CN201096986Y - Target face focus spot monitoring device - Google Patents
Target face focus spot monitoring device Download PDFInfo
- Publication number
- CN201096986Y CN201096986Y CNU2007200768261U2007200768261U CN200720076826U CN201096986Y CN 201096986 Y CN201096986 Y CN 201096986Y CN U2007200768261U2007200768261 U CNU2007200768261U2007200768261 U CN U2007200768261U2007200768261U CN 200720076826 U CN200720076826 U CN 200720076826U CN 201096986 Y CN201096986 Y CN 201096986Y
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- target surface
- target
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- optical axis
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Abstract
The utility model relates to a target surface burned spot monitoring device for laser targeting. The monitoring device comprises a parallel laser beam shooting light path, a target surface imaging light path, an optical axis abut jointing system and an image receiving system. The parallel laser beam shooting light path is used for shooting simulative light beams, the target surface imaging light path is used for receiving scattered light shoot by the target surface burned spots to perform imaging to the target surface, the optical axis abut jointing system realizes the abut joint of the optical axis of the target surface burned spot monitoring device of the utility model and the optical axis of targeting light beams, the image receiving system is used for receiving a target surface image imaged by the target surface imaging light path and displaying the target surface image on the monitoring device, and the actual size of the target surface burned spots can be accurately measured through calculating the sizes of images of the target surface burned spots received by a CCD video camera. The monitoring device of the utility model not only can provide parallel laser beams identical to calibers of the laser beams of actual targeting, but also can monitor the target spots through higher multiplying factor simultaneously, to improve the adjusting precision of target lens, therefore to improve the efficiency of the laser target.
Description
Technical field
The utility model relates to a kind of target system of taking aim at, particularly a kind of for ultrashort ultrafast laser device provide the simulation light beam, simultaneously target surface focal spot is carried out device for monitoring.
Background technology
In ultrashort ultrafast laser device, laser beam forms a focal spot on target surface after the target mirror focuses on, the shape of this focal spot, size and play a part for the efficient of laser target shooting in the positional precision of target surface crucial, so the adjustment of target mirror is just seemed very important.But because the launch time of actual laser beam of practicing shooting is very short, and power is very high, can not be as the reference beam of adjustment optical element.Therefore, practice shooting and all to adopt the simulation light beam of launching continuously to replace actual target practice light beam to come the adjustment optical element as last as the reference light beam.
Formerly in the technology, generally adopt the device of structure shown in Figure 1 to provide the simulation light beam, and the size and the position of target surface focal spot are monitored for ultrashort ultrafast laser device.The a branch of thin parallel beam that is sent by LASER Light Source 1 imports target chamber 2 along the optical axis of target practice light beam, as the simulation light beam, focuses on the target 204 through target mirror 203 again.The scattered light that is produced by target 204 surfaces sees through window glass 205, is received imagings and is shown on the monitor 12 by long-focus microscope 3.
The shortcoming of above-mentioned technology formerly is:
1. the simulation beam size that provides can not truly reflect the focal spot situation of actual target practice light beam after the target mirror focuses on much smaller than the reality light beam of practicing shooting, and therefore can not come the target mirror is carried out precision adjustment with respect to the position of target surface with the simulation light beam.
2. the microscopical enlargement ratio of common long-focus is less, and depth of focus is big, and is low to the measuring accuracy of the size of target surface focal spot and position.
3. need take the observation window on the target chamber.
Summary of the invention
The purpose of this utility model is to overcome the shortcoming of above-mentioned technology formerly, a kind of target surface focal spot monitoring device is provided, this device can either provide and the identical collimated laser beam of actual target practice laser beam bore, can monitor target spot with higher enlargement ratio again simultaneously, with the adjustment precision of raising target mirror, thus the efficient of raising laser target shooting.
Technical solution of the present utility model is as follows:
A kind of target surface focal spot monitoring device that is used for laser target shooting is characterized in comprising:
Collimated laser beam emission light path comprises LASER Light Source and constitutes along emergent light direction catoptron, focus lamp, Amici prism and the principal goods mirror successively of this LASER Light Source that the focus of described focus lamp is positioned on the focal plane of principal goods mirror;
The target surface imaging optical path, by successively principal goods mirror, Amici prism, show the speck mirror by elementary microcobjective and secondary change and form, the focus of described principal goods mirror is positioned on the object plane of elementary microcobjective 9, the overlapping with the object plane that secondary change shows speck mirror 10 as the plane of elementary microcobjective 9;
Described collimated laser beam emission light path and target surface imaging optical path are realized light path altogether by described Amici prism;
The optical axis docking system is made up of first catoptron and second catoptron, and described first catoptron and second catoptron all have the governor motion that moves, does pitching and rotatablely move along optical axis;
Image receiving system comprises ccd video camera and monitor, and described ccd video camera is positioned at the picture plane that described secondary change shows the speck mirror, and the output of described ccd video camera links to each other with described monitor.
Described principal goods mirror is beam-expanding collimation lens, and it expands the bore that clear aperture behind the bundle equals laser target shooting light beam to be monitored.
The utility model is compared with technology formerly, has following technique effect:
1, the degree of regulation height of target mirror.This device can provide bigbore collimated laser beam, and its bore equates with actual target practice beam size, can truly reflect shape, size and the situation of target practice laser beam target surface focal spot after the target mirror focuses on, thereby can improve the degree of regulation of target mirror.
2, the accuracy of detection height of target surface focal spot shape, size and position.Because this device has higher enlargement ratio, can realize the precise monitoring to the target surface focal spot parameter.
3, the optical axis butt joint is convenient.The optical axis docking system is made up of first catoptron and second catoptron, and the butt joint that can realize simulating beam optical axis and target practice beam optical axis is easily regulated in both combinations.
4, compact conformation.This device adopts incorporate design, does not take the observation window on the target chamber.
Description of drawings
Fig. 1 is that formerly technology adopts thin parallel beam and long-focus microscope to take aim at the structural representation of target assembly.
Fig. 2 is the structural representation of target surface supervising device of the present utility model.
Embodiment
See also Fig. 2, Fig. 2 is the structural representation of target surface focal spot monitoring device of the present utility model.As seen from the figure, target surface focal spot monitoring device of the present utility model comprises collimated laser beam emission light path, target surface imaging optical path, optical axis docking system and image receiving system.Described collimated laser beam emission light path is used for the launching simulation light beam, thereby the scattered light that target surface imaging optical path reception target surface focal spot sends is to the target surface imaging, the butt joint of the optical axis of optical axis docking system realization the utility model target surface focal spot monitoring device and the optical axis of target practice light beam, image receiving system is used for target surface picture that receiving target surface imaging light path become and showing on monitor, by calculating the target surface focal spot picture size that ccd video camera receives, can accurately measure the physical size of target surface focal spot.
Described collimated laser beam emission light path comprises LASER Light Source 1 and constitutes along emergent light direction catoptron 4, focus lamp 5, Amici prism 6 and the principal goods mirror 7 successively of this LASER Light Source 1 that the focus of described focus lamp 5 is positioned on the focal plane of principal goods mirror 7;
Described target surface imaging optical path, by successively principal goods mirror 7, Amici prism 6, show speck mirror 10 by elementary microcobjective 9 and secondary change and form, the focus of described principal goods mirror 7 is positioned on the object plane of elementary microcobjective 9, the overlapping with the object plane that secondary change shows speck mirror 10 as the plane of elementary microcobjective 9;
Described collimated laser beam emission light path and target surface imaging optical path are realized light path altogether by described Amici prism 6;
Described optical axis docking system 8 is made up of first catoptron 801 and second catoptron 802, and described first catoptron 801 and second catoptron 802 all have the governor motion that moves, does pitching and rotatablely move along optical axis; Utilize the aggregate motion of two catoptrons can realize easily that the optical axis of the utility model target surface focal spot monitoring device and the optical axis of target practice laser beam dock.
Described image receiving system comprises ccd video camera 11 and monitor 12, and described ccd video camera 11 is positioned at the picture plane that described secondary change shows speck mirror 10, and the output of described ccd video camera 11 links to each other with described monitor 12.
Described principal goods mirror 7 is beam-expanding collimation lens, and it expands the bore that clear aperture behind the bundle equals laser target shooting light beam to be monitored.
Typical target chamber system 2 comprises window glass 201,45 ° of catoptrons 202, target mirror 203 and targets 204.The simulation light beam that collimated laser beam emission light path is sent is focused on the target 204 by target mirror 203 after passing through window glass 201 and 45 ° of catoptrons 202 successively.Rear orientation light by target 204 surfaces are produced enters the target surface imaging optical path behind target mirror 203,45 ° of catoptrons 202, window glass 201 and optical axis docking systems 8, the target surface picture that is become is received and is presented on the monitor 12 by ccd video camera 11.
The utility model is compared with technology formerly, and characteristics of the present utility model are:
The bore of the simulation light beam that collimated laser beam emission light path provides is identical with the bore of target practice light beam;
Form optical axis docking system 8 by first catoptron 801 and second catoptron 802, can realize simulating the optical axis butt joint of the optical axis and the target practice laser beam of light beam easily;
By calculating the target surface focal spot picture size that ccd video camera 11 receives, can accurately measure the physical size of target surface focal spot, thereby provide foundation for the adjusting of target mirror 203;
Collimated laser beam emission light path and target surface imaging optical path be light path altogether.
Described simulation light beam is provided by collimated laser beam emission light path.Compositions such as collimated laser beam emission optical routing LASER Light Source 1, catoptron 4, focus lamp 5, Amici prism 6 and principal goods mirror 7.The narrow laser beam that LASER Light Source 1 is sent is focused on by focus lamp 5 after 90 ° of catoptron 4 deflections, and focus point is positioned on the focal plane of principal goods mirror 7, becomes the bore parallel beam suitable with the target practice beam size behind principal goods mirror 7 collimations.When the bore of bore of simulating light beam and target practice light beam is consistent, can simulate the actual conditions when practicing shooting, improve the degree of regulation of target mirror, thereby improve the efficient of practicing shooting.
Said optical axis docking system 8 is made up of first catoptron 801 and second catoptron 802, and two catoptrons can move along x direction of principal axis and y direction of principal axis one dimension respectively, and all can do pitching and rotatablely move.By regulating first catoptron 801 and second catoptron 802, can under the situation of not whole mobile the utility model device, realize the optical axis of simulation light beam and the accurate butt joint of target practice beam optical axis, thereby improve the reliability and stability of system greatly.
Said two-stage amplification system shows speck mirror 10 by elementary microcobjective 9 and secondary change and forms.The rear orientation light that is produced by target 204 surfaces, enter the target surface imaging optical path behind line focus target mirror 203,45 ° of catoptrons 202, window glass 201 and optical axis docking systems 8, at first focus on by principal goods mirror 7, focus is positioned on the object plane of elementary microcobjective 9, carries out elementary amplification by elementary microcobjective 9.Be positioned on the object plane that secondary change shows speck mirror 10 through the picture point after the elementary amplification, show speck mirror 10 by secondary change and carry out secondary and amplify.Secondary change shows speck mirror 10 and can object point be carried out the continuous zoom rate amplify at object-image conjugate under constant situation.When little enlargement ratio, the visual field of observation is bigger, can carry out coarse adjustment to the target mirror; When big enlargement ratio, can carry out more accurate adjusting to the target mirror.Adopt said two-stage amplification system can in the reduction system volume, obtain higher enlargement ratio, thereby obtain high target surface focal spot measuring accuracy; And, can take into account the visual field again, thereby can improve the adjusting efficient of target mirror owing to adopted secondary change to show speck mirror 10.
Formerly in the technology, want to observe in real time the situation of target surface focal spot, must be on target chamber reserved window, adopt the long-focus microscope to observe.The collimated laser beam emission light path of the utility model target surface focal spot supervising device and target surface imaging optical path have been realized integrated, can monitor in real time target surface focal spot, do not take other resource simultaneously again.
The course of work of target surface focal spot monitoring device of the present utility model is: the narrow laser beam that LASER Light Source 1 is sent is focused on by focus lamp 5 behind catoptron 4, again through principal goods mirror 7 beam-expanding collimations, become the bore directional light suitable with the target practice light beam, import target chamber system 2 by optical axis docking system 8 then, behind window glass 201 and 45 ° of catoptrons 202, focus on the target 204 by target mirror 203.The rear orientation light that is produced by target 204 surfaces, behind target mirror 203,45 ° of catoptrons 202, window glass 201 and optical axis docking systems 8, at first focus on by principal goods mirror 7, show speck mirror 10 by elementary microcobjective 9 and secondary change again and carry out the two-stage amplification, the target surface picture that is become is received and is presented on the monitor 12 by ccd video camera 11.If the position of target mirror is in perfect condition, then the target surface focal spot image on the monitor 12 is circular or oval, and it is of a size of minimum.If the position and the ideal bit of target mirror are equipped with deviation, the target surface picture of then seeing is for other is irregularly shaped, and its size is bigger, at this moment can the target mirror be regulated, and is best and be of a size of minimum up to being shaped as of target surface focal spot picture.Because it is known that target mirror 203, principal goods mirror 7, elementary microcobjective 9 and secondary change show the parameter of speck mirror 10, by calculating the target surface focal spot picture size that ccd video camera 11 receives, can accurately measure the physical size of target surface focal spot, thereby provide foundation for the adjusting of target mirror 203.
The measuring method of target 203 surperficial focal spot sizes is: the focal length of establishing target mirror 203 is f
1', the focal length of principal goods mirror 7 is f
2', the enlargement ratio of elementary microcobjective 9 is β
1, the enlargement ratio that secondary change shows speck mirror 10 is β
2, then the optical imagery multiplying power from target 204 surfaces to ccd video camera 11 is β=(f
2'/f
1') * β
1* β
2If the target surface focal spot image diameter that ccd video camera 11 receives is D, then the actual diameter d of target 203 surperficial focal spots can be calculated as follows, d=D/ β.
The concrete structure and the parameter of most preferred embodiment of the present utility model are as follows:
The wavelength of actual target practice light beam is 800nm.
LASER Light Source 1 adopts the He-Ne laser instrument, and wavelength is 632.8nm, and output power is 5mW, and beam size is 2mm.
The focal distance f of principal goods mirror 7
2'=903.1mm, clear aperture is φ 160mm, during design to wavelength 632.8nm and 800nm achromatism.
The transmission plane of Amici prism 6 is to 632.8nm wavelength plating anti-reflection film, and light splitting surface is to 632.8nm wavelength plating part reflective semitransparent film.
The workplace of first catoptron 801 and second catoptron 802 is to 632.8nm and 800nm wavelength plating total reflection film, and reflectivity is greater than 98%.
201 pairs of 632.8nm wavelength platings of window glass anti-reflection film.
The reflecting surface of 45 ° of catoptrons 202 is to 800nm wavelength plating total reflection film, and the transmitance to the 632.8nm wavelength is 90% simultaneously; The back side is to 632.8nm wavelength plating anti-reflection film.
Secondary change shows the enlargement ratio β of speck mirror 10
2=0.7x～4.5x, adjustable continuously.
Calculate as can be known by above-mentioned parameter, optical imagery multiplying power β from target 204 surfaces to ccd video camera 11=5.26 times～33.86 times, so the field range for target 204 surfaces is (0.14～0.91) mm * (0.11～0.68) mm, be 1.24 μ m～0.27 μ m for the Measurement Resolution of focal spot size.
Adopt the utility model target surface focal spot monitoring device as the adjustment instrument, to clear aperture is that φ 160mm, focal length are that the off axis paraboloid mirror target mirror of 480mm is regulated, in adjustment process, received target surface picture can reflect very accurately that actual target practice light beam focuses on the position deviation of back at the focal spot of target surface formation through the target mirror, far above the accuracy of detection of technology formerly.
Claims (2)
1 one kinds of target surface focal spot monitoring devices that are used for laser target shooting is characterized in that comprising:
Collimated laser beam emission light path, comprise LASER Light Source (1) and constitute that the focus of described focus lamp (5) is positioned on the focal plane of principal goods mirror (7) along the emergent light direction of this LASER Light Source (1) catoptron (4), focus lamp (5), Amici prism (6) and principal goods mirror (7) successively;
The target surface imaging optical path, by successively principal goods mirror (7), Amici prism (6), show speck mirror (10) by elementary microcobjective (9) and secondary change and form, the focus of described principal goods mirror (7) is positioned on the object plane of elementary microcobjective (9), and the object plane that shows speck mirror (10) as plane and secondary change of elementary microcobjective (9) overlaps;
Described collimated laser beam emission light path and target surface imaging optical path are realized light path altogether by described Amici prism (6);
Optical axis docking system (8) is made up of first catoptron (801) and second catoptron (802), and described first catoptron (801) and second catoptron (802) all have the governor motion that moves, does pitching and rotatablely move along optical axis;
Image receiving system comprises ccd video camera (11) and monitor (12), and described ccd video camera (11) is positioned at the picture plane that described secondary change shows speck mirror (10), and the output of described ccd video camera (11) links to each other with described monitor (12).
2, target surface focal spot monitoring device according to claim 1 is characterized in that described principal goods mirror (7) is beam-expanding collimation lens, and it expands the bore that clear aperture behind the bundle equals laser target shooting light beam to be monitored.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200768261U2007200768261U CN201096986Y (en) | 2007-10-31 | 2007-10-31 | Target face focus spot monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200768261U2007200768261U CN201096986Y (en) | 2007-10-31 | 2007-10-31 | Target face focus spot monitoring device |
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| Publication Number | Publication Date |
|---|---|
| CN201096986Y true CN201096986Y (en) | 2008-08-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200768261U2007200768261U Expired - Lifetime CN201096986Y (en) | 2007-10-31 | 2007-10-31 | Target face focus spot monitoring device |
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| Country | Link |
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| CN (1) | CN201096986Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100492098C (en) * | 2007-10-31 | 2009-05-27 | 中国科学院上海光学精密机械研究所 | Target surface focal spot monitoring device |
| CN102564734A (en) * | 2011-03-15 | 2012-07-11 | 北京国科世纪激光技术有限公司 | Automatic testing device and testing method for laser damage threshold value |
| CN115555705A (en) * | 2021-07-01 | 2023-01-03 | 中国科学院上海光学精密机械研究所 | Multi-path picosecond and nanosecond composite high-power laser pulse system and focusing adjustment method |
-
2007
- 2007-10-31 CN CNU2007200768261U2007200768261U patent/CN201096986Y/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100492098C (en) * | 2007-10-31 | 2009-05-27 | 中国科学院上海光学精密机械研究所 | Target surface focal spot monitoring device |
| CN102564734A (en) * | 2011-03-15 | 2012-07-11 | 北京国科世纪激光技术有限公司 | Automatic testing device and testing method for laser damage threshold value |
| CN102564734B (en) * | 2011-03-15 | 2014-12-03 | 北京国科世纪激光技术有限公司 | Automatic testing device and testing method for laser damage threshold value |
| CN115555705A (en) * | 2021-07-01 | 2023-01-03 | 中国科学院上海光学精密机械研究所 | Multi-path picosecond and nanosecond composite high-power laser pulse system and focusing adjustment method |
| CN115555705B (en) * | 2021-07-01 | 2024-04-12 | 中国科学院上海光学精密机械研究所 | Multi-path picosecond and nanosecond composite high-power laser pulse system and focusing adjustment method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20071031 |
|
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20071031 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |