CN100462773C - Method for accurate determination of laser transmitting-receiving path coaxial reference using Zernike coefficient - Google Patents
Method for accurate determination of laser transmitting-receiving path coaxial reference using Zernike coefficient Download PDFInfo
- Publication number
- CN100462773C CN100462773C CNB2007100723871A CN200710072387A CN100462773C CN 100462773 C CN100462773 C CN 100462773C CN B2007100723871 A CNB2007100723871 A CN B2007100723871A CN 200710072387 A CN200710072387 A CN 200710072387A CN 100462773 C CN100462773 C CN 100462773C
- Authority
- CN
- China
- Prior art keywords
- optical
- interferometer
- level crossing
- receiving
- light path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The invention is a method of applying Zernike coefficient to accurately determine axial reference of laser transmit-receiving, relating to a coaxial determining method of transmitting and receiving light paths of optical system of transmitting and receiving by sharing the same antenna. And it comprises the steps of: using interferometer to emit laser beam which passes through in turn transmitting light path component, light splitter and optical antenna of a tested optical system and then is emitted; a flat mirror is arranged at the outlet of the optical antenna and vertical to optical axis of the optical antenna so as to make the laser beam emitted from the optical antenna onto the surface of the flat mirror return along the original light path into the interferometer; when regulating the flat mirror, monitoring interference stripes in the interferometer and making Zernike less thangamma/10; the laser beam reaching the flat mirror is reflected by the flat mirror and then reflected by the light splitter and finally reaches the receiving light path component of the tested optical system so as to act as a reference to regulate optical axis of the receiving light path component.
Description
Technical field
The present invention relates to the optical system emission light path of the transmit-receive sharing same antenna and coaxial definite method of receiving light path.
Background technology
When the optical system of the development transmit-receive sharing same antenna, one of important parameter that the right alignment of emission light path and receiving light path is strict with.In the existing method of adjustment, through the antenna output light field, utilizing angle prism that it is entered receiving light path along former road reflected back receiving antenna by the emission light path, is reference axis with this incident light, and receiving light path is adjusted, and guarantees the alignment of emission, receiving light path.Because the restriction of angle prism machining precision, light field is not strict returns by former road in emission, makes the precision of emission, receiving light path right alignment only can reach tens of μ rad, can not satisfy the high-precision applications demand.Process owing to the large aperture angle prism is difficult on the other hand, so this method is difficult to be applied in the wide aperture antenna optical system.
Summary of the invention
The purpose of this invention is to provide a kind of Zernike of utilization coefficient and accurately determine the method for laser transmitting-receiving coaxial reference, to overcome existing method can not satisfy the high-precision applications demand because of the restriction of angle prism machining precision and difficulty defective.It comprises the steps: one, by interferometer 1 emission laser beam, this light beam sees through outgoing behind emission optical path component 2-1, the spectroscope 2-2 of tested optical system 2 and the optical antenna 2-3 successively; Two, vertical its optical axis is provided with a level crossing 3 outside the outlet of optical antenna 2-3, level crossing 3 is installed on the adjusting mechanism 4, adjust with respect to the verticality of incident laser light beam by 4 pairs of level crossings 3 of adjusting mechanism, turn back to the interferometer 1 along original optical path so that shine level crossing 3 lip-deep laser beams from optical antenna 2-3; When utilizing adjusting mechanism 4 to adjust level crossing 3, monitor the interference fringe in the interferometer 1, make wavefront error polynomial expression inclination coefficient Zernike less than λ/10; Three, the laser beam of plane of incidence mirror 3, after level crossing 3 reflections, through the reflection of spectroscope 2-2, incide among the receiving light path assembly 2-4 of tested optical system 2, through the light beam after the spectroscope 2-2 reflection to be the optical axis of benchmark adjustment receiving light path assembly 2-4.
Because method of the present invention is not used all higher angle prism of machining precision and difficulty, has overcome the defective of prior art.The present invention proposes a kind of high-precision laser transmitting/receiving system reference axis and determines technology, utilize interferometer, high precision adjusting mechanism, high precision plane mirror, by accurate measurement Zernike inclination coefficient, determine the optical axis benchmark of laser pick-off optical path component according to the optical axis of Laser emission optical path component, the reference axis of laser pick-off light path is brought up to the order of magnitude of 0.1 μ rad with the right alignment of emission light path, and this technology can be widely used in have in the light transmitting and receiving system of large aperture optical antenna.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
Embodiment one: specify present embodiment below in conjunction with Fig. 1.Present embodiment is made up of following steps: one, by interferometer 1 emission laser beam, this light beam sees through outgoing behind emission optical path component 2-1, the spectroscope 2-2 of tested optical system 2 and the optical antenna 2-3 successively; Two, vertical its optical axis is provided with a level crossing 3 outside the outlet of optical antenna 2-3, level crossing 3 is installed on the adjusting mechanism 4, adjust with respect to the verticality of incident laser light beam by 4 pairs of level crossings 3 of adjusting mechanism, turn back to the interferometer 1 along original optical path so that shine level crossing 3 lip-deep laser beams from optical antenna 2-3; When utilizing adjusting mechanism 4 to adjust level crossing 3, monitor the interference fringe in the interferometer 1, make wavefront error polynomial expression inclination coefficient Zernike less than λ/10; Three, the laser beam of plane of incidence mirror 3, after level crossing 3 reflections, reflection through spectroscope 2-2, incide among the receiving light path assembly 2-4 of tested optical system 2, to be the optical axis that benchmark is adjusted receiving light path assembly 2-4 through the light beam after the spectroscope 2-2 reflection, the malalignment that can guarantee the emission light path of tested optical system 2 and receiving light path is less than (λ/10)/φ.φ is the effective aperture of optical antenna 2-3, and λ is the wavelength of laser beam.
When the optical axis of level crossing 3 did not overlap with the emission light path light axis of optical antenna 2-3, the multinomial coefficient Zernike tilt quantity of wavefront error was non-vanishing, about the striped of interferometer 1 will present, asymmetrical state up and down.
Regulate adjusting mechanism 4 when monitoring interferometer 1 striped, make wavefront error polynomial expression inclination coefficient Zernike less than λ/10, can guarantee the optical axis of level crossing 3 and launch the light path light axis angle less than (λ/10)/φ, the laser beam of plane of incidence mirror 3, after level crossing 3 reflections, the receiving light path of the tested optical system 2 of incident is that receiving light path that benchmark is adjusted tested optical system 2 can guarantee that the malalignment of its emission and receiving system is less than (λ/10)/φ with the light beam after level crossing 3 reflection.
Can select when using bore as the level crossing of 300 millimeters of φ as catoptron, surface precision RMS is 1/70 λ.The GHI-4 that can select U.S. ZYGO company to produce " HS type interferometer transmitted-reference light beam, and the interference fringe of detection reflected wavefront and reference wave front.The interferometer that ZYGO company produces has ccd detector, interference fringe image directly can be imported the computing machine that has data collecting card, carries out Flame Image Process.The interferometer major parameter that ZYGO company produces is: bore φ 300mm, operation wavelength 632.8nm can select to horizontally rotate, the two-dimension high-precision adjustment rack of pitching rotation adjusts as the angle of 4 pairs of level crossings of adjusting mechanism.
Claims (1)
1. utilization Zernike coefficient is accurately determined the method for laser transmitting-receiving coaxial reference, it is characterized in that it comprises the steps: one, launches laser beam by interferometer (1), this light beam sees through emission optical path component (2-1), spectroscope (2-2) and optical antenna (2-3) the back outgoing of tested optical system (2) successively; Two, vertical its optical axis is provided with a level crossing (3) outside the outlet of optical antenna (2-3), level crossing (3) is installed on the adjusting mechanism (4), by adjusting mechanism (4) level crossing (3) is adjusted with respect to the verticality of incident laser light beam, turned back to the interferometer (1) along original optical path so that shine the lip-deep laser beam of level crossing (3) from optical antenna (2-3); When utilizing adjusting mechanism (4) to adjust level crossing (3), monitor the interference fringe in the interferometer (1), make wavefront error polynomial expression inclination coefficient Zernike less than λ/10; Three, the laser beam of plane of incidence mirror (3), after level crossing (3) reflection, reflection through spectroscope (2-2), inciding in the receiving light path assembly (2-4) of tested optical system (2), is the optical axis that benchmark is adjusted receiving light path assembly (2-4) with the light beam after reflecting through spectroscope (2-2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100723871A CN100462773C (en) | 2007-06-22 | 2007-06-22 | Method for accurate determination of laser transmitting-receiving path coaxial reference using Zernike coefficient |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100723871A CN100462773C (en) | 2007-06-22 | 2007-06-22 | Method for accurate determination of laser transmitting-receiving path coaxial reference using Zernike coefficient |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101101369A CN101101369A (en) | 2008-01-09 |
| CN100462773C true CN100462773C (en) | 2009-02-18 |
Family
ID=39035721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100723871A Expired - Fee Related CN100462773C (en) | 2007-06-22 | 2007-06-22 | Method for accurate determination of laser transmitting-receiving path coaxial reference using Zernike coefficient |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100462773C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103603653B (en) * | 2013-11-25 | 2016-04-20 | 国家电网公司 | A kind of method and measurement mechanism thereof measuring drill hole inclination |
| CN106855396A (en) * | 2015-12-09 | 2017-06-16 | 财团法人金属工业研究发展中心 | Optical measurement system, lifting interference image quality and the method for measuring cylindricity |
| CN109100733A (en) * | 2018-07-05 | 2018-12-28 | 南京先进激光技术研究院 | Laser radar apparatus error detecting facility, method and device |
| CN108956098B (en) * | 2018-07-27 | 2020-08-28 | 莱特巴斯光学仪器（镇江）有限公司 | Inclination eliminating device and method for wavefront test of plano-convex aspheric lens |
| CN109358321B (en) * | 2018-09-27 | 2023-05-16 | 中国船舶工业系统工程研究院 | Adjustment method for laser transceiving coaxiality |
| CN114112318A (en) * | 2020-09-01 | 2022-03-01 | 南京先进激光技术研究院 | Optical mirror surface online detection method and detection device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5187539A (en) * | 1991-09-23 | 1993-02-16 | Rockwell International Corporation | Mirror surface characteristic testing |
| JP2002357508A (en) * | 2001-05-31 | 2002-12-13 | Olympus Optical Co Ltd | Lens inspection method |
| US20060097205A1 (en) * | 2004-11-05 | 2006-05-11 | Osamu Kakuchi | Measuring apparatus, exposure apparatus and device manufacturing method |
-
2007
- 2007-06-22 CN CNB2007100723871A patent/CN100462773C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5187539A (en) * | 1991-09-23 | 1993-02-16 | Rockwell International Corporation | Mirror surface characteristic testing |
| JP2002357508A (en) * | 2001-05-31 | 2002-12-13 | Olympus Optical Co Ltd | Lens inspection method |
| US20060097205A1 (en) * | 2004-11-05 | 2006-05-11 | Osamu Kakuchi | Measuring apparatus, exposure apparatus and device manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101101369A (en) | 2008-01-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100462773C (en) | Method for accurate determination of laser transmitting-receiving path coaxial reference using Zernike coefficient | |
| CN107941477B (en) | Spectroscope measurement method and device capable of accurately controlling incident angle | |
| CN106405860B (en) | Method of Adjustment based on refraction-reflection type infrared imaging optical system | |
| CN102385170B (en) | Optical system for measuring and regulating center deviation of optics lens at high precision | |
| CN109100019B (en) | System and method for realizing high-precision gluing of Sagnac physical interferometer | |
| CN103335819A (en) | Method and device for optical detection of high-precision cube-corner prism | |
| CN105784335A (en) | Auxiliary light correction device and method for calibrating normal direction of reference mirror | |
| CN111664803B (en) | Rapid detection method and device for off-axis parabolic reflector | |
| CN101614523B (en) | Multi-beam long-rail interferometer for detecting grazing tubular off-axis aspheric mirror | |
| CN108572061B (en) | Full-caliber harmonic conversion efficiency measuring system and measuring method thereof | |
| CN110207588A (en) | A kind of prism of corner cube optical apex sighting device and its Method of Adjustment | |
| CN107884079B (en) | Single-shot ultrashort laser pulse width measuring device and measuring method | |
| US20140340691A1 (en) | Enhancements to integrated optical assembly | |
| CN101078615A (en) | Precision determination method for angle between optical axis and mechanical axis of optical system | |
| CN101113890A (en) | Multidimensional full field optical calibrator | |
| CN100383606C (en) | Method and device for precisely determining optical system focus surface by interferometer | |
| CN104949630A (en) | Point diffraction interference device with adjustable large-numerical-aperture fringe contrast | |
| CN101256112A (en) | Method for rapid accurate determination of superelevation reflectance ratio eyeglass | |
| CN102901463A (en) | Measurement device and measurement method for axicon surface shape | |
| CN100529736C (en) | Zero calibration method for BRDF measuring system | |
| CN211668748U (en) | Optical correction device for monitoring optical axis of reflecting telescope based on polarization beam splitting | |
| US20150185324A1 (en) | Laser radar tracking systems | |
| CN202793737U (en) | System for detecting reflectivity of plane mirror | |
| CN112902875B (en) | Aspheric reflector curvature radius detection device and method | |
| CN107966279B (en) | Multi-view-field wavefront measuring device and method for telescope system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090218 Termination date: 20200622 |