CN103226057B - Multifunctional high-efficiency laser damage test device and method in vacuum environment - Google Patents
Multifunctional high-efficiency laser damage test device and method in vacuum environment Download PDFInfo
- Publication number
- CN103226057B CN103226057B CN201310102099.1A CN201310102099A CN103226057B CN 103226057 B CN103226057 B CN 103226057B CN 201310102099 A CN201310102099 A CN 201310102099A CN 103226057 B CN103226057 B CN 103226057B
- Authority
- CN
- China
- Prior art keywords
- laser
- sample
- window
- damage
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Laser Beam Processing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention relates to a multifunctional high-efficiency laser damage test device and method in a vacuum environment. Five samples can be placed on a sample stage in a vacuum chamber at one time; the samples can be sequentially rotated to the laser irradiation position for testing laser damage by rotating the sample stage; online monitoring and judgment of damage conditions can be realized by using an online imaging and scattered light detection device of a CCD (Charge Coupled Device) camera and a pressure detection element; and the samples can also be rotated to an observation window and then the damage morphology of the samples is observed in an off-line manner and analyzed. Meanwhile, the function that front sides and back sides of the samples are respectively irradiated by laser can be achieved by using the rotation of the sample stage. The device is simple and easy to operate; according to the device, the data test time in the vacuum environment is greatly saved and the efficiency of damage test is increased; and meanwhile, test method and functions are diversified and comprehensive damage information can be obtained.
Description
Technical field
The present invention relates to the field tests of optical element resisting laser damage performance under vacuum conditions, be specifically related to damage from laser proving installation and the method for high-efficiency multifunctional under a kind of vacuum environment.
Background technology
Optical element has a wide range of applications in fields such as Laser Processing, laser weapon and high power laser systems, is requisite primary element in optical system.And improving constantly along with laser instrument output energy, the laser damage threshold of optical element has become the key factor restricting High-power Laser Technologies and further develop, is also the weak link of restriction laser technology to high-energy, high power future development.In order to analyse in depth damage performance and the damage mechanisms of optical element, the resisting laser damage ability of accurate evaluation optical element, needs the measuring technique of constantly development and improvement laser damage threshold, thus instructs optimization and the improvement of thin film preparation process.
Along with laser system is in the widespread use of space field and vacuum environment, optical thin film element application is under vacuum conditions more and more extensive, under vacuum environment, the damage from laser characteristic of optical thin film element has the singularity of himself relative to the damage feature under atmospheric environment, and the factor affecting the damage from laser of optical thin film element under vacuum conditions increases greatly.There is the process that some are special under vacuum environment, as the attaching process etc. of the deflation course of material, the decomposable process of laser irradiation material and free particle, thus optical thin film element laser damage threshold is under vacuum conditions reduced significantly.But can the anti-laser irradiation ability of optical thin film element be directly connected to laser system and run successfully in vacuum and space environment under vacuum conditions.So the damage feature tool of optical thin film under research vacuum environment plays a very important role.
Complicated than under atmospheric environment of the experimental provision that damage from laser characteristic under research vacuum environment needs, need the environment setting up a high vacuum, strictly to guarantee the vacuum tightness of optical thin film element place environment, also need vacuum monitoring equipment simultaneously, also will solve the damage of what kind of mode to be monitored sample by.Because sample is placed in vacuum chamber, how to monitor the damage of sample, how placing fault localization system etc. is all the problem needing to consider, so Optical thin-film component damage feature is under vacuum conditions relatively larger than the difficulty under atmospheric environment.
More common vacuum test device once can only put into a sample at present, just can test, after a sample test is complete, needs to open vacuum chamber and vary product, then also will re-start and vacuumize with vacuum pump after taking out the vacuum of several hours.In addition once sample is put in vacuum chamber, can only be judged by the method for on-line monitoring, observe its degree of impairment, if want in the process of experiment, the damage morphologies high-power microscope of sample is carried out to finer observation and takes pictures, need sample to take out vacuum chamber, damage from laser will be proceeded so again vacuumize again after having observed.Also have for some special film sample, it is different for carrying out its damage feature of laser irradiation from the back side and front, for such sample, needs in the process of test, open vacuum chamber upset sample direction, destroy vacuum tightness equally, also need again to vacuumize.So the damage measure that current device and method of testing realize under vacuum environment is lost time especially, the extremely low and function singleness of efficiency.
Summary of the invention
The present invention, in order to solve the deficiency of above-mentioned technology, provides damage from laser proving installation and the method for high-efficiency multifunctional under a kind of vacuum environment.
For reaching above object, solution of the present invention is:
The device for measuring damage threshold of high-efficiency multifunctional under a kind of vacuum environment, comprise: Nd:YAG laser instrument 1, He-Ne detecting laser 2, pressure detecting element 6, vacuum chamber 7, first CCD camera 10, high-power microscope 12, electric system 14, sample 16, optical detection device 18, second CCD camera 19 and computing machine 20, wherein: vacuum chamber 7 is fixed on electric system 14, vacuum chamber 7 side level is provided with laser incidence window 3, opposite side level is provided with laser emitting window 9, in side, top is provided with exploring laser light incidence window 4, in side, below is provided with exploring laser light exit window 17, top is provided with pressure detection window 5, in opposite side, below is provided with CCD camera monitoring window 11, in opposite side, top is provided with vacuum pump window 8, below is provided with off-line watch window 13, specimen rotating holder 15 is provided with in vacuum chamber 7, sample is positioned on specimen rotating holder 15, exploring laser light incidence window 4 is placed with He-Ne detecting laser 2, exploring laser light exit window 17 is placed with optical detection device 18 and the second CCD camera 19, pressure detection window 5 is placed with pressure detecting element 6, a CCD camera 10 placed by CCD camera monitoring window 11, off-line watch window 13 is provided with high-power microscope 12, Nd:YAG laser instrument 1, pressure detecting element 6, first CCD camera 10, high-power microscope 12, electric system 14, optical detection device 18, second CCD camera 19 connects computing machine 20 respectively, the light-emitting window of Nd:YAG laser instrument 1 aims at the light inlet of laser incidence window 3, when sample 16 is placed on laser incidence window 3 position, by the second CCD camera 19 pairs of surperficial real-time photographies of sample 16, when sample 16 rotates to laser emitting window 9 position, by the first CCD camera 10 pairs of surperficial real-time photographies of sample 16, when sample 16 rotates to off-line watch window 13, carry out off-line observation analysis by high-power microscope 12 pairs of samples 16.
In the present invention, described electric system 14 comprises motorized precision translation stage and electric rotating machine.Described vacuum chamber 7 is positioned at above motorized precision translation stage, and vacuum chamber 7 and sample 16 entirety control by motorized precision translation stage the motion doing horizontal or vertical direction.
In the present invention, described specimen rotating holder 15 is regualr decagon structures, and wherein five limits are provided with five by side sample clamp, can place five samples simultaneously.
In the present invention, described specimen rotating holder 15 connects electric rotating machine, controls it rotate by electric rotating machine.
In the present invention, described vacuum chamber 7 connects vacuum pump, and described vacuum pump adopts mechanical pump or turbomolecular pump.
The using method of the damage from laser proving installation of high-efficiency multifunctional under the vacuum environment that the present invention proposes, concrete steps are as follows:
A) sample is fixed on the specimen rotating holder in vacuum chamber, opens vacuum pump and vacuum chamber is vacuumized, by the vacuum tightness in pressure gauge monitoring vacuum chamber;
B) start to carry out damage threshold test experiments when the vacuum tightness in vacuum chamber reaches experiment desired value, first open He-Ne laser instrument and send laser irradiation on sample surface, receive the scattered light on sample surface with optical detection device;
C) with Nd:YAG laser irradiation sample surface, utilize the motorized precision translation stage of electric system to control sample to do in the plane perpendicular to laser irradiation direction vertically or the movement of horizontal direction, realize 1-on-1, R-on-1, S-on-1 and raster scanning method of testing, by the second CCD camera to sample surface real-time photography, the pressure change in the vacuum chamber of pressure detecting element monitoring simultaneously;
D) by observing the result of the change of scattered light intensity, the pressure method of changing of vacuum chamber and real-time photography, the laser damage threshold of comprehensive three kinds of method determination samples;
E) as step D) there is change but uncertainly whether occurred damage in described three kinds of monitoring methods, electric rotating machine is utilized to rotate specimen rotating holder, sample is rotated and determines to off-line watch window high-power microscope, then sample is rotated again and proceed test to laser incidence window position.
F) when damage appears in sample, sample is rotated and observes damage morphologies further to off-line watch window high-power microscope, analyze damage characteristic, and take pictures;
G) for needing the sample carrying out damage from laser test from the back side, specimen rotating holder can be revolved turnback to laser emitting window, now its back side becomes laser entrance face, accept laser irradiation, by the first CCD camera to its surperficial real-time photography, the detection angle of light degree of adjustment He-Ne detecting laser and the angle of optical detection device, repeat C ~ F process;
H) sample test complete after, by specimen rotating holder rotate 36 degree, make next sample rotate to laser incidence window position, repetition step C) ~ G), carry out laser damage threshold test.
Owing to have employed such scheme, the present invention has the following advantages:
1, high-level efficiency: the sample stage in vacuum chamber is regualr decagon, wherein five limits are provided with sample clamp, disposablely can put into five samples, and only need take out a vacuum, by the rotation of sample stage in the process of experiment, each rotary sample is carried out laser irradiation to laser incidence window, saves the time significantly.
2, multi-functional: the damage being realized on-line monitoring sample by CCD real-time photography and scattered light intensity method two kinds of methods, determine damage threshold.Can also by electric rotating machine by rotary sample to off-line watch window, analyze further with high-power microscope, observe damage morphologies, take pictures.Simultaneously can also by rotary sample to laser emitting window, now the sample back side becomes laser irradiated surface, can study the damage feature during reception laser irradiation of its back side.In addition in conjunction with the method for three kinds of ONLINE RECOGNITION damage, damage can be identified and occur in sample surfaces or in its body, and can be confirmed by ultramicroscopic observation.
3, high precision: taken pictures by off-line and can record the pattern of every one-phase in damage measure process, rotated by electric rotating machine after having taken pictures and proceed laser irradiation to as penetrated window, the rotation of motor ensure that each off-line of sample has been taken pictures accurately can be positioned the position at place last time after rotation to entrance window, and after both having ensure that each rotation, the exposure spots position of laser on sample can not change.This feature has considerable effect in the research of damage growth.During online damage monitoring, three various methodologies are monitored simultaneously in addition, as long as have a kind of method to recognize damage stop laser irradiation immediately, relatively only with a kind of method, there is high sensitivity, better can identify initial damage, this micromechanism of damage for Optical element has very great help.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the present invention's laser deflection value measurement mechanism under vacuum conditions.
Fig. 2 is that rotary sample is to the schematic diagram from the back side irradiation during laser emitting window.
Fig. 3 is the schematic diagram that second rotary sample carries out testing to laser incidence window.
number in the figure:1 is Nd:YAG laser instrument, 2 is He-Ne detecting laser, and 3 is laser incidence window, and 4 is exploring laser light incidence window, 5 is pressure detection window, 6 is pressure detecting element, and 7 is vacuum chamber, and 8 is vacuum pump window, 9 is laser emitting window, 10 is the first CCD camera, and 11 is CCD camera monitoring window, and 12 is high-power microscope, 13 is off-line watch window, 14 is electric system, and 15 is specimen rotating holder, and 16 is sample, 17 is exploring laser light exit window, 18 is optical detection device, and 19 is the second CCD camera, and 20 is computing machine.
Embodiment
Below in conjunction with accompanying drawing illustrated embodiment, the present invention is further illustrated.
Embodiment 1: consult Fig. 1, Nd:YAG laser instrument 1, He-Ne detecting laser 2, pressure detecting element 6, vacuum chamber 7, first CCD camera 10, high-power microscope 12, electric system 14, sample 16, optical detection device 18, second CCD camera 19 and computing machine 20.Wherein the assembly of vacuum chamber 7 has laser incidence window 3, laser emitting window 9, exploring laser light incidence window 4, exploring laser light exit window 17, pressure detection window 5, CCD camera to monitor window 11, vacuum pump window 8, off-line watch window 13 and specimen rotating holder 15.Wherein:
Sample 16 is placed on the specimen rotating holder 15 in vacuum chamber 7, and vacuum chamber 7 is fixed on electric system 14.
Electric system 14 comprises motorized precision translation stage and electric rotating machine.
Described sample 16 controls by electronic dynamic translation stage the motion doing horizontal or vertical direction together with vacuum chamber 7 entirety.
Specimen rotating holder 15 in described vacuum chamber 7 is controlled to rotate by electric rotating machine.
Specimen rotating holder 15 in described vacuum chamber 7 is regualr decagons, wherein there are five sample clamps on five limits, can place five samples simultaneously.
Described vacuum chamber exploring laser light incidence window 4 can place He-Ne laser instrument 2, and exploring laser light exit window 17 can place optical detection device 18 and the second CCD camera 19.
When sample 16 is placed on laser incidence window 3 position, available second CCD camera 19 is to its surperficial real-time photography, and when sample 16 rotates to laser emitting window 9 position, available first CCD camera 10 is to its surperficial real-time photography.
In described vacuum chamber 7, off-line watch window 13 is provided with high-power microscope 12, sample 16 is rotated so far window time, available high-power microscope 12 pairs of samples 16 carry out off-line observation analysis.
In described vacuum chamber 7, pressure detection window 5 is provided with pressure detecting element 6 and detects vacuum tightness in vacuum chamber.
In described vacuum chamber 7, vacuum pump window 8 can connect mechanical pump and turbomolecular pump vacuumizes vacuum chamber 7.
Nd:YAG laser instrument 1, pressure detecting element 6, first CCD camera 10, high-power microscope 12, electric system 14, optical detection device 18 are all connected with computing machine 20 with the second CCD camera 19, and computing machine 20 can carry out digital independent and control to each assembly.
Utilize a method of testing for said apparatus, comprise the following steps:
A, be fixed on sample 16 in vacuum chamber 7 specimen rotating holder 15 on, open vacuum pump and vacuum chamber 7 vacuumized, monitor the vacuum tightness in vacuum chamber 7 with pressure detecting element 6;
B, vacuum tightness start to carry out damage threshold test experiments when reaching experiment desired value, first open He-Ne detecting laser 2 and send laser irradiation at sample surfaces, receive the scattered light of sample surfaces with optical detection device 18;
Laser irradiation sample 16 surface of C, use Nd:YAG laser instrument 1, motorized precision translation stage Quality control 16 is utilized to do in the plane perpendicular to laser irradiation direction vertically or the movement of horizontal direction, realize 1-on-1, R-on-1, S-on-1 and raster scanning method of testing, second CCD camera 19 is focused in sample 16 front surface, carry out real-time photography, pressure detecting element 6 monitors the pressure change in vacuum chamber 7 simultaneously;
The pressure change of D, the change observing scattered light intensity, vacuum chamber and the result of real-time photography, laser damage threshold and the judgement damage of comprehensive three kinds of method determination samples occur in sample surfaces or body:
1. scattered light intensity and vacuum cavity pressure one of them change, real-time photography result has also recognized damage point and has occurred and without the burnt phenomenon of void, be then judged to damage the front surface occurring in sample;
2. scattered light intensity is unchanged, and vacuum cavity pressure changes, and real-time photography result has also recognized damage point and occurred and have empty burnt phenomenon, be then judged to damage the rear surface occurring in sample.Because exploring laser light is generally the front surface generation scattering at sample, so scattered light intensity can not change when impaired loci appears in sample rear surface, but vacuum cavity pressure can change.Because CCD camera is focused in sample front surface, so the impaired loci of the rear surface recognized has empty burnt effect of amplifying;
3. scattered light intensity and vacuum chamber pressure all unchanged, real-time photography result also recognized damage point occur and have empty burnt phenomenon, be then judged to damage occurring in the body of sample.Because the detection sensitivity of pressure detecting element to sample surfaces is very high, as long as there is damage splash in its surface goes out particle, vacuum cavity pressure can change immediately, if but damage occurs in sample body, without particle splash, so vacuum cavity pressure would not change, but CCD camera still has empty burnt effect of amplifying;
E, to be different from D situation 1., 2., 3. when the result of three kinds of monitoring methods monitoring, electric rotating machine now can be utilized to be carried out carefully analyzing confirmation type of impairment to off-line watch window 13 high-power microscope 12 by rotary sample, then sample is rotated again and proceed test to laser incidence window position.
F, when damage appears in sample, rotary sample is observed damage morphologies further to off-line watch window 13 high-power microscope 12, analysis damage characteristic, and carries out taking pictures and preserving;
G, for needing the sample carrying out damage from laser test from the back side, sample stage can be revolved turnback to laser emitting window 9, as shown in Figure 2.Now its back side becomes laser entrance face, accept laser irradiation, monitor window 11 to its laser entrance face real-time photography by the first CCD camera 10 by CCD camera, the detection angle of light degree of adjustment He-Ne detecting laser and the angle of optical detection device, repeat C ~ F process;
After H, a sample test are complete, sample stage are rotated 36 degree, makes next rotary sample to laser incidence window position, as shown in Figure 3, repetition C ~ G, carries out laser damage threshold test;
The invention is not restricted to embodiment here, those skilled in the art are according to announcement of the present invention, and the improvement made for the present invention and amendment all should within protection scope of the present invention.
Claims (6)
1. the device for measuring damage threshold of high-efficiency multifunctional under a vacuum environment, it is characterized in that comprising: Nd:YAG laser instrument (1), He-Ne detecting laser (2), pressure detecting element (6), vacuum chamber (7), first CCD camera (10), high-power microscope (12), electric system (14), sample (16), optical detection device (18), second CCD camera (19) and computing machine (20), wherein: vacuum chamber (7) is fixed on electric system (14), vacuum chamber (7) side level is provided with laser incidence window (3), opposite side level is provided with laser emitting window (9), in side, top is provided with exploring laser light incidence window (4), in side, below is provided with exploring laser light exit window (17), top is provided with pressure detection window (5), in opposite side, below is provided with CCD camera monitoring window (11), in opposite side, top is provided with vacuum pump window (8), below is provided with off-line watch window (13), specimen rotating holder (15) is provided with in vacuum chamber (7), sample is positioned on specimen rotating holder (15), exploring laser light incidence window (4) is placed with He-Ne detecting laser (2), exploring laser light exit window (17) is placed with optical detection device (18) and the second CCD camera (19), pressure detection window (5) is placed with pressure detecting element (6), CCD camera monitoring window (11) places a CCD camera (10), off-line watch window (13) is provided with high-power microscope (12), Nd:YAG laser instrument (1), pressure detecting element (6), first CCD camera (10), high-power microscope (12), electric system (14), optical detection device (18), second CCD camera (19) connects computing machine (20) respectively, the light-emitting window of Nd:YAG laser instrument (1) aims at the light inlet of laser incidence window (3), when sample (16) is placed on laser incidence window (3) position, by the second CCD camera (19) to sample (16) surperficial real-time photography, when sample (16) rotates to laser emitting window (9) position, by the first CCD camera (10) to sample (16) surperficial real-time photography, when sample (16) rotates to off-line watch window (13), by high-power microscope (12), off-line observation analysis is carried out to sample (16).
2. the device for measuring damage threshold of high-efficiency multifunctional under a kind of vacuum environment according to claim 1, is characterized in that described electric system (14) comprises motorized precision translation stage and electric rotating machine; Vacuum chamber (7) is positioned at above motorized precision translation stage, vacuum chamber (7) and the overall motion being done horizontal or vertical direction by motorized precision translation stage control of sample (16).
3. the device for measuring damage threshold of high-efficiency multifunctional under a kind of vacuum environment according to claim 1, it is characterized in that described specimen rotating holder (15) is regualr decagon structure, wherein five limits are provided with five sample fixtures, can place five samples simultaneously.
4. the device for measuring damage threshold of high-efficiency multifunctional under a kind of vacuum environment according to claim 1, is characterized in that described specimen rotating holder (15) connects electric rotating machine, controls it rotate by electric rotating machine.
5. the device for measuring damage threshold of high-efficiency multifunctional under a kind of vacuum environment according to claim 1, it is characterized in that described vacuum chamber (7) connects vacuum pump, described vacuum pump adopts mechanical pump or turbomolecular pump.
6. the using method of the device for measuring damage threshold of high-efficiency multifunctional under vacuum environment as claimed in claim 1, is characterized in that concrete steps are as follows:
A) sample is fixed on the specimen rotating holder in vacuum chamber, opens vacuum pump and vacuum chamber is vacuumized, by the vacuum tightness in pressure gauge monitoring vacuum chamber;
B) start to carry out damage threshold test experiments when the vacuum tightness in vacuum chamber reaches experiment desired value, first open He-Ne laser instrument and send laser irradiation on sample surface, receive the scattered light on sample surface with optical detection device;
C) with Nd:YAG laser irradiation sample surface, utilize the motorized precision translation stage of electric system to control sample to do in the plane perpendicular to laser irradiation direction vertically or the movement of horizontal direction, realize 1-on-1, R-on-1, S-on-1 and raster scanning method of testing, by the second CCD camera to sample surface real-time photography, the pressure change in the vacuum chamber of pressure detecting element monitoring simultaneously;
D) by observing the result of the change of scattered light intensity, the pressure method of changing of vacuum chamber and real-time photography, the laser damage threshold of comprehensive three kinds of method determination samples;
E) as step D) there is change but uncertainly whether occurred damage in described three kinds of monitoring methods, electric rotating machine is utilized to rotate specimen rotating holder, sample is rotated and determines to off-line watch window high-power microscope, then sample is rotated again and proceed test to laser incidence window position;
F) when damage appears in sample, sample is rotated and observes damage morphologies further to off-line watch window high-power microscope, analyze damage characteristic, and take pictures;
G) for needing the sample carrying out damage from laser test from the back side, specimen rotating holder can be revolved turnback to laser emitting window, now its back side becomes laser entrance face, accept laser irradiation, by the first CCD camera to its surperficial real-time photography, the detection angle of light degree of adjustment He-Ne detecting laser and the angle of optical detection device, repeat C ~ F process;
H) sample test complete after, by specimen rotating holder rotate 36 degree, make next sample rotate to laser incidence window position, repetition step C) ~ G), carry out laser damage threshold test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310102099.1A CN103226057B (en) | 2013-03-27 | 2013-03-27 | Multifunctional high-efficiency laser damage test device and method in vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310102099.1A CN103226057B (en) | 2013-03-27 | 2013-03-27 | Multifunctional high-efficiency laser damage test device and method in vacuum environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103226057A CN103226057A (en) | 2013-07-31 |
| CN103226057B true CN103226057B (en) | 2015-04-08 |
Family
ID=48836585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310102099.1A Active CN103226057B (en) | 2013-03-27 | 2013-03-27 | Multifunctional high-efficiency laser damage test device and method in vacuum environment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103226057B (en) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048812B (en) * | 2014-05-21 | 2016-03-30 | 西北核技术研究所 | A kind of effect experiment device of Continuous high-energy laser illuminated optical element |
| CN104227601B (en) * | 2014-08-26 | 2016-06-08 | 中国电子科技集团公司第四十一研究所 | A kind of four-quadrant photo detector clamping alignment device |
| JP5938155B1 (en) * | 2015-04-24 | 2016-06-22 | 大塚電子株式会社 | Optical measuring apparatus and optical measuring method |
| CN105424712B (en) * | 2015-12-09 | 2018-07-03 | 同济大学 | A kind of diagnostic method of damage from laser initial stage material injection behavior |
| CN105679631B (en) * | 2016-01-29 | 2018-08-07 | 复旦大学 | Transmission electron microscope add in-place electrode sample platform |
| CN106556809A (en) * | 2016-10-26 | 2017-04-05 | 北京航空航天大学 | A kind of thin film magnetic under vacuum environment characterizes instrument |
| CN106768889A (en) * | 2016-12-19 | 2017-05-31 | 中北大学 | Optical thin film laser damage threshold test device and method under a kind of vacuum environment |
| CN108519218B (en) * | 2018-03-19 | 2019-10-18 | 中国科学院上海光学精密机械研究所 | Optical element multiwavelength laser damage measure and analysis system |
| CN108391042B (en) * | 2018-05-21 | 2023-09-19 | 光速视觉（北京）科技有限公司 | Camera image conversion system of vacuum packaging image sensor chip |
| CN108918094B (en) * | 2018-06-11 | 2021-03-26 | 同济大学 | Desktop type high energy density extreme ultraviolet irradiation damage testing arrangement |
| CN109343105B (en) * | 2018-09-11 | 2021-07-13 | 东莞中子科学中心 | Control system for white-light neutron source charged particle detection spectrometer |
| CN109343102B (en) * | 2018-09-11 | 2020-09-29 | 东莞中子科学中心 | Vacuum target chamber of white-light neutron source charged particle detection spectrometer |
| CN109991179B (en) * | 2019-01-25 | 2020-10-16 | 中国科学院上海光学精密机械研究所 | Use environment simulation device and measurement method for optical thin film spectral measurement |
| CN110108749B (en) * | 2019-04-26 | 2022-04-01 | 西北核技术研究所 | System and method for measuring pyrolysis kinetic parameters of resin-based composite material |
| CN110411629A (en) * | 2019-07-05 | 2019-11-05 | 东莞材料基因高等理工研究院 | A kind of multi-functional welding in-situ testing device |
| CN113484242A (en) * | 2021-07-06 | 2021-10-08 | 南开大学 | Simple sample vacuum device for strong laser damage experiment |
| CN114396876B (en) * | 2022-01-24 | 2023-06-16 | 中国工程物理研究院机械制造工艺研究所 | Laser transmission repeated positioning precision detection device, system and detection method |
| CN116973382A (en) * | 2023-07-26 | 2023-10-31 | 中国科学院上海光学精密机械研究所 | Space energy particle and on-orbit service state performance test device and method |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7528342B2 (en) * | 2005-02-03 | 2009-05-05 | Laserfacturing, Inc. | Method and apparatus for via drilling and selective material removal using an ultrafast pulse laser |
| CN101165474B (en) * | 2006-10-16 | 2011-11-16 | 福建福晶科技股份有限公司 | Non-linear crystal laser damage threshold valve measuring method |
| CN101706444B (en) * | 2009-11-13 | 2011-07-13 | 哈尔滨工业大学 | Detection device of laser damage threshold of optical crystal element |
| CN101718712B (en) * | 2009-12-02 | 2012-03-21 | 西安工业大学 | Combined testing device and testing method of laser damage thresholds of film and optical element |
| CN102175594B (en) * | 2011-02-25 | 2013-04-17 | 同济大学 | Device for measuring damage threshold under combined action of three-wavelength pulse laser and debugging method |
| CN102564734B (en) * | 2011-03-15 | 2014-12-03 | 北京国科世纪激光技术有限公司 | Automatic testing device and testing method for laser damage threshold value |
| CN102608019A (en) * | 2012-03-23 | 2012-07-25 | 中国矿业大学 | Device and method for measuring laser irradiation optical thin film damage threshold in high-temperature environment |
-
2013
- 2013-03-27 CN CN201310102099.1A patent/CN103226057B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103226057A (en) | 2013-07-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103226057B (en) | Multifunctional high-efficiency laser damage test device and method in vacuum environment | |
| CN106840610B (en) | The measuring device and measurement method of optic element damage threshold value under vacuum environment | |
| CN203337576U (en) | Multifunctional secondary electronic emission coefficient analyzing and testing device | |
| CN1858606A (en) | Corona detecting method and system for insulator remote surface on optical amplifier | |
| CN100468132C (en) | Charge neutralizer for glass substrate | |
| EP3904869A1 (en) | Diffraction device and method for non-destructive testing of internal crystal orientation uniformity of workpiece | |
| CN107655909A (en) | The electron diffraction instrument of defect auto-control can be achieved | |
| CN103728282B (en) | The instrument analytical method of inclusion content in a kind of Fast Measurement material | |
| US4809314A (en) | Method of aligning a linear array X-ray detector | |
| CN115825127A (en) | Lithium cell multi-angle CT formation of image check out test set | |
| CN111157213A (en) | Real-time monitoring device and method for drop damage of microelectronic product | |
| CN107462592A (en) | Bimodulus successively measuring system | |
| CN207675651U (en) | Portable underwater deposit, rock composition detection device based on LIBS technologies | |
| CN108010829B (en) | The mass spectrometer of plumage brightness particulate in a kind of laser welding | |
| CN101752462B (en) | Laser processing state detection method and apparatus and method for manufacturing solar cell board | |
| CN106680314B (en) | The thermal infrared imaging device and method of projection-type non-destructive testing film interlayer internal flaw | |
| CN112378930A (en) | Pulse laser-based cladding layer surface and deep layer flaw detection method | |
| CN112666595A (en) | Proton beam current measuring device and method | |
| CN105259194A (en) | Measuring method for modulation period and uniformity of multiple layers of films | |
| CN103491698A (en) | Micro-focus X-ray source dynamic focus control method | |
| CN217638780U (en) | High-temperature mechanical platform based on X-ray | |
| CN115290655B (en) | Imaging method of defect detection photo-thermal fusion imaging device based on heat flow diffusion tracking | |
| CN115753715A (en) | Analysis system and analysis method for impurity elements on surface of divertor of EAST tokamak device | |
| CN203881709U (en) | Recognition device for laser-induced damage of optical thin film | |
| CN112461880B (en) | Method for positioning and detecting surface conductive type passage of glass sealing structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |