CN103018012B - A kind of measuring method of transmittance of optical element and device - Google Patents
A kind of measuring method of transmittance of optical element and device Download PDFInfo
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- CN103018012B CN103018012B CN201210524943.5A CN201210524943A CN103018012B CN 103018012 B CN103018012 B CN 103018012B CN 201210524943 A CN201210524943 A CN 201210524943A CN 103018012 B CN103018012 B CN 103018012B
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Abstract
The invention discloses a kind of transmittance of optical element measuring method and corresponding device.Wherein method comprises: the laser beam of specific wavelength is carried out beam splitting, obtains two bundle laser, makes it respectively by a reference path and an optical path; Optical path does not place optical element, measures the ENERGY E of the laser beam obtained by reference to light path
1, be E by the laser energy of optical path
2; Optical path is placed unit and learns element, measure the ENERGY E of the laser beam obtained by reference to light path
1', be E by the laser energy of optical path
3; According to formula T=E
1e
3/ E
1' E
2calculate the transmitance T of this optical element.Measuring method of the present invention and device adopt double light path aplanatism to measure, reach the object of real-time online measuring, effectively can eliminate energy of light source shake to the repeatability of measurement result and the impact on high transmission eyeglass transmitance mensuration, the transmittance of optical element for any ultraviolet pulse laser can be realized accurately and measured easily.
Description
Technical field
The invention belongs to laser measuring technique field, be specifically related to a kind of measuring method and device of transmittance of optical element, especially for measuring method and the device thereof of the optical mirror slip transmitance of macro-energy, Gao Zhongying ultraviolet pulse laser.
Background technology
Transmittance of optical element refers to that it is the important indicator of optical element Energy Transfer from the irradiation luminous flux of optical element outgoing and the ratio of irradiation luminous flux projecting this optical element.Because transmittance of optical element directly reflects the loss of its irradiation luminous flux and the quality of image quality, so be very important to the measurement of the transmitance of optical element.
The method of the laser transmittance of measurement optical element conventional is at present single channel mensuration.As shown in Figure 1, adopt the Solid State Laser light source of high stable, placing the power before and after optical element to be measured by measuring same position on outgoing laser optical path, obtaining transmittance of optical element to be measured by power ratio.
Such as, but single channel mensuration exists intrinsic shortcoming: for the 193nm uv excimer laser of Relative pulse energy jitter sigma=± 5%, if its average energy is E
avgoptical element is lens, and the true transmitance of lens to be measured is T
real, then pulsed laser energy real-time measurement values may be energy-minimum E
avg+ σ
min× E
avgto maximal value E
avg+ σ
max× E
avgbetween scope in some values.σ
minand σ
maxfor minimum value and the maximal value of energy deviation average factor sigma.The transmitance of single channel mensuration to these lens to be measured using this traditional measures.Such as, under a certain extreme case, recording energy when not adding lens to be measured is 0.95E
avg(or 1.05E
avg, 0.95E
avgit is Relative pulse energy jitter sigma
minσ when=-5%
max=5% laser energy shake lower limit E
avg+ σ
min× E
avg, 1.05E
avgthe higher limit E of the energy shake of laser when being Relative pulse energy shake
avg+ σ
max× E
avg), recording energy when adding lens to be measured is 1.05E
avg× T
real(or 0.95E
avg× T
real), measurement result is done ratio computing, the transmitance obtained is 1.105T
real(or 0.905T
real), namely truer transmitance by have an appointment 10% deviation, obviously homogeneous measurement result deviation is very not large, and measuring repeatability cannot ensure, does not meet and measures requirement.On the other hand, if the transmitance of known lens to be measured is greater than 1-| σ |, now, the change adding luminous energy before and after lens to be measured may be submerged in laser energy and shake among the luminous energy change that causes.Visible, use traditional transmittance of optical element measuring method to be difficult to measure the transmitance of optical element under ultraviolet pulse laser.
The another kind of method measuring transmittance of optical element is spectrophotometer method.The method adopts hydrogen arc lamp and halogen tungsten lamp light source, produces ultraviolet to infrared wide range light, by obtaining specific wavelength light after monochromator light splitting, utilizing light by spectral intensity change before and after determinand, obtaining the light transmission rate of determinand.Therefore, although this method can measure transmittance of optical element accurately, but because its light source is lower powered hydrogen arc lamp and halogen tungsten lamp, transmittance of optical element records all under low power scenarios, cannot differentiate the transmitance situation of optical element under the Long-Duration Exposure state of macro-energy, Gao Zhongying laser pulse.In order to solve a measurement difficult problem for the transmittance of optical element of ultraviolet pulse laser, need a kind of new transmittance of optical element measuring method of exploitation and device badly.
Summary of the invention
(1) technical matters that will solve
This patent quasi-solution certainly draws the problem of comparatively accurate transmitance value when the energy instability of light source own, design suitable light path and optimize measuring condition, can realize the high-acruracy survey of transmittance of optical element under macro-energy, Gao Zhongying condition.
(2) technical scheme
The present invention proposes a kind of transmittance of optical element measuring method, for measuring the transmitance of optical element for the laser beam of specific wavelength, the method comprises the steps: the laser beam of described specific wavelength to carry out beam splitting, obtain two bundle laser, make it respectively by a reference path and an optical path; Optical path does not place described optical element, measures the ENERGY E of the laser beam obtained by reference to light path
1, be E by the laser energy of optical path
2; Optical path is placed described unit and learns element, measure the ENERGY E of the laser beam obtained by reference to light path
1', be E by the laser energy of optical path
3; According to formula T=E
1e
3/ E
1' E
2calculate the transmitance T of this optical element.
The present invention also proposes a kind of transmittance of optical element measurement mechanism, for measuring the transmitance of optical element for the laser beam of specific wavelength, this device comprises the laser generator of the laser beam for generation of this specific wavelength, this transmittance of optical element measurement mechanism also comprises beam splitter, the first photo-detector and the second photo-detector, described beam splitter is used for the laser that described laser generator produces to be divided into two bundles, a branch ofly pass through an optical path, another bundle is by a reference path; First, second detector described is for measuring the energy of the laser beam projected on it; Wherein said optical element can be removably mounted on described optical path, and when this optical element is arranged on this optical path, described laser beam transmissive incides described first photo-detector after crossing this optical element to be measured, and the laser of described reference path is directly incident on the second photo-detector.
The present invention also proposes another kind of transmittance of optical element measurement mechanism, for measuring the transmitance of optical element for the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam with specific wavelength and the first repetition frequency, this transmittance of optical element measurement mechanism also comprises beam splitter, optical chopper, beam splitter, first lock-in amplifier, second lock-in amplifier and photo-detector, described laser generator is also for synchronously producing a repetition signal, and this repetition signal is sent to described optical chopper and the first lock-in amplifier, this repetition signal frequency equals laser pulse repetition frequency, described beam splitter is used for the laser that described laser generator produces to be divided into two bundles, a branch ofly passes through an optical path, and another bundle is by a reference path, described optical chopper is for receiving by the laser by described reference path of beam splitter outgoing, the repetition signal sent using described laser generator is as trigger pip, according to a modulation signal, chopping modulation is carried out to received laser, export the laser with the second repetition frequency, this frequency modulating signal equals the second repetition frequency, described beam splitter is used for the laser of described optical path and described reference path to merge respectively and be generated as two bundle mixed light beams measuring light direction and reference light direction, before inciding this beam splitter, optical path direction is orthogonal with reference path direction, measure light and reference light same position generation transmittance and reflectance on beam splitter, the measurement transmitted light of light and the reflected light of reference light synthesize a branch of mixed light beam, the transmitted light of the reflected light and reference light of measuring light then synthesizes another and restraints mixed light beam, this orthogonal outgoing beam splitter in two bundle mixed light beam same position places on beam splitter, it for measuring the energy signal of described mixed light beam, and is inputted first, second lock-in amplifier described by described photo-detector respectively, described first lock-in amplifier and the second lock-in amplifier are used for receiving respectively repetition signal that described laser generator sends and the modulation signal that described optical chopper sends, and respectively using the first repetition frequency and the second repetition frequency as its reference frequency, to detect that frequency is respectively the laser energy signal of described first repetition frequency and described second repetition frequency respectively from the energy signal of described mixed light beam, these two signals correspond respectively to the light intensity of measuring beam and reference beam, optical element to be measured can be removably mounted on optical path, and when this optical element is arranged on this optical path, described laser beam transmissive incides beam splitter after crossing this optical element to be measured.
(3) beneficial effect
The optical element measuring method that the present invention proposes and device thereof, double light path aplanatism is adopted to measure, reach the object of real-time online measuring, effectively eliminate energy of light source shake to the repeatability of measurement result and the impact on high transmission eyeglass transmitance mensuration, the transmittance of optical element for any ultraviolet pulse laser can be realized accurately and measured easily.
Accompanying drawing explanation
Fig. 1 is the structural representation of traditional transmittance of optical element measurement mechanism;
Fig. 2 is the structural representation of the first embodiment of the transmittance of optical element measurement mechanism for macro-energy, Gao Zhongying ultraviolet pulse laser that the present invention proposes;
Fig. 3 is the structural representation of the second embodiment of the transmittance of optical element measurement mechanism for macro-energy, Gao Zhongying ultraviolet pulse laser that the present invention proposes.
Embodiment
The object of the present invention is to provide a kind of accurate measurement method and device thereof of the transmittance of optical element for macro-energy, Gao Zhongying ultraviolet pulse laser.
According to an aspect of the present invention, propose a kind of transmittance of optical element measuring method, first the laser beam of described specific wavelength is carried out beam splitting by the method, obtains two bundle laser, makes it respectively by a reference path and an optical path.
Owing to there is the measuring error being difficult to eliminate between different photo-detectors, can there is the aging measurement result that causes and change in same photo-detector, and the splitting ratio of beam splitter is difficult to accurate control after working after a while.Therefore, when measuring the transmitance of optical element by this measurement mechanism, first on optical path, do not add optical element to be measured, energy calibration is carried out to reference path and optical path, obtains reference light ENERGY E
1with measurement luminous energy E
2laser energy ratio k, i.e. k=E
1/ E
2.K reflects the dichroism of whole light path, irrelevant with the change of LASER Light Source, the response condition of photo-detector etc.
Then, optical element to be measured is put into optical path, after making laser light optical element to be measured, incide the first photo-detector, obtain measurement luminous energy E now
3with reference light ENERGY E
1'.Because dichroism remains unchanged, measuring beam energy when supposing actual measurement when optical path does not add optical element is E
2', then according to equation k=E
1/ E
2=E
1'/E
2', calculate E
2'=E
1'/k, thus, the transmitance that can obtain lens to be measured is T=E
3/ (E
1'/k)=E
3/ [E
1'/(E
1/ E
2)]=E
1e
3/ E
1' E
2.
According to another aspect of the present invention, a kind of transmittance of optical element measurement mechanism is provided, it is kind of a double light path dual probe measurement mechanism, and this device comprises a laser generator, a beam splitter and two photo-detectors (first, second photo-detector).Laser generator is for generation of the laser of specific wavelength and energy, and produced laser is divided into two bundles by beam splitter, a branch of by optical path, and another bundle is by reference to light path.Optical element to be measured can be removably mounted on optical path, incides first photo-detector after crossing optical element to be measured to make the laser-transmitting on optical path; The laser of reference path is directly incident on the second photo-detector.
When measuring, first on optical path, not placing described optical element, measuring the ENERGY E of the laser beam obtained by reference to light path
1, be E by the laser energy of optical path
2; Optical path is placed described unit and learns element, measure the ENERGY E of the laser beam obtained by reference to light path
1', be E by the laser energy of optical path
3.According to formula T=E
1e
3/ E
1' E
2calculate the transmitance T of this optical element.
According to a further aspect of the invention, the transmittance of optical element measurement mechanism provided is a double light path list probe measurement device, and this device comprises a laser generator, a beam splitter, an optical chopper, beam splitter, two lock-in amplifiers (first, second lock-in amplifier) and a photo-detector.
Laser generator for generation of the laser of specific wavelength, repetition frequency and energy, and exports a repetition signal to optical chopper and the first lock-in amplifier, and the frequency of this repetition signal equals laser pulse repetition frequency.The repetition frequency of the initial laser that laser generator produces is referred to here as the first repetition frequency.
The laser that laser generator produces by beam splitter is divided into two bundles, a branch of by optical path, and another bundle is by reference to light path.Optical element to be measured can be removably mounted on optical path, after making crossing optical element to be measured by the laser-transmitting of optical path, incide beam splitter.
Optical chopper is for receiving by the laser by reference to light path of beam splitter outgoing, the repetition signal sent using described laser generator is as trigger pip, according to a modulation signal, chopping modulation is carried out to received laser, export the laser with the second repetition frequency, this second repetition frequency equals chopping modulation frequency.
Beam splitter is used for the laser by optical path and reference path to merge into mixed light beam.In one embodiment, before inciding beam splitter, optical path direction is orthogonal with reference path direction, measurement light and reference light are by same position generation transmittance and reflectance on beam splitter, the measurement transmitted light of light and the reflected light of reference light synthesize a branch of mixed light beam, the transmitted light of the reflected light and reference light of measuring light then synthesizes another and restraints mixed light beam, and this orthogonal outgoing beam splitter in two bundle mixed light beam same position places on beam splitter, wherein a branch of mixed light beam arrives photo-detector.
The repetition signal that laser generator sends and the modulation signal that optical chopper sends send into first respectively, second lock-in amplifier is as its reference frequency, simultaneously, the energy signal of the mixed light beam that photo-detector is recorded input respectively lock-in amplifier and signal input part, then first, second lock-in amplifier can detect from mixed light beam energy signal that frequency is respectively the signal of the frequency of described repetition signal and described modulation signal respectively, these two signals correspond respectively to the beam energy of optical path and reference path, thus measure while realizing two light path energy.
When measuring, similarly, first on optical path, not adding optical element to be measured, energy calibration is carried out to reference path and optical path, obtaining reference light ENERGY E (f
1) and measure light E (f
2), obtain ratio k=E (f
1)/E (f
2).Then optical element to be measured is put into optical path, obtains reference light ENERGY E ' (f
1) and measure light E ' (f
2).According to equation k=E (f
1)/E (f
2)=E ' (f
1)/E ' (f
2), calculate E ' (f
2)=E ' (f
1)/k, thus, can obtain transmittance of optical element to be measured is T=E ' (f
1)/(E ' (f
1)/k).
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
First embodiment
Fig. 2 is the structural representation of the first embodiment of the transmittance of optical element measurement mechanism for macro-energy, Gao Zhongying ultraviolet pulse laser that the present invention proposes.As shown in Figure 2, this device is a kind of double light path dual probe (photodetector) device, comprises LASER Light Source 100, optical attenuator 200, beam splitter 210, first aperture plate 300, second orifice plate 301, element under test clamping device 510, first photo-detector 600, second photo-detector 601 and computing machine 800.Optical element measured by the device of this embodiment is lens 500.
LASER Light Source 100 is ultraviolet pulse laser light source, for generation of ultraviolet pulse laser.Optical attenuator 200, for receiving the ultraviolet pulse laser of described LASER Light Source 100 outgoing, and by the threshold range of the energy hole of this ultraviolet pulse laser at the first photo-detector 600 and the second photo-detector 601.LASER Light Source 100 has repetition frequency f usually
1.
Beam splitter 210 is for being divided into two bundle laser by LASER Light Source 100 through the ultraviolet pulse laser that optical attenuator 200 sends: beam of laser is by inciding lens 500 to be measured after the first aperture plate 300, and the laser through lens 500 to be measured outgoing incides the first photo-detector 600; Another beam of laser is directly incident on the second photo-detector 601 after second orifice plate 301.At this, respectively the light path arriving the first photo-detector 600 through the first aperture plate 300, lens to be measured 500 is called optical path, the light path arriving the second photo-detector 601 through second orifice plate 301 is called reference path.
Described first aperture plate 300 and second orifice plate 301 are provided with the aperture passed through for laser, and this aperture, for regulating laser beam size, makes beam size close to the conventional light area area of lens 500 to be measured, to adapt to measure needs.In this embodiment, the pore size of the first aperture plate 300 and second orifice plate 301 can regulate, in the same size to ensure the laser beam after by aperture plate.
Described lens to be measured 500 are removably fixed in the optical path of described measurement mechanism by described element under test clamping device 510.
Described first photo-detector 600 and the second photo-detector 601 are for detecting the energy size of incident ultraviolet pulse laser on it, produce laser energy signal, it both can be photodetector head assembly, also can be thermoelectricity detecting head, the two can be different, but are preferably same type and surveying range is identical.
Described computing machine 800, for receiving the laser energy signal recorded by the first photo-detector 600 and the second photo-detector 601, obtains the transmitance of described lens to be measured 500 to described laser energy signal after processing.Computing machine 800 also can have other data processing equipment with data processing function to realize, as data acquisition process board.
As mentioned above, the ultraviolet pulse laser sent from LASER Light Source 100 is divided into two-beam after beam splitter 210 beam splitting, and wherein beam of laser arrives the first photo-detector 600 by optical path, and another beam of laser arrives the second photo-detector 601 by reference to light path.According to laser characteristics, optical path and reference path can regard approximate aplanatism as, and namely two bundle laser almost arrive the first photo-detector 600 and the second photo-detector 601 simultaneously.
When measuring, first determining the logical light size of lens 500 to be measured, regulating the first aperture plate 300 and the pore size of second orifice plate 301 as required, making the laser beam penetrated from aperture plate 300,301 have suitable size.Select suitable element under test clamping device according to lens 500 to be measured again, but lens 500 to be measured are not held on this element under test clamping device 510.The light path of calibrating installation, makes the center of each element in device and light path light axis coincide.Open the switch of LASER Light Source 100, read and record now the second photo-detector 601 reading E
1with the reading E of the first photo-detector 600
2, obtain ratio k=E
1/ E
2, close laser.
Then, lens 500 to be measured are held on described element under test clamping device 510, open the emission switch of LASER Light Source 100, read and record now the first photo-detector 600 reading E
3with the second photo-detector 601 reading E
1'.According to equation k=E
1/ E
2=E
1'/E
2', calculate E
2'=E
1'/k, thus, the transmitance that can obtain lens 500 to be measured is T=E
3/ (E
1'/k).
Second embodiment
Fig. 3 is the structural representation of the second embodiment of the transmittance of optical element measurement mechanism for macro-energy, Gao Zhongying ultraviolet pulse laser that the present invention proposes.As shown in Figure 3, this device is a kind of double light path list probe (photodetector) device, comprises LASER Light Source 100, optical attenuator 200, beam splitter 210, first aperture plate 300, second orifice plate 301, optical chopper 400, first catoptron 220, second catoptron 221, beam splitter 211, optical beam dump 230, element under test clamping device 510, photo-detector 600, first lock-in amplifier 700 and the second lock-in amplifier 701 and computing machine 800.Optical element measured by the device of this second embodiment is also lens 500.
LASER Light Source 100 is ultraviolet pulse laser light source, for generation of having the first repetition frequency f
1ultraviolet pulse laser.Meanwhile, LASER Light Source also produces a repetition signal F
1, and by this repetition signal F
1be sent to optical chopper 400 and the first lock-in amplifier 700, this repetition signal frequency equals laser pulse repetition frequency.Optical attenuator 200, for receiving the ultraviolet pulse laser of described LASER Light Source 100 outgoing, and by the threshold range of the energy hole of this ultraviolet pulse laser at photo-detector 600.
Beam splitter 210 is for being divided into two bundle laser by LASER Light Source 100 through the ultraviolet pulse laser that optical attenuator 200 sends: beam of laser is by inciding lens 500 to be measured after the first aperture plate 300, and the laser through lens 500 to be measured outgoing incides the first catoptron 220; Another beam of laser is directly incident on the second catoptron 221 after optical chopper, second orifice plate 301.At this, respectively the light path through the first aperture plate 300, lens to be measured 500 is called optical path, the light path through optical chopper 400, second orifice plate 301 is called reference path.
Described first aperture plate 300 for regulating laser beam size, makes beam size close to the conventional light area area of lens 500 to be measured with second orifice plate 301, to adapt to measure needs.In this embodiment, the pore size of the first aperture plate 300 and second orifice plate 301 can regulate, in the same size to ensure the laser beam after by aperture plate.
Described lens to be measured 500 are removably fixed in the optical path of described measurement mechanism by described element under test clamping device 510.
Described optical chopper 400 is for receiving by the laser by reference to light path of beam splitter 210 outgoing, and the repetition signal F that LASER Light Source 100 is sent
1as trigger pip, according to a modulation signal F
2chopping modulation is carried out to received laser, exports and there is the second repetition frequency f
2laser.This second repetition frequency equals its chopping modulation frequency.
Optical chopper 400 can be rotating light chopper, comprises parametric controller, motor head group is closed and trough of belt chopper wheel; Optical chopper 400 can be also electronic shutter, comprises parametric controller and fast door guard plate.Optical chopper 400 operationally, can regulate its chopping modulation frequency by parametric controller.In one embodiment, parametric controller has a control interface, by this control interface, one control signal is sent into the parametric controller of optical chopper 400, thus change chopping modulation frequency according to control signal, when light beam is by optical chopper, the light running into chopper wheel blade or shutter flapper closure is stopped, and runs into the fairing profit that space between chopper wheel blade or fast door guard plate open and pass through, thus the Annual distribution of light beam is changed.
Described first catoptron 220 and the second catoptron 221 are respectively used to the laser of optical path and the laser reflection of reference path to beam splitter 211.In this embodiment, as shown in Figure 3, the first catoptron 220 and the second catoptron 211 are all with 45° angle total-reflection laser light beam.
Described beam splitter 211 is for measuring light direction and reference light direction is synthesized a branch of respectively by the laser of optical path and reference path.Before inciding this beam splitter, optical path direction is orthogonal with reference path direction, measure light and reference light same position generation transmittance and reflectance on beam splitter, the measurement transmitted light of light and the reflected light of reference light synthesize a branch of mixed light beam, the transmitted light of the reflected light and reference light of measuring light then synthesizes another and restraints mixed light beam, this orthogonal outgoing beam splitter in two bundle mixed light beam same position places on beam splitter.
Described photo-detector 600, for receiving by the mixed light beam of the outgoing on beam splitter 211 direction, detects the energy size of this ultraviolet pulse laser, produces laser energy signal.Photo-detector 600 both can be photodetector head assembly, also can be thermoelectricity detecting head.
Described optical beam dump 230 is for collecting the light beam of the light path orthogonal directions of the mixed light beam received with photo-detector from beam splitter 211 outgoing.
Described first lock-in amplifier 700 and the second lock-in amplifier 701 obtain the laser energy signal of measuring beam and the laser energy signal of reference beam respectively for the laser energy signal detected according to photo-detector 600.The repetition signal F that LASER Light Source 100 sends
1the modulation signal F sent with optical chopper 400
2send into the first lock-in amplifier 700 and the second lock-in amplifier 701 respectively as its reference frequency, meanwhile, the laser energy signal of the mixed light beam recorded by photo-detector 600 inputs the signal input part of the first lock-in amplifier 700 and the second lock-in amplifier 701 respectively.Thus, the first lock-in amplifier 700 exports frequent rate of attaching most importance to is f
1laser energy signal intensity, thus detect the intensity of measuring beam; It is f that second lock-in amplifier 701 exports frequent rate of attaching most importance to
2laser energy signal intensity, thus detect the intensity of reference beam.
Described computing machine 800 for receiving described measurement laser energy signal and reference laser energy signal, for obtaining the transmitance of described lens to be measured 500 after processing two laser energy signals.
As mentioned above, the repetition frequency sent from LASER Light Source 100 is f
1gao Zhongying ultraviolet pulse laser after beam splitter 210 beam splitting, be divided into two-beam, wherein light beam by optical path arrive photo-detector 600.The repetition signal F that optical chopper 400 sends with the LASER Light Source 100 received
1as trigger pip, with modulating frequency f
2chopping modulation is carried out to the light by reference to light path.Reference laser after modulation arrives photo-detector 600 with measurement light after beam splitter 211 simultaneously.The repetition signal F that LASER Light Source 100 is sent
1(repetition signal F
1frequency and the repetition frequency f of laser pulse that sends of LASER Light Source 100
1equal) the modulation signal F that sends with optical chopper 400
2(modulation signal F
2frequency equal the chopping modulation frequency f of optical chopper 400
2) send into the first lock-in amplifier 700 and the second lock-in amplifier 701 respectively as its reference frequency, simultaneously, the mixed signal recorded by photo-detector 600 inputs the signal input part of the first lock-in amplifier 700 and the second lock-in amplifier 701 respectively, then two lock-in amplifiers 700,701 can detect that frequency is f respectively from mixed signal
1with f
2laser energy signal, these two signals correspond respectively to the light intensity of the laser of optical path and reference path, thus while realizing two light path energy measure.
When measuring, first determining the logical light size of lens 500 to be measured, regulating the first aperture plate 300 and the pore size of second orifice plate 301 as required, making the laser beam penetrated from aperture plate 300,301 have suitable size.Select suitable element under test clamping device according to lens 500 to be measured again, but lens 500 to be measured are not held on this element under test clamping device 510.The light path of calibrating installation, makes the center of each element in device and light path light axis coincide.
Then, open the emission switch of LASER Light Source 100, read and record this photo detector 600 reading E (f
1) and E (f
2), obtain ratio k=E (f
1)/E (f
2), close LASER Light Source 100.
Then lens 500 to be measured are held on described element under test clamping device 510, open the emission switch of LASER Light Source 100, read and record this photo detector 600 reading E ' (f
1) and E ' (f
2).According to equation k=E (f
1)/E (f
2)=E ' (f
1)/E ' (f
2), calculate E ' (f
2)=E ' (f
1)/k, thus, can obtain lens transmitance to be measured is T=E ' (f
1)/(E ' (f
1)/k).
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. a transmittance of optical element measurement mechanism, for measuring the transmitance of optical element for ultraviolet pulse laser light beam, this device comprises the laser generator for generation of the ultraviolet laser beams with the first repetition frequency, it is characterized in that, this transmittance of optical element measurement mechanism also comprises beam splitter, optical chopper, beam splitter, the first lock-in amplifier, the second lock-in amplifier and photo-detector
This repetition signal also for synchronously producing a repetition signal, and is sent to described optical chopper and the first lock-in amplifier by described laser generator, and this repetition signal frequency equals laser pulse repetition frequency;
Described beam splitter is used for the laser that described laser generator produces to be divided into two bundles, a branch ofly passes through an optical path, and another bundle is by a reference path;
Described optical chopper is for receiving by the laser by described reference path of beam splitter outgoing, the repetition signal sent using described laser generator is as trigger pip, according to a modulation signal, chopping modulation is carried out to received laser, export the laser with the second repetition frequency, this frequency modulating signal equals the second repetition frequency;
Described beam splitter is used for the laser of described optical path and described reference path to merge respectively and be generated as two bundle mixed light beams measuring light direction and reference light direction; Before inciding this beam splitter, measure light direction orthogonal with reference light direction, measure light and reference light same position generation transmittance and reflectance on beam splitter, the measurement transmitted light of light and the reflected light of reference light synthesize a branch of mixed light beam, the transmitted light of the reflected light and reference light of measuring light then synthesizes another and restraints mixed light beam, this orthogonal outgoing beam splitter in two bundle mixed light beam same position places on beam splitter;
It for measuring the energy signal of described mixed light beam, and is inputted first, second lock-in amplifier described by described photo-detector respectively;
Described first lock-in amplifier and the second lock-in amplifier are used for receiving respectively repetition signal that described laser generator sends and the modulation signal that described optical chopper sends, and respectively using the first repetition frequency and the second repetition frequency as its reference frequency, to detect that frequency is respectively the laser energy signal of described first repetition frequency and described second repetition frequency respectively from the energy signal of described mixed light beam, these two signals correspond respectively to the light intensity of measuring beam and reference beam;
Optical element to be measured can be removably mounted on optical path, and when this optical element to be measured is arranged on optical path, described laser beam transmissive incides beam splitter after crossing this optical element to be measured.
2. transmittance of optical element measurement mechanism as claimed in claim 1, it is characterized in that, described reference path and described optical path include aperture plate, described aperture plate is provided with the aperture passed through for laser, this aperture, for regulating laser beam size, makes beam size suitable with the light area area stating optical element.
3. transmittance of optical element measurement mechanism as claimed in claim 1, it is characterized in that, described optical element (500) is removably fixed in the optical path of described measurement mechanism by element under test clamping device (510).
4. transmittance of optical element measurement mechanism as claimed in claim 1, it is characterized in that, also comprise data processing equipment (800), it, for receiving the laser energy signal having described first repetition frequency He have described second repetition frequency, obtains the transmitance of described optical element (500) to these two laser energy signals after processing.
5. transmittance of optical element measurement mechanism as claimed in claim 1, is characterized in that, also comprise the first catoptron and the second catoptron, and it is respectively used to the laser of optical path and the laser reflection of reference path to beam splitter.
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Effective date of registration: 20160907 Address after: 100176, Yizhuang economic and Technological Development Zone, Beijing, Daxing District Hai Industrial Park, No. 10 building Patentee after: Beijing science and Technology Co., Ltd. Address before: 100094 Haidian District, Deng Zhuang Road, No. 9, Beijing Patentee before: Inst of Photoelectrics, C.A.S |