CN109115730A - Spectral transmittance test macro and method based on tunable laser - Google Patents
Spectral transmittance test macro and method based on tunable laser Download PDFInfo
- Publication number
- CN109115730A CN109115730A CN201811300636.2A CN201811300636A CN109115730A CN 109115730 A CN109115730 A CN 109115730A CN 201811300636 A CN201811300636 A CN 201811300636A CN 109115730 A CN109115730 A CN 109115730A
- Authority
- CN
- China
- Prior art keywords
- road
- sample
- detector
- tested
- spectral transmittance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Landscapes
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention belongs to field of optical measuring technologies, and in particular to a kind of spectral transmittance test macro and method based on tunable laser.The system includes that tunable laser tunable laser, beam splitter, diplopore chopper, optical attenuator, detector and total reflection mirror are several.The optical path of the system is divided into reference path by beam splitter and optical path two parts form, the single beam that tunable laser issues is divided through beam splitter by certain splitting ratio, respectively enter reference light paths and optical path, after being modulated by chopper, into reference cell and sample cell, it is most reflected afterwards through total reflective mirror, two-beam enters detector.The present invention is wider relative to traditional spectrophotometer application range, and measurement confidence level is also higher.
Description
Technical field
The invention belongs to field of optical measuring technologies, and in particular to a kind of spectral transmittance test based on tunable laser
System and method.
Background technique
For high-precision sample to be tested (4) technical applications, especially optical thin film element, to spectrum property test
Demand is as follows: in low-loss AR film Element Technology demand, it is desirable that the reflectivity or transmissivity of thin-film component reach 99.99% with
On；In light splitting and light filter film element, it is desirable that the spectral wavelength of thin-film component is accurately positioned, depth is ended, high steepness, high score
Color performance etc..Optical component transmitance, reflectivity are the important parameters of optical system, are had for overall system performance important
It influences, traditional spectrophotometer can no longer meet testing requirement in certain technical applications.
Conventionally employed spectrophotometer measurement component transmitance, since spectrophotometer is made using noncoherent tungsten halogen lamp
For light source, narrow linewidth output is obtained by grating beam splitting, there are shortcomings, are not able to satisfy practical application request: 1) directionality
Difference, there are cone angle effects, and when being used for angular-sensitive type component transmission measurement, measurement result accuracy is poor；2) beam size
Increase obviously with propagation distance, is not suitable for large scale component Transmissivity measurement；3) monochromatic brightness is low, measurement dynamic range
It is small, it is not suitable for the measurement of low transmission component.People are in the test of high reflectivity film element, with ultra-low loss optics
The development of coating technique, various low-loss test devices and instrument based on different test philosophies and method also promptly occur,
Main having time damped method, frequency sweep method and method of amplitude modulation etc..The time loss of attenuation method passive resonant cavity is
Finger laser light wave is incident on passive resonant cavity to be measured, when it is intracavitary set up stable laser generation after rapidly cut off light
The output intensity in source, resonant cavity will gradually decay, and the total losses of film are derived according to the attenuation equation of light intensity.For ultralow
The test of transmitance, also not mature commercial apparatus and disclosed standard method at present, therefore how to solve ultralow transmitance
Spectrum test there are still urgent problems.
In conclusion how to solve the low transmission of high-precision thin-film component under the demand of high-precision sample to be tested development
Rate spectrum test is the key that the current high-precision sample to be tested manufacturing technology development of limitation, and the antireflective of such as superelevation transmitance is thin
The light filter film element etc. that membrane component, wide spectrum are ended deeply, it is still urgent to the spectrum test demand of ultralow transmitance.
Summary of the invention
(1) technical problems to be solved
The technical problem to be solved by the present invention is how to propose a kind of based on tunable laser optical transmission spectra test system
System and method may be implemented optical thin film element of the transmitance lower than 0.1% in visible light wave range and test
(2) technical solution
In order to solve the above technical problems, the present invention provides a kind of spectral transmittance test macro based on tunable laser,
The spectral transmittance test macro includes: tunable laser 1, beam splitter 2, diplopore chopper 3, the first optical attenuation piece 6,
Two optical attenuation pieces 7, detector 8, the first total reflection mirror 5, the second total reflection mirror 9, third total reflection mirror 10, the 4th total reflection mirror
11, the 5th total reflection mirror 12, the 6th total reflection mirror 13, the 7th total reflection mirror 14；
Wherein, the single beam that the tunable laser 1 issues is divided into measurement road through beam splitter 2 and two beam of reference road swashs
Light, the reflected beams of beam splitter 2 are reference road, and transmitted light beam is measurement road；Two beam laser pass through the modulation of diplopore chopper 3,
Keep the repetition of two-way laser not identical；
The transmitted light beam for the beam splitter 2 modulated through diplopore chopper 3 is all-trans through sample to be tested 4, the first attenuator the 6, the 4th
Penetrate mirror 11, the 5th total reflection mirror 12 enters detector 8；
The reflected light for the beam splitter 2 modulated through diplopore chopper 3 is through the second total reflection mirror 9, third total reflection mirror 10, second
Attenuator 7, the 7th total reflection mirror 14, the 6th total reflection mirror 13 enter detector 8；
Detector 8 is used to the two-way laser entered being converted into electric signal；It can be by electric signal two using lock-in amplifier
The signal of road light extracts respectively, and the transmitance of sample to be tested 4 is calculated using the intensity rate of two ways of optical signals.
Wherein, the system also includes specimen rotating holders 15；
Sample to be tested 4 is placed on the specimen rotating holder 15, rotatable example platform is formed, with 6 structure of the first attenuator
At sample cell.
Wherein, the system also includes: compensation translation platform 16；
The compensation translation platform 16 is for carrying the 4th total reflection mirror 11.
Wherein, the beam splitter 2 is used to incident light being divided into the stable laser of two-way beam intensity ratio.
Wherein, it is set on the diplopore chopper 3 there are two hole, continuous light or quasi-continuous light is allowed to pass through the two holes, it can be with
By continuous light or quasi-continuous the light modulation light different at two-way repetition.
In addition, the present invention also provides a kind of spectral transmittance test method based on tunable laser, the method are based on
Above-mentioned spectral transmittance test macro is implemented, in the method:
In single angle fixed wave length transmission measurement: before being put into sample to be tested 4, opening tunable laser 1, adjust
Whole optical path makes to measure road and the laser on reference road enters detector 8, the output wavelength of tunable laser 1 is set as definite value, is transported
Row spectral transmittance test macro, detector 8 obtain the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as transmission
The hundred line value of reference of rate test process；
It is then placed in sample to be tested 4, sets the angle of specimen rotating holder 15, runs spectral transmittance test macro, detection
Device 8 obtains the light intensity on two-beam road, by detector 8 this measurement result divided by being put into the reference obtained before sample to be tested 4
Hundred line values, finally obtain the transmitance of sample to be tested 4.
Wherein, in single angle length scanning transmission measurement:
Before being put into sample to be tested 4, tunable laser 1 is opened, adjusts optical path, makes the laser for measuring road and reference road
Into detector 8, the output wavelength of tunable laser 1 is set as one section of wave-length coverage, runs spectral transmittance test macro,
Detector 8 obtains the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as the reference of spectral transmittance test macro
Hundred line values；
It is then placed in sample to be tested 4, setting specimen rotating holder 15 rotates angle, runs spectral transmittance test macro, visits
The light intensity that device 8 obtains two-beam road is surveyed, by detector 8 this measurement result divided by being put into the ginseng obtained before sample to be tested 4
Hundred line values are examined, the transmitance of sample to be tested 4 is finally obtained.
Wherein, in multi-angle Single wavelength transmission measurement:
Before being put into sample to be tested 4, tunable laser 1 is opened, adjusts optical path, makes the laser for measuring road and reference road
Into detector 8, the output wavelength of tunable laser 1 is arranged to definite value, runs spectral transmittance test macro, detector
8 obtain the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as the hundred line value of reference of spectral transmittance test macro；
It is then placed in sample to be tested 4, setting specimen rotating holder 15 rotates angle and rotary step, and operation spectral transmittance is surveyed
Test system, detector 8 obtain the light intensity on two-beam road, automatically by this measurement result divided by being put into before sample to be tested 4
Obtained hundred line value of reference, the reading that last detector 8 obtains are the transmitance of sample to be tested 4.
Wherein, in multi-angle length scanning transmission measurement:
Before being put into sample to be tested 4, tunable laser 1 is opened, adjusts optical path, makes the laser for measuring road and reference road
Into detector 8, the output wavelength of tunable laser 1 is set as one section of wave-length coverage, runs spectral transmittance test macro,
Detector 8 obtains the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as the reference of spectral transmittance test macro
Hundred line values；
It is then placed in sample to be tested 4, setting specimen rotating holder 15 rotates angle and rotary step, and operation spectral transmittance is surveyed
Test system, detector 8 obtain the light intensity on two-beam road, by detector 8 this measurement result divided by being put into before sample to be tested 4
Obtained hundred line value of reference, finally obtains the transmitance of sample to be tested 4.
Wherein, in thick sample transmission measurement:
Before being put into sample to be tested 4, tunable laser 1 is opened, adjusts optical path, makes the laser for measuring road and reference road
Into detector 8, the output wavelength of tunable laser 1 is set, runs spectral transmittance test macro, detector 8 obtains two
The light intensity of beam optical path, the hundred line value of reference that measurement road and reference arm beam intensity ratio are united as spectral transmittance test macro；
It is then placed in sample to be tested 4, sets incident angle, adjustment compensation translation platform 16 enters the laser for measuring road
Detector 8 runs spectral transmittance test macro, and detector 8 obtains the light intensity on two-beam road, by this measurement of detector 8
As a result divided by the hundred line value of reference obtained before sample to be tested 4 is put into, the transmitance of sample to be tested 4 is finally obtained.
(3) beneficial effect
The present invention provides a kind of spectrum test method of ultralow transmitance sample to be tested of visible light wave range, with prior art phase
Than the advantage of the invention is that application range is wider, measurement results reliability is higher, is especially adapted for use in angular-sensitive member device
The measurement of part, large scale component and extremely low transmitance component transmitance.
Detailed description of the invention
Fig. 1 is the light path principle figure of technical solution of the present invention.
Specific embodiment
To keep the purpose of the present invention, content and advantage clearer, with reference to the accompanying drawings and examples, to of the invention
Specific embodiment is described in further detail.
In order to solve the above technical problems, the present invention provides a kind of spectral transmittance test macro based on tunable laser,
As shown in Figure 1, the spectral transmittance test macro includes: tunable laser 1, beam splitter 2, diplopore chopper 3, the first light
Attenuator 6, the second optical attenuation piece 7, detector 8, the first total reflection mirror 5, the second total reflection mirror 9, third total reflection mirror the 10, the 4th
Total reflection mirror 11, the 5th total reflection mirror 12, the 6th total reflection mirror 13, the 7th total reflection mirror 14；
Wherein, the single beam that the tunable laser 1 issues is divided into measurement road through beam splitter 2 and two beam of reference road swashs
Light, the reflected beams of beam splitter 2 are reference road, and transmitted light beam is measurement road；Two beam laser pass through the modulation of diplopore chopper 3,
Keep the repetition of two-way laser not identical；
The transmitted light beam for the beam splitter 2 modulated through diplopore chopper 3 is all-trans through sample to be tested 4, the first attenuator the 6, the 4th
Penetrate mirror 11, the 5th total reflection mirror 12 enters detector 8；
The reflected light for the beam splitter 2 modulated through diplopore chopper 3 is through the second total reflection mirror 9, third total reflection mirror 10, second
Attenuator 7, the 7th total reflection mirror 14, the 6th total reflection mirror 13 enter detector 8；
Detector 8 is used to the two-way laser entered being converted into electric signal；It can be by electric signal two using lock-in amplifier
The signal of road light extracts respectively, and the transmitance of sample to be tested 4 is calculated using the intensity rate of two ways of optical signals.
Wherein, the system also includes specimen rotating holders 15；
Sample to be tested 4 is placed on the specimen rotating holder 15, rotatable example platform is formed, with 6 structure of the first attenuator
At sample cell.
Wherein, the system also includes: compensation translation platform 16；
The compensation translation platform 16 is for carrying the 4th total reflection mirror 11.
Wherein, the beam splitter 2 is used to incident light being divided into the stable laser of two-way beam intensity ratio.
Wherein, it is set on the diplopore chopper 3 there are two hole, continuous light or quasi-continuous light is allowed to pass through the two holes, it can be with
By continuous light or quasi-continuous the light modulation light different at two-way repetition.
In addition, the present invention also provides a kind of spectral transmittance test method based on tunable laser, the method are based on
Above-mentioned spectral transmittance test macro is implemented, in the method:
In single angle fixed wave length transmission measurement: before being put into sample to be tested 4, opening tunable laser 1, adjust
Whole optical path makes to measure road and the laser on reference road enters detector 8, the output wavelength of tunable laser 1 is set as definite value, is transported
Row spectral transmittance test macro, detector 8 obtain the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as transmission
The hundred line value of reference of rate test process；
It is then placed in sample to be tested 4, sets the angle of specimen rotating holder 15, runs spectral transmittance test macro, detection
Device 8 obtains the light intensity on two-beam road, by detector 8 this measurement result divided by being put into the reference obtained before sample to be tested 4
Hundred line values, finally obtain the transmitance of sample to be tested 4.
Wherein, in single angle length scanning transmission measurement:
Before being put into sample to be tested 4, tunable laser 1 is opened, adjusts optical path, makes the laser for measuring road and reference road
Into detector 8, the output wavelength of tunable laser 1 is set as one section of wave-length coverage, runs spectral transmittance test macro,
Detector 8 obtains the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as the reference of spectral transmittance test macro
Hundred line values；
It is then placed in sample to be tested 4, setting specimen rotating holder 15 rotates angle, runs spectral transmittance test macro, visits
The light intensity that device 8 obtains two-beam road is surveyed, by detector 8 this measurement result divided by being put into the ginseng obtained before sample to be tested 4
Hundred line values are examined, the transmitance of sample to be tested 4 is finally obtained.
Wherein, in multi-angle Single wavelength transmission measurement:
Before being put into sample to be tested 4, tunable laser 1 is opened, adjusts optical path, makes the laser for measuring road and reference road
Into detector 8, the output wavelength of tunable laser 1 is arranged to definite value, runs spectral transmittance test macro, detector
8 obtain the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as the hundred line value of reference of spectral transmittance test macro；
It is then placed in sample to be tested 4, setting specimen rotating holder 15 rotates angle and rotary step, and operation spectral transmittance is surveyed
Test system, detector 8 obtain the light intensity on two-beam road, automatically by this measurement result divided by being put into before sample to be tested 4
Obtained hundred line value of reference, the reading that last detector 8 obtains are the transmitance of sample to be tested 4.
Wherein, in multi-angle length scanning transmission measurement:
Before being put into sample to be tested 4, tunable laser 1 is opened, adjusts optical path, makes the laser for measuring road and reference road
Into detector 8, the output wavelength of tunable laser 1 is set as one section of wave-length coverage, runs spectral transmittance test macro,
Detector 8 obtains the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as the reference of spectral transmittance test macro
Hundred line values；
It is then placed in sample to be tested 4, setting specimen rotating holder 15 rotates angle and rotary step, and operation spectral transmittance is surveyed
Test system, detector 8 obtain the light intensity on two-beam road, by detector 8 this measurement result divided by being put into before sample to be tested 4
Obtained hundred line value of reference, finally obtains the transmitance of sample to be tested 4.
Wherein, in thick sample transmission measurement:
Before being put into sample to be tested 4, tunable laser 1 is opened, adjusts optical path, makes the laser for measuring road and reference road
Into detector 8, the output wavelength of tunable laser 1 is set, runs spectral transmittance test macro, detector 8 obtains two
The light intensity of beam optical path, the hundred line value of reference that measurement road and reference arm beam intensity ratio are united as spectral transmittance test macro；
It is then placed in sample to be tested 4, sets incident angle, adjustment compensation translation platform 16 enters the laser for measuring road
Detector 8 runs spectral transmittance test macro, and detector 8 obtains the light intensity on two-beam road, by this measurement of detector 8
As a result divided by the hundred line value of reference obtained before sample to be tested 4 is put into, the transmitance of sample to be tested 4 is finally obtained.
Embodiment 1
The present embodiment provides a kind of spectral transmittance test macro and method based on tunable laser, its object is to solve
Certainly high-precision low transmission, large scale, to the spectrum test problem of angle sensitivity sample to be tested (4).
It adopts the technical scheme that:
1) using tunable laser as light source, instead of traditional tungsten lamp or deuterium lamp.
It 2) is two-way laser by the single beam beam splitting issued by tunable laser using beam splitter, due to laser beam size
It is unobvious with distance change, so the distance between two-way light is pulled open, and then realize the survey to large scale component transmitance
Amount；
3) utilize diplopore chopper by the two-way Laser Modulation after beam splitting at the laser of different repetitions.By two-way low frequency so that
Direct current signal is handled after becoming high frequency ac signal, to avoid the influence of noise of the 1/f of low-frequency range.
4) optical signal for measuring road and reference arm two-way laser is converted into electric signal, the electric signal of acquisition using detector
It is transferred to lock-in amplifier, lock-in amplifier mentions the signal of two-way difference Repetition Frequency Laser in the electric signal of detector detection acquisition
It takes out, then carries out signal processing.
Embodiment 2
The present embodiment utilize 1 output wavelength continuous variable of tunable laser laser, through beam splitter 2 be divided into measurement road and
Two beam laser of reference road, the reflected light of beam splitter are the light source on reference road, and transmitted light is the light source for measuring road；Two beam laser are logical
The modulation of diplopore chopper 3 is crossed, keeps the repetition of two-way laser not identical；The two beam laser modulated through diplopore chopper are respectively through to be measured
Sample 4, attenuator 6, total reflection mirror 11,12 enter detector 8, and through total reflection mirror 9,10, attenuator 7, total reflection mirror 14,
13 enter detector 8, and two-way laser can be converted into electric signal by detector 8；It can be by electric signal two using lock-in amplifier
The signal of road light extracts respectively, and the transmitance of component to be measured is calculated using the intensity rate of two ways of optical signals.
Entire transmitance optical system platform divides upper layer and lower layer, and upper layer is optical path subsystem, and lower layer is control subsystem
System.Tunable laser 1, beam splitter 2, diplopore chopper 3, total reflective mirror 5,9,10 are mounted on the first rectangular cavities bottom plate, rotation
Sample transfer sample platform 15 and attenuator 6,7 are mounted on the second rectangular cavities bottom plate, compensation translation platform 16, total reflective mirror 11,12,13,
14 and photodetector 8 be located in third rectangular cavity.Cavity and cavity are connected by the circular hole on cavity wall, the sample of sample to be tested
Platform can be with 0 °~360 ° rotation real work ranges for 0 °~45 ° by the driving of stepper motor, and compensating platform is driven by stepper motor
Dynamic to carry out translation compensation, it is real by programmable software Labview that detector and lock-in amplifier obtain data and control system
It is existing.
Each subsystem is described in detail below.
1. tunable laser subsystem used in the present invention is by the groups such as power supply and control system, laser and its tuner module
At.The light source has following characteristics:
Tuning range is wide: 300-900nm (extends to 2400nm)；
The quasi-continuous output of Gao Zhongying；
Spatial model is good: the output of TEM00 mould；
It can realize to export laser by USB and control；
Optical path connection type: optical fiber.
2. optical path subsystem used in the present invention may be implemented to measuring system light intensity, polarization, sample measurement angle
And after beam splitting repetition etc. control, it is specific as follows:
(1) intensity control
Intensity control drives linear gradient density decay piece to realize by motorized precision translation stage, and attenuator different location is corresponding not
Same transmitance, transmitance variation range OD 0.1-4, highest attenuation ratio 104.
(2) Polarization Control
It is approximately isotropism that this system laser, which exports laser, it is necessary to the polarizer be added in the optical path and realize specific polarization
Orientation measurement considers that after compared with multimirror, there are fevering sodium effects for laser, in order to accurately measure the saturating of certain polarization direction
Rate or reflectivity are crossed, using adding Glan-Taylor prism to realize accurate Polarization Control at sample room and reference sample room entrance port.
(3) beam splitting component
Beam splitting chip is coated with the film layer of high-precision splitting ratio, which has accurately marked in advance in the splitting ratio of different wave length
It is fixed.Input laser energy, and then real-time monitoring incident laser energy can be extracted at a specific ratio using the beam splitting chip.
3. signal detection subsystem used in the present invention is for being acquired and handling to photosignal.Wherein mainly include
Detector, lock-in amplifier and associated control software.
(1) detector
In order to detect the optical signal of tunable laser sending, the present invention uses single point detector.Its spy with higher
Survey sensitivity, lower noise, the higher linearity and wider spectral response range.
(2) phase-lock technique device
Phase-lock technique device receives technology using cross-correlation, and the performance that instrument can be made to inhibit noise improves several quantity
Grade.In addition cooperate wave chopping technology, handled after low frequency being become high frequency ac signal down to direct current signal, so as to
Avoid the influence of noise of the 1/f of low-frequency range.
The present invention provides a kind of tests using tunable laser transmitance system testing low transmission sample to be tested
Method.
Four kinds of test functions may be implemented using the tunable laser transmitance system:
A, single angle fixed wave length transmission measurement: before being put into sample to be tested 4, opening tunable laser light source 1,
Optical path is adjusted, makes to measure road and the laser on reference road enters detector, the output wavelength of tunable laser 1 is set as definite value,
Transmission measurement system is run, detector 8 obtains the light intensity on measurement road and reference arm laser, and the ratio of the two is with reference to hundred lines
Value is then placed in sample to be tested 4, sets the angle of sample rotates platform, runs transmission measurement system, and detector 8 obtains measurement
The light intensity on road and reference arm laser, by the ratio of the two divided by the hundred line value of reference obtained before sample to be tested 4 is put into, finally
The numerical value arrived is the transmitance of sample to be tested 4.
B, single angle length scanning transmission measurement: before being put into sample to be tested 4, opening tunable laser light source 1,
Optical path is adjusted, makes to measure road and the laser on reference road enters detector, the output wavelength of tunable laser 1 is set into one section of wave
Long range runs transmission measurement system, and detector 8 obtains the light intensity on measurement road and reference arm laser, and the ratio of the two is ginseng
Hundred line values are examined, sample to be tested 4 is then placed in, setting sample rotates platform rotates angle, runs transmission measurement system, detector 8
The light intensity for obtaining measurement road and reference arm laser, hundred line of reference that the ratio of the two is obtained before divided by sample to be tested 4 is put into
Value, the numerical value finally obtained are the transmitance of sample to be tested 4.
C, multi-angle Single wavelength transmission measurement: before being put into sample to be tested 4, tunable laser light source 1 is opened, is adjusted
Whole optical path makes to measure road and the laser on reference road enters detector, the output wavelength of tunable laser is set as definite value, is run
Transmission measurement system, detector 8 obtain the light intensity on measurement road and reference arm laser, and the ratio of the two is with reference to hundred line values, so
After be put into sample to be tested, setting sample rotates platform rotation angle and rotary step run transmission measurement system, and detector 8 obtains
The light intensity for taking measurement road and reference arm laser, the hundred line value of reference that the ratio of the two is obtained before divided by sample to be tested 4 is put into,
The numerical value finally obtained is the transmitance of sample to be tested 4.
D, multi-angle length scanning transmission measurement: before being put into sample to be tested 4, opening tunable laser light source 1,
Optical path is adjusted, makes to measure road and the laser on reference road enters detector, the output wavelength of tunable laser is set into one section of wave
Long range runs transmission measurement system, and detector 8 obtains the light intensity on measurement road and reference arm laser, and the ratio of the two is ginseng
Hundred line values are examined, sample to be tested, setting sample rotates platform rotation angle and rotary step is then placed in, runs transmission measurement system
System, detector 8 obtain the light intensity on measurement road and reference arm laser, and the ratio of the two is obtained divided by before being put into sample to be tested 4
Hundred line value of reference, the numerical value finally obtained be sample to be tested 4 transmitance.
E, thick sample transmission measurement: before being put into sample to be tested 4, tunable laser light source 1 is opened, adjusts light
Road makes the laser for measuring road and reference road enter detector, runs transmission measurement system, and detector 8 obtains measurement road and ginseng
The light intensity of road laser is examined, the ratio of the two is to be then placed in sample to be tested with reference to hundred line values, sets incident angle, translation compensation
Platform makes the laser for measuring road enter detector, runs transmission measurement system, detector 8 obtains measurement road and reference arm swashs
The light intensity of light, by the ratio of the two divided by being put into the hundred line value of reference obtained before sample to be tested 4, the numerical value finally obtained for
The transmitance of sample 4.
Embodiment 3
The spectral transmittance test macro light path principle figure of the tunable laser of the present embodiment is as shown in Figure 1.
The optical path of transmission measurement system mainly includes tunable laser 1, beam splitter 2, chopper 3, to test sample
Product 4, attenuator 6,7 and detector 8.Sample to be tested 4 is placed on the electronic rotation sample 15 of 360 ° of Arbitrary Rotations
On, the angle of specimen rotating holder is controlled, realizes multiangular measurement；Reflecting mirror 11 is placed on a compensation translation platform 16, when
When sample to be tested is thicker, translatable mirror 11 compensates to be influenced caused by light translation；Two-way laser can be converted by detector 8
Electric signal；The signal of two-way light in electric signal can be extracted using lock-in amplifier respectively, utilize the strong of two ways of optical signals
Degree radiometer calculates the transmitance of component to be measured.
In tunable laser transmission measurement system, the function and relevant parameter of various pieces are as follows:
1. tunable laser used in the present invention is the light source of measuring system, tuning range is that 300-900nm is (expansible
To 2400nm), using the quasi-continuous output of Gao Zhongying, spatial model is the output of TEM00 mould；
2. it is approximately isotropism that this system laser, which exports laser, it is necessary to it is specific partially that polarizer realization be added in the optical path
Vibration orientation measurement, considers after compared with multimirror, there are fevering sodium effects for laser, in order to accurately measure certain polarization direction
Transmitance or reflectivity, using adding Glan-Taylor prism to realize at sample room and reference sample room entrance port, accurate polarization is controlled
System.
3. beam splitting chip is coated with the film layer of high-precision splitting ratio, which has accurately marked in advance in the splitting ratio of different wave length
It is fixed.Input laser energy, and then real-time monitoring incident laser energy can be extracted at a specific ratio using the beam splitting chip.
4. intensity control drives linear gradient density decay piece to realize by motorized precision translation stage, attenuator different location is corresponding
Different transmitances, transmitance variation range OD 0.1-4, highest attenuation ratio 104.
It include tunable laser, beam splitter, diplopore chopper in first rectangular cavities.Tunable laser issues laser
As light source, through beam splitter, the modulation of diplopore chopper generates the different laser of two beam certain proportion repetitions as measurement light and ginseng
Compare light.
Sample cell and reference cell of second rectangular cavities as tunable laser transmission measurement system and device rotate sample
Sample platform, attenuator are located in the second rectangular cavities, and specimen rotating holder, 0-360 degree arbitrarily rotates under the driving of electric rotary table,
Work is in 0-45 degree when actual measurement；Attenuator transmitance variation range OD 0.1-4, highest attenuation ratio 104.Measure light and ginseng
Than light after sample to be tested and attenuator, light intensity changes.
There are total reflection mirror, translation compensation platform, detector in third rectangular cavities, measures light and reference light is anti-through total reflective mirror
It injects into detector, detector calculates transmitance according to the light intensity of two-beam.When sample is thicker, there are optical path translation, meetings
Lead to facula position drift at detector, influence measurement accuracy, to overcome the problems, such as this, this system uses translation compensation method.
When light translation, translation stage is accordingly moved, influence caused by light translation can be compensated.
Above-mentioned beam splitter, diplopore chopper, specimen rotating holder, translation compensation platform own by accurately calibration
Rectangular cavities in be all made of black coating and reduce influence of the stray light to test result.
The software and hardware of control system: the whole control program of system is flat based on PC machine graphical programming software LabVIEW
It is write under platform, specimen rotating holder, attenuator, compensation translation platform includes parameter setting area in operation interface by stepper motor,
Display field and measurement result viewing area.Parameter setting area includes wavelength, and thickness of sample is decayed, pendulous frequency, incidence angle
Setting, when each measurement is shown in display field, the measurement result of data collector.Measurement result viewing area is shown
Each data carry out that treated result and caulocarpic average value.
To sum up, the invention belongs to field of optical measuring technologies, and in particular to a kind of spectral transmission based on tunable laser
Rate test macro and method.The system include tunable laser tunable laser, beam splitter, diplopore chopper, optical attenuator,
Detector and total reflection mirror are several.The optical path of the system is divided into reference path and optical path two parts group by beam splitter
At the single beam that tunable laser issues is divided through beam splitter by certain splitting ratio, respectively enters reference light paths and measurement light
Road after being modulated by chopper, into reference cell and sample cell, is most reflected through total reflective mirror, two-beam enters detector afterwards.This is
The sample to be tested of system is placed on the sample stage that can be arbitrarily rotated with 0-360 °, realizes multi-angle Transmissivity measurement, obtains sample
More comprehensive information；When sample is thicker, optical path translation will cause, when light translation, accordingly move translation stage, can compensate
Light influences caused by translating, and improves measurement accuracy.In addition, tunable laser good directionality, spectral radiant power are high (single
Colour brightness is high), dynamic range it is big, so influence very little of the distance to laser.So therefore of the invention relative to traditional spectrophotometric
It is wider to count application range, measurement confidence level is also higher.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvement and deformations can also be made, these improvement and deformations
Also it should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of spectral transmittance test macro based on tunable laser, which is characterized in that spectral transmittance test system
System includes: tunable laser (1), beam splitter (2), diplopore chopper (3), the first optical attenuation piece (6), the second optical attenuation piece
(7), detector (8), the first total reflection mirror (5), the second total reflection mirror (9), third total reflection mirror (10), the 4th total reflection mirror
(11), the 5th total reflection mirror (12), the 6th total reflection mirror (13), the 7th total reflection mirror (14)；
Wherein, the single beam that the tunable laser (1) issues is divided into measurement road through beam splitter (2) and two beam of reference road swashs
Light, the reflected beams of beam splitter (2) are reference road, and transmitted light beam is measurement road；Two beam laser pass through diplopore chopper (3) tune
System, keeps the repetition of two-way laser not identical；
The transmitted light beam of beam splitter (2) through diplopore chopper (3) modulation is through sample to be tested (4), the first attenuator (6), the 4th
Total reflection mirror (11), the 5th total reflection mirror (12) enter detector (8)；
Through diplopore chopper (3) modulation beam splitter (2) reflected light through the second total reflection mirror (9), third total reflection mirror (10),
Second attenuator (7), the 7th total reflection mirror (14), the 6th total reflection mirror (13) enter detector (8)；
Detector (8) is used to the two-way laser entered being converted into electric signal；It can be by two-way in electric signal using lock-in amplifier
The signal of light extracts respectively, and the transmitance of sample to be tested (4) is calculated using the intensity rate of two ways of optical signals.
2. the spectral transmittance test macro based on tunable laser as described in claim 1, which is characterized in that the system
Further include: specimen rotating holder (15)；
Sample to be tested (4) are placed on the specimen rotating holder (15), rotatable example platform are formed, with the first attenuator (6)
Constitute sample cell.
3. the spectral transmittance test macro based on tunable laser as described in claim 1, which is characterized in that the system
Further include: compensation translation platform (16)；
Compensation translation platform (16) is for carrying the 4th total reflection mirror (11).
4. the spectral transmittance test macro based on tunable laser as described in claim 1, which is characterized in that the beam splitting
Mirror (2) is used to incident light being divided into the stable laser of two-way beam intensity ratio.
5. the spectral transmittance test macro based on tunable laser as described in claim 1, which is characterized in that the diplopore
It is set on chopper (3) there are two hole, continuous light or quasi-continuous light is allowed to pass through the two holes, it can be by continuous light or quasi-continuous light tune
The different light of two-way repetition is made.
6. a kind of spectral transmittance test method based on tunable laser, which is characterized in that the method is based on wanting such as right
Spectral transmittance test macro described in asking 3 is implemented, in the method:
In single angle fixed wave length transmission measurement: before being put into sample to be tested (4), opening tunable laser (1), adjust
Whole optical path, makes to measure road and the laser on reference road enters detector (8), and the output wavelength of tunable laser (1) is set as fixed
Value runs spectral transmittance test macro, and detector (8) obtains the light intensity on two-beam road, by measurement road and reference arm beam intensity ratio
Hundred line value of reference as transmission measurement process；
It is then placed in sample to be tested (4), sets the angle of specimen rotating holder (15), run spectral transmittance test macro, detection
Device (8) obtains the light intensity on two-beam road, and by detector (8), this measurement result is obtained divided by being put into before sample to be tested (4)
Hundred line value of reference, finally obtain the transmitance of sample to be tested (4).
7. the spectral transmittance test method based on tunable laser as claimed in claim 6, which is characterized in that in single angle
When length scanning transmission measurement:
It before being put into sample to be tested (4), opens tunable laser (1), adjusts optical path, make the laser for measuring road and reference road
Into detector (8), the output wavelength of tunable laser (1) is set as one section of wave-length coverage, operation spectral transmittance test
System, detector (8) obtain the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as spectral transmittance test macro
Hundred line value of reference；
It is then placed in sample to be tested (4), setting specimen rotating holder (15) rotates angle, runs spectral transmittance test macro, visits
The light intensity that device (8) obtain two-beam road is surveyed, by detector (8) this measurement result divided by being put into before sample to be tested (4)
The hundred line value of reference arrived, finally obtains the transmitance of sample to be tested (4).
8. the spectral transmittance test method based on tunable laser as claimed in claim 7, which is characterized in that in multi-angle
When Single wavelength transmission measurement:
It before being put into sample to be tested (4), opens tunable laser (1), adjusts optical path, make the laser for measuring road and reference road
Into detector (8), the output wavelength of tunable laser (1) is arranged to definite value, runs spectral transmittance test macro, is visited
The light intensity that device (8) obtain two-beam road is surveyed, using measurement road and reference arm beam intensity ratio as the reference of spectral transmittance test macro
Hundred line values；
It is then placed in sample to be tested (4), setting specimen rotating holder (15) rotation angle and rotary step, operation spectral transmittance are surveyed
Test system, detector (8) obtain the light intensity on two-beam road, automatically by this measurement result divided by being put into sample to be tested (4)
The hundred line value of reference obtained before, the reading that last detector (8) obtains are the transmitance of sample to be tested (4).
9. the spectral transmittance test method based on tunable laser as claimed in claim 8, which is characterized in that in multi-angle
When length scanning transmission measurement:
It before being put into sample to be tested (4), opens tunable laser (1), adjusts optical path, make the laser for measuring road and reference road
Into detector (8), the output wavelength of tunable laser (1) is set as one section of wave-length coverage, operation spectral transmittance test
System, detector (8) obtain the light intensity on two-beam road, using measurement road and reference arm beam intensity ratio as spectral transmittance test macro
Hundred line value of reference；
It is then placed in sample to be tested (4), setting specimen rotating holder (15) rotation angle and rotary step, operation spectral transmittance are surveyed
Test system, detector (8) obtain the light intensity on two-beam road, by detector (8) this measurement result divided by being put into sample to be tested
(4) the hundred line value of reference obtained before, finally obtains the transmitance of sample to be tested (4).
10. the spectral transmittance test method based on tunable laser as claimed in claim 9, which is characterized in that in thick sample
When product transmission measurement:
It before being put into sample to be tested (4), opens tunable laser (1), adjusts optical path, make the laser for measuring road and reference road
Into detector (8), the output wavelength of tunable laser (1) is set, runs spectral transmittance test macro, detector (8)
The light intensity for obtaining two-beam road, hundred line of reference that measurement road and reference arm beam intensity ratio are united as spectral transmittance test macro
Value；
It is then placed in sample to be tested (4), sets incident angle, adjustment compensation translation platform (16) enters the laser for measuring road
Detector (8), run spectral transmittance test macro, detector (8) obtain two-beam road light intensity, by detector (8) this
Measurement result divided by the hundred line value of reference obtained before sample to be tested (4) is put into, finally obtain the transmission of sample to be tested (4)
Rate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811300636.2A CN109115730A (en) | 2018-11-02 | 2018-11-02 | Spectral transmittance test macro and method based on tunable laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811300636.2A CN109115730A (en) | 2018-11-02 | 2018-11-02 | Spectral transmittance test macro and method based on tunable laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109115730A true CN109115730A (en) | 2019-01-01 |
Family
ID=64853726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811300636.2A Pending CN109115730A (en) | 2018-11-02 | 2018-11-02 | Spectral transmittance test macro and method based on tunable laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109115730A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738162A (en) * | 2019-01-08 | 2019-05-10 | 中国科学院合肥物质科学研究院 | A kind of apparatus and method using angle tuning measurement F-P etalon parameter |
| CN110031434A (en) * | 2019-04-08 | 2019-07-19 | 大族激光科技产业集团股份有限公司 | Laser light transmission rate test device and its test method |
| CN110208776A (en) * | 2019-05-05 | 2019-09-06 | 中国科学院上海光学精密机械研究所 | The spectral measurement device and measurement method of narrow band filter |
| CN110514627A (en) * | 2019-08-26 | 2019-11-29 | 松山湖材料实验室 | Silicon wafer method for measuring reflectance and its measuring device |
| CN111044431A (en) * | 2019-12-28 | 2020-04-21 | 中国科学院长春光学精密机械与物理研究所 | Device and method for testing water vapor transmittance of film |
| CN111487190A (en) * | 2020-04-20 | 2020-08-04 | 中国科学院力学研究所 | Single-ion imaging detection method and device |
| CN111781120A (en) * | 2020-06-24 | 2020-10-16 | 吉林大学 | Testing method for thin film package |
| CN111829971A (en) * | 2020-08-10 | 2020-10-27 | 广州标旗光电科技发展股份有限公司 | Method for reducing measurement error of wide spectrum transmittance |
| CN112229605A (en) * | 2020-09-22 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Device and method for measuring reflectivity and transmissivity of optical component |
| CN114264453A (en) * | 2021-12-21 | 2022-04-01 | 电子科技大学 | Measuring method for improving reflectivity/transmissivity of high-precision optical element |
| CN114414502A (en) * | 2022-01-07 | 2022-04-29 | 中国工程物理研究院激光聚变研究中心 | Variable-angle transmittance measuring device, measuring system and measuring method |
| CN115615672A (en) * | 2022-10-08 | 2023-01-17 | 上海镭望光学科技有限公司 | Light spot generation device, optical element laser damage threshold testing device and method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4061918A (en) * | 1974-08-09 | 1977-12-06 | Horst Preier | Measurement of low concentration gases |
| CN101865826A (en) * | 2010-03-05 | 2010-10-20 | 新奥光伏能源有限公司 | Photometric method and device |
| CN201765108U (en) * | 2010-05-25 | 2011-03-16 | 冠捷显示科技（厦门）有限公司 | Novel light transmittance detector |
| CN102829959A (en) * | 2012-08-16 | 2012-12-19 | 京东方科技集团股份有限公司 | Testing device and method for light transmittance spectrum of light guide plates |
| CN203132813U (en) * | 2012-12-10 | 2013-08-14 | 中国科学院光电研究院 | Apparatus for testing transmittance of optical lens |
| CN103743720A (en) * | 2014-01-20 | 2014-04-23 | 厦门大学 | Confocal microscopic Raman spectrometer with angle resolution capacity |
| CN108051409A (en) * | 2017-11-30 | 2018-05-18 | 成都光明光电股份有限公司 | Transmissivity measurement method in glass spectrum |
-
2018
- 2018-11-02 CN CN201811300636.2A patent/CN109115730A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4061918A (en) * | 1974-08-09 | 1977-12-06 | Horst Preier | Measurement of low concentration gases |
| CN101865826A (en) * | 2010-03-05 | 2010-10-20 | 新奥光伏能源有限公司 | Photometric method and device |
| CN201765108U (en) * | 2010-05-25 | 2011-03-16 | 冠捷显示科技（厦门）有限公司 | Novel light transmittance detector |
| CN102829959A (en) * | 2012-08-16 | 2012-12-19 | 京东方科技集团股份有限公司 | Testing device and method for light transmittance spectrum of light guide plates |
| CN203132813U (en) * | 2012-12-10 | 2013-08-14 | 中国科学院光电研究院 | Apparatus for testing transmittance of optical lens |
| CN103743720A (en) * | 2014-01-20 | 2014-04-23 | 厦门大学 | Confocal microscopic Raman spectrometer with angle resolution capacity |
| CN108051409A (en) * | 2017-11-30 | 2018-05-18 | 成都光明光电股份有限公司 | Transmissivity measurement method in glass spectrum |
Non-Patent Citations (1)
| Title |
|---|
| 潘裕柏: "《稀土陶瓷材料》", 31 May 2016, 冶金工业出版社 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738162A (en) * | 2019-01-08 | 2019-05-10 | 中国科学院合肥物质科学研究院 | A kind of apparatus and method using angle tuning measurement F-P etalon parameter |
| CN110031434A (en) * | 2019-04-08 | 2019-07-19 | 大族激光科技产业集团股份有限公司 | Laser light transmission rate test device and its test method |
| CN110208776A (en) * | 2019-05-05 | 2019-09-06 | 中国科学院上海光学精密机械研究所 | The spectral measurement device and measurement method of narrow band filter |
| CN110514627B (en) * | 2019-08-26 | 2024-06-07 | 松山湖材料实验室 | Silicon wafer reflectivity measuring method and measuring device thereof |
| CN110514627A (en) * | 2019-08-26 | 2019-11-29 | 松山湖材料实验室 | Silicon wafer method for measuring reflectance and its measuring device |
| CN111044431A (en) * | 2019-12-28 | 2020-04-21 | 中国科学院长春光学精密机械与物理研究所 | Device and method for testing water vapor transmittance of film |
| CN111487190A (en) * | 2020-04-20 | 2020-08-04 | 中国科学院力学研究所 | Single-ion imaging detection method and device |
| CN111781120A (en) * | 2020-06-24 | 2020-10-16 | 吉林大学 | Testing method for thin film package |
| CN111829971A (en) * | 2020-08-10 | 2020-10-27 | 广州标旗光电科技发展股份有限公司 | Method for reducing measurement error of wide spectrum transmittance |
| CN112229605A (en) * | 2020-09-22 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Device and method for measuring reflectivity and transmissivity of optical component |
| CN114264453A (en) * | 2021-12-21 | 2022-04-01 | 电子科技大学 | Measuring method for improving reflectivity/transmissivity of high-precision optical element |
| CN114414502A (en) * | 2022-01-07 | 2022-04-29 | 中国工程物理研究院激光聚变研究中心 | Variable-angle transmittance measuring device, measuring system and measuring method |
| CN115615672A (en) * | 2022-10-08 | 2023-01-17 | 上海镭望光学科技有限公司 | Light spot generation device, optical element laser damage threshold testing device and method |
| CN115615672B (en) * | 2022-10-08 | 2024-02-06 | 上海镭望光学科技有限公司 | Light spot generating device, optical element laser damage threshold testing device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109115730A (en) | Spectral transmittance test macro and method based on tunable laser | |
| CN104390935A (en) | Device and method for testing nonlinear polarization coefficient and absorption coefficient at terahertz band | |
| CN105716756B (en) | A kind of device for accurately measuring of optical material microstress spatial distribution | |
| CN109115690B (en) | Terahertz time domain ellipsometer sensitive to real-time polarization and optical constant measurement method | |
| JPS6134442A (en) | Ellipsometry measuring method for inspecting physical characteristic of sample surface or surface film layer of sample and device thereof | |
| CN107063456B (en) | Time resolution diffraction efficiency of grating spectral measurement device in situ and method | |
| CN107462849B (en) | Device and method for measuring radio frequency line transmission factor based on atomic energy level | |
| CN109211842A (en) | A kind of Terahertz frequency range material reflection coefficient calibration measuring device and method | |
| CN108645601B (en) | A kind of the probe beam deflation device and its measurement method of optical microcavity | |
| CN105758625B (en) | A kind of device and method for the linear polarization sensitivity measuring remote sensing instrument | |
| TW201314194A (en) | Object characteristics measurement system | |
| CN103278507A (en) | Device and method for measuring elasto-optical coefficient of semiconductor material | |
| CN202793737U (en) | System for detecting reflectivity of plane mirror | |
| CN207741917U (en) | A kind of spectroscope measuring device that can accurately control incidence angle | |
| CN109115682A (en) | A kind of spectrometer and its detection method for taking into account liquid and solid content detection | |
| CN108931495A (en) | Terahertz time-domain spectroscopy synchronized measurement system and method | |
| CN205537514U (en) | Detection apparatus for be used for laser arc monitor that hangs down | |
| CN208847653U (en) | Real-time polarization sensitive terahertz time-domain ellipsometer | |
| CN109211843B (en) | Method and device for determining incident angle of terahertz wave reflection measurement system | |
| CN107525589B (en) | A kind of wavelength scaling system and method | |
| CN104807546A (en) | Measuring device used for research on target scattering and reflective polarization state | |
| CN102607806A (en) | System for detecting reflectivity of plane mirror | |
| CN106342212B (en) | High reflection mirror laser back scattering measurement mechanism | |
| CN216771491U (en) | Polarization resolution second harmonic testing device | |
| CN206557092U (en) | A kind of measurement apparatus of Refractive Index of Material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190101 |