CN105716833B - The measurement apparatus of infrared balzed grating, diffraction efficiency in a kind of - Google Patents
The measurement apparatus of infrared balzed grating, diffraction efficiency in a kind of Download PDFInfo
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- CN105716833B CN105716833B CN201410729572.3A CN201410729572A CN105716833B CN 105716833 B CN105716833 B CN 105716833B CN 201410729572 A CN201410729572 A CN 201410729572A CN 105716833 B CN105716833 B CN 105716833B
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Abstract
A kind of measurement apparatus of mid-infrared light grid diffraction efficiency, the device include tunable middle infrared test laser, guiding laser, polarizer, polarized light splitting device, grating to be measured, three-D electric displacement platform, photo-detector, attenuator, spectrometer.Using mid-infrared light grid to different wave length, incidence angles degree, different polarization characteristic mid-infrared laser first-order diffraction power output difference centering echelette diffraction efficiency carry out direct measurement, more truly reflect actual diffraction efficiency of the mid-infrared light grid in practical application.Using polarization spectro measurement and double light path double detector comparison detection, measurement accuracy ensure that.The continuous measurement of infrared band grating first-order spectrum diffraction efficiency in can realizing.
Description
Technical field
The present invention relates to diffraction efficiency of grating, particularly a kind of measurement apparatus of mid-infrared light grid diffraction efficiency.
Background technology
The laser of middle infrared band suffers from fields such as photoelectronic warfare, laser remote sensing, laser acquisition and constituent analyses
Important application.The laser of some middle infrared bands such as HF/DF lasers, CO lasers, CO2Laser etc. is multi-wavelength
Vibration simultaneously.And in real work, in order to obtain laser output at specific wavelengths, it is necessary to use the humorous of wavelength selectivity
Shake chamber.Usual this resonator frequently includes a wavelength selector, and luminous energy is all focused on -1 grade by middle echelette diffraction grating
Spectrally, it is a kind of good wavelength selector.The first-order diffraction efficiency of mid-infrared light grid directly determines laser resonant cavity
Loss, therefore the measurement of the diffraction efficiency of centering echelette becomes particularly significant.
At present due to the limitation of measurement light source in the measurement of mid-infrared light grid diffraction efficiency, substantially from several specific
The monochromatic light of wavelength is tested, and can not all be measured for the diffraction efficiency of whole middle infrared band incident light, measurement data
It is very imperfect, and diffraction efficiency difference of the diffraction grating for incidence angles degree, with different polarization characteristic incident light is very
Greatly, current test platform can not be provided all.Because measurement light source is mostly made up of wideband light source and monochromator, monochromatic light intensity
Degree is weaker, needs to calculate angle of diffraction when adjusting incident wavelength so as to adjust the position of detector, less efficient, measurement error
It is larger.Furthermore because the centre wavelength of testing light source can produce drift with the change of time and external environment condition, this also can be to causing
Measurement result is not accurate enough.
By above-mentioned analysis, it is necessary to which one kind can be directed to different incident wavelengths, incidence angles degree and different polarization characteristic,
Middle infrared band is continuous, actual effect, the device of accurate measurement diffraction efficiency of grating.The present invention realizes above-mentioned mid-infrared light grid diffraction
The measurement demand of efficiency.
The content of the invention
It is an object of the invention to overcome above-mentioned technical problem, there is provided a kind of measurement dress of mid-infrared light grid diffraction efficiency
Put.Realize the first-order diffraction effect of the middle echelette diffraction grating under the conditions of different wave length, incidence angles degree and different polarization characteristic
The direct measurement of rate, actual diffraction efficiency of the mid-infrared light grid in practical application is reflected more truly, exactly.
To realize the purpose of the present invention, particular technique solution is：
A kind of measurement apparatus of mid-infrared light grid diffraction efficiency, is characterized in that the device includes：Tunable mid-infrared laser
The light that device and guiding laser, tunable mid-infrared laser device and guiding laser are sent is respectively radiated to close beam piece both sides table
Face, the light that ECDC beam piece closes beam are irradiated to polarization spectro piece after polarizer, half-wave plate successively, through the light point of polarization spectro piece
Cheng Erlu, all the way light enter the first power meter, another way light is again broken down into two tunnels through optical grating diffraction to be measured, wherein diffraction light all the way
Inputted through attenuator into spectrometer, another way diffraction light enters the second power meter.
The course of work of measurement apparatus of the present invention is as follows：Grating to be measured is placed on three-D electric displacement platform.Electricity driving displacement
Platform can realize rotation, pitching, the displacement for translating three directions.The mid-infrared laser warp that tunable mid-infrared laser device is launched
Cross polarizer and be changed into polarised light, be divided into two-way by polarization spectro piece, wherein the light all the way reflected by polarization spectro piece, its power
Directly measured by power meter, through the light all the way of polarization spectro piece, after grating first-order diffraction to be measured, its power is by another power
Meter measurement.By the measured value of comparative quantity power meter, the first-order diffraction efficiency of grating to be measured is calculated.Due to middle infrared band
Light it is invisible, two power meter measurement positions are determined by image space of the laser on sensitive film.When measurement grating to be measured is not to
During the first-order diffraction efficiency of co-wavelength incident light, change the Output of laser wavelength of tunable mid-infrared laser device, while change work(
The measurement position of rate meter measures；When measuring incidence angles degree, grating to be measured is to the first-order diffraction efficiency of incident light,
Change the anglec of rotation of electricity driving displacement platform, while the measurement position for changing power meter measures；When measurement grating to be measured is not to
With polarization state incident light first-order diffraction efficiency when, rotatable halfwave plate changes the polarization state of incident light, and by polarization spectro piece
This polarization state light splitting piece is replaced with, then the first-order diffraction efficiency of grating is measured using two power meters.Measure laser
Wavelength can utilize the Zero-order diffractive outgoing position of grating to be measured to be determined by spectrometer measurement, the position of spectrometer.By
It is very low in the zeroth-order efficiency of grating to be measured, the method for sensitive film imaging can not be used to determine the position of spectrometer, therefore make
With guiding laser.Because grating to be measured is identical with the exit direction of guiding laser Zero-order diffractive for mid-infrared laser, therefore light
The position that the position of spectrometer directly can be emitted by guiding laser Zero-order diffractive determines.
Described grating to be measured is positioned on three-D electric displacement platform.
The light that described tunable mid-infrared laser device is sent guides the light ECDC beam piece that laser is sent through beam piece is closed
Reflection.
Described tunable mid-infrared laser device Output of laser wavelength is 1.3 μm~15 μm continuously adjustabes, and laser linewidth is
0.2cm-1。
Described conjunction beam piece is coated with the medium of guiding light reflection anti-reflection to mid-infrared laser to two thang-kng surfaces respectively
Film.
Described half-wave plate is yttrium vanadate crystal, and the front and rear surfaces of crystal are coated with anti-reflection film.
Described polarization spectro piece is placed for 45° angle, and its splitting ratio is 50%.When measurement grating to be measured is to the diffraction of p light
During efficiency, the polarization spectro piece being coated with to the deielectric-coating that p light splitting ratio is 50% is used；Measure diffraction of the grating to be measured to s light
During efficiency, the polarization spectro piece being coated with to the deielectric-coating that s light splitting ratio is 50% is used.
Two-way polarised light is separated by described polarization spectro piece, route the first power meter detection is used as reference light, another
Road is detected via after grating first-order diffraction to be measured by the second power meter, and grating to be measured is calculated by two power meter result of detections
Diffraction efficiency.The position that the detecting location of first power meter and the second power meter is imaged on sensitive film respectively by two-way polarised light
Put given.
Described spectrometer is used to measure the wavelength of mid-infrared laser, through polarization spectro piece mid-infrared laser through to be measured
Enter spectrometer through the decay of overdamping piece after the Zero-order diffractive of grating.The measurement position of spectrometer is sent by guiding light laser
The position that laser is emitted after the Zero-order diffractive of grating to be measured gives.
The present invention has advantages below：
1. using tunable mid-infrared laser device as measurement light source, its wavelength continuously adjustabe, and laser linewidth is narrower, can
To realize that the diffraction efficiency for treating light-metering grid difference incident wavelength carries out continuous direct measurement, its result is more directly perceived, actual effect.
Because the power for measuring laser is higher, can be imaged by sensitive film, therefore the determination of probe power meter position becomes directly perceived, is changing
When laser wavelength of incidence and incident laser angle, the position for adjusting power meter is very simple.
2. using polarizer and wave plate, change the polarization state of measurement laser, it is possible to achieve treat light-metering grid different polarization
The measurement of the incident lower diffraction efficiency of light, its measurement result are more complete.
3. being divided using polarization spectro piece, detected, can be eliminated due to measuring laser by two power meters
Measurement error caused by power is unstable.
4. using the wavelength of spectrometer monitoring measurement laser, it can reduce and be surveyed caused by the drift of measurement laser center wavelength
Error is measured, the position of spectrometer is determined by emergent light of the guiding laser through grating Zero-order diffractive to be measured, it is succinct effective.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the measurement apparatus of mid-infrared light grid diffraction efficiency of the present invention.
Embodiment
As shown in Figure 1, a kind of measurement apparatus of mid-infrared light grid diffraction efficiency, it is characterised in that the device includes：Can
Tune mid-infrared laser device 1 and guiding laser 2, the light that tunable mid-infrared laser device 1 and guiding laser 2 are sent respectively according to
It is mapped to and closes the both side surface of beam piece 3, the light that ECDC beam piece 3 closes beam is irradiated to polarization spectro piece after polarizer 4, half-wave plate 5 successively
6, be divided into two tunnels through the light of polarization spectro piece 6, light enters the first power meter 9 all the way, another way light through the diffraction of grating 7 to be measured again
Secondary to be divided into two tunnels, wherein diffraction light is inputted into spectrometer 12 through attenuator 11 all the way, another way diffraction light enters the second power
Meter 10.
When treating the first-order diffraction efficiencies of light-metering grid 7 and measuring, grating 7 to be measured is placed on three-D electric displacement platform 8
On, three-D electric displacement platform 8 can realize rotation, pitching, the displacement for translating three directions.
When measuring the first-order diffraction efficiency of grating 7 to be measured, the tunable emission measurement laser of mid-infrared laser device 1, measurement
It is changed into p-polarization light into polarizer 4 after the conjunction beam piece 3 that laser is placed through 45° angle, entering 45° angle through half-wave plate 5 places
Polarization spectro piece 6.Now polarization spectro piece 6 is p-polarization light splitting piece, and measurement laser is divided into mutually perpendicular two beams p-polarization
Laser, first laser beam enter the first power meter 9, the beam average laser power are measured by the first power meter 9, its result
For P1；Second laser beam is after the first-order diffraction of grating 7 to be measured, and emergent light enters the second power meter 10, by the second power meter 10
The beam average laser power is measured, its result is P2.By formula η=P2/P1The first-order diffraction effect of grating to be measured is calculated
Rate.Second laser beam is after the Zero-order diffractive of grating 7 to be measured, and emergent light enters spectrometer 12 through attenuator 11, by spectrometer
The wavelength of 12 measurement incident lasers.
The guiding laser that guiding laser 2 is launched is adjusted to after the conjunction beam piece 3 that 45° angle is placed reflects to swash in measurement
The equidirectional transmission of light, guiding laser are sequentially passed through into polarizer 4, half-wave plate 5, polarization spectro piece 6, incided on grating 7 to be measured,
After the Zero-order diffractive of grating 7 to be measured, emergent light enters spectrometer 12 through attenuator 11.
Change the wavelength that tunable mid-infrared laser device 1 launches laser, second laser beam spreads out by the one-level of grating 7 to be measured
Penetrate rear exit direction to change, that is, measure second laser beam and incide the position of the second power meter 10 and change, now make
The position of the light beam of the second power meter 10 is incided with sensitive film determination, adjusts the position measurement second laser of the second power meter 10
The mean power of beam, by formula η=P2/P1The first-order diffraction efficiency of grating to be measured is calculated.At the same time, the zero of grating 7 to be measured
Order diffraction direction changes, that is, the direction for inciding the measurement laser of spectrometer 12 changes, now according to guiding laser
Exit direction, adjust the position of spectrometer 12, measure the wavelength of mid-infrared laser.
Change the anglec of rotation for the three-D electric displacement platform 8 for placing grating 7 to be measured, second laser beam passes through grating 7 to be measured
First-order diffraction after exit direction change, that is, measure second laser beam and incide the position of the second power meter 10 and change
Become, now determine to incide the position of the light beam of the second power meter 10 using sensitive film, the position of the second power meter 10 of adjustment is surveyed
The mean power of flow control dual-laser beam, by formula η=P2/P1The first-order diffraction efficiency of grating to be measured is calculated.At the same time, treat
The Zero-order diffractive direction of light-metering grid 7 changes, that is, the direction for inciding the measurement laser of spectrometer 12 changes, now root
According to the exit direction of guiding laser, the position of spectrometer 12 is adjusted, measures the wavelength of mid-infrared laser.
Half-wave plate 5 is rotated by 90 °, is changed into s polarised lights via the measurement laser of half-wave plate 5, now polarization spectro piece 6 is s
Polarization spectro piece, measurement laser is divided into mutually perpendicular two beams s polarization lasers.S polarization spectroscopes 6 are divided into laser is measured mutually
Two perpendicular beam laser, first laser beam enter the first power meter 9, and the beam average laser power is entered by the first power meter 9
Row measurement, its result is P1；For second laser beam after the first-order diffraction of grating 7 to be measured, emergent light enters the second power meter 10, by
Second power meter 10 measures to the beam average laser power, and its result is P2.By formula η=P2/P1Grating to be measured is calculated
First-order diffraction efficiency.For second laser beam after the Zero-order diffractive of grating 7 to be measured, emergent light enters spectrometer through attenuator 11
12, the wavelength of incident laser is measured by spectrometer 12.
The present invention, which has, realizes the middle infrared ray diffraction light under the conditions of different wave length, incidence angles degree and different polarization characteristic
The direct measurement of the first-order diffraction efficiency of grid, it can reduce caused by measurement light source power is unstable and centre wavelength is drifted about
Measurement error, actual diffraction efficiency of the mid-infrared light grid in practical application can be reflected more true, exactly.
Claims (9)
- A kind of 1. measurement apparatus of mid-infrared light grid diffraction efficiency, it is characterised in that：The device includes tunable mid-infrared laser The light that device (1) and guiding laser (2), tunable mid-infrared laser device (1) and guiding laser (2) are sent is respectively radiated to close Beam piece (3) both side surface, the light that ECDC beam piece (3) closes beam are irradiated to polarization spectro through polarizer (4), half-wave plate after (5) successively Piece (6), it is divided into two tunnels through the light of polarization spectro piece (6), light enters the first power meter (9) all the way, and another way light is through treating light-metering Grid (7) diffraction is again broken down into two tunnels, wherein diffraction light is inputted into spectrometer (12) through attenuator (11) all the way, another way diffraction Light enters the second power meter (10).
- 2. the measurement apparatus of mid-infrared light grid diffraction efficiency according to claim 1, it is characterised in that：Grating (7) to be measured It is positioned on three-D electric displacement platform (8).
- 3. the measurement apparatus of mid-infrared light grid diffraction efficiency according to claim 1, it is characterised in that：It is infrared in tunable The light that laser (1) is sent reflects through beam piece (3), the light ECDC beam piece (3) that guiding laser (2) is sent is closed.
- 4. the measurement apparatus of mid-infrared light grid diffraction efficiency according to claim 1, it is characterised in that：Described is tunable Mid-infrared laser device (1) Output of laser wavelength is 1.3 μm~15 μm continuously adjustabes, laser linewidth 0.2cm-1。
- 5. the measurement apparatus of mid-infrared light grid diffraction efficiency according to claim 1, it is characterised in that：Described conjunction beam piece (3) two thang-kng surfaces are coated with the deielectric-coating of guiding light reflection anti-reflection to mid-infrared laser respectively.
- 6. the measurement apparatus of mid-infrared light grid diffraction efficiency according to claim 1, it is characterised in that：Described half-wave plate (5) it is yttrium vanadate crystal, the front and rear surfaces of crystal are coated with anti-reflection film.
- 7. the measurement apparatus of mid-infrared light grid diffraction efficiency according to claim 1, it is characterised in that：Described polarization point Mating plate (6) is placed for 45° angle, and its splitting ratio is 50%.When measuring grating (7) to be measured to the diffraction efficiency of p light, using being coated with Polarization spectro piece (6) to p light splitting ratio for 50% deielectric-coating；When measuring grating to be measured (7) to the diffraction efficiency of s light, make With the polarization spectro piece (6) being coated with to the deielectric-coating that s light splitting ratio is 50%.
- 8. the measurement apparatus of mid-infrared light grid diffraction efficiency according to claim 1, it is characterised in that：By described polarization Light splitting piece (6) separates two-way polarised light, and the first power meter of route (9) detection is used as reference light, and another way is via grating to be measured (7) detected after first-order diffraction by the second power meter (10), spreading out for grating to be measured (7) is calculated by two power meter result of detections Penetrate efficiency；The detecting location of first power meter (9) and the second power meter (10) is imaged on sensitive film respectively by two-way polarised light Position give.
- A kind of 9. measurement apparatus of mid-infrared light grid diffraction efficiency according to claim 1, it is characterised in that：Described light Spectrometer (12) is used to measure the wavelength of mid-infrared laser, through polarization spectro piece (6) mid-infrared laser through grating to be measured (7) Enter spectrometer (12) through overdamping piece (11) decay after Zero-order diffractive, the measurement position of spectrometer (12) is by guiding laser (2) position that the laser sent is emitted after the Zero-order diffractive of grating to be measured (7) gives.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108195467A (en) * | 2017-12-19 | 2018-06-22 | 上海理工大学 | Double light path spectral detection system based on double glittering face echelle grating |
| CN108332945A (en) * | 2017-12-26 | 2018-07-27 | 湖北航天技术研究院总体设计所 | A kind of diffraction efficiency of grating test system and method |
| CN112649179A (en) * | 2020-07-28 | 2021-04-13 | 上海复享光学股份有限公司 | Method, system, computing device and storage medium for detecting blazed gratings |
| CN114421268B (en) * | 2022-01-07 | 2023-09-22 | 中国人民解放军国防科技大学 | Method and system for testing write transmission spectrum of mid-infrared fiber grating in real time |
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| JPH0282134A (en) * | 1988-08-23 | 1990-03-22 | Siemens Ag | Method and device for measuring optical attenuance of optical medium |
| CN102539122A (en) * | 2012-01-04 | 2012-07-04 | 西北工业大学 | Method and system for measuring diffraction efficiency of grating by using parabolic reflector |
| CN102620907A (en) * | 2012-03-19 | 2012-08-01 | 中国科学院上海技术物理研究所 | Method for measuring phase delay angles of optical device |
| CN103674498A (en) * | 2014-01-08 | 2014-03-26 | 中国工程物理研究院激光聚变研究中心 | Grating sampling parameter detection device |
| CN104101485A (en) * | 2014-07-04 | 2014-10-15 | 上海理工大学 | Device and method for detecting concave grating resolution and diffraction efficiency |
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Patent Citations (5)
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|---|---|---|---|---|
| JPH0282134A (en) * | 1988-08-23 | 1990-03-22 | Siemens Ag | Method and device for measuring optical attenuance of optical medium |
| CN102539122A (en) * | 2012-01-04 | 2012-07-04 | 西北工业大学 | Method and system for measuring diffraction efficiency of grating by using parabolic reflector |
| CN102620907A (en) * | 2012-03-19 | 2012-08-01 | 中国科学院上海技术物理研究所 | Method for measuring phase delay angles of optical device |
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| CN104101485A (en) * | 2014-07-04 | 2014-10-15 | 上海理工大学 | Device and method for detecting concave grating resolution and diffraction efficiency |
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