CN103226057A - Multifunctional high-efficiency laser damage test device and method in vacuum environment - Google Patents
Multifunctional high-efficiency laser damage test device and method in vacuum environment Download PDFInfo
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- CN103226057A CN103226057A CN2013101020991A CN201310102099A CN103226057A CN 103226057 A CN103226057 A CN 103226057A CN 2013101020991 A CN2013101020991 A CN 2013101020991A CN 201310102099 A CN201310102099 A CN 201310102099A CN 103226057 A CN103226057 A CN 103226057A
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Abstract
The invention relates to a multifunctional high-efficiency laser damage test device and method in a vacuum environment. Five samples can be placed on a sample stage in a vacuum chamber at one time; the samples can be sequentially rotated to the laser irradiation position for testing laser damage by rotating the sample stage; online monitoring and judgment of damage conditions can be realized by using an online imaging and scattered light detection device of a CCD (Charge Coupled Device) camera and a pressure detection element; and the samples can also be rotated to an observation window and then the damage morphology of the samples is observed in an off-line manner and analyzed. Meanwhile, the function that front sides and back sides of the samples are respectively irradiated by laser can be achieved by using the rotation of the sample stage. The device is simple and easy to operate; according to the device, the data test time in the vacuum environment is greatly saved and the efficiency of damage test is increased; and meanwhile, test method and functions are diversified and comprehensive damage information can be obtained.
Description
Technical field
The present invention relates to the field tests of the resisting laser damage performance of optical element under vacuum environment, be specifically related to the damage from laser proving installation and the method for high-efficiency multifunctional under a kind of vacuum environment.
Background technology
Optical element has a wide range of applications in fields such as Laser Processing, laser weapon and high power laser systems, is requisite primary element in the optical system.And along with laser instrument is exported improving constantly of energy, the laser damage threshold of optical element has become the key factor that restriction light laser technology further develops, also is the weak link that the limit laser technology develops to high-energy, high power direction.For damage performance and the damage mechanism of analysing in depth optical element, accurately estimate the resisting laser damage ability of optical element, the measuring technique of laser damage threshold be need constantly develop and improve, thereby the optimization and the improvement of thin film preparation process instructed.
Along with the widespread use of laser system in space field and vacuum environment, the application of optical thin film element under vacuum environment more and more widely, the damage from laser characteristic of optical thin film element has the singularity of himself with respect to the damage feature under the atmospheric environment under the vacuum environment, and the factor that influences the damage from laser of optical thin film element under vacuum environment increases greatly.There are some special processes under the vacuum environment,, thereby make the laser damage threshold of optical thin film element under vacuum environment reduce significantly as the deflation course of material, the decomposable process of laser irradiation material and the attaching process of free particle etc.Yet can the anti-laser irradiation ability of optical thin film element be directly connected to laser system and move successfully in vacuum and space environment under vacuum environment.So the damage of optical film characteristic tool under the research vacuum environment plays a very important role.
The experimental provision that damage from laser characteristic under the research vacuum environment needs is than the complexity under the atmospheric environment, need set up the environment of a high vacuum, want the strict vacuum tightness of guaranteeing optical thin film element place environment, also need vacuum monitoring equipment simultaneously, also will solve the damage of what kind of mode to monitor sample by.Because sample is to be placed in the vacuum chamber, how to monitor the damage of sample, how placing fault localization system etc. and all being needs the problem considered, so the damage feature of research optical thin film element under vacuum environment is bigger relatively than the difficulty under atmospheric environment.
At present more common vacuum test device once can only be put into a sample, just can test take out several hours vacuum with vacuum pump after, after a sample test finishes, need open vacuum chamber and vary product, also will vacuumize again then.In case sample is put in the vacuum chamber in addition, can only judge, observe its degree of impairment by the method for on-line monitoring, if want in the process of experiment, the damage pattern of sample to be carried out finer observation with high-power microscope and take pictures then need sample is taken out vacuum chamber, after having observed, will proceed damage from laser like this and vacuumize again again.Also have for some special film sample, it is different carrying out its damage feature of laser irradiation from the back side and front, for such sample, need open vacuum chamber upset sample direction in the process of test, destroyed vacuum tightness equally, also needed to vacuumize again.So present device and method of testing realize the damage test under the vacuum environment and lose time the extremely low and function singleness of efficient especially.
Summary of the invention
The present invention provides the damage from laser proving installation and the method for high-efficiency multifunctional under a kind of vacuum environment in order to solve the deficiency of above-mentioned technology.
For reaching above purpose, solution of the present invention is:
The damage threshold measurement mechanism of high-efficiency multifunctional under a kind of vacuum environment, comprise: Nd:YAG laser instrument 1, He-Ne detecting laser 2, pressure detecting element 6, vacuum chamber 7, the one CCD camera 10, high-power microscope 12, electric system 14, sample 16, optical detection device 18, the 2nd CCD camera 19 and computing machine 20, wherein: vacuum chamber 7 is fixed on the electric system 14, vacuum chamber 7 one side levels are provided with laser incidence window 3, the opposite side level is provided with laser emitting window 9, the top is provided with exploring laser light incidence window 4 in one side, the below is provided with exploring laser light outgoing window 17 in one side, the top is provided with pressure detection window 5, the below is provided with CCD camera monitoring window 11 in the opposite side, the top is provided with vacuum pump window 8 in the opposite side, the below is provided with off-line watch window 13, be provided with specimen rotating holder 15 in the vacuum chamber 7, sample is positioned on the specimen rotating holder 15; Exploring laser light incidence window 4 is placed with He-Ne detecting laser 2, exploring laser light outgoing window 17 is placed with optical detection device 18 and the 2nd CCD camera 19, pressure detection window 5 is placed with pressure detecting element 6, CCD camera monitoring window 11 is placed a CCD camera 10, off-line watch window 13 is equipped with high-power microscope 12, Nd:YAG laser instrument 1, pressure detecting element 6, the one CCD camera 10, high-power microscope 12, electric system 14, optical detection device 18, the 2nd CCD camera 19 connects computing machine 20 respectively, the light-emitting window of Nd:YAG laser instrument 1 is aimed at the light inlet of laser incidence window 3, when sample 16 is placed on laser incidence window 3 positions, by 19 pairs of samples of the 2nd CCD camera, 16 surperficial real-time photographies; When sample 16 rotates to laser emitting window 9 positions, by 10 pairs of samples of a CCD camera, 16 surperficial real-time photographies; When sample 16 rotates to off-line watch window 13, carry out the off-line observation analysis by 12 pairs of samples of high-power microscope 16.
Among the present invention, described electric system 14 comprises motorized precision translation stage and electric rotating machine.Described vacuum chamber 7 is positioned at the motorized precision translation stage top, and vacuum chamber 7 and sample 16 integral body are done the motion of level or vertical direction by motorized precision translation stage control.
Among the present invention, described specimen rotating holder 15 is regualr decagon structures, and wherein five limits are provided with five by the side sample clamp, can place five samples simultaneously.
Among the present invention, described specimen rotating holder 15 connects electric rotating machine, controls it by electric rotating machine and rotates.
Among the present invention, described vacuum chamber 7 connects vacuum pump, and described vacuum pump adopts mechanical pump or turbomolecular pump.
The using method of the damage from laser proving installation of high-efficiency multifunctional under the vacuum environment that the present invention proposes, concrete steps are as follows:
A) sample is fixed on the specimen rotating holder in the vacuum chamber, opens vacuum pump vacuum chamber is vacuumized, with the vacuum tightness in the pressure gauge monitoring vacuum chamber;
B) when the vacuum tightness in the vacuum chamber reaches the experiment desired value, begin to carry out the damage threshold test experiments, at first open the He-Ne laser instrument and send laser irradiation, receive the scattered light on sample surface with optical detection device on the sample surface;
C) with Nd:YAG laser irradiation sample surface, utilize the motorized precision translation stage control sample of electric system in plane, to do moving of vertical or horizontal direction perpendicular to the laser irradiation direction, realize 1-on-1, R-on-1, S-on-1 and raster scanning method of testing, to sample surface real-time photography, the pressure in the vacuum chamber of pressure detecting element monitoring simultaneously changes with the 2nd CCD camera;
D) by observing variation, the pressure method of changing of vacuum chamber and the result of real-time photography of scattered light intensity, comprehensive three kinds of methods are determined the laser damage threshold of sample;
E) as step D) described three kinds of monitoring methods occur changing but uncertainly damage whether occurred, utilize electric rotating machine rotation specimen rotating holder, sample is rotated to the off-line watch window determine, then sample is rotated to again laser incidence window position and proceed test with high-power microscope.
F) when damage appears in sample, sample is rotated to the off-line watch window further observe the damage pattern, analyze damage characteristic, and take pictures with high-power microscope;
G) for the sample that need carry out the damage from laser test from the back side, can be with specimen rotating holder Rotate 180 degree to the laser emitting window, this moment, its back side became laser entrance face, accept laser irradiation, with a CCD camera to its surperficial real-time photography, adjust the detection angle of light degree of He-Ne detecting laser and the angle of optical detection device, repeat C ~ F process;
H) after a sample test finishes,, make next sample rotate to laser incidence window position, repeating step C with specimen rotating holder rotation 36 degree) ~ G), carry out the laser damage threshold test.
Owing to adopted such scheme, the present invention has the following advantages:
1, high-level efficiency: the sample stage in the vacuum chamber is a regualr decagon, wherein on five limits sample clamp is installed, can disposablely put into five samples, and only need take out vacuum one time, rotation by sample stage in the process of experiment, each sample is rotated to the laser incidence window carry out laser irradiation, saved the time significantly.
2, multi-functional: as to realize the damage of on-line monitoring sample by CCD real-time photography and two kinds of methods of scattered light intensity method, determine damage threshold.Can also sample be rotated to the off-line watch window by electric rotating machine, further analyze, observe the damage pattern, take pictures with high-power microscope.Simultaneously sample can also be rotated to the laser emitting window, this moment, the sample back side became laser irradiated surface, the damage feature in the time of can studying its back side and receive laser irradiation.In addition in conjunction with the method for three kinds of ONLINE RECOGNITION damage, can identify that damage occurs in sample surfaces or in its body, and can confirm by ultramicroscopic observation.
3, high precision: take pictures by off-line and can write down the pattern in each stage in the damage test process, take pictures to rotate to as penetrating window by electric rotating machine after finishing and proceed laser irradiation, the rotation of motor has been guaranteed that the each off-line of sample has been taken pictures and has been rotated to the position that can accurately be positioned place last time behind the entrance window, both guaranteed that the exposure spots position of laser on sample, each rotation back can not change.These characteristics have considerable effect in the damage Study on Growth.Three various methodologies are monitored simultaneously during online in addition damage monitoring, stop laser irradiation immediately as long as there is a kind of method to recognize damage, relatively only with a kind of method, has high sensitivity, can the better recognition initial damage, this micromechanism of damage for the research optical element has very great help.
Description of drawings
Fig. 1 is the synoptic diagram of the present invention's laser deflection value measurement mechanism under vacuum environment.
Fig. 2 is sample synoptic diagram from back side irradiation when rotating to the laser emitting window.
Fig. 3 is that second sample rotates to the synoptic diagram that the laser incidence window is tested.
Number in the figure:1 is the Nd:YAG laser instrument, 2 is the He-Ne detecting laser, and 3 is the laser incidence window, and 4 is the exploring laser light incidence window, 5 is the pressure detection window, 6 is the pressure detecting element, and 7 is vacuum chamber, and 8 is the vacuum pump window, 9 is the laser emitting window, 10 is a CCD camera, and 11 are CCD camera monitoring window, and 12 is high-power microscope, 13 is the off-line watch window, 14 is electric system, and 15 is specimen rotating holder, and 16 is sample, 17 is exploring laser light outgoing window, 18 is optical detection device, and 19 is the 2nd CCD camera, and 20 is computing machine.
Embodiment
The present invention is further illustrated below in conjunction with the accompanying drawing illustrated embodiment.
Embodiment 1: consult Fig. 1, Nd:YAG laser instrument 1, He-Ne detecting laser 2, pressure detecting element 6, vacuum chamber 7, a CCD camera 10, high-power microscope 12, electric system 14, sample 16, optical detection device 18, the 2nd CCD camera 19 and computing machine 20.Wherein the assembly of vacuum chamber 7 has laser incidence window 3, laser emitting window 9, exploring laser light incidence window 4, exploring laser light outgoing window 17, pressure detection window 5, CCD camera monitoring window 11, vacuum pump window 8, off-line watch window 13 and specimen rotating holder 15.Wherein:
Described sample 16 is done the motion of level or vertical direction by electronic moving translation stage control together with vacuum chamber 7 integral body.
Described vacuum chamber exploring laser light incidence window 4 can be placed He-Ne laser instrument 2, and exploring laser light outgoing window 17 can be placed optical detection device 18 and the 2nd CCD camera 19.
When sample 16 was placed on laser incidence window 3 positions, available the 2nd CCD camera 19 was to its surperficial real-time photography, and when sample 16 rotated to laser emitting window 9 positions, an available CCD camera 10 was to its surperficial real-time photography.
Off-line watch windows 13 are equipped with high-power microscope 12 in the described vacuum chamber 7, and when sample 16 was rotated so far window, 12 pairs of samples of available high-power microscope 16 carried out the off-line observation analysis.
Described vacuum chamber 7 internal pressure detection windows 5 are equipped with the vacuum tightness that pressure detecting element 6 is surveyed in the vacuum chamber.
Described vacuum chamber 7 interior vacuum pump windows 8 can connect mechanical pump and turbomolecular pump vacuumizes vacuum chamber 7.
Nd:YAG laser instrument 1, pressure detecting element 6, a CCD camera 10, high-power microscope 12, electric system 14, optical detection device 18 all are connected with computing machine 20 with the 2nd CCD camera 19, and computing machine 20 can carry out data read and control to each assembly.
A kind of method of testing of utilizing said apparatus may further comprise the steps:
A, sample 16 is fixed on the specimen rotating holder 15 in the vacuum chamber 7, opens vacuum pump vacuum chamber 7 is vacuumized, with the vacuum tightness in the pressure detecting element 6 monitoring vacuum chambers 7;
B, vacuum tightness begin to carry out the damage threshold test experiments when reaching the experiment desired value, at first open He-Ne detecting laser 2 and send laser irradiation at sample surfaces, receive the scattered light of sample surfaces with optical detection device 18;
The pressure variation of D, the variation of observing scattered light intensity, vacuum chamber and the result of real-time photography, comprehensive three kinds of methods determine the laser damage threshold of sample and judge that it still is in the body that damage occurs in sample surfaces:
1. scattered light intensity and vacuum chamber internal pressure one of them change, the real-time photography result has also recognized damage point and has occurred and do not have empty burnt phenomenon, then is judged to be the front surface that damage occurs in sample;
2. scattered light intensity no change, the vacuum chamber internal pressure changes, and the real-time photography result has also recognized the damage point and has occurred and empty burnt phenomenon is arranged, and then is judged to be the rear surface that damage occurs in sample.Because exploring laser light generally is in the front surface generation scattering of sample, so scattered light intensity can not change when impaired loci appears in the sample rear surface, but the vacuum chamber internal pressure can change.Because the CCD camera is to focus in the sample front surface, so the impaired loci of the rear surface that recognizes has empty burnt effect of amplifying;
3. scattered light intensity and vacuum chamber pressure no change all, the real-time photography result has also recognized the damage point and has occurred and empty burnt phenomenon is arranged, and then is judged to be damage and occurs in the body of sample.Because the pressure detecting element is very high to the detection sensitivity of sample surfaces, particle as long as the damage splash takes place on its surface, the vacuum chamber internal pressure can change immediately, if but damage occurs in the sample body, no particle splash, the vacuum chamber internal pressure just can not change so, but the CCD camera still has empty burnt effect of amplifying;
E, when the result of three kinds of monitoring methods monitoring be different among the D 1., 2., 3. situation, can utilize electric rotating machine that sample is rotated to off-line watch window 13 usefulness high-power microscopes 12 and anatomize the affirmation type of impairment this moment, then sample rotated to again laser incidence window position and proceed test.
F, when damage appears in sample, sample is rotated to off-line watch window 13 usefulness high-power microscopes 12 further observes the damage patterns, analysis damage characteristic, and take pictures and preserve;
G, for the sample that need carry out damage from laser test from the back side, can be with sample stage Rotate 180 degree to laser emitting window 9, as shown in Figure 2.This moment, its back side became laser entrance face, accept laser irradiation, monitor window 11 to its laser entrance face real-time photography with a CCD camera 10 by the CCD camera, adjust the detection angle of light degree of He-Ne detecting laser and the angle of optical detection device, repeat C ~ F process;
After H, a sample test finish,, make next sample rotate to laser incidence window position, as shown in Figure 3, repeat C ~ G, carry out the laser damage threshold test sample stage rotation 36 degree;
The invention is not restricted to the embodiment here, those skilled in the art should be within protection scope of the present invention for improvement and modification that the present invention makes according to announcement of the present invention.
Claims (6)
1. the damage threshold measurement mechanism of high-efficiency multifunctional under the vacuum environment, it is characterized in that comprising: Nd:YAG laser instrument (1), He-Ne detecting laser (2), pressure detecting element (6), vacuum chamber (7), the one CCD camera (10), high-power microscope (12), electric system (14), sample (16), optical detection device (18), the 2nd CCD camera (19) and computing machine (20), wherein: vacuum chamber (7) is fixed on the electric system (14), vacuum chamber (7) one side levels are provided with laser incidence window (3), the opposite side level is provided with laser emitting window (9), the top is provided with exploring laser light incidence window (4) in one side, the below is provided with exploring laser light outgoing window (17) in one side, the top is provided with pressure detection window (5), the below is provided with CCD camera monitoring window (11) in the opposite side, the top is provided with vacuum pump window (8) in the opposite side, the below is provided with off-line watch window (13), be provided with specimen rotating holder (15) in the vacuum chamber (7), sample is positioned on the specimen rotating holder (15); Exploring laser light incidence window (4) is placed with He-Ne detecting laser (2), exploring laser light outgoing window (17) is placed with optical detection device (18) and the 2nd CCD camera (19), pressure detection window (5) is placed with pressure detecting element (6), CCD camera monitoring window (11) is placed a CCD camera (10), off-line watch window (13) is equipped with high-power microscope (12), Nd:YAG laser instrument (1), pressure detecting element (6), the one CCD camera (10), high-power microscope (12), electric system (14), optical detection device (18), the 2nd CCD camera (19) connects computing machine (20) respectively, the light-emitting window of Nd:YAG laser instrument (1) is aimed at the light inlet of laser incidence window (3), when sample (16) is placed on laser incidence window (3) position, by the 2nd CCD camera (19) to the surperficial real-time photography of sample (16); When sample (16) rotates to laser emitting window (9) position, by a CCD camera (10) to the surperficial real-time photography of sample (16); When sample (16) rotates to off-line watch window (13), sample (16) is carried out the off-line observation analysis by high-power microscope (12).
2. the damage threshold measurement mechanism of high-efficiency multifunctional under a kind of vacuum environment according to claim 1 is characterized in that described electric system (14) comprises motorized precision translation stage and electric rotating machine; Vacuum chamber (7) is positioned at the motorized precision translation stage top, the whole motion of doing level or vertical direction by motorized precision translation stage control of vacuum chamber (7) and sample (16).
3. the damage threshold measurement mechanism of high-efficiency multifunctional under a kind of vacuum environment according to claim 1, it is characterized in that described specimen rotating holder (15) is the regualr decagon structure, wherein five limits are provided with five by the side sample clamp, can place five samples simultaneously.
4. the damage threshold measurement mechanism of high-efficiency multifunctional under a kind of vacuum environment according to claim 1 is characterized in that described specimen rotating holder (15) connects electric rotating machine, controls it by electric rotating machine and rotates.
5. the damage threshold measurement mechanism of high-efficiency multifunctional under a kind of vacuum environment according to claim 1 is characterized in that described vacuum chamber (7) connects vacuum pump, and described vacuum pump adopts mechanical pump or turbomolecular pump.
6. the using method of the damage from laser proving installation of high-efficiency multifunctional under the vacuum environment as claimed in claim 1 is characterized in that concrete steps are as follows:
A) sample is fixed on the specimen rotating holder in the vacuum chamber, opens vacuum pump vacuum chamber is vacuumized, with the vacuum tightness in the pressure gauge monitoring vacuum chamber;
B) when the vacuum tightness in the vacuum chamber reaches the experiment desired value, begin to carry out the damage threshold test experiments, at first open the He-Ne laser instrument and send laser irradiation, receive the scattered light on sample surface with optical detection device on the sample surface;
C) with Nd:YAG laser irradiation sample surface, utilize the motorized precision translation stage control sample of electric system in plane, to do moving of vertical or horizontal direction perpendicular to the laser irradiation direction, realize 1-on-1, R-on-1, S-on-1 and raster scanning method of testing, to sample surface real-time photography, the pressure in the vacuum chamber of pressure detecting element monitoring simultaneously changes with the 2nd CCD camera;
D) by observing variation, the pressure method of changing of vacuum chamber and the result of real-time photography of scattered light intensity, comprehensive three kinds of methods are determined the laser damage threshold of sample;
E) as step D) described three kinds of monitoring methods occur changing but uncertainly damage whether occurred, utilize electric rotating machine rotation specimen rotating holder, sample is rotated to the off-line watch window determine, then sample is rotated to again laser incidence window position and proceed test with high-power microscope;
F) when damage appears in sample, sample is rotated to the off-line watch window further observe the damage pattern, analyze damage characteristic, and take pictures with high-power microscope;
G) for the sample that need carry out the damage from laser test from the back side, can be with specimen rotating holder Rotate 180 degree to the laser emitting window, this moment, its back side became laser entrance face, accept laser irradiation, with a CCD camera to its surperficial real-time photography, adjust the detection angle of light degree of He-Ne detecting laser and the angle of optical detection device, repeat C ~ F process;
H) after a sample test finishes,, make next sample rotate to laser incidence window position, repeating step C with specimen rotating holder rotation 36 degree) ~ G), carry out the laser damage threshold test.
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