CN101865826A - Photometric method and device - Google Patents
Photometric method and device Download PDFInfo
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- CN101865826A CN101865826A CN 201010118286 CN201010118286A CN101865826A CN 101865826 A CN101865826 A CN 101865826A CN 201010118286 CN201010118286 CN 201010118286 CN 201010118286 A CN201010118286 A CN 201010118286A CN 101865826 A CN101865826 A CN 101865826A
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Abstract
The invention discloses a spectrophotometer device for improving the accuracy of photometric measurement. The device comprises 2n reflectors, a sample and a detector; wherein n reflectors are arranged on a reference optical path, n reflectors are arranged on a sample optical path, wherein n is 0 or a positive integer; the sample is arranged on the sample optical path; the detector is used for receiving the light from the reference optical path and the light from the sample optical path, and detecting the light intensity value of the reference optical path and the sample optical path; the n reflectors on the reference optical path are used for enabling the light from the reference optical path to enter the detector after being reflected for n times; and the n reflectors and the sample on the sample optical path are used for enabling the light from the sample optical path to enter the detector after being reflected for n times and transmitted by the sample for once, or enabling the light form the sample optical path to enter the detector after being reflected for n times and reflected by the sample for once. The invention also discloses a method for realizing the device.
Description
Technical field
The present invention relates to optical field, particularly relate to photometric method and device.
Background technology
Spectrophotometer is the most frequently used equipment of measuring samples reflectivity, transmissivity and scattered power.At present, most spectrophotometers all adopt the twin-beam structure: a branch of through sample, a branch of through reference substance.The ratio of the light intensity of process sample and process reference substance is defined as film based system reflectivity or transmissivity or scattered power.Spectrophotometric is in respect of two cover light intensity detectors, and a cover is a standard detectors, and a cover is an integrating sphere.
In the prior art, when adopting standard detectors, sample is placed in the sample chamber, referring to the sample shown in 106 among Fig. 1, and the 101,102,103, the 104th, identical aluminium mirror, the 105th, the aluminium mirror identical with 101 also is simultaneously the reference substance with respect to sample.Because the reflectivity of aluminium mirror is not 100%,, it is defined as the relative reflectance of sample to reference substance so test result is the ratio of the light intensity value of sample 106 and aluminium mirror 105.
When adopting integrating sphere, the sample laying method is referring to Fig. 2 and shown in Figure 3, and Fig. 2 is a transmission mode, and Fig. 3 is a reflective-mode.Among Fig. 2 the 201,202,203,204, the 205th, identical aluminium mirror, the 206th, sample, the 207th, blank, 205 is the reference substance with respect to sample.Among Fig. 3 the 301,302,303,304, the 305th, identical aluminium mirror, the 306th, sample, 305 is the reference substance with respect to sample.When adopting integrating sphere as detecting device, transmission still is that reflection measurement all needs the aluminium mirror to do reference, and therefore, test result still is the relative reflectance of sample to the aluminium mirror.
To sum up, reflectivity and transmissivity that reflectivity that standard detectors is measured and integrating sphere are measured all are sample relative reflectance and relative transmittances with respect to the aluminium mirror, rather than the real reflectance of sample self, therefore, measurement result can not accurately reflect the optical property of sample.
Summary of the invention
The embodiment of the invention provides a kind of photometric method and device, is used to improve the accuracy of photometric measurement.
A kind of photometric method may further comprise the steps:
Obtain the light intensity value of reference light paths; Wherein, there is not reference substance on the reference light paths with respect to sample.
Obtain the light intensity value of sample light path;
The ratio of the light intensity value of the light intensity value of light path and reference light paths per sample obtains the reflectivity or the transmissivity of sample.
A kind of spectrophotometric counter device comprises:
2n catoptron, wherein n catoptron is positioned at reference light paths, and n catoptron is positioned at the sample light path, and wherein n is 0 or positive integer;
Detecting device is used to receive light on the reference light paths and the light on the sample light path;
When n was 0, the light on the reference light paths was directly injected detecting device; When n is positive integer, enter detecting device behind the light process n secondary reflection on the reference light paths;
When n was 0, the light on the sample light path was directly injected detecting device through after the transmission of sample, and perhaps the light on the sample light path is directly injected detecting device through after the reflection of sample; When n was positive integer, the light on the sample light path entered detecting device through the n secondary reflection of catoptron and through after the transmission of sample, and perhaps the light on the sample light path enters detecting device through the n secondary reflection of catoptron and through after the primary event of sample.
The embodiment of the invention on reference light paths cancellation with respect to the reference substance of sample, and the position and the quantity of catoptron have been changed, thereby improved light path, make that the ratio of light intensity value of the light intensity value of sample light path and reference light paths is the absolute reflectance or the absolute transmissivity of sample self, eliminate the influence of reference substance, improved the accuracy of photometric measurement.
Description of drawings
Fig. 1 is the synoptic diagram that passes through standard detectors measuring samples reflectivity in the prior art;
Fig. 2 is the synoptic diagram that passes through integrating sphere measuring samples transmissivity in the prior art;
Fig. 3 is the synoptic diagram that passes through integrating sphere measuring samples reflectivity in the prior art;
Fig. 4 is the spectrum synoptic diagram during energy spectrometer in the embodiment of the invention;
Fig. 5 is the method flow diagram of photometric measurement in the embodiment of the invention;
Fig. 6 A is the schematic appearance of sample chamber module and sensing chamber's module in the embodiment of the invention;
Fig. 6 B is the synoptic diagram of the sample chamber module of no-mirror when passing through standard detectors measuring samples transmissivity in the embodiment of the invention;
Fig. 7 is the synoptic diagram of sensing chamber's module in the embodiment of the invention;
Fig. 8 is for there being the synoptic diagram of the sample chamber module of even number catoptron in the embodiment of the invention during by standard detectors measuring samples transmissivity;
Fig. 9 is for there being the synoptic diagram of the sample chamber module of even number catoptron in the embodiment of the invention during by standard detectors measuring samples reflectivity;
Figure 10 is for there being the synoptic diagram of the sample chamber module of odd number catoptron in the embodiment of the invention during by integrating sphere measuring samples transmissivity;
Figure 11 is for there being the synoptic diagram of the sample chamber module of even number catoptron in the embodiment of the invention during by integrating sphere measuring samples transmissivity;
Figure 12 is for there being the synoptic diagram of the sample chamber module of odd number catoptron in the embodiment of the invention during by integrating sphere measuring samples reflectivity;
Figure 13 is for there being the synoptic diagram of the sample chamber module of even number catoptron in the embodiment of the invention during by integrating sphere measuring samples reflectivity.
Embodiment
The embodiment of the invention has reduced the reference substance with respect to sample on reference light paths, and the position and the quantity of catoptron have been changed, thereby improved light path, make that the ratio of light intensity value of the light intensity value of sample light path and reference light paths is the absolute reflectance or the absolute transmissivity of sample self, improved the accuracy of photometric measurement.
According to law of conservation of energy, R+T+S+A=1, R, T, S, A are respectively the reflectivity of light in the film based system, transmissivity, scattered power and absorptivity.Yet, in the actual measurement process, often find that measurement result obviously runs counter to above-mentioned rule.Fig. 4 is reflectance spectrum (line 401), the transmitted spectrum (line 402) of the a-Si film for preparing on substrate of glass, and reflectivity and transmissivity sum (line 403), and transverse axis is represented wavelength, and the longitudinal axis is represented reflectivity or transmissivity.As can be seen from Figure 4, greater than 100%, between 100%～110%, this is because the reflectivity that test obtains is the relative reflectance of sample with respect to the aluminium mirror, greater than the actual reflectance of sample at a plurality of wave bands for reflection and transmission sum.
Referring to Fig. 5, the method flow of photometric measurement is as follows in the present embodiment:
Step 501: the light intensity value that obtains reference light paths.Wherein, there is not reference substance on the reference light paths with respect to sample.
Step 502: the light intensity value that obtains the sample light path.
Step 503: the ratio of the light intensity value of the light intensity value of light path and reference light paths per sample obtains the reflectivity or the transmissivity of sample.
This method can realize that inner structure and the function to the spectrophotometer device is introduced below by the spectrophotometric counter device.
The spectrophotometric counter device comprises detecting device and 2n catoptron.
2n catoptron, wherein n catoptron is positioned at reference light paths, and n catoptron is positioned at the sample light path, and wherein n is 0 or positive integer.
Sample is positioned at the sample light path.
Detecting device is used to receive light on the reference light paths and the light on the sample light path.
N on a reference light paths catoptron enters detecting device after being used to make the light on the reference light paths to pass through the n secondary reflection.Light on the reference light paths is except process air and catoptron, without any other medium.
N on a sample light path catoptron and sample are used to make the light process n secondary reflection on the sample light path and once enter detecting device through after the transmission of sample, perhaps make the light process n secondary reflection on the sample light path and once enter detecting device after the process reflection of sample.Light on the sample light path is except process sample, air and catoptron, without any other medium.
Can adopt xenon lamp and metal halid lamp as light source, the light that light source sends becomes directional light through concavees lens, become two monochromic beams then after filtration after mating plate, monochromator and the beam splitting system along rectilinear propagation, become the monochromatic light that two bundles are parallel to each other by direct reflection at last, a branch of light source as reference light paths, a branch of light source as the sample light path.This two monochromic beam has identical wavelength, and its wavelength coverage is generally 190nm-3300nm, can select the wavelength of needs by Control Software, or set wavelength coverage, uniformly-spaced scans, and sweep spacing is usually greater than 0.1nm.
Detecting device is a kind of photoelectric commutator, can be specially standard detectors B or integrating sphere J etc.When detecting device was standard detectors, described sample was arranged in the sample chamber module of spectrophotometric counter device; When detecting device was integrating sphere, described sample was arranged in sensing chamber's module of spectrophotometric counter device.Standard detectors in the present embodiment comprises the photomultiplier of silicon and/or the photomultiplier of vulcanized lead etc.
For the accuracy that guarantees to detect, reference light paths and sample light path are injected same detecting device.Inject same detecting device for the ease of reference light paths and sample light path, and reduce light path as far as possible, reference light paths and sample light path penetrate from the same side of sample chamber module, and inject the detecting device in sensing chamber's module.Referring to the appearance assumption diagram of the sample chamber module shown in Fig. 6 A and sensing chamber's module, 601,602,603,604 is circular holes of four about 15mm of diameter.601 enter the sample chamber module from the reference light of beam splitting system outgoing from the entrance port, from exit portal 603 outgoing, another monochromic beam in parallel (being the light on the sample light path) 602 enters the sample chamber from the entrance port, from exit portal 604 outgoing.Penetrate for each catoptron on the reference light paths from the same side of sample chamber module for the ease of reference light paths and sample light path, its corresponding catoptron is all arranged on the sample light path.Wherein, comprise corresponding with it: the incident angle of light on the catoptron of the incident angle on the catoptron of reference light paths and sample light path equates.
In order to improve the accuracy of detection, the difference of the light path of reference light paths and sample light path is not less than preset threshold value in the spectrophotometric counter device, and is preferable, the equivalent optical path of reference light paths and sample light path.And, for each catoptron on the reference light paths, its corresponding catoptron is arranged all on the sample light path.Wherein, comprise corresponding with it: material, structure and the performance of the catoptron on catoptron on the reference light paths and the sample light path are identical.A kind of preferable mode that realizes the equivalent optical path of reference light paths and sample light path is reference light paths and the sample light path middle rotational symmetry with respect to the spectrophotometric counter device, and just the position of the catoptron on catoptron on the reference light paths and the sample light path is with respect to the middle rotational symmetry of spectrophotometric counter device.Wherein, the axis of spectrophotometric counter device is meant: the line of the mid point on mid point on the spectrophotometric counter device between two entrance ports of reference light paths and sample light path and the spectrophotometric counter device between two exit portals of reference light paths and sample light path.Introduce the structure of spectrophotometric counter device in detail below by several embodiment.
Be arranged in the sample chamber module of spectrophotometric counter device when sample, and when needing the transmissivity of measuring samples, shown in Fig. 6 B, can there be catoptron (being specially aluminium mirror etc.) in the module of sample chamber on the reference light paths, light is injected from the entrance port 601 of sample chamber module, penetrate from exit portal 603 then, enter the standard detectors in sensing chamber's module after the ejaculation.According to the position of standard detectors in sensing chamber's module, can directly or after reflecting inject standard detectors.Also can not have catoptron on the sample light path, have only sample, light is injected from the entrance port 602 of sample chamber module, transmission from sample 605, and, enter the standard detectors in sensing chamber's module after the ejaculation from exit portal 604 ejaculations.According to the position of standard detectors in sensing chamber's module, can directly or after reflecting inject standard detectors.All through injecting same standard detectors after the reflection, referring to shown in Figure 7, the incident angle of the catoptron glazing of relevant position equates light on sample light path and the reference light paths in sensing chamber's module.
If detecting device can only receive a branch of light a moment, then the spectrophotometric counter device also comprises scrambler, one catoptron is arranged on this scrambler, scrambler engraves when making one by the angle of controlling this catoptron has only the light of sample light path or reference light paths to inject detecting device, and promptly the light of sample light path and reference light paths is alternately injected detecting device.Preferable, in order to reduce catoptron on the scrambler to the influence of the test result of sample transmissivity or reflectivity, scrambler is positioned at the outside of the entrance port of sample chamber module, and promptly light is injected the sample chamber module through behind the scrambler.
The entrance port 601/602 of sample chamber and exit portal 603/604 are parallel with respect to the transverse axis 606 (just aforesaid axis) of sample chamber module among Fig. 6 and Fig. 7, and this transverse axis 606 is virtual lines, and reality does not exist.If entrance port 601/602 and exit portal 603/604 can be not parallel with respect to transverse axis 606, then the light of sample light path and reference light paths could penetrate from exit portal 603/604 through reflection after injecting the sample chamber module.Referring to shown in Figure 8,2 catoptrons 801/802/803/804 are respectively arranged on reference light paths in the module of sample chamber and the sample light path, after injecting from entrance port 601, light on the reference light paths, and penetrates from exit portal 603 from catoptron 802 reflection backs through the reflection toward mirror 802 of catoptron 801.Relative and the parallel placement of the reflecting surface of catoptron 801 and catoptron 802.Light on the sample light path is injected back transmission from the sample 605 from entrance port 602, and toward mirror 803, from catoptron 803 reflection back toward mirror 804, and after catoptron 804 reflections directive exit portal 604.Relative and the parallel placement of the reflecting surface of catoptron 803 and catoptron 804.Sample 605 is between entrance port 602 and catoptron 803 among the embodiment shown in Figure 8, and scheme is not limited thereto, and sample 605 can be arranged in the arbitrary position on the module sample light path of sample chamber.For the quantity that reduces catoptron and reduce the influence of catoptron, all adopted the individual catoptron of minimum even number (promptly 2) on reference light paths and the sample light path in the present embodiment to light intensity.Certainly, all can adopt a plurality of catoptrons such as 4,6,8 on reference light paths and the sample light path, but because the reflectivity of catoptron is not 100%, light intensity has loss, may influence the transmissivity of the sample that finally records.When the sample chamber module adopted entrance port shown in Fig. 8 and exit portal, by adjusting the angle of catoptron, reference light paths and sample light path all can be realized by odd number (more than 3 and 3) catoptron.
Be arranged in the sample chamber module of spectrophotometric counter device when sample, and when needing the reflectivity of measuring samples, referring to shown in Figure 9, in the module of sample chamber, on reference light paths and the sample light path even number catoptron can be arranged, entrance port 601/602 and exit portal 603/604 are positioned at the both sides of sample chamber module, and it is not parallel with respect to transverse axis 606, for the least possible application catoptron, 2 catoptrons 901/902/903/904 are respectively arranged on reference light paths in the module of sample chamber and the sample light path, after injecting from entrance port 601, light on the reference light paths, and penetrates from exit portal 603 from catoptron 902 reflection backs through the reflection toward mirror 902 of catoptron 901.Relative and the parallel placement of the reflecting surface of catoptron 901 and catoptron 902.Light on the sample light path 602 is injected the back from catoptron 903 reflection from the entrance port, and directive sample 605, from sample 605 reflection back toward mirror 904, and after catoptron 904 reflections directive exit portal 604.Sample 605 can with the location swap of catoptron 903 and catoptron 904.
Be arranged in sensing chamber's module of spectrophotometric counter device when sample, and when needing the transmissivity of measuring samples, referring to shown in Figure 10, the light of sample light path can directly pass the sample chamber module, 1001 inject sensing chamber from the entrance port then, and inject integrating sphere after directly seeing through sample 605.The light of reference light paths can directly pass the sample chamber module, 1002 injects sensing chamber from the entrance port then, and directly injects integrating sphere.The light of sample light path and reference light paths can be injected same integrating sphere through after the primary event.The light of sample light path 1001 is injected sensing chamber from the entrance port, through directive sample 605 after the reflection of catoptron 1003, injects integrating sphere after seeing through sample 605.Sample 605 can be in sensing chamber's module the arbitrary position on the sample light path.The light of reference light paths 1002 is injected sensing chamber from the entrance port, through directive integrating sphere after the reflection of catoptron 1004.Entrance port 1001 and transverse axis 1005 symmetries of entrance port 1002 with respect to sensing chamber, catoptron 1003 and catoptron 1004 are also with respect to transverse axis 1005 symmetries of sensing chamber.Transverse axis 1005 is virtual lines, and reality does not exist.Accepted standard detecting device or integrating sphere in sensing chamber's module for no matter can be suitable for the entrance port and the exit portal of same sample chamber module, and sample light path and the reference light paths of present embodiment in the module of sample chamber all adopts 2 catoptrons to change light path.The reflecting surface of 2 catoptrons on the reference light paths is relative, and 2 parallel placements of catoptron.Catoptron on the sample light path and the catoptron on the reference light paths are with respect to transverse axis 606 symmetries.The light of reference light paths and sample light path can be injected integrating sphere behind each process odd number secondary reflection, is preferable scheme through 1 secondary reflection.If change the opening direction of integrating sphere entrance port, also can make the light of reference light paths and sample light path inject integrating sphere behind each process even number secondary reflection, referring to shown in Figure 11.
Be arranged in sensing chamber's module of spectrophotometric counter device when sample, and when needing the reflectivity of measuring samples, referring to shown in Figure 12, the light of sample light path can directly pass the sample chamber module, 1001 inject sensing chamber from the entrance port then, and inject integrating sphere, from the opposite side directive sample 605 of integrating sphere and reflect.The light of reference light paths can directly pass the sample chamber module, 1002 injects sensing chamber from the entrance port then, and injects integrating sphere.The light of sample light path and reference light paths can be injected integrating sphere through after the primary event.The light of sample light path 1001 is injected sensing chamber from the entrance port, through directive integrating sphere after the reflection of catoptron 1201, at the opposite side directive sample 605 of integrating sphere, and reflects.The light of reference light paths 1002 is injected sensing chamber from the entrance port, through directive integrating sphere after the reflection of catoptron 1202.Entrance port 1001 and transverse axis 1005 symmetries of entrance port 1002 with respect to sensing chamber, catoptron 1201 and catoptron 1202 are also with respect to transverse axis 1005 symmetries of sensing chamber.The light of reference light paths and sample light path can be injected integrating sphere behind each process odd number secondary reflection, is preferable scheme through 1 secondary reflection.If change the opening direction of integrating sphere entrance port, also can make the light of reference light paths and sample light path inject integrating sphere behind each process even number secondary reflection, referring to shown in Figure 13.
More than described the inner structure and the function of spectrophotometric counter device, everyly realized that by reducing reference substance the spectrophotometric counter device of measurements such as the reflectivity of sample or transmissivity all is applicable to present embodiment.
The embodiment of the invention has reduced the reference substance with respect to sample on reference light paths, and the position and the quantity of catoptron have been changed, thereby improved light path, make that the ratio of light intensity value of the light intensity value of sample light path and reference light paths is the absolute reflectance or the absolute transmissivity of sample self, eliminate the influence of reference substance, improved the accuracy of photometric measurement.The embodiment of the invention provides the light path design that is suitable for this structure for the entrance port that do not change sample chamber module and sensing chamber's module and the position of exit portal.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (8)
1. a spectrophotometric counter device is characterized in that, comprising:
2n catoptron, wherein n catoptron is positioned at reference light paths, and n catoptron is positioned at the sample light path, and wherein n is 0 or positive integer;
Detecting device is used to receive light on the reference light paths and the light on the sample light path, and detects the light intensity value of reference light paths and sample light path;
When n was 0, the light on the reference light paths was directly injected detecting device; When n is positive integer, enter detecting device behind the light process n secondary reflection on the reference light paths;
When n was 0, the light on the sample light path was directly injected detecting device through after the transmission of sample, and perhaps the light on the sample light path is directly injected detecting device through after the reflection of sample; When n was positive integer, the light on the sample light path entered detecting device through the n secondary reflection of catoptron and through after the transmission of sample, and perhaps the light on the sample light path enters detecting device through the n secondary reflection of catoptron and through after the primary event of sample.
2. spectrophotometric counter device as claimed in claim 1 is characterized in that, detecting device is standard detectors or integrating sphere.
3. spectrophotometric counter device as claimed in claim 2 is characterized in that, when detecting device was standard detectors, described sample was arranged in the sample chamber module of spectrophotometric counter device; When detecting device was integrating sphere, described sample was arranged in sensing chamber's module of spectrophotometric counter device.
4. spectrophotometric counter device as claimed in claim 3 is characterized in that, reference light paths and sample light path penetrate from the same direction of sample chamber module, and injects the same detecting device in sensing chamber's module.
5. spectrophotometric counter device as claimed in claim 1, it is characterized in that, catoptron on catoptron on the reference light paths and the sample light path is with respect to the middle rotational symmetry of spectrophotometric counter device, wherein, the axis of spectrophotometric counter device is meant: the line of the mid point on mid point on the spectrophotometric counter device between two entrance ports of reference light paths and sample light path and the spectrophotometric counter device between two exit portals of reference light paths and sample light path.
6. as each described spectrophotometric counter device in the claim 1 to 5, it is characterized in that, for each catoptron on the reference light paths, its corresponding catoptron is all arranged on the sample light path, wherein, comprise corresponding with it: material, structure and the performance of the catoptron on catoptron on the reference light paths and the sample light path are identical.
7. spectrophotometric counter device as claimed in claim 6 is characterized in that, correspondingly with it also comprises: the incident angle of light on the catoptron of the incident angle on the catoptron of reference light paths and sample light path equates.
8. a photometric method is characterized in that, may further comprise the steps:
Obtain the light intensity value of reference light paths; Wherein, there is not reference substance on the reference light paths with respect to sample,
Obtain the light intensity value of sample light path;
The ratio of the light intensity value of the light intensity value of light path and reference light paths per sample obtains the reflectivity or the transmissivity of sample.
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| CN 201010118286 CN101865826A (en) | 2010-03-05 | 2010-03-05 | Photometric method and device |
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| CN 201010118286 CN101865826A (en) | 2010-03-05 | 2010-03-05 | Photometric method and device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565008A (en) * | 2011-12-28 | 2012-07-11 | 北京奥博泰科技有限公司 | Method and device for measuring transmittance of material by using integrating sphere |
| CN104458598A (en) * | 2014-12-12 | 2015-03-25 | 张晓勇 | Novel photoelectric property integrated test system |
| CN104458580A (en) * | 2014-12-12 | 2015-03-25 | 张晓勇 | Sample chamber for dual optical path spectrophotometer |
| CN107144527A (en) * | 2017-06-12 | 2017-09-08 | 智慧盈通（北京）工业技术有限公司 | Detection device and the light source light splitting body and photometric detection module for it |
| CN109115730A (en) * | 2018-11-02 | 2019-01-01 | 天津津航技术物理研究所 | Spectral transmittance test macro and method based on tunable laser |
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| CN1280298A (en) * | 1999-07-08 | 2001-01-17 | 上海春晓光电科技有限公司 | Optical system of multifunction spectrophotometer |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565008A (en) * | 2011-12-28 | 2012-07-11 | 北京奥博泰科技有限公司 | Method and device for measuring transmittance of material by using integrating sphere |
| CN102565008B (en) * | 2011-12-28 | 2013-09-11 | 北京奥博泰科技有限公司 | Method and device for measuring transmittance of material by using integrating sphere |
| CN104458598A (en) * | 2014-12-12 | 2015-03-25 | 张晓勇 | Novel photoelectric property integrated test system |
| CN104458580A (en) * | 2014-12-12 | 2015-03-25 | 张晓勇 | Sample chamber for dual optical path spectrophotometer |
| CN107144527A (en) * | 2017-06-12 | 2017-09-08 | 智慧盈通（北京）工业技术有限公司 | Detection device and the light source light splitting body and photometric detection module for it |
| CN107144527B (en) * | 2017-06-12 | 2023-11-10 | 智慧盈通（北京）工业技术有限公司 | Detection equipment and light source spectroscope and luminosity detection module used for same |
| CN109115730A (en) * | 2018-11-02 | 2019-01-01 | 天津津航技术物理研究所 | Spectral transmittance test macro and method based on tunable laser |
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Application publication date: 20101020 |