CN102564734A - Automatic testing device and testing method for laser damage threshold value - Google Patents
Automatic testing device and testing method for laser damage threshold value Download PDFInfo
- Publication number
- CN102564734A CN102564734A CN2011100615820A CN201110061582A CN102564734A CN 102564734 A CN102564734 A CN 102564734A CN 2011100615820 A CN2011100615820 A CN 2011100615820A CN 201110061582 A CN201110061582 A CN 201110061582A CN 102564734 A CN102564734 A CN 102564734A
- Authority
- CN
- China
- Prior art keywords
- laser
- damage threshold
- automatic testing
- image acquisition
- testing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses an automatic testing device and an automatic testing method for a laser damage threshold value. The automatic testing device comprises a laser, a light splitting attenuation system, a focusing system, an energy acquisition system, a beam acquisition system and a processing system, wherein the light splitting attenuation system comprises a high reflective mirror, a high transmitting mirror, a linkage mechanism and a splay compensation high transmitting mirror; and the high reflective mirror and the high transmitting mirror are transposed under the action of the linkage mechanism, and in the transposition process, the front mirror surfaces of the high reflective mirror and the high transmitting mirror are positioned on the same plane. The testing method comprises the following steps of: a) calculating damage energy on the unit area of a laser beam; b) dotting a lens to be tested to form a plurality of test dots by using the laser beam, and observing the damage condition of the surface of the lens to be tested by using the beam acquisition system; and c) regulating the energy of the laser beam, and repeating the steps a and b until the damage threshold value is measured. The structure and the testing method provided by the invention are low in test errors and high in applicability and accuracy.
Description
Technical field
The present invention relates to the measuring technology of the laser damage threshold of employed eyeglass (containing coatings) in a kind of laser optical path, particularly relate to a kind of laser damage threshold automatic testing equipment and method of testing.
Background technology
In the high-power high-energy laser system, there is a large amount of thin-film components, can the resisting laser damage ability of these elements and system normally effectively operation be closely related.Existing research shows that the destruction of thin-film component under light laser is determined by the anti-laser ability of element surface fully.Therefore, along with the continuous expansion of superpower laser range of application, the importance of film resisting laser damage performance becomes increasingly conspicuous, so that the damage from laser threshold values becomes the indispensable performance index of optical thin film element.Film must have the bottleneck that high damage from laser threshold values has become the anti-laser activity of optical element; The key that addresses this problem is accurately to measure the damage from laser threshold values of film, thereby the test of optical thin film laser threshold is become the technical matters of being badly in need of solution.
In international standard ISO11254, the method for testing of optical thin film laser threshold is to be summarized in the method for testing of optical surface damage from laser threshold values, and optical surface can be divided into plated film face and two kinds of situation of plated film face (naked surface) not.Different to laser beam and optical thin film umber of exposures, international standard is divided into two parts: ISO 11254-1 and ISO 11254-2.The former is called " 1 pair 1 " test, also cries " test of single irradiation ", is mainly used in the single laser device; The latter is called " S is to 1 test ", also cries " repeatedly irradiation test ", for repetitive frequency laser is considered.The method of testing of the optical thin-film laser injure threshold values of China roughly is divided into 3 types: " the enterprise's mark " that (1) constituent parts is made by oneself; (2) national military standard; (3) national standard.
Yet,, therefore, up to the present also do not have the proving installation of multipurpose universal type commercial lasers threshold values on the market owing to Wavelength of Laser, energy, pulsewidth etc. have diversity.Everybody combines own enterprise or breadboard actual demand, builds test platform temporarily, tests with reference to existing standard, causes the index of test uneven, debugging complicacy during test, and the test data that finally obtains is uncertain big.
In view of above drawback, be necessary to provide a kind of laser damage threshold automatic testing equipment and method of testing in fact.
Summary of the invention
The objective of the invention is to above-mentioned existing defective and deficiency; For society provides a kind of laser damage threshold automatic testing equipment and method of testing with laser instrument and follow-up test system modular; It not only can satisfy the test of dissimilar damage thresholds, and its testing efficiency is high, reliable test result.
For realizing above-mentioned purpose; The technical scheme that the present invention takes is: a kind of laser damage threshold automatic testing equipment; It comprises: the beam split attenuation factor, focusing system, energy collecting system and the light beam acquisition system that are provided with in regular turn according to optical path direction; Said beam split attenuation factor and said energy collecting system are positioned on first primary optical axis that external laser gives off laser beam, and said focusing system, said light beam acquisition system are positioned on second primary optical axis vertical with first primary optical axis, wherein; Said beam split attenuation factor comprises high reflection mirror, high diaphotoscope and link gear, said high reflection mirror, high diaphotoscope transposition under the effect of said link gear.
Said laser damage threshold automatic testing equipment comprises that also the laser beam that is used for that external laser is sent imports the light beam import system of beam split attenuation factor; Said light beam import system comprises the catoptron and the rotating mechanism of two relative and settings parallel to each other, and said rotating mechanism is used to adjust the setting height(from bottom) of two catoptrons.
The said high reflection mirror and first primary optical axis are obliquely installed, and said high diaphotoscope and said high reflection mirror setting are at grade.
Described beam split attenuation factor comprises that also the Eight characters compensates high diaphotoscope, and the said Eight characters compensates high diaphotoscope and described high reflection mirror or high diaphotoscope and is arranged to Eight characters shape.
Two catoptrons in the said light beam import system all become the 45 setting with surface level.
Said focusing system comprises at least one condenser lens and is used to regulate first motion of condenser lens at the vertical direction height.
Said light beam acquisition system comprises first image acquisition units, second image acquisition units, second motion and is used for the clamping tooling of outside to be measured of clamping; Said first image acquisition units is used to gather by said beam split attenuation factor penetrates next incipient beam of light, and said second image acquisition units is used to observe the laser facula on outside to be measured.
Said clamping tooling is provided with the outside and treats that lateral plate becomes 5 degree angle lappings oblique with plane, first primary optical axis place.
Said first image acquisition units and said second image acquisition units all are CCD.
The enlargement ratio of said second image acquisition units is greater than or equal to 50 times.
Said laser damage threshold automatic testing equipment also comprises a disposal system that is used to control said link gear.
The present invention also provides a kind of method of testing of utilizing said apparatus, and it may further comprise the steps:
A) the damage energy on the laser beam unit area of measurement external laser output;
B) to be measured is moved in the light path through a clamping tooling and second motion, and utilize said laser beam on to be measured, to hit a plurality of test points, and observe the degree of impairment on to be measured surface with the light beam acquisition system;
C) energy of the laser beam of adjustment external laser output, and repeat abovementioned steps a to step b, till recording damage threshold.
Said step a comprises:
A1) the high diaphotoscope of beam split attenuation factor is implanted in the light path;
A2) start the external laser outgoing laser beam, the light beam import system is installed on the direction of propagation of laser beam, it is directed in the beam split attenuation factor through the light beam import system;
A3) energy of the laser beam through energy collecting system collection input is beaten on the light beam acquisition system through focusing system simultaneously, obtains the laser faculas of different sizes, calculates the damage energy on the unit area through disposal system.
Said step b comprises:
B1) during initialization, said first image acquisition units 51 is gathered by said beam split attenuation factor 20 and is penetrated the incipient beam of light of coming;
B2) outside to be measured effect at said clamping tooling and said second motion moves down into light path, receives said beam splitting system 20 and penetrates next laser beam, and simultaneously, said first image acquisition units 51 shifts out light path;
B3) outside to be measured receive said beam splitting system 20 penetrate behind the laser beam that comes move to said second image acquisition units 52 below, the laser facula in outside to be measured of said second image acquisition units 52 observations.
After the present invention adopted as above technical scheme, its advantage showed:
1. easy to use, the high reflection mirror of said beam split attenuation factor, high diaphotoscope exchange under the effect of link gear, guarantee that in interchange process the preceding minute surface of aforesaid high reflection mirror, high diaphotoscope is positioned on the same plane.When high diaphotoscope was positioned at front surface, the Eight characters of back compensates high diaphotoscope made light path still along former road, has brought convenience for light modulation;
2. applicability is strong, and light beam import system of the present invention does not have Compulsory Feature to the centre-height of laser instrument, and the sheet catoptron height of winning arbitrarily is provided with within the specific limits;
3. efficient is high, and the present invention has adopted link gear, second motion and second motion to make whole testing device link automatically, and automaticity is high, has not only improved the work efficiency of test, has also guaranteed the reliability of test.
Description of drawings
Fig. 1 is the structural representation of laser damage threshold automatic testing equipment of the present invention.
Embodiment
Pass through specific embodiment below, and combine accompanying drawing, technical scheme of the present invention is further specified.
Please refer to shown in Figure 1; A kind of laser damage threshold automatic testing equipment 100; It comprises: laser instrument 10, beam split attenuation factor 20, focusing system 30, energy collecting system 40, sample stage, light beam acquisition system 50 and disposal system (figure does not show); Wherein, Said beam split attenuation factor 20 and said energy collecting system 40 are positioned on first primary optical axis that laser instrument 10 gives off laser beam; Said focusing system 30, said light beam acquisition system 50 are positioned on second primary optical axis vertical with first primary optical axis, and said beam split attenuation factor 20 comprises that the high diaphotoscope of a high reflection mirror 21,22, a link gear, an Eight characters compensate high diaphotoscope 23 and an iris.Said high reflection mirror 21, high diaphotoscope 22 can be realized location swap under the effect of said link gear, and the preceding minute surface that in interchange process, is remaining aforesaid high reflection mirror 21, high diaphotoscope 22 is positioned on the same plane.
Said laser damage threshold automatic testing equipment 100 comprises that also a laser beam that is used for that laser instrument is sent imports the light beam import system 60 of beam split attenuation factor 20; Said light beam import system 60 comprises the catoptron (61,62) and a rotating mechanism (figure does not show) of two relative and settings parallel to each other; Said rotating mechanism is used to adjust the setting height(from bottom) of two catoptrons (61,62), with the laser beam guaranteeing to send from laser instrument on the working surface of two catoptrons (61,62).Because said catoptron 61 can move up and down within the specific limits, does not have Compulsory Feature so the center of 60 pairs of laser instruments 10 of light beam import system of the present invention is high, thereby satisfies the quick replacing of various lasers 10.In embodiments of the present invention, preferred two groups parallel and become two catoptrons (61,62) You Jia of 45 with surface level.The aforementioned Eight characters compensates on first primary optical axis that high diaphotoscope 23 is arranged on the laser that penetrates from light beam import system 60, and itself and aforesaid high diaphotoscope 22 roughly are Eight characters setting.When said high diaphotoscope 22 was positioned at front surface, the Eight characters of back compensates high diaphotoscope 23 made light path still along former road, has brought convenience for light modulation.
Said beam split attenuation factor 20 comprises that the high diaphotoscope of a high reflection mirror 21,22, a link gear (figure does not show), an Eight characters compensate high diaphotoscope 23 and an iris.Said high reflection mirror 21, high diaphotoscope 22 can be realized exchanging under the effect of said link gear, and the preceding minute surface that in interchange process, is remaining aforesaid high reflection mirror 21, high diaphotoscope 22 is positioned on the same plane.The said Eight characters compensates on first primary optical axis that high diaphotoscope 23 is arranged on the laser that penetrates from light beam import system 60, and itself and said high diaphotoscope 22 roughly are Eight characters setting.When said high diaphotoscope 22 was positioned at front surface, the Eight characters of back compensates high diaphotoscope 23 made light path still along former road, has brought convenience for light modulation.
Said focusing system 30 comprises a condenser lens 31 and first motion (figure does not show) of regulating condenser lens at the vertical direction height; The focal length of condenser lens 31 is not less than 50, and the minimum clear aperture in focusing system 30 porch should be greater than 6 times of incident beam bore.Energy collecting system 40 is used to gather the energy of laser beam.
Said light beam acquisition system 50 comprises one first image acquisition units 51, one second image acquisition units 52, second motion (figure does not show) and a clamping tooling (scheming not show) that is used for outside to be measured of clamping; Said second motion is used for changing the position of said clamping tooling and said first image acquisition units 51; Said first image acquisition units 51 is used to gather by said beam split attenuation factor 20 penetrates next incipient beam of light, and said second image acquisition units 52 is used to observe the laser facula on outside to be measured.Said clamping tooling is provided with the outside and treats to become 5 in plane, lateral plate and first primary optical axis place to spend angle lappings oblique, treats that to prevent to incide the outside light on the lateral plate returns and damages other elements in the light path along original optical path.The concrete principle of work of said light beam acquisition system 50 is: during initialization; Said first image acquisition units 51 is gathered by said beam split attenuation factor 20 and is penetrated next incipient beam of light; Outside to be measured effect at said clamping tooling and said second motion moves down into light path; Receive said beam splitting system 20 and penetrate next laser beam, simultaneously, said first image acquisition units 51 shifts out light path; Outside to be measured receive said beam splitting system 20 penetrate behind the laser beam that comes move to said second image acquisition units 52 below, the laser facula in outside to be measured of said second image acquisition units 52 observations.
The enlargement ratio of said second image acquisition units 52 is greater than or equal to 50 times, and it is used to observe the lip-deep damage from laser of sample.In the film damage, mainly show as scar, pin hole, slabbing etc.The damage of high-reflecting film shows as the scar that the film surface burn forms basically, and polarizing coating and anti-reflection film mainly show as little air marks gathering.Thereby high-reflecting film is mainly laser ablation and destroys, and polarizing coating and anti-reflection film are mainly laser standing wave field and destroy, and the ablation effect is less, and it is poor that anti-laser is interrupted striking capabilities.Second motion and to be measured clamping tooling are cooperated together, are used to load to be measured and it is positioned over sample stage.
Be provided with a plurality of communications and analysis software in the said disposal system; Laser facula information on the outside to be measured of said second image acquisition units collection is carried out computing, processing, and it controls the action of said rotating mechanism, link gear, first motion and second motion.
In another embodiment of the present invention, a kind of method of testing of utilizing said apparatus also is provided, it may further comprise the steps,
A) the damage energy on the laser beam unit area of measurement external laser output;
B) add rotating mechanism with to be measured through a translation and move in the light path, and utilize said laser beam on to be measured, to hit a plurality of test points, and observe the degree of impairment on to be measured surface with the light beam acquisition system;
C) energy of the laser beam of adjustment external laser output, and repeat abovementioned steps a to step b, till recording damage threshold.
Wherein, said step a comprises:
A1) the high diaphotoscope of beam split attenuation factor is implanted in the light path;
A2) start the external laser outgoing laser beam, light beam import system 60 is installed on the direction of propagation of laser beam, it is directed in the beam split attenuation factor through the light beam import system;
A3) energy of the laser beam through energy collecting system collection input; Simultaneously through 30 dozens of focusing systems on the light beam acquisition system; Obtain the laser facula of different sizes, calculate automatically, draw the damage energy on the unit area through the software systems that are provided with in the disposal system.
Said step b comprises:.
B1) during initialization, said first image acquisition units 51 is gathered by said beam split attenuation factor and is penetrated the incipient beam of light of coming;
B2) outside to be measured effect at said clamping tooling and said second motion moves down into light path, receives said beam splitting system and penetrates next laser beam, and simultaneously, said first image acquisition units shifts out light path;
B3) outside to be measured receive said beam splitting system penetrate behind the laser beam that comes move to said second image acquisition units below, the laser facula in outside to be measured of said second image acquisition units observation.
In order to guarantee whole device to test best results; Requirement is when test; The spacing of to be measured lip-deep laser facula test point should be more than or equal to 3 times of to be measured lip-deep spot diameters; And whole test is to be 16～32 ℃ in environment temperature, and relative humidity is less than carrying out under 50%, 1000 grade of cleaning condition.
Laser damage threshold automatic testing equipment of the present invention and method of testing; Be not restricted to described in instructions and the embodiment; Therefore for the personnel of familiar field, can easily realize additional advantage and modification; So under the situation of the spirit of the universal that does not deviate from claim and equivalency range and limited and scope, the examples shown that the present invention is not limited to specific details, representational equipment and illustrates here and describe.
Claims (14)
1. laser damage threshold automatic testing equipment; It comprises: the beam split attenuation factor, focusing system, energy collecting system and the light beam acquisition system that are provided with in regular turn according to optical path direction; Said beam split attenuation factor and said energy collecting system are positioned on first primary optical axis that external laser gives off laser beam; Said focusing system, said light beam acquisition system are positioned on second primary optical axis vertical with first primary optical axis; It is characterized in that: said beam split attenuation factor comprises high reflection mirror, high diaphotoscope and link gear, said high reflection mirror, high diaphotoscope transposition under the effect of said link gear.
2. laser damage threshold automatic testing equipment as claimed in claim 1; It is characterized in that: said laser damage threshold automatic testing equipment comprises that also the laser beam that is used for that external laser is sent imports the light beam import system of beam split attenuation factor; Said light beam import system comprises the catoptron and the rotating mechanism of two relative and settings parallel to each other, and said rotating mechanism is used to adjust the setting height(from bottom) of two catoptrons.
3. laser damage threshold automatic testing equipment as claimed in claim 1 is characterized in that: the said high reflection mirror and first primary optical axis are obliquely installed, and said high diaphotoscope and said high reflection mirror setting are at grade.
4. laser damage threshold automatic testing equipment as claimed in claim 1 is characterized in that: described beam split attenuation factor comprises that also the Eight characters compensates high diaphotoscope, and the said Eight characters compensates high diaphotoscope and described high reflection mirror or high diaphotoscope and is arranged to Eight characters shape.
5. laser damage threshold automatic testing equipment as claimed in claim 2 is characterized in that: two catoptrons in the said light beam import system all become the 45 setting with surface level.
6. laser damage threshold automatic testing equipment as claimed in claim 1 is characterized in that: said focusing system comprises at least one condenser lens and is used to regulate first motion of condenser lens at the vertical direction height.
7. laser damage threshold automatic testing equipment as claimed in claim 6; It is characterized in that: said light beam acquisition system comprises first image acquisition units, second image acquisition units, second motion and is used for the clamping tooling of outside to be measured of clamping; Said first image acquisition units is used to gather by said beam split attenuation factor penetrates next incipient beam of light, and said second image acquisition units is used to observe the laser facula on outside to be measured.
8. laser damage threshold automatic testing equipment as claimed in claim 1 is characterized in that: said clamping tooling is provided with the outside and treats that lateral plate becomes 5 degree angle lappings oblique with plane, first primary optical axis place.
9. laser damage threshold automatic testing equipment as claimed in claim 1 is characterized in that: said first image acquisition units and said second image acquisition units all are CCD.
10. laser damage threshold automatic testing equipment as claimed in claim 9 is characterized in that: the enlargement ratio of said second image acquisition units is greater than or equal to 50 times.
11. laser damage threshold automatic testing equipment as claimed in claim 1 is characterized in that: said laser damage threshold automatic testing equipment also comprises a disposal system that is used to control said link gear.
12. the method for testing with the said device of claim 1 is characterized in that: may further comprise the steps,
A) the damage energy on the laser beam unit area of measurement external laser output;
B) to be measured is moved in the light path through a clamping tooling and second motion, and utilize said laser beam on to be measured, to hit a plurality of test points, and observe the degree of impairment on to be measured surface with the light beam acquisition system;
C) energy of the laser beam of adjustment external laser output, and repeat abovementioned steps a to step b, till recording damage threshold.
13. method of testing as claimed in claim 12 is characterized in that: said step a comprises:
A1) the high diaphotoscope of beam split attenuation factor is implanted in the light path;
A2) start the external laser outgoing laser beam, the light beam import system is installed on the direction of propagation of laser beam, it is directed in the beam split attenuation factor through the light beam import system;
A3) energy of the laser beam through energy collecting system collection input is beaten on the light beam acquisition system through focusing system simultaneously, obtains the laser faculas of different sizes, calculates the damage energy on the unit area through disposal system.
14. method of testing as claimed in claim 12 is characterized in that: said step b comprises:
B1) during initialization, said first image acquisition units 51 is gathered by said beam split attenuation factor 20 and is penetrated the incipient beam of light of coming;
B2) outside to be measured effect at said clamping tooling and said second motion moves down into light path, receives said beam splitting system 20 and penetrates next laser beam, and simultaneously, said first image acquisition units 51 shifts out light path;
B3) outside to be measured receive said beam splitting system 20 penetrate behind the laser beam that comes move to said second image acquisition units 52 below, the laser facula in outside to be measured of said second image acquisition units 52 observations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110061582.0A CN102564734B (en) | 2011-03-15 | 2011-03-15 | Automatic testing device and testing method for laser damage threshold value |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110061582.0A CN102564734B (en) | 2011-03-15 | 2011-03-15 | Automatic testing device and testing method for laser damage threshold value |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102564734A true CN102564734A (en) | 2012-07-11 |
| CN102564734B CN102564734B (en) | 2014-12-03 |
Family
ID=46410748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110061582.0A Expired - Fee Related CN102564734B (en) | 2011-03-15 | 2011-03-15 | Automatic testing device and testing method for laser damage threshold value |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102564734B (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103226057A (en) * | 2013-03-27 | 2013-07-31 | 同济大学 | Multifunctional high-efficiency laser damage test device and method in vacuum environment |
| CN103364176A (en) * | 2012-12-06 | 2013-10-23 | 西安工业大学 | Testing system for laser induced damage threshold |
| CN104950433A (en) * | 2014-08-15 | 2015-09-30 | 中国水利水电科学研究院 | Sheet type light source system of laser beam |
| CN106959206A (en) * | 2017-03-21 | 2017-07-18 | 中国人民解放军国防科学技术大学 | Fused quartz element zero probability damage threshold Forecasting Methodology based on photo-thermal weak absorbing |
| CN108287061A (en) * | 2018-01-19 | 2018-07-17 | 中国工程物理研究院激光聚变研究中心 | A kind of laser optical element life tests and service life probabilistic testing method and system |
| CN108572161A (en) * | 2018-04-10 | 2018-09-25 | 淮阴工学院 | Optical coherence tomography based on partial wave front interferometer |
| CN108955582A (en) * | 2018-06-21 | 2018-12-07 | 中国人民解放军战略支援部队航天工程大学 | Laser focal beam spot area measuring device |
| CN109186755A (en) * | 2018-08-20 | 2019-01-11 | 北京国科世纪激光技术有限公司 | A kind of energy of lasers monitoring device |
| CN112033644A (en) * | 2020-07-24 | 2020-12-04 | 中国科学院空天信息创新研究院 | High-reflection sample laser damage threshold testing device |
| CN112630983A (en) * | 2020-12-24 | 2021-04-09 | 中国工程物理研究院激光聚变研究中心 | Laser system, laser-induced damage testing system and method |
| CN112730433A (en) * | 2020-12-25 | 2021-04-30 | 中国工程物理研究院激光聚变研究中心 | Laser damage testing system and method |
| CN114486191A (en) * | 2022-01-18 | 2022-05-13 | 湖北航天技术研究院总体设计所 | Laser load capacity testing system and method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4667101A (en) * | 1985-02-04 | 1987-05-19 | The United States Of America As Respresented By The United States Department Of Energy | Predicting threshold and location of laser damage on optical surfaces |
| JP2005114720A (en) * | 2003-09-19 | 2005-04-28 | Japan Science & Technology Agency | Method for evaluating threshold of laser damage to optical material |
| CN1752739A (en) * | 2005-10-21 | 2006-03-29 | 中国科学院上海光学精密机械研究所 | Spectrophotometer for quickly measuring spectrum |
| CN201096986Y (en) * | 2007-10-31 | 2008-08-06 | 中国科学院上海光学精密机械研究所 | Target surface focal spot monitoring device |
| CN201622245U (en) * | 2009-12-02 | 2010-11-03 | 西安工业大学 | Combined testing device for laser damage threshold of film and optical element |
-
2011
- 2011-03-15 CN CN201110061582.0A patent/CN102564734B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4667101A (en) * | 1985-02-04 | 1987-05-19 | The United States Of America As Respresented By The United States Department Of Energy | Predicting threshold and location of laser damage on optical surfaces |
| JP2005114720A (en) * | 2003-09-19 | 2005-04-28 | Japan Science & Technology Agency | Method for evaluating threshold of laser damage to optical material |
| CN1752739A (en) * | 2005-10-21 | 2006-03-29 | 中国科学院上海光学精密机械研究所 | Spectrophotometer for quickly measuring spectrum |
| CN201096986Y (en) * | 2007-10-31 | 2008-08-06 | 中国科学院上海光学精密机械研究所 | Target surface focal spot monitoring device |
| CN201622245U (en) * | 2009-12-02 | 2010-11-03 | 西安工业大学 | Combined testing device for laser damage threshold of film and optical element |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103364176A (en) * | 2012-12-06 | 2013-10-23 | 西安工业大学 | Testing system for laser induced damage threshold |
| CN103364176B (en) * | 2012-12-06 | 2016-01-20 | 西安工业大学 | A kind of laser damage threshold test macro |
| CN103226057A (en) * | 2013-03-27 | 2013-07-31 | 同济大学 | Multifunctional high-efficiency laser damage test device and method in vacuum environment |
| CN104950433A (en) * | 2014-08-15 | 2015-09-30 | 中国水利水电科学研究院 | Sheet type light source system of laser beam |
| CN104950433B (en) * | 2014-08-15 | 2017-09-05 | 中国水利水电科学研究院 | Laser beam sheet laser system |
| CN106959206A (en) * | 2017-03-21 | 2017-07-18 | 中国人民解放军国防科学技术大学 | Fused quartz element zero probability damage threshold Forecasting Methodology based on photo-thermal weak absorbing |
| CN108287061A (en) * | 2018-01-19 | 2018-07-17 | 中国工程物理研究院激光聚变研究中心 | A kind of laser optical element life tests and service life probabilistic testing method and system |
| CN108572161A (en) * | 2018-04-10 | 2018-09-25 | 淮阴工学院 | Optical coherence tomography based on partial wave front interferometer |
| CN108955582A (en) * | 2018-06-21 | 2018-12-07 | 中国人民解放军战略支援部队航天工程大学 | Laser focal beam spot area measuring device |
| CN109186755A (en) * | 2018-08-20 | 2019-01-11 | 北京国科世纪激光技术有限公司 | A kind of energy of lasers monitoring device |
| CN109186755B (en) * | 2018-08-20 | 2021-02-12 | 北京国科世纪激光技术有限公司 | Laser energy monitoring device |
| CN112033644A (en) * | 2020-07-24 | 2020-12-04 | 中国科学院空天信息创新研究院 | High-reflection sample laser damage threshold testing device |
| CN112033644B (en) * | 2020-07-24 | 2022-11-08 | 中国科学院空天信息创新研究院 | High-reflection sample laser damage threshold testing device |
| CN112630983A (en) * | 2020-12-24 | 2021-04-09 | 中国工程物理研究院激光聚变研究中心 | Laser system, laser-induced damage testing system and method |
| CN112730433A (en) * | 2020-12-25 | 2021-04-30 | 中国工程物理研究院激光聚变研究中心 | Laser damage testing system and method |
| CN114486191A (en) * | 2022-01-18 | 2022-05-13 | 湖北航天技术研究院总体设计所 | Laser load capacity testing system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102564734B (en) | 2014-12-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102564734B (en) | Automatic testing device and testing method for laser damage threshold value | |
| US7064817B1 (en) | Method to determine and adjust the alignment of the transmitter and receiver fields of view of a LIDAR system | |
| CN103098319B (en) | Laser beam analytical equipment | |
| CN101266926B (en) | Laser drawing method and apparatus | |
| CN101762332B (en) | Single ultrashort laser pulse contrast measuring device | |
| CN103308005B (en) | The Photoperiodic effects method of the anti-photoelectric observing collimation device of linear array | |
| CN102819014B (en) | Optical system for testing laser distance measurer performance based on off-axis parabolic mirror | |
| US9574946B2 (en) | Spatiotemporally resolved far-field pulse contrast measuring method and device | |
| CN100492098C (en) | Target surface focal spot monitoring device | |
| CN104814716A (en) | Laser system and method for detecting biomechanical property of cornea | |
| CN201935737U (en) | Laser pulse waveform measuring device | |
| CN111769870B (en) | Detection device and detection method for relay light path assembly of space laser communication terminal | |
| CN202159173U (en) | Space adjusting mechanism and apparatus for alignment of polarization maintaining fiber collimator | |
| CN104748674A (en) | Focus monitoring device and method | |
| CN102589848A (en) | System for testing optical thin film damage threshold | |
| CN103017664A (en) | Method and system for calibrating laser beam analyzer | |
| CN116879298A (en) | Multifunctional laser damage threshold automatic test system | |
| CN202216766U (en) | Collimated light beam detection device | |
| CN104062299A (en) | Device and method using amplified spontaneous emission(ASE) light source to test optical element damage threshold | |
| CN113346949B (en) | Laser communication testing device and method based on light pipe simulation distance and divergence angle | |
| CN201096986Y (en) | Target surface focal spot monitoring device | |
| CN204924614U (en) | Monitoring devices is floated at debugging of laser entry angle and angle | |
| CN112186475B (en) | Laser pulse shaping device and method, pulse shaper and optical system | |
| CN112304574B (en) | Image quality testing device and method for optical system with optical despin assembly | |
| CN111707448B (en) | Efficiency detection device and efficiency detection method for optical component of space laser communication terminal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141203 Termination date: 20200315 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |