CN203132813U - Apparatus for testing transmittance of optical lens - Google Patents
Apparatus for testing transmittance of optical lens Download PDFInfo
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- CN203132813U CN203132813U CN 201220676269 CN201220676269U CN203132813U CN 203132813 U CN203132813 U CN 203132813U CN 201220676269 CN201220676269 CN 201220676269 CN 201220676269 U CN201220676269 U CN 201220676269U CN 203132813 U CN203132813 U CN 203132813U
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Abstract
The utility model discloses an apparatus for testing transmittance of an optical lens. The apparatus comprises a laser generator, a beam splitter, a first photo-detector and a second photo-detector, wherein the beam splitter divides the laser generated by the laser generator into two beams, of which one passes through a measuring optical path, and the other passes through a referential optical path, the first and second detectors measure energy of the laser beam projected on the first and second detectors, and the optical lens is detachably installed on the measuring optical path. When the optical lens is installed on the measuring optical path, the laser beam is incident on the first photo-detector after penetrating through the optical lens to be measured, and the laser on the referential optical path is directly incident on the second photo-detector. Double optical paths and equal light path measurement are employed in the apparatus, thereby realizing the purpose of real-time on-line measurement, and effectively eliminating influence of the light energy jitter on repeatability of the measuring result and determination of transmittance of highly penetrating lens.
Description
Technical field
The utility model belongs to the laser measuring technique field, is specifically related to a kind of device of measuring optical eyeglass transmitance, especially for the measurement mechanism of the optical mirror slip transmitance of macro-energy, high repetition ultraviolet pulse laser.
Background technology
The optical mirror slip transmitance refers to that from the irradiation luminous flux of optical mirror slip outgoing and the ratio of the irradiation luminous flux that projects this optical mirror slip it is the important indicator of optical mirror slip energy transmission.Because the optical mirror slip transmitance directly reflected the loss of its irradiation luminous flux and the quality of image quality, so be very important to the measurement of the transmitance of optical mirror slip.
The method of the laser transmittance of measurement optical mirror slip commonly used is the single channel mensuration at present.As shown in Figure 1, adopt the Solid State Laser light source of high stable, place the power of optical mirror slip to be measured front and back by same position on the measurement outgoing laser optical path, obtain optical mirror slip transmitance to be measured by power ratio.
Yet there is intrinsic shortcoming in the single channel mensuration, and for example: for the 193nm uv excimer laser of relative pulse energy jitter sigma=± 5%, establishing its average energy is E
AvgOptical mirror slip is lens, and the true transmitance of lens to be measured is T
Real, then the pulsed laser energy real-time measurement values may be energy-minimum E
Avg+ σ
Min* E
AvgTo maximal value E
Avg+ σ
Max* E
AvgBetween scope in some values.σ
MinAnd σ
MaxMinimum value and maximal value for energy deviation average factor sigma.Use this traditional single channel mensuration to come the transmitance of these lens to be measured is measured.For example, under a certain extreme case, recording energy when not adding lens to be measured is 0.95E
Avg(or 1.05E
Avg, 0.95E
AvgIt is relative pulse energy jitter sigma
Min=-5% o'clock σ
MaxThe lower limit E of=5% laser energy shake
Avg+ σ
Min* E
Avg, 1.05E
AvgThe higher limit E of the energy shake of the laser when being the shake of relative pulse energy
Avg+ σ
Max* E
Avg), recording energy when adding lens to be measured is 1.05E
Avg* T
Real(or 0.95E
Avg* T
Real), measurement result is done the ratio computing, the transmitance that obtains is 1.105T
Real(or 0.905T
Real), i.e. true transmitance 10% the deviation of will having an appointment, obviously homogeneous measurement result deviation is very not big, and measuring repeatability can't guarantee, does not satisfy and measures requirement.On the other hand, if the transmitance of known lens to be measured is greater than 1-| σ |, at this moment, the variation that adds lens to be measured front and back luminous energy may be submerged in laser energy and shake among the luminous energy variation that causes.As seen, use traditional optical mirror slip transmitance measuring method will be difficult to measure the transmitance of optical mirror slip under the ultraviolet pulse laser.
The another kind of method of measuring the optical mirror slip transmitance is spectrophotometer method.This method adopts hydrogen arc lamp and halogen tungsten lamp light source, produces ultraviolet to infrared wide range light, by obtaining specific wavelength light after the monochromator light splitting, utilizes light to pass through determinand front and back spectral intensity and changes, and obtains the light transmission rate of determinand.Therefore, though this method can be measured the optical mirror slip transmitance accurately, but because its light source is lower powered hydrogen arc lamp and halogen tungsten lamp, the optical mirror slip transmitance all records under the low-power situation, can't differentiate the transmitance situation of optical mirror slip under the Long-Duration Exposure state of macro-energy, high Repetition Frequency Laser pulse.For the measurement difficult problem of the optical mirror slip transmitance that solves ultraviolet pulse laser, need a kind of new optical mirror slip transmitance measurement mechanism of exploitation badly.
The utility model content
(1) technical matters that will solve
This patent quasi-solution certainly draws the problem of comparatively accurate transmitance value under the unsettled situation of the energy of light source own, design suitable light path and optimize measuring condition, can realize the high-acruracy survey of optical mirror slip transmitance under macro-energy, high repetition condition.
(2) technical scheme
The utility model also proposes a kind of device for measuring optical eyeglass transmitance, be used for measuring optical mirror slip for the transmitance of the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam of this specific wavelength, the device that should be used for measuring optical eyeglass transmitance also comprises beam splitter, first photo-detector and second photo-detector, described beam splitter is used for the laser that described laser generator produces is divided into two bundles, a branch ofly pass through one and measure light path, another bundle is by a reference path; Described first, second photo-detector is used for measuring the energy that throws the laser beam on it; Wherein said optical mirror slip can be removably mounted on the described measurement light path, and when this optical mirror slip is installed on this measurement light path, described laser beam transmissive incides described first photo-detector after crossing this optical mirror slip to be measured, and the laser of described reference path is directly incident on second photo-detector.
The utility model also proposes the another kind of device that is used for measuring optical eyeglass transmitance, be used for measuring optical mirror slip for the transmitance of the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam with specific wavelength and first repetition frequency, the device that should be used for measuring optical eyeglass transmitance also comprises beam splitter, optical chopper, beam splitter, first lock-in amplifier, second lock-in amplifier and photo-detector, described laser generator also is used for producing synchronously a repetition signal, and this repetition signal sent to described optical chopper and first lock-in amplifier, this repetition signal frequency equals laser pulse repetition frequency; Described beam splitter is used for the laser that described laser generator produces is divided into two bundles, a branch ofly passes through one and measures light path, and another bundle is by a reference path; Described optical chopper is used for receiving the laser that passes through described reference path by the beam splitter outgoing, the repetition signal that sends with described laser generator is as trigger pip, according to a modulation signal laser that receives is carried out chopping modulation, the laser that output has the second repetition frequency, this frequency modulating signal equals the second repetition frequency; Described beam splitter is used for the laser of described measurement light path and described reference path merged respectively in measuring light direction and reference light direction and is generated as two and restraints mixed light beams; Before inciding this beam splitter, measure optical path direction and reference path direction quadrature, measuring light and reference light be same position generation transmission and reflection on beam splitter, the transmitted light of measuring light and the reflected light of reference light synthesize a branch of mixed light beam, the reflected light of measuring light and the transmitted light of reference light be synthetic another bundle mixed light beam then, this two bundle mixed light beam quadrature outgoing beam splitter in same position place on beam splitter; Described photo-detector is used for measuring the energy signal of described mixed light beam, and it is imported described first, second lock-in amplifier respectively; Described first lock-in amplifier and second lock-in amplifier are used for receiving respectively the modulation signal that repetition signal that described laser generator sends and described optical chopper send, and respectively with the first repetition frequency and the second repetition frequency as its reference frequency, be respectively the laser energy signal of the described first repetition frequency and the described second repetition frequency to detect frequency respectively from the energy signal of described mixed light beam, these two signals correspond respectively to the light intensity of measuring beam and reference beam; Optical mirror slip to be measured can be removably mounted on to be measured on the light path, and when this optical mirror slip was installed on this measurement light path, described laser beam transmissive incided beam splitter after crossing this optical mirror slip to be measured.
According to a kind of embodiment of the present invention, include aperture plate in described reference path and described measurement light path, described aperture plate is provided with the aperture that passes through for laser, this aperture is used for regulating the laser beam size, makes that the light area area of beam size and described optical mirror slip is suitable.
According to a kind of embodiment of the present invention, the device that is used for measuring optical eyeglass transmitance also comprises data processing equipment, it is used for receiving the laser energy signal that is recorded by first photo-detector and second photo-detector, obtains the transmitance of described optical mirror slip after described laser energy signal is handled.
(3) beneficial effect
The optical lens measuring device that the utility model proposes, adopt the double light path aplanatism to measure, reached the purpose of real-time online measuring, eliminated the energy of light source shake effectively and seen through the influence that the eyeglass transmitance is measured to the repeatability of measurement result and to height, can the optical mirror slip transmitance that be used for any ultraviolet pulse laser have been realized accurately and measure easily.
Description of drawings
Fig. 1 is traditional structural representation that is used for the device of measuring optical eyeglass transmitance;
Fig. 2 is the structural representation of first embodiment of the device that is used for measuring optical eyeglass transmitance that is used for macro-energy, high repetition ultraviolet pulse laser that the utility model proposes;
Fig. 3 is the structural representation of second embodiment of the device that is used for measuring optical eyeglass transmitance that is used for macro-energy, high repetition ultraviolet pulse laser that the utility model proposes.
Embodiment
The purpose of this utility model is to provide a kind of device for accurately measuring of the optical mirror slip transmitance for macro-energy, high repetition ultraviolet pulse laser.
According to an aspect of the present utility model, a kind of optical mirror slip transmitance measurement mechanism is proposed, this device at first carries out beam splitting with the laser beam of described specific wavelength, obtains two bundle laser, makes it respectively by a reference path and a measurement light path.
Owing to there is the measuring error that is difficult to eliminate between the different photo-detectors, same photo-detector can take place to wear out to cause measurement result to change after working after a while, and the splitting ratio of beam splitter is difficult to accurate control.Therefore, when measuring the transmitance of optical mirror slip by this measurement mechanism, at first on the measurement light path, do not add optical mirror slip to be measured, reference path and measurement light path are carried out energy calibration, obtain the reference light energy E
1With the measuring light energy E
2The laser energy ratio k, i.e. k=E
1/ E
2K has reflected the dichroism of whole optical path, and is irrelevant with the variation of LASER Light Source, the response condition of photo-detector etc.
Then, optical mirror slip to be measured put into measure light path, incide first photo-detector after making laser see through optical mirror slip to be measured, obtain the measuring light energy E of this moment
3With the reference light energy E
1'.Because dichroism remains unchanged, the measuring beam energy when supposing actual measurement when the measurement light path does not add optical mirror slip is E
2', then according to equation k=E
1/ E
2=E
1'/E
2', calculate E
2'=E
1'/k, thus, the transmitance that can obtain lens to be measured is T=E
3/ (E
1'/k)=E
3/ [E
1'/(E
1/ E
2)]=E
1E
3/ E
1' E
2
According to another aspect of the present utility model, a kind of device for measuring optical eyeglass transmitance is provided, it is the two probe measurement devices of kind of double light path, and this device comprises a laser generator, beam splitter and two photo-detectors (first, second photo-detector).Laser generator is for generation of the laser of specific wavelength and energy, and beam splitter is divided into two bundles with the laser that produces, and a branch of by measuring light path, another bundle passes through reference path.Optical mirror slip to be measured can be removably mounted on to be measured on the light path, so that the laser-transmitting on the measurement light path incides first photo-detector after crossing optical mirror slip to be measured; The laser of reference path is directly incident on second photo-detector.
When measuring, on the measurement light path, do not place described optical mirror slip earlier, measure the energy E by the laser beam of reference path
1, be E by the laser energy of measuring light path
2Measuring the described unit of light path placement element, measure the energy E by the laser beam of reference path
1', be E by the laser energy of measuring light path
3According to formula T=E
1E
3/ E
1' E
2Calculate the transmitance T of this optical mirror slip.
According to another aspect of the present utility model, the device that is used for measuring optical eyeglass transmitance that provides is a double light path list probe measurement device, and this device comprises a laser generator, a beam splitter, an optical chopper, beam splitter, two lock-in amplifiers (first, second lock-in amplifier) and a photo-detector.
Laser generator is for generation of the laser of specific wavelength, repetition frequency and energy, and to optical chopper and repetition signal of first lock-in amplifier output, the frequency of this repetition signal equals laser pulse repetition frequency.The repetition frequency of the initial laser that laser generator produces is called the first repetition frequency at this.
The laser that beam splitter produces laser generator is divided into two bundles, and a branch of by measuring light path, another bundle passes through reference path.Optical mirror slip to be measured can be removably mounted on to be measured on the light path, so that incide beam splitter after crossing optical mirror slip to be measured by the laser-transmitting of measuring light path.
Optical chopper is used for receiving the laser that passes through reference path by the beam splitter outgoing, the repetition signal that sends with described laser generator is as trigger pip, according to a modulation signal laser that receives is carried out chopping modulation, the laser that output has the second repetition frequency, this second repetition frequency equals the chopping modulation frequency.
Beam splitter is used for and will merges into mixed light beam by the laser of measuring light path and reference path.In one embodiment, before inciding beam splitter, measure optical path direction and reference path direction quadrature, measuring light and reference light are by same position generation transmission and reflection on the beam splitter, the transmitted light of measuring light and the reflected light of reference light synthesize a branch of mixed light beam, the reflected light of measuring light and the transmitted light of reference light be synthetic another bundle mixed light beam then, this two bundle mixed light beam quadrature outgoing beam splitter in same position place on beam splitter, and wherein a branch of mixed light beam arrives photo-detector.
The modulation signal that the repetition signal that laser generator sends and optical chopper send sends into first respectively, second lock-in amplifier is as its reference frequency, simultaneously, the energy signal of the mixed light beam that photo-detector is recorded import respectively lock-in amplifier and signal input part, then first, second lock-in amplifier can detect the signal that frequency is respectively the frequency of described repetition signal and described modulation signal respectively from the mixed light beam energy signal, these two signals correspond respectively to the beam energy of measuring light path and reference path, thus measurement when realizing two light path energy.
When measuring, similarly, at first on the measurement light path, do not add optical mirror slip to be measured, reference path and measurement light path are carried out energy calibration, obtain reference light energy E (f
1) and measuring light E (f
2), obtain ratio k=E (f
1)/E (f
2).Then optical mirror slip to be measured is put into and is measured light path, obtain the reference light energy E ' (f
1) and measuring light E ' (f
2).According to equation k=E (f
1)/E (f
2)=E ' (f
1)/E ' (f
2), calculate E ' (f
2)=E ' (f
1)/k, thus, can obtain optical mirror slip transmitance to be measured is T=E ' (f
1)/(E ' (f
1)/k).
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
First embodiment
Fig. 2 is the structural representation of first embodiment of the device that is used for measuring optical eyeglass transmitance that is used for macro-energy, high repetition ultraviolet pulse laser that the utility model proposes.As shown in Figure 2, this device is the two probes of a kind of double light path (photodetector) devices, comprises LASER Light Source 100, optical attenuator 200, beam splitter 210, first aperture plate 300, second aperture plate 301, element under test clamping device 510, first photo-detector 600, second photo-detector 601 and computing machine 800.The measured optical mirror slip of the device of this embodiment is lens 500.
LASER Light Source 100 is the ultraviolet pulse laser light source, for generation of ultraviolet pulse laser.Optical attenuator 200 be used for to receive the ultraviolet pulse laser of described LASER Light Source 100 outgoing, and with the energy control of this ultraviolet pulse laser threshold range at first photo-detector 600 and second photo-detector 601.LASER Light Source 100 has the repetition frequency f usually
1
Beam splitter 210 is used for LASER Light Source 100 is divided into two bundle laser through the ultraviolet pulse laser that optical attenuator 200 sends: beam of laser incides lens 500 to be measured after by first aperture plate 300, sees through lens 500 emitting lasers to be measured and incides first photo-detector 600; Another Shu Jiguang is directly incident on second photo-detector 601 behind second aperture plate 301.At this, will be called the measurement light path through the light path that first aperture plate 300, lens to be measured 500 arrive first photo-detector 600 respectively, will be called reference path through the light path that second aperture plate 301 arrives second photo-detector 601.
Be provided with the aperture that passes through for laser on described first aperture plate 300 and second aperture plate 301, this aperture is used for regulating the laser beam size, makes beam size near the light area commonly used area of lens 500 to be measured, to adapt to the measurement needs.In this embodiment, the pore size of first aperture plate 300 and second aperture plate 301 can be regulated, and is consistent to guarantee by the size of the laser beam behind the aperture plate.
Described lens to be measured 500 removably are fixed in the measurement light path of described measurement mechanism by described element under test clamping device 510.
Described first photo-detector 600 and second photo-detector 601 are for detection of the energy size of the ultraviolet pulse laser of incident on it, produce the laser energy signal, it both can be photodetector head assembly, also can be thermoelectric detecting head, the two can be different, but are preferably between same type and measurement zone identical.
Described computing machine 800 is used for receiving the laser energy signal that is recorded by first photo-detector 600 and second photo-detector 601, obtains the transmitance of described lens to be measured 500 after described laser energy signal is handled.Computing machine 800 also can have other data processing equipment with data processing function to realize, as data acquisition process integrated circuit board.
As mentioned above, the ultraviolet pulse laser that sends from LASER Light Source 100 is divided into two-beam after beam splitter 210 beam splitting, and wherein beam of laser arrives first photo-detector 600 by measuring light path, and another Shu Jiguang arrives second photo-detector 601 by reference path.According to laser characteristics as can be known, measure light path and reference path and can regard approximate aplanatism as, namely two bundle laser almost arrive first photo-detector 600 and second photo-detector 601 simultaneously.
When measuring, at first determine the logical light size of lens 500 to be measured, regulate the pore size of first aperture plate 300 and second aperture plate 301 as required, make from aperture plate 300,301 laser beams that penetrate to have suitable size.Select suitable element under test clamping device according to lens 500 to be measured again, but lens 500 to be measured are not held on this element under test clamping device 510.The light path of calibrating installation coincides the center of each element in the device and light path light axis.Open the switch of LASER Light Source 100, read and record second photo-detector, 601 reading E this moment
1Reading E with first photo-detector 600
2, obtain ratio k=E
1/ E
2, close laser.
Then, lens 500 to be measured are held on described element under test clamping device 510, open the emission switch of LASER Light Source 100, read and record first photo-detector, 600 reading E this moment
3With second photo-detector, 601 reading E
1'.According to equation k=E
1/ E
2=E
1'/E
2', calculate E
2'=E
1'/k, thus, the transmitance that can obtain lens 500 to be measured is T=E
3/ (E
1'/k).
Second embodiment
Fig. 3 is the structural representation of second embodiment of the device that is used for measuring optical eyeglass transmitance that is used for macro-energy, high repetition ultraviolet pulse laser that the utility model proposes.As shown in Figure 3, this device is a kind of double light path list probe (photodetector) device, comprises LASER Light Source 100, optical attenuator 200, beam splitter 210, first aperture plate 300, second aperture plate 301, optical chopper 400, first catoptron 220, second catoptron 221, beam splitter 211, optical beam dump 230, element under test clamping device 510, photo-detector 600, first lock-in amplifier 700 and second lock-in amplifier 701 and computing machine 800.The measured optical mirror slip of the device of this second embodiment also is lens 500.
LASER Light Source 100 is the ultraviolet pulse laser light source, for generation of having the first repetition frequency f
1Ultraviolet pulse laser.Simultaneously, LASER Light Source also produces a repetition signal F
1, and with this repetition signal F
1Send to optical chopper 400 and first lock-in amplifier 700, this repetition signal frequency equals laser pulse repetition frequency.Optical attenuator 200 be used for to receive the ultraviolet pulse laser of described LASER Light Source 100 outgoing, and with the energy control of this ultraviolet pulse laser threshold range at photo-detector 600.
Beam splitter 210 is used for LASER Light Source 100 is divided into two bundle laser through the ultraviolet pulse laser that optical attenuator 200 sends: beam of laser incides lens 500 to be measured after by first aperture plate 300, sees through lens 500 emitting lasers to be measured and incides first catoptron 220; Another Shu Jiguang is directly incident on second catoptron 221 behind optical chopper, second aperture plate 301.At this, will be called the measurement light path through the light path of first aperture plate 300, lens to be measured 500 respectively, will be called reference path through the light path of optical chopper 400, second aperture plate 301.
Described first aperture plate 300 and second aperture plate 301 are used for regulating the laser beam size, make beam size near the light area commonly used area of lens 500 to be measured, to adapt to the measurement needs.In this embodiment, the pore size of first aperture plate 300 and second aperture plate 301 can be regulated, and is consistent to guarantee by the size of the laser beam behind the aperture plate.
Described lens to be measured 500 removably are fixed in the measurement light path of described measurement mechanism by described element under test clamping device 510.
Described optical chopper 400 is used for receiving the laser that passes through reference path by beam splitter 210 outgoing, and the repetition signal F that LASER Light Source 100 is sent
1As trigger pip, according to a modulation signal F
2The laser that receives is carried out chopping modulation, and output has the second repetition frequency f
2Laser.This second repetition frequency equals its chopping modulation frequency.
Optical chopper 400 can be the rotation optical chopper, comprises control platform, the combination of motor head and trough of belt chopper wheel; Optical chopper 400 can be electronic shutter also, comprises control platform and shutter baffle plate.Optical chopper 400 can be regulated its chopping modulation frequency by the control platform when work.In one embodiment, the control platform has a control interface, one control signal is sent into the control platform of optical chopper 400 by this control interface, thereby change the chopping modulation frequency according to control signal, when light beam passes through optical chopper, the light that runs into chopper wheel blade or shutter flapper closure is blocked, and passes through and run into the fairing profit that space between the chopper wheel blade or shutter baffle plate open, and changes thereby make time of light beam distribute.
Described first catoptron 220 and second catoptron 221 are respectively applied to reflex to beam splitter 211 with measuring the laser of light path and the laser of reference path.In this embodiment, as shown in Figure 3, first catoptron 220 and second catoptron 211 are all with 45 total-reflection laser light beam.
Described beam splitter 211 is synthetic a branch of respectively in measuring light direction and reference light direction for the laser that will measure light path and reference path.Before inciding this beam splitter, measure optical path direction and reference path direction quadrature, measuring light and reference light be same position generation transmission and reflection on beam splitter, the transmitted light of measuring light and the reflected light of reference light synthesize a branch of mixed light beam, the reflected light of measuring light and the transmitted light of reference light be synthetic another bundle mixed light beam then, this two bundle mixed light beam quadrature outgoing beam splitter in same position place on beam splitter.
Described photo-detector 600 is used for receiving the mixed light beam by the outgoing on the direction of beam splitter 211, detects the energy size of this ultraviolet pulse laser, produces the laser energy signal.Photo-detector 600 both can be photodetector head assembly, also can be thermoelectric detecting head.
Described optical beam dump 230 is used for collecting from the light beam of the light path orthogonal directions of the mixed light beam that receives with photo-detector of beam splitter 211 outgoing.
The laser energy signal that described first lock-in amplifier 700 and second lock-in amplifier 701 are used for detecting according to photo-detector 600 obtains the laser energy signal of measuring beam and the laser energy signal of reference beam respectively.The repetition signal F that LASER Light Source 100 is sent
1The modulation signal F that sends with optical chopper 400
2Send into first lock-in amplifier 700 and second lock-in amplifier 701 respectively as its reference frequency, simultaneously, the laser energy signal of the mixed light beam that photo-detector 600 is recorded is imported the signal input part of first lock-in amplifier 700 and second lock-in amplifier 701 respectively.Thus, to be output as the repetition frequency be f to first lock-in amplifier 700
1The laser energy signal intensity, thereby detect the intensity of measuring beam; It is f that second lock-in amplifier 701 is output as the repetition frequency
2The laser energy signal intensity, thereby detect the intensity of reference beam.
Described computing machine 800 is used for receiving described measurement laser energy signal and reference laser energy signal, for the transmitance that obtains described lens to be measured 500 after two laser energy signals are handled.
As mentioned above, the repetition frequency of sending from LASER Light Source 100 is f
1High repetition ultraviolet pulse laser after beam splitter 210 beam splitting, be divided into two-beam, wherein a branch of light arrives photo-detector 600 by measuring light path.The repetition signal F that optical chopper 400 sends with the LASER Light Source 100 that receives
1As trigger pip, with modulating frequency f
2Light by reference path is carried out chopping modulation.Reference laser after the modulation arrives photo-detector 600 simultaneously with measuring light behind beam splitter 211.The repetition signal F that LASER Light Source 100 is sent
1(repetition signal F
1Frequency and the repetition frequency f of the laser pulse that sends of LASER Light Source 100
1Equate) the modulation signal F that sends with optical chopper 400
2(modulation signal F
2Frequency equal the chopping modulation frequency f of optical chopper 400
2) send into first lock-in amplifier 700 and second lock-in amplifier 701 respectively as its reference frequency, simultaneously, the mixed signal that photo-detector 600 is recorded is imported the signal input part of first lock-in amplifier 700 and second lock-in amplifier 701 respectively, and then can to detect frequency respectively from mixed signal be f to two lock-in amplifiers 700,701
1With f
2The laser energy signal, these two signals correspond respectively to the light intensity of measuring light path and the laser of reference path, thus measurement when realizing two light path energy.
When measuring, at first determine the logical light size of lens 500 to be measured, regulate the pore size of first aperture plate 300 and second aperture plate 301 as required, make from aperture plate 300,301 laser beams that penetrate to have suitable size.Select suitable element under test clamping device according to lens 500 to be measured again, but lens 500 to be measured are not held on this element under test clamping device 510.The light path of calibrating installation coincides the center of each element in the device and light path light axis.
Then, open the emission switch of LASER Light Source 100, read and record photo-detector 600 reading E (f this moment
1) and E (f
2), obtain ratio k=E (f
1)/E (f
2), close LASER Light Source 100.
Then lens 500 to be measured are held on described element under test clamping device 510, open the emission switch of LASER Light Source 100, read and record photo-detector 600 reading E ' (f this moment
1) and E ' (f
2).According to equation k=E (f
1)/E (f
2)=E ' (f
1)/E ' (f
2), calculate E ' (f
2)=E ' (f
1)/k, thus, can obtain lens transmitance to be measured is T=E ' (f
1)/(E ' (f
1)/k).
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the above only is specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. device that is used for measuring optical eyeglass transmitance, be used for measuring optical mirror slip for the transmitance of the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam of this specific wavelength, it is characterized in that, the device that should be used for measuring optical eyeglass transmitance also comprises beam splitter, first photo-detector and second photo-detector
Described beam splitter is used for the laser that described laser generator produces is divided into two bundles, a branch ofly passes through one and measures light path, and another bundle is by a reference path;
Described first, second photo-detector is used for measuring the energy that throws the laser beam on it; Wherein
Described optical mirror slip can be removably mounted on the described measurement light path, and when this optical mirror slip was installed on this measurement light path, described laser beam transmissive incided described first photo-detector after crossing this optical mirror slip to be measured, and
The laser of described reference path is directly incident on second photo-detector.
2. the device for measuring optical eyeglass transmitance as claimed in claim 1, it is characterized in that, include aperture plate in described reference path and described measurement light path, described aperture plate is provided with the aperture that passes through for laser, this aperture is used for regulating the laser beam size, makes that the light area area of beam size and described optical mirror slip is suitable.
3. the device for measuring optical eyeglass transmitance as claimed in claim 1 is characterized in that, described optical mirror slip (500) removably is fixed in the described measurement light path by element under test clamping device (510).
4. the device for measuring optical eyeglass transmitance as claimed in claim 1, it is characterized in that, also comprise data processing equipment (800), it is used for receiving the laser energy signal that is recorded by first photo-detector (600) and second photo-detector (601), obtains the transmitance of described optical mirror slip (500) after described laser energy signal is handled.
5. device that is used for measuring optical eyeglass transmitance, be used for measuring optical mirror slip for the transmitance of the laser beam of specific wavelength, this device comprises the laser generator for generation of the laser beam with specific wavelength and first repetition frequency, it is characterized in that, the device that should be used for measuring optical eyeglass transmitance also comprises beam splitter, optical chopper, beam splitter, first lock-in amplifier, second lock-in amplifier and photo-detector
Described laser generator also is used for producing a repetition signal synchronously, and this repetition signal is sent to described optical chopper and first lock-in amplifier, and this repetition signal frequency equals laser pulse repetition frequency;
Described beam splitter is used for the laser that described laser generator produces is divided into two bundles, a branch ofly passes through one and measures light path, and another bundle is by a reference path;
Described optical chopper is used for receiving the laser that passes through described reference path by the beam splitter outgoing, the repetition signal that sends with described laser generator is as trigger pip, according to a modulation signal laser that receives is carried out chopping modulation, the laser that output has the second repetition frequency, this frequency modulating signal equals the second repetition frequency;
Described beam splitter is used for the laser of described measurement light path and described reference path merged respectively in measuring light direction and reference light direction and is generated as two and restraints mixed light beams; Before inciding this beam splitter, measure optical path direction and reference path direction quadrature, measuring light and reference light be same position generation transmission and reflection on beam splitter, the transmitted light of measuring light and the reflected light of reference light synthesize a branch of mixed light beam, the reflected light of measuring light and the transmitted light of reference light be synthetic another bundle mixed light beam then, this two bundle mixed light beam quadrature outgoing beam splitter in same position place on beam splitter;
Described photo-detector is used for measuring the energy signal of described mixed light beam, and it is imported described first, second lock-in amplifier respectively;
Described first lock-in amplifier and second lock-in amplifier are used for receiving respectively the modulation signal that repetition signal that described laser generator sends and described optical chopper send, and respectively with the first repetition frequency and the second repetition frequency as its reference frequency, be respectively the laser energy signal of the described first repetition frequency and the described second repetition frequency to detect frequency respectively from the energy signal of described mixed light beam, these two signals correspond respectively to the light intensity of measuring beam and reference beam;
Optical mirror slip to be measured can be removably mounted on to be measured on the light path, and when this optical mirror slip was installed on this measurement light path, described laser beam transmissive incided beam splitter after crossing this optical mirror slip to be measured.
6. the device for measuring optical eyeglass transmitance as claimed in claim 5, it is characterized in that, include aperture plate in described reference path and described measurement light path, described aperture plate is provided with the aperture that passes through for laser, this aperture is used for regulating the laser beam size, makes beam size suitable with the light area area of stating optical mirror slip.
7. the device for measuring optical eyeglass transmitance as claimed in claim 5 is characterized in that, described optical mirror slip (500) removably is fixed on by element under test clamping device (510) in the measurement light path of device of described measuring optical eyeglass transmitance.
8. the device for measuring optical eyeglass transmitance as claimed in claim 5, it is characterized in that, also comprise data processing equipment (800), it is used for receiving the described laser energy signal that has the first repetition frequency and have the described second repetition frequency, obtains the transmitance of described optical mirror slip (500) after these two laser energy signals are handled.
9. the device for measuring optical eyeglass transmitance as claimed in claim 5 is characterized in that, also comprises first catoptron and second catoptron, and it is respectively applied to reflex to beam splitter with measuring the laser of light path and the laser of reference path.
10. the device for measuring optical eyeglass transmitance as claimed in claim 9 is characterized in that, described first catoptron and second catoptron are all with 45 total-reflection laser light beam.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220676269 CN203132813U (en) | 2012-12-10 | 2012-12-10 | Apparatus for testing transmittance of optical lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220676269 CN203132813U (en) | 2012-12-10 | 2012-12-10 | Apparatus for testing transmittance of optical lens |
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| CN203132813U true CN203132813U (en) | 2013-08-14 |
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| CN 201220676269 Expired - Lifetime CN203132813U (en) | 2012-12-10 | 2012-12-10 | Apparatus for testing transmittance of optical lens |
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| CN105716756A (en) * | 2016-01-26 | 2016-06-29 | 河北工业大学 | Accurate measuring device for microstress spatial distribution of optical material |
| CN106352815A (en) * | 2016-09-18 | 2017-01-25 | 国防科学技术大学 | Laser beam measurement and direction control experiment system |
| CN109115730A (en) * | 2018-11-02 | 2019-01-01 | 天津津航技术物理研究所 | Spectral transmittance test macro and method based on tunable laser |
| CN109211920A (en) * | 2018-09-04 | 2019-01-15 | 东旭科技集团有限公司 | Ultraviolet transmissivity measurer and equipment for support plate glass |
| CN109443703A (en) * | 2018-08-21 | 2019-03-08 | 南京波长光电科技股份有限公司 | A kind of detection device and detection method of transmitance and reflectivity |
| CN113188774A (en) * | 2021-07-01 | 2021-07-30 | 南通环球光学仪器有限公司 | Optical lens detection jig and positioning method |
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2012
- 2012-12-10 CN CN 201220676269 patent/CN203132813U/en not_active Expired - Lifetime
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105716756A (en) * | 2016-01-26 | 2016-06-29 | 河北工业大学 | Accurate measuring device for microstress spatial distribution of optical material |
| CN105716756B (en) * | 2016-01-26 | 2019-07-09 | 河北工业大学 | A kind of device for accurately measuring of optical material microstress spatial distribution |
| CN106352815A (en) * | 2016-09-18 | 2017-01-25 | 国防科学技术大学 | Laser beam measurement and direction control experiment system |
| CN106352815B (en) * | 2016-09-18 | 2018-10-19 | 国防科学技术大学 | Laser beam measures and is directed toward control experimental system |
| US10473889B2 (en) | 2016-09-18 | 2019-11-12 | National University Of Defense Technology | Experimental system for laser beam measurement and steering control |
| CN109443703A (en) * | 2018-08-21 | 2019-03-08 | 南京波长光电科技股份有限公司 | A kind of detection device and detection method of transmitance and reflectivity |
| CN109211920A (en) * | 2018-09-04 | 2019-01-15 | 东旭科技集团有限公司 | Ultraviolet transmissivity measurer and equipment for support plate glass |
| CN109115730A (en) * | 2018-11-02 | 2019-01-01 | 天津津航技术物理研究所 | Spectral transmittance test macro and method based on tunable laser |
| CN113188774A (en) * | 2021-07-01 | 2021-07-30 | 南通环球光学仪器有限公司 | Optical lens detection jig and positioning method |
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Effective date of registration: 20200907 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences Effective date of registration: 20200907 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |
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