CN112229605A - Device and method for measuring reflectivity and transmissivity of optical component - Google Patents
Device and method for measuring reflectivity and transmissivity of optical component Download PDFInfo
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- CN112229605A CN112229605A CN202011003266.3A CN202011003266A CN112229605A CN 112229605 A CN112229605 A CN 112229605A CN 202011003266 A CN202011003266 A CN 202011003266A CN 112229605 A CN112229605 A CN 112229605A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N2021/558—Measuring reflectivity and transmission
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Abstract
A device and a method for measuring reflectivity and transmissivity of an optical component comprise a phase-locked amplifier, a laser, a chopper, a wedge, a test light path detector, an idle light path detector fine adjustment platform, a reference light path detector fine adjustment platform, a sample clamp and a test light path detector fine adjustment platform. The method can obtain a reference signal value, a signal difference value of reference light and test light during null and a signal difference value of the reference light and the test light with a sample through the phase-locked amplifier, thereby calculating the reflectivity and the transmissivity of the optical component. The invention can effectively realize the measurement of the optical component with ultrahigh reflectivity and transmissivity and improve the measurement precision of the reflectivity and the transmissivity.
Description
Technical Field
The invention relates to a device and a method for measuring the reflectivity and the transmissivity of an optical component, in particular to a device and a method for measuring the high reflectivity and the high transmissivity of the optical component with high precision.
Background
At present, optical components with low loss and high reflectivity (R > 99.9%) are increasingly and widely applied to laser optical systems in gravitational wave observation, laser gyros, high-sensitivity laser spectrums, high-power lasers, positioning guidance fields, aerospace detection fields, nuclear fields and the like, and the film parameters of the high-reflectivity laser components have a significant influence on the performance improvement and product quality control of the systems. The highest reflection rate reported abroad is 99.99984%, and the reflection rate of the high-reflection mirror which can be plated at certain special wavelength at home can reach more than 99.995%. With the development of the high-reflection film plating technology and the wide application of the high-reflection mirror, the research on the accurate detection method of the multi-film parameters on the surface of the high-precision optical component is particularly important. The continuous improvement of the performance of the high-reflection optical film makes the requirement of accurate measurement of high reflectivity increasingly urgent. The development of technologies such as laser gyroscopes places very stringent requirements on the measurement of ultra-high reflectivity for large angles of incident light. Conventional reflectance measurement techniques and spectrophotometry are not widely applicable to high reflectance of mirrors with a reflectance of greater than 99.9% because either the measurement process is too cumbersome and the system is too complex, or accurate measurements cannot be made.
Disclosure of Invention
In order to solve the problems, the invention provides a novel device and a method for measuring the reflectivity and the transmissivity of an optical component by a spectrophotometry method, and the device and the method can effectively realize the measurement of high reflectivity and high transmissivity. The reflectivity and the transmissivity are calculated by measuring the signal difference values of the reference signal and the empty test signal and the reference signal and the test signal, rather than directly measuring the reference signal value, the empty test signal value and the test signal value.
The technical solution of the invention is as follows:
a device for measuring reflectivity and transmissivity of an optical component is characterized by comprising a phase-locked amplifier, a laser, a chopper, a wedge, a test light path detector, an empty light path detector fine-tuning platform for placing the test light path detector, a reference light path detector fine-tuning platform for placing the reference light path detector, a sample clamp for placing a sample and a test light path detector fine-tuning platform for placing the test light path detector; the output end of the reference light path detector is connected with the first input end of the lock-in amplifier, the output end of the test light path detector is connected with the second input end of the lock-in amplifier, and the synchronous signal output end of the chopper is connected with the reference signal input end of the lock-in amplifier;
the output light of the laser is incident to the wedge-shaped piece through the chopper, the reflected light reflected by the front surface of the wedge-shaped piece is used as test light and received by a test light path detector arranged on the empty light path detector fine tuning platform, and the reflected light reflected by the rear surface of the wedge-shaped piece is used as reference light and received by a reference light path detector;
and placing a sample in the direction of the test light, wherein the test light is received by a test light path detector placed on the test light path detector fine tuning platform through a light beam reflected or transmitted by the sample.
A method for measuring reflectivity and transmissivity of an optical component is characterized by comprising the following steps:
the method comprises the following steps that firstly, the chopper and the wedge-shaped piece are sequentially installed along the output light direction of a laser, when laser pulses irradiate the wedge-shaped piece, reflected light beams are respectively generated on the front surface and the rear surface and serve as test light and reference light, and the idle light path detector fine adjustment platform and the test light path detector are installed in the test light direction; the reference light path detector fine tuning platform and the reference light path detector are arranged in the direction of reference light, the output end of the reference light path detector is connected with the first input end of the lock-in amplifier, the output end of the test light path detector is connected with the second input end of the lock-in amplifier, and the synchronous signal output end of the chopper is connected with the reference signal input end of the lock-in amplifier;
secondly, the phase-locked amplifier is in the working mode of differential operation to output differential signals, namely the reference signal value V1And empty measurement signal value V2The difference, i.e. V1-V2；
Blocking the test light, and adjusting the reference light path detector fine adjustment platform to enable the reference light path detector on the reference light path detector fine adjustment platform (8) to be located at the optimal detection position, and the output signal of the phase-locked amplifier reaches the maximum value;
blocking reference light, adjusting the fine adjustment platform of the idle light path detector to enable the test light path detector on the fine adjustment platform of the idle light path detector to be located at the optimal detection position, and enabling the output signal of the phase-locked amplifier to reach the maximum value;
placing the sample on a sample clamp, moving the test light path detector to the test light path detector fine tuning platform, continuously blocking reference light, and adjusting the test light path detector fine tuning platform to enable the test light path detector on the test light path detector fine tuning platform (10) to be located at the optimal detection position, and enabling the output signal of the lock-in amplifier to reach the maximum value;
when there is sample, the reference signal value is V1', the test signal value is V2'the phase-locked amplifier outputs a differential signal, and the output signal of the phase-locked amplifier is the signal difference V' between the reference optical path and the test optical path with the sample, and V is equal to V1’-V2’；
Seventhly, taking the sample off the sample clamp, moving the test light path detector to an idle light path detector fine adjustment platform, and setting a reference signal value as V when no sample exists1Test signal value of V2(ii) a When the readout of the phase-locked amplifier is stable, the output signal of the phase-locked amplifier is the signal difference V between the reference optical path and the test optical path without the sample, where V is V1-V2；
Allowing the phase-locked amplifier to output a single-channel signal, wherein the phase-locked amplifier outputs a reference signal V1；
Ninthly, calculating the reflectivity R or the transmissivity T of the sample according to the following formula:
The invention has the technical effects that:
1. the invention can be used for measuring the reflectivity and the transmissivity of the optical component with high reflectivity and high transmissivity, the measurement precision can reach 99.99 percent, the device structure and the data processing are simple, and the measurement method is simple and easy to implement.
2. The invention has two methods of use, both reflectance and transmittance measurements.
Drawings
FIG. 1 is a schematic diagram of a device for measuring reflectivity and transmissivity by a novel spectrophotometry method in space time.
FIG. 2 is a schematic diagram of a novel spectrophotometric apparatus for measuring reflectance with a sample.
FIG. 3 is a schematic diagram of a novel spectrophotometric apparatus for measuring transmittance with a sample.
IN the figure, a phase-locked amplifier (1-1-A/I input port, 1-2-B input port and 1-3-REF IN input port) is adopted, a 2-laser, a 3-chopper, a 4-wedge, a 5-test light path detector, a 6-null light path detector fine adjustment platform, a 7-reference light path detector, an 8-reference light path detector fine adjustment platform, a 9-sample clamp and a 10-test light path detector fine adjustment platform are adopted.
Detailed Description
The invention is further illustrated with reference to the following examples and figures, without thereby limiting the scope of the invention.
Referring to fig. 1, fig. 1 is a device for measuring reflectivity and transmissivity of an optical component during null time, and as shown in the figure, the device for measuring reflectivity and transmissivity of an optical component includes a lock-in amplifier 1, a laser 2, a chopper 3, a wedge 4, a test optical path detector 5, a null optical path detector fine-tuning platform 6 for placing the test optical path detector 5, a reference optical path detector 7, a reference optical path detector fine-tuning platform 8 for placing the reference optical path detector 7, a sample clamp 9 for placing a sample, and a test optical path detector fine-tuning platform 10 for placing the test optical path detector 5; the output end of the reference light path detector 7 is connected with the first input end 1-1 of the lock-in amplifier 1, the output end of the test light path detector 5 is connected with the second input end 1-2 of the lock-in amplifier 1, and the synchronous signal output end of the chopper 3 is connected with the reference signal input end 1-3 of the lock-in amplifier 1;
laser output by the laser 2 is incident on the wedge-shaped sheet 4 after passing through the chopper 3, light beams are respectively reflected on the front surface and the rear surface of the wedge-shaped sheet 4 to form two beams of laser, the front surface reflected laser is a test light path and is received by the test light path detector 5, the rear surface reflected laser is a reference light path and is received by the reference light path detector 7, and a test light path signal, a reference light path signal and a chopper signal are all input into the phase-locked amplifier 1.
Referring to fig. 2, fig. 2 is a schematic diagram of a novel spectrophotometric apparatus for measuring reflectance with a sample. Wherein. The reference optical path is the same as the first reference optical path, in the test optical path, after being reflected from the front surface of the wedge 4, the light beam is incident on the sample, after being reflected from the surface of the sample, the light beam is received by the test optical path detector 5, and the signal is also connected to the lock-in amplifier 1.
Please refer to fig. 3. FIG. 3 is a schematic diagram of a novel spectrophotometric transmittance measurement apparatus with a sample. The reference optical path is the same as that in the first drawing, in the test optical path, after being reflected from the front surface of the wedge 4, the light beam is incident on the sample, after being transmitted through the sample, the light beam is received by the test optical path detector 5, and the signal is also connected to the lock-in amplifier 1.
The invention relates to a method for automatically adjusting the direction of a continuous laser beam, which comprises the following steps:
the chopper 3 and the wedge-shaped piece 4 are sequentially arranged in the laser irradiation direction, when laser pulses irradiate the wedge-shaped piece 4, reflected light beams are respectively generated on the front surface and the rear surface, and the idle light path detector fine adjustment platform 6 and the test light path detector 5 are arranged in the direction of the reflected light generated on the front surface; the reference light path detector fine-tuning platform 8 and the reference light path detector 7 are arranged in the direction of reflected light generated on the rear surface of the reference light path detector, the output end of the reference light path detector 7 is connected with the first input end 1-1 of the lock-in amplifier 1, the output end of the test light path detector 5 is connected with the second input end 1-2 of the lock-in amplifier 1, and the synchronous signal output end of the chopper 3 is connected with the reference signal input end 1-3 of the lock-in amplifier 1;
pressing an INPUT button in a SIGNAL INPUT area of the lock-in amplifier 1, and selecting an A-B gear to enable the lock-in amplifier 1 to be in a differential operation working mode and output a differential SIGNAL. At this time, the output of the lock-in amplifier 1 is the reference signal value V1And empty measurement signal value V2The difference, i.e. V1-V2；
Blocking the test light, and adjusting the fine adjustment platform 8 of the reference light path detector to enable the output signal of the phase-locked amplifier 1 to reach the maximum value;
blocking the reference light, and adjusting the fine adjustment platform 6 of the empty light path detector to enable the output signal of the phase-locked amplifier 1 to reach the maximum value;
placing the sample on a sample clamp 9, moving the test optical path detector 5 to a test optical path detector fine tuning platform 10, continuously blocking reference light, and adjusting the test optical path detector fine tuning platform 10 to enable the output signal of the phase-locked amplifier 1 to reach the maximum value;
when there is sample, the reference signal value is V1', the test signal value is V2'when the output signal of the lock-in amplifier 1 is the signal difference V' between the reference optical path and the test optical path with the sample, V ═ V1’-V2’；
And seventhly, taking the sample off the sample clamp 9, and moving the test light path detector 5 to the empty light path detector fine adjustment platform 6. Reference signal value in the absence of sampleIs a V1Test signal value of V2. When the readout of the lock-in amplifier 1 is stable, the output signal of the lock-in amplifier 1 is the signal difference V between the reference optical path and the test optical path without the sample, where V is V1-V2；
Pressing 'INPUT' button in 'SIGNAL INPUT' area of said lock-in amplifier 1 to select 'A' gear, at this time the output of lock-in amplifier 1 is reference SIGNAL V1；
Ninthly when measured in a short time, the reference signal can be considered constant, i.e. V1＝V1', so that the reflectance can be obtained:
or transmittance:
experiments show that the method is simple and feasible, can effectively realize the measurement of the reflectivity and the refractive index of the optical element and improve the measurement precision, the measured sample reflectivity can reach 99.99 percent at most, and the conservative estimation of the instrument measurement limit can reach 99.995 percent.
The present invention is not limited to the embodiments described herein, and those skilled in the art, having the benefit of the teachings of the present invention, may effect modifications and variations thereto without departing from the scope of the present invention.
Claims (2)
1. A device for measuring reflectivity and transmissivity of an optical component is characterized by comprising a phase-locked amplifier (1), a laser (2), a chopper (3), a wedge-shaped piece (4), a test light path detector (5), an empty light path detector fine-tuning platform (6) for placing the test light path detector (5), a reference light path detector (7), a reference light path detector fine-tuning platform (8) for placing the reference light path detector (7), a sample clamp (9) for placing a sample and a test light path detector fine-tuning platform (10) for placing the test light path detector (5); the output end of the reference light path detector (7) is connected with a first input end (1-1) of the lock-in amplifier (1), the output end of the test light path detector (5) is connected with a second input end (1-2) of the lock-in amplifier (1), and the synchronous signal output end of the chopper (3) is connected with a reference signal input end (1-3) of the lock-in amplifier (1);
the output light of the laser (2) is incident to the wedge-shaped sheet (4) through the chopper (3), the reflected light reflected by the front surface of the wedge-shaped sheet (4) is used as test light, the test light is received by a test light path detector (5) arranged on the idle light path detector fine-tuning platform (6), and the reflected light reflected by the rear surface of the wedge-shaped sheet (4) is used as reference light and received by a reference light path detector (7);
and a sample is placed in the direction of the test light, and the test light is received by a test light path detector (5) placed on the test light path detector fine tuning platform (10) through a light beam reflected or transmitted by the sample.
2. A method for measuring reflectivity and transmissivity of an optical component is characterized by comprising the following steps:
the method comprises the following steps that firstly, a chopper (3) and a wedge-shaped piece (4) are sequentially installed along the output light direction of a laser (2), when laser pulses irradiate the wedge-shaped piece (4), reflected light beams are respectively generated on the front surface and the rear surface and serve as test light and reference light, and a null light path detector fine-tuning platform (6) and a test light path detector (5) are installed in the test light direction; the reference light path detector fine-tuning platform (8) and the reference light path detector (7) are arranged in the reference light direction, the output end of the reference light path detector (7) is connected with the first input end (1-1) of the phase-locked amplifier (1), the output end of the test light path detector (5) is connected with the second input end (1-2) of the phase-locked amplifier (1), and the synchronous signal output end of the chopper (3) is connected with the reference signal input end (1-3) of the phase-locked amplifier (1);
secondly, the phase-locked amplifier (1) is in a differential operation working mode to output differential signals, namely reference signalsValue V1And empty measurement signal value V2The difference, i.e. V1-V2；
Blocking the test light, and adjusting a reference light path detector fine-tuning platform (8) to enable a reference light path detector (7) on the reference light path detector fine-tuning platform (8) to be located at an optimal detection position, so that the output signal of the phase-locked amplifier (1) reaches a maximum value;
blocking reference light, and adjusting the idle light path detector fine adjustment platform (6) to enable the test light path detector (5) on the idle light path detector fine adjustment platform (6) to be located at the optimal detection position, and the output signal of the phase-locked amplifier (1) reaches the maximum value;
placing the sample on a sample clamp (9), moving the test light path detector (5) to a test light path detector fine-tuning platform (10), continuously blocking reference light, and adjusting the test light path detector fine-tuning platform (10) to enable the test light path detector (5) on the test light path detector fine-tuning platform (10) to be located at an optimal detection position, wherein the output signal of the phase-locked amplifier (1) reaches a maximum value;
when there is sample, the reference signal value is V1', the test signal value is V2'the phase-locked amplifier (1) is enabled to output a differential signal, and the output signal of the phase-locked amplifier (1) is the signal difference V', V between the reference optical path and the test optical path with the sample1’-V2’；
Seventhly, taking the sample off the sample clamp (9), moving the test light path detector (5) to an empty light path detector fine adjustment platform (6), and setting a reference signal value to be V when no sample exists1Test signal value of V2(ii) a When the reading number of the phase-locked amplifier (1) is stable, the output signal of the phase-locked amplifier (1) is the signal difference V between the reference optical path and the test optical path without the sample, and V is equal to V1-V2；
Allowing the phase-locked amplifier (1) to output a single-channel signal, wherein the phase-locked amplifier (1) outputs a reference signal V1；
Ninthly, calculating the reflectivity R or the transmissivity T of the sample according to the following formula:
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| CN111006854A (en) * | 2019-12-25 | 2020-04-14 | 中国科学院光电技术研究所 | Device and method for testing diffraction efficiency of micro-nano structure lens |
| CN111238773A (en) * | 2020-01-20 | 2020-06-05 | 中国科学院上海光学精密机械研究所 | High-resolution laser output power variation monitoring device and method |
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2020
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| JPH07260684A (en) * | 1994-03-28 | 1995-10-13 | Nippon Telegr & Teleph Corp <Ntt> | Accurate reflectivity measurement method and instrument |
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