CN101414052A - Galileo type multiple-wave length magnification changeable laser bundle-enlarging collimation system - Google Patents
Galileo type multiple-wave length magnification changeable laser bundle-enlarging collimation system Download PDFInfo
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- CN101414052A CN101414052A CNA2008102033860A CN200810203386A CN101414052A CN 101414052 A CN101414052 A CN 101414052A CN A2008102033860 A CNA2008102033860 A CN A2008102033860A CN 200810203386 A CN200810203386 A CN 200810203386A CN 101414052 A CN101414052 A CN 101414052A
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Abstract
The invention discloses a Galilean multi-wavelength vary-power laser expanded beam alignment system which consists of a multifocal group plane convex single lens, a fixed group plano-concave single quadric non-spherical lens and a compensating group plano-concave quadric non-spherical lens. The system can continuously expand the beam of any laser wave length having the divergence angle of emergence within 5mrad at the interval of 250-2300nm by vary-power within 2-12 times, and no real convergent point is available in the system, and the system can be applied to the field of intense laser. When in design, a perfect lens is added behind a compensating mirror, so that the obtained the image of the system proves that the wave aberration PV values at center vision field of laser with any wavelength in the whole wave band are superior to lambada/50, the PV value of 0.7 vision field is basically superior to lambada/10, the PV value of 1 vision field is superior to lambada/4, and the alignment effect of the expanded beam is good. The system has simple structure, easy processing and debugging as well as convenient use.
Description
Technical field
The present invention relates to optical element, design of Optical System technology, specifically be meant a kind of Galileo type multiple-wave length magnification changeable laser bundle-enlarging colimated light system, it is applicable to the design of laser bundle-enlarging collimation system of the real convergent point of nothing of the expansion bundle multiplying power Adjustable real-time that multi-wavelength is used.
Background technology
Gaussian beam except that the profile scale factor changes, will remain Gaussian distribution by the propagation of free space with by the aberrationless Transformation of Lens time.
Gaussian beam is in its collimation district, and spot size changes slowly, and away from place with a tight waist, hot spot increases linearly with the increase of distance.With a tight waist more little, the angle of divergence of light beam is big more, and with a tight waist big more, the angle of divergence of light beam is more little.Though the light beam that laser instrument sends has fabulous directivity, still there is a certain amount of lateral divergence angle.Utilize laser beam expander to improve its directivity in actual the use, promptly compress its angle of divergence, the beam-expanding collimation of laser beam that Here it is.
The refraction type laser beam expanding system does not have central obscuration, divide have in the middle of two kinds of the Galileo formulas of Kepler's formula of real convergent point and no real convergent point.The Galileo beam-expanding system can not bring problems such as air ionization because of there not being real convergent point, can be applicable to the light laser field, and tube length is short, and aberration is proofreaied and correct well on the axle.But off-axis aberration is difficult to proofread and correct, and restraints the multiplying power requirement for big, the high expansion of the original laser angle of divergence, and is then more difficult.At this moment, often by complicated system architecture, increase eyeglass quantity and come the balance aberration.In light laser is used, if the angle of divergence of the light beam that laser instrument is come out has a plurality of requirements or a plurality of laser instruments (the different outgoing angles of divergence) are all had the beam-expanding collimation requirement, if, then need the beam-expanding systems that overlap only with the fixing beam expander of multiplying power more.At this moment, use the beam expander of different fixedly multiplying powers for fear of frequent switching, develop a kind of change times scope bigger, collimate the adjustable laser beam expander of the reasonable multiplying power of performance and be very important.Simultaneously, for simplifying the beam expander optical system structure, adopt the secondary aspherical lens that are easy to inspection during manufacture.
Summary of the invention
The objective of the invention is to design a kind of laser beam expanding optical system of expansion bundle variable power of suitable multi-wavelength work, solve at present the problem of the beam expander of the different fixedly multiplying power of frequent switching use that the fixing laser beam expander of multiplying power exists.
Change multiplying power beam expander optical system of the present invention as shown in Figure 1, optical system doubly organizes 1 by becoming, fixing group 2 and compensation group 3 are formed.Become that doubly to organize 1 be a plano-convex spherical lens, fixing group 2 is plano-concave secondary aspherical lens, and compensation group 3 is plano-convex secondary aspherical lens, the plano-convex secondary aspherical lens of compensation group 3 and becoming doubly organize 1 and the zoom group that constitute of fixing group 2 disappearing image is poor separately.
Secondary aspherical lens face shape can be expressed as
In the following formula, z is the rise of aspheric surface on optical axis direction, and c is the aspheric surface vertex curvature radius, and k is the secondary aspherical constant, and r is the aspheric surface radial distance.
The laser of laser emitting doubly organizes 1 through becoming, fixing group 2, the compensation group 3 parallel outgoing in back, bore expansion, and the angle of divergence diminishes.
Variable power laser beam expanding system multiplying power method of adjustment of the present invention is: fixing group 1 does not move, regulate to become and doubly to organize 1 and the interval d12 of fixing group 2, this moment, the image planes position can change, regulate the interval d23 of fixing group 2 and compensation group 3 again, the image planes location restore to infinite distant place, is realized the beam-expanding collimation of laser beam.Each specific change doubly organizes 1 and the interval d12 of fixing group 2, the interval d23 of a corresponding fixing group 2 and compensation group 3, doubly organize 1 and the interval d12 of fixing group 2 when constantly changing when becoming, the corresponding fixedly group 2 and the interval d23 of compensation group 3 also will change, and so just can realize expanding the continuous variation of bundle multiplying power M.
Variable power laser beam expanding system of the present invention can work in the multi-wavelength.Because the optics material is different to the refractive index of different wavelength of laser, for same expansion bundle multiplying power, a kind of optical maser wavelength of every replacing, after determining to become the interval d12 of times group and fixing group, regulate the interval d23 of fixing group and compensation group, the image planes location restore to infinite distant place, is realized the expansion bundle of this this multiplying power of wavelength.The laser of adjacent wavelengths expands bundle with multiplying power, only needs to finely tune to become doubly group and the fixing interval d12 that organizes, and regulates the interval d23 of fixing group and compensation group again.When the optical material adopting quartz glass of lens, beam-expanding system of the present invention can be worked under arbitrary single wavelength in wavelength 250nm-2300nm.
Advantage of the present invention is:
1. no real convergent point in the system can be used for the collimator and extender of light laser;
2. system architecture is simple, only is made up of 2 plano-convex lenss and 1 plano-concave lens, and it is loose to add frock school tolerance;
3. the independent anaberration of plano-convex non-spherical lens is easy to processing;
4. fixing group does not move, and regulates to become and doubly organizes the position, and the position assurance image planes of regulating the compensation group again can realize that all the time at unlimited distance the continuous zoom that the 2-12 ploidy can be good expands bundle;
5. when becoming times, adjustable range is little, and focusing physical construction is simple, is easy to realize;
6. regulate the position that becomes times group and compensation group, can be applied to the beam-expanding collimation of multiple optical maser wavelength.
Description of drawings
Fig. 1 is an optical texture synoptic diagram of the present invention,
Among the figure: 1 for becoming doubly group;
2 are fixing group;
3 are the compensation group;
R11 is for becoming the front surface radius-of-curvature of doubly organizing 1 lens;
R12 is for becoming the rear surface radius-of-curvature of doubly organizing 1 lens;
R21 is the front surface curvature of centre radius of fixing group 2 lens;
R22 is the rear surface radius-of-curvature of fixing group 2 lens;
R31 is the front surface radius-of-curvature that 3 lens are organized in compensation;
R32 is for becoming the rear surface curvature of centre radius of doubly organizing lens;
D1 is for becoming the center thickness of doubly organizing 1 lens;
D12 doubly organizes 1 lens and the fixing airspace of organizing 2 lens for becoming;
D2 is the center thickness of fixing group 2 lens;
D23 organizes the airspace of 3 lens for fixing group 2 lens and compensation;
D3 is the center thickness that 3 lens are organized in compensation.
Embodiment
Also elaborate for better embodiment of the present invention according to Fig. 1 below:
The parameter of incoming laser beam: bore 3mm, arbitrary single wavelength in the angle of divergence 5mrad, wavelength 250-2300nm.(because optics of lens material difference, but the wavelength coverage of beam-expanding collimation is also different)
Require the parameter of outgoing laser beam: expanding the bundle multiplying power is M (2≤M≤12), bore 3M, and the angle of divergence is 5/M.
With 623.8nm optical maser wavelength is example, and beam expander optical system specific design parameter is as shown in table 1:
Table 1 becomes times beam expander optical system data
D12 and d23 are adjustable at interval, and when change multiplying power M continuously changed between 2-12, for 0.6328nm optical maser wavelength, the d12 span was 42.50mm-3.50mm, and the d23 span is 177.85mm-195.84mm.
Adding a perfect lens and estimate the designing quality of beam-expanding system after system, is example with change multiplying power M=2,4,6,8,10,12 these several points, and the wave aberration of each visual field is referring to table 2.This system 2-12 doubly between during continuous zoom, the PV value that the PV value that visual field, center PV value all is better than λ/50,0.7 visual fields is better than λ/20,1 visual fields substantially all is better than λ/10, the beam-expanding collimation effect is good.
The different picture elements that expand each visual field of bundle multiplying power of table 2
To a certain single wavelength, become in times process, becoming a times group is linear movement, and the approximate parabolic curve motion of compensation group.
By change to become doubly organize 1 with the airspace d23 of the airspace d12 of fixing group 2, fixing group 2 and compensation group 3, can carry out beam-expanding collimation to arbitrary single wavelength laser beam in the wavelength 250-2300nm.For simplicity, select wavelength X=250,300,400,500,600,700,800,900,1000,1100,1200,1300,1400,1500,1600,1700,1800,1900,2000,2100,2200,2300nm, select to expand bundle multiplying power M=2,4,7,10,12 these several points.Each wavelength each expand bundle multiplying power correspondence 0 visual field, 0.7 visual field (± 3.5mrad), (± 5.0mrad) wave aberration PV value is referring to table 3, and the wave aberration PV value of each visual field is all much smaller than λ/4 under the various situations in 1.0 visual fields.Single wavelength becomes when doubly expanding bundle or changing optical maser wavelength, and the value of d12 and d23 is referring to table 4.
For the 250-2300nm wavelength coverage, 2-12 doubly expands bundle continuously, then become the airspace d12 span of doubly organizing lens and fixing group lens and be 45.0mm-3.1mm, the airspace d23 span of fixing group lens and compensation group lens is 159.6mm-206.8mm.System optics length is less than 250mm.
Claims (5)
1. Galileo type multiple-wave length magnification changeable laser bundle-enlarging colimated light system, it is made up of a spherical lens and two non-spherical lenses, it is characterized in that:
The change that laser beam constitutes via plano-convex spherical lens is doubly organized after (1) refraction successively by fixedly group (2) that is made of a plano-concave non-spherical lens and the compensation group (3) that is made of a plano-convex non-spherical lens parallel outgoing in back, bore enlarges, and the angle of divergence diminishes;
The expansion bundle multiplying power of system is adjusted by adjusting the spacing d12 and the fixing spacing d23 that organizes between (2) and the compensation group (3) that become between times group (1) and the fixing group (2);
The operation wavelength of system changes by changing the spacing d12 and the fixing spacing d23 that organizes between (2) and the compensation group (3) that become between times group (1) and the fixing group (2).
2. a kind of Galileo type multiple-wave length magnification changeable laser bundle-enlarging colimated light system according to claim 1 is characterized in that: said fixedly group (2) is a quadric surface non-spherical lens.
3. a kind of Galileo type multiple-wave length magnification changeable laser bundle-enlarging colimated light system according to claim 1 is characterized in that: (3) anaberrational quadric surface non-spherical lenses of said compensation group.
4. a kind of Galileo type multiple-wave length magnification changeable laser bundle-enlarging colimated light system according to claim 1 is characterized in that: the expansion bundle multiplying power setting range of described system is 2-12 times.
5. a kind of Galileo type multiple-wave length magnification changeable laser bundle-enlarging colimated light system according to claim 1 is characterized in that: when optical system adopted the Q1 of Schott AG quartz glass lens, the operating wavelength range of described system was 250nm-2300nm.
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| CNA2008102033860A CN101414052A (en) | 2008-11-26 | 2008-11-26 | Galileo type multiple-wave length magnification changeable laser bundle-enlarging collimation system |
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| CNA2008102033860A CN101414052A (en) | 2008-11-26 | 2008-11-26 | Galileo type multiple-wave length magnification changeable laser bundle-enlarging collimation system |
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| CN101788716B (en) * | 2010-02-24 | 2011-09-28 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
| CN101762879B (en) * | 2010-01-25 | 2012-03-14 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
| CN102109678B (en) * | 2009-12-24 | 2013-05-15 | 深圳市大族激光科技股份有限公司 | Laser beam expanding device and demonstration system |
| CN102109679B (en) * | 2009-12-24 | 2013-10-23 | 深圳市大族激光科技股份有限公司 | Beam expanding device and laser demonstration system |
| WO2014012415A1 (en) * | 2012-07-18 | 2014-01-23 | 深圳市大族激光科技股份有限公司 | Ultraviolet laser zoom beam expanding system and laser processing equipment |
| WO2014012417A1 (en) * | 2012-07-18 | 2014-01-23 | 深圳市大族激光科技股份有限公司 | Green laser zoom beam expanding system and laser processing equipment |
| WO2014012416A1 (en) * | 2012-07-18 | 2014-01-23 | 深圳市大族激光科技股份有限公司 | Infrared laser zoom beam expanding system and laser processing equipment |
| CN104142498A (en) * | 2014-08-01 | 2014-11-12 | 北京理工大学 | Novel beam expander of coherent wind lidar |
| CN104181694A (en) * | 2014-09-09 | 2014-12-03 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system and laser processing device |
| CN104635343A (en) * | 2015-02-14 | 2015-05-20 | 哈尔滨工业大学 | Refracting-reflecting type variable zoom laser expanding and collimating system |
| CN105527716A (en) * | 2016-02-03 | 2016-04-27 | 上海仪万光电科技有限公司 | Ultraviolet laser zoom beam expanding lens |
| CN108080800A (en) * | 2017-06-14 | 2018-05-29 | 谢文杰 | Adjustable light beam femto-second laser processing unit (plant) |
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| CN110514595A (en) * | 2019-08-28 | 2019-11-29 | 中国科学院长春光学精密机械与物理研究所 | Optical measuring device with Beam Control function |
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| CN114488555A (en) * | 2022-03-31 | 2022-05-13 | 武汉锐科光纤激光技术股份有限公司 | Light beam collimation device, method, apparatus, storage medium and electronic apparatus |
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| CN102109679B (en) * | 2009-12-24 | 2013-10-23 | 深圳市大族激光科技股份有限公司 | Beam expanding device and laser demonstration system |
| CN101762879B (en) * | 2010-01-25 | 2012-03-14 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
| CN101788716B (en) * | 2010-02-24 | 2011-09-28 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
| DE112013003558B4 (en) | 2012-07-18 | 2019-01-03 | Han's Cnc Science And Technology Co., Ltd. | Zoomable beam expansion system for an ultraviolet laser and laser processing device |
| DE112013003585B4 (en) | 2012-07-18 | 2019-01-03 | Han's Cnc Science And Technology Co., Ltd. | Zoomable beam expansion system for a green laser and laser processing device |
| WO2014012416A1 (en) * | 2012-07-18 | 2014-01-23 | 深圳市大族激光科技股份有限公司 | Infrared laser zoom beam expanding system and laser processing equipment |
| WO2014012417A1 (en) * | 2012-07-18 | 2014-01-23 | 深圳市大族激光科技股份有限公司 | Green laser zoom beam expanding system and laser processing equipment |
| DE112013003095B4 (en) | 2012-07-18 | 2019-01-03 | Han's Cnc Science And Technology Co., Ltd. | Infrared Laser Zoom Beam Expansion System and Laser Processing System |
| WO2014012415A1 (en) * | 2012-07-18 | 2014-01-23 | 深圳市大族激光科技股份有限公司 | Ultraviolet laser zoom beam expanding system and laser processing equipment |
| US9069170B1 (en) | 2012-07-18 | 2015-06-30 | Han's Laser Technology Industry Group Co., Ltd. | Ultraviolet laser zoom beam expanding system and laser processing equipment |
| JP2015523608A (en) * | 2012-07-18 | 2015-08-13 | ハンズ レーザー テクノロジー インダストリー グループ カンパニー リミテッド | Green laser zoom beam expansion system and laser processing equipment |
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| US9329395B2 (en) | 2012-07-18 | 2016-05-03 | Han's Laser Technology Industry Group Co., Ltd. | Green laser zoom beam expanding system and laser processing equipment |
| CN104142498A (en) * | 2014-08-01 | 2014-11-12 | 北京理工大学 | Novel beam expander of coherent wind lidar |
| CN104181694A (en) * | 2014-09-09 | 2014-12-03 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system and laser processing device |
| CN104635343A (en) * | 2015-02-14 | 2015-05-20 | 哈尔滨工业大学 | Refracting-reflecting type variable zoom laser expanding and collimating system |
| CN105527716A (en) * | 2016-02-03 | 2016-04-27 | 上海仪万光电科技有限公司 | Ultraviolet laser zoom beam expanding lens |
| CN105527716B (en) * | 2016-02-03 | 2018-09-21 | 上海仪万光电科技有限公司 | A kind of ultraviolet laser continuous zoom beam expanding lens |
| CN108080800A (en) * | 2017-06-14 | 2018-05-29 | 谢文杰 | Adjustable light beam femto-second laser processing unit (plant) |
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| CN110514595A (en) * | 2019-08-28 | 2019-11-29 | 中国科学院长春光学精密机械与物理研究所 | Optical measuring device with Beam Control function |
| CN111650755A (en) * | 2020-07-10 | 2020-09-11 | 鹏城实验室 | Underwater laser light source system and underwater wireless optical communication system |
| CN114488555A (en) * | 2022-03-31 | 2022-05-13 | 武汉锐科光纤激光技术股份有限公司 | Light beam collimation device, method, apparatus, storage medium and electronic apparatus |
| CN115032806A (en) * | 2022-04-22 | 2022-09-09 | 北京遥测技术研究所 | Multi-wavelength laser beam expanding method and beam expanding system |
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Open date: 20090422 |