus of described photoelectric detector (11) in the plane of auxiliary beam and normal, and with auxiliary light with the normal be the symmetry.
3. film according to claim 1 and optical element laser damage threshold combined measuring device is characterized in that: described laser-assisted (7) departs from primary optical axis 45 degree and is provided with; Described photodiode array (8) is positioned at print surface normal 60 degree positions.
4. film according to claim 1 and optical element laser damage threshold combined measuring device is characterized in that: the last extinction film overlay area of described convergent lens (10) should be 2 times of laser-assisted output facula diameter.
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| CN2009202455716U CN201622245U (en) | 2009-12-02 | 2009-12-02 | Combined testing device for laser damage threshold of film and optical element |
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| CN2009202455716U CN201622245U (en) | 2009-12-02 | 2009-12-02 | Combined testing device for laser damage threshold of film and optical element |
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Granted publication date: 20101103 Termination date: 20111202 |