CN104181694A - Laser beam expanding system and laser processing device - Google Patents
Laser beam expanding system and laser processing device Download PDFInfo
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- CN104181694A CN104181694A CN201410459300.6A CN201410459300A CN104181694A CN 104181694 A CN104181694 A CN 104181694A CN 201410459300 A CN201410459300 A CN 201410459300A CN 104181694 A CN104181694 A CN 104181694A
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Abstract
The invention is applicable to the technical field of laser processing and provides a laser beam expanding system. The laser beam expanding system comprises a front lens group and a back lens group which are sequentially arranged in the laser transmission direction. The front lens group comprises a first lens. The back lens group comprises a second lens and a third lens. The first lens is a double-concave or plano-concave negative lens. The second lens is a meniscus or plano-concave positive lens. The third lens is a double-convex or plano-convex positive lens. The front lens group and the back lens group are confocal to form a Galilean telescope system structure. The front lens group and the back lens group can move relatively, so that the laser beam expanding system conducts equimultiple beam expanding on lasers with different wavelengths. The laser beam expanding system can achieve multi-wavelength equimultiple beam expanding, can be compatible with a multi-wavelength high-power laser system and is wide in application range; under operation at the multiple wavelengths compatible with the laser beam expanding system, output light spots can all reach a diffraction limit, focus points are high in energy density, and processing efficiency is high; the laser beam expanding system is compact in structure, convenient to adjust and small in occupied space.
Description
Technical field
The invention belongs to laser technology field, relate in particular to a kind of laser beam expanding system and laser process equipment.
Background technology
In laser processing procedure, conventionally require laser very concentrated at the energy of focus point, ensure that Laser Focusing point has higher energy density, laser is worked effectively, and improve the work efficiency of laser.For same laser instrument, if will improve the focus energy density of laser, to obtain exactly as far as possible little focus point.According to diffraction limit theory: the pass of the angle of divergence θ of laser and laser beam waist diameter w is θ * w=4 λ/π, in the time using certain laser instrument, the wavelength X of laser is certain, so the product of the angle of divergence θ of laser and laser beam waist diameter w is constant.In order to reduce focal beam spot, conventionally need to reduce the light angle of divergence and increase simultaneously the diameter of laser beam, generally all smaller from the laser beam diameter of laser instrument output, angle of divergence θ is larger, before focusing on by convergence optical system, generally can require expanded light beam diameter to reduce angle of divergence θ.Conventionally in the convergence optical system that laser instrument and focal length are f, add laser beam expanding system, select the suitable multiple β that expands, make laser beam enlarged-diameter to D=β * w, the angle of divergence θ of laser
enterstill meet diffraction limit theoretical relationship θ
enter* D=4 λ/π, so, θ
enter=4 λ/π D=θ/β, the big or small σ=θ of convergent laser hot spot
enter* f=4 λ f/ π D, so, by adding a suitable multiplying power beam-expanding system, just can obtain desirable focal beam spot σ to improve the energy density at job spotlight place.But in actual applications, beam-expanding system plays a role for certain wavelength, even if the multiplying power that light beam will expand is certain, but due to corresponding optical maser wavelength difference, the beam-expanding system using is also different, therefore for set laser instrument beam-expanding system, its utilization rate is subject to larger restriction.
Summary of the invention
The object of the present invention is to provide a kind of laser beam expanding system, enable compatibility in multi-wavelength's laser system, improve its utilization rate.
The present invention is achieved in that a kind of laser beam expanding system, comprises the front lens group and the rear lens group that set gradually along Laser Transmission direction; Described front lens group comprises first lens, described rear lens group comprises the second lens and the 3rd lens, described first lens is double concave type or platycelous negative lens, and described the second lens are curved month type or platycelous negative lens, and described the 3rd lens are biconvex or planoconvex positive lens; The confocal formation Galileo telescope of described front lens group and rear lens group system architecture; Described front lens group and rear lens group can relatively move, and described laser beam expanding system is expanded multiplying powers such as the laser of different wave length carry out.
Apply laser beam expanding system provided by the invention, by changing the spacing of front lens group and rear lens group, can realize the multiplying powers such as multi-wavelength and expand, can be by its compatibility in multi-wavelength's high power laser system, utilization rate is high, applied range; And under multi-wavelength's work of this beam-expanding system compatibility, output facula all can reach diffraction limit, and focus point energy density is high, and working (machining) efficiency is high; And this beam-expanding system compact conformation, easy to adjust and take up room littlely, be conducive to the miniaturization of laser-processing system.
Brief description of the drawings
Fig. 1 is the structural representation of the laser beam expanding system that provides of the embodiment of the present invention;
Fig. 2 is the index path of the laser beam expanding system that provides of the embodiment of the present invention;
Fig. 3 is the transfer curve figure of the laser beam expanding system that provides of the embodiment of the present invention;
Fig. 4 is the disc of confusion figure of the laser beam expanding system that provides of the embodiment of the present invention;
Fig. 5 is Rayfan (composition error of the optical system) figure of the laser beam expanding system that provides of the embodiment of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Below in conjunction with specific embodiment, specific implementation of the present invention is described in detail:
The embodiment of the present invention provides a kind of laser beam expanding system, for laser process equipment, is arranged between laser instrument and focusing system, laser beam is carried out to beam-expanding collimation processing, further to focus on workplace by focusing system.Please refer to Fig. 1 and Fig. 2, this laser beam expanding system comprises the front lens group and the rear lens group that set gradually along Laser Transmission direction, and front lens group comprises first lens L1, and rear lens group comprises the second lens L2 and the 3rd lens L3.First, second, and third lens all adopt high temperature resistant optical material to make.First lens L1 is double concave type or platycelous negative lens, and the second lens L2 is curved month type or platycelous negative lens, and the 3rd lens L3 is biconvex or planoconvex positive lens.The confocal formation Galileo telescope of front lens group and rear lens group system architecture.Wherein, front lens group and rear lens group can relatively move, and make the distance between the two adjustable, and then make this beam-expanding system carry out expanding of same multiplying power to the laser of different wave length.In the present embodiment, the spacing of front lens group and rear lens group is regulated and is the spacing by fixing the second lens and the 3rd lens and changes first lens and the spacing of the second lens realizes.
Please further consult accompanying drawing 1, laser beam expanding system comprises first lens L1, the second lens L2 and the 3rd lens L3.First lens L1 and the rear lens group being made up of the second lens L2 and the 3rd lens L3 be confocal forms Galileo telescope system architecture.First lens L1 has first surface S1 and the second curved surface S2, and the second lens L2 has the 3rd curved surface S3 and the 4th curved surface S4, and the 3rd lens L3 has the 5th curved surface S5 and the 6th curved surface S6.First surface S1 to the six curved surface S6 set gradually along the transmission direction of laser.Wherein first lens L1 is a biconcave lens, and the radius-of-curvature of first surface S1 is-19mm that the radius-of-curvature of the second curved surface S2 is 13mm; The second lens L2 is negative meniscus, and the radius-of-curvature of the 3rd curved surface S3 is 623mm, and the radius-of-curvature of the 4th curved surface S4 is 56mm; The 3rd lens L3 is biconvex positive lens, and the radius-of-curvature of the 5th curved surface S5 is 61mm, and the radius-of-curvature of the 6th curved surface S6 is-61mm.The tolerance of above-mentioned each radius-of-curvature is 5%.
Further, on the basis of above-mentioned curvature parameters, thickness and lenticular spacing to each lens limit as follows, concrete, the center thickness d1 of first lens L1 is 1.5mm, the center thickness d3 of the second lens L2 is 3mm, and the center thickness d5 of the 3rd lens L3 is 8mm, and the tolerance of each center thickness is 5%.The spacing d2 (distance between the second curved surface S2 and the 3rd curved surface S3) of first lens L1 and the second lens L2 is adjustable between 101～107mm, the spacing d4 (distance between the 4th curved surface S4 and the 5th curved surface S5) of the second lens L2 and the 3rd lens L3 is 1.3mm, and the tolerance of each distance is 5%.
By the distance d2 between the second curved surface S2 and the 3rd curved surface S3 is regulated, can doubly expand the laser realization of 355nm, 532nm and 1064nm etc.Adopt in the situation of material Nd/Vd=1.4/67, in the time that the distance d2 between the second curved surface S2 and the 3rd curved surface S3 is 101mm, the laser that can be 355nm to wavelength carries out 8 times and expands; In the time that the distance d2 between the second curved surface S2 and the 3rd curved surface S3 is 105mm, the laser that can be 532nm to wavelength carries out 8 times and expands; In the time that the distance d2 between the second curved surface S2 and the 3rd curved surface S3 is 107mm, the laser that can be 1064nm to wavelength carries out 8 times and expands, and the entrance pupil diameter of this beam-expanding system is 3.5mm.
Below further by the clear specifications parameter that above-mentioned each lens are shown of form, as table 1 and table 2.
Table 1. laser beam expanding system parameter list
The spacing d2 of table 2. front lens group and rear lens group and the table of comparisons of wavelength X
| Wavelength X | 355nm | 532nm | 1064nm |
| d2 | 101mm | 105mm | 107mm |
According to the laser beam expanding system of above-mentioned parameter design, not only can expand by compatible multi-wavelength, can also ensure good beam quality, ensure the high-energy-density of focus point, and then ensure Laser Processing precision and efficiency.Below, by the optical effect of the above-mentioned laser beam expanding system of accompanying drawing 3～5 signal, wavelength is respectively 355nm, 532nm and 1064nm.
With reference to (a) in figure 3, (b), (c) figure, it shows the optical transfer function curve map of this beam-expanding system, real space frequency is in the time of 20lp/mm, the transport function of corresponding 355nm and 532nm laser reach 0.5 or more than, for the transport function of 1064nm be 0.12 or more than, resolution is high, meets the requirement of Laser Processing.With further reference to Fig. 4, (a), (b) in Fig. 4, the disperse figure that (c) figure shows respectively 355nm, 532nm and 1064nm Laser Focusing point, in the time that wavelength is 355nm, disc of confusion approaches Airy disk; In the time that wavelength is 532nm, disc of confusion is less than Airy disk; In the time that wavelength is 1064nm, disc of confusion is far smaller than Airy disk, (a), (b) of Fig. 5, the Rayfan figure that (c) figure shows respectively 355nm, 532nm and 1064nm, show that this system is operated in respectively under three kinds of wavelength, and output facula consistance is fine.
The laser beam expanding system that the application embodiment of the present invention provides, by changing the spacing d2 of first lens L1 and the second lens L2, can be compatible in multi-wavelength's high power laser system, make to be applied in dissimilar laser instrument with a beam-expanding system, utilization rate is high, applied range; And under multi-wavelength's work of this beam-expanding system compatibility, output facula all can reach diffraction limit, and focus point energy density is high, and working (machining) efficiency is high; And this beam-expanding system compact conformation, easy to adjust and take up room littlely, be conducive to the miniaturization of laser-processing system.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.
Claims (10)
1. a laser beam expanding system, is characterized in that, comprises the front lens group and the rear lens group that set gradually along Laser Transmission direction; Described front lens group comprises first lens, described rear lens group comprises the second lens and the 3rd lens, described first lens is double concave type or platycelous negative lens, and described the second lens are curved month type or platycelous negative lens, and described the 3rd lens are biconvex or planoconvex positive lens; The confocal formation Galileo telescope of described front lens group and rear lens group system architecture; Described front lens group and rear lens group can relatively move, and described laser beam expanding system is expanded multiplying powers such as the laser of different wave length carry out.
2. laser beam expanding system as claimed in claim 1, is characterized in that, described first lens comprises first surface and the second curved surface, and described the second lens comprise the 3rd curved surface and the 4th curved surface, and described the 3rd lens comprise the 5th curved surface and the 6th curved surface; The radius-of-curvature of described first surface is-19mm, the radius-of-curvature of described the second curved surface is 13mm, the radius-of-curvature of described the 3rd curved surface is 623mm, the radius-of-curvature of described the 4th curved surface is 56mm, the radius-of-curvature of described the 5th curved surface is 61mm, the radius-of-curvature of described the 6th curved surface is-61mm that the tolerance of each radius-of-curvature is 5%.
3. the laser beam expanding system that claim 2 is stated, is characterized in that, the center thickness of described first lens is 1.5mm, and the center thickness of described the second lens is 3mm, and the center thickness of described the 3rd lens is 8mm, and the tolerance of each center thickness is 5%; Distance between described the 4th curved surface and the 5th curved surface is 1.3mm, and the tolerance of each distance is 5%.
4. laser beam expanding system as claimed in claim 3, is characterized in that, the distance between described the second curved surface and the 3rd curved surface is 101mm, and described sharp light wavelength is 355nm.
5. laser beam expanding system as claimed in claim 3, is characterized in that, the distance between described the second curved surface and the 3rd curved surface is 105mm, and described sharp light wavelength is 532nm.
6. laser beam expanding system as claimed in claim 3, is characterized in that, the distance between described the second curved surface and the 3rd curved surface is 107mm, and described sharp light wavelength is 1064nm.
7. the laser beam expanding system as described in claim 1 to 6 any one, is characterized in that, the material of described first lens, the second lens and the 3rd lens is Nd/Vd=1.4/67.
8. laser beam expanding system as claimed in claim 7, is characterized in that, the multiplying power that expands of described laser beam expanding system is 8.
9. a laser process equipment, comprises laser instrument, beam-expanding system and focusing system, it is characterized in that, described beam-expanding system adopts the laser beam expanding system described in claim 1 to 8 any one.
10. laser process equipment as claimed in claim 9, is characterized in that, the output wavelength of described laser instrument is 355nm, 532nm or 1064nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410459300.6A CN104181694B (en) | 2014-09-09 | A kind of laser beam expanding system and laser process equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410459300.6A CN104181694B (en) | 2014-09-09 | A kind of laser beam expanding system and laser process equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104181694A true CN104181694A (en) | 2014-12-03 |
| CN104181694B CN104181694B (en) | 2017-01-04 |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199983A (en) * | 2016-08-25 | 2016-12-07 | 大族激光科技产业集团股份有限公司 | Expand assembly and there is this laser process equipment expanding assembly |
| CN108508614A (en) * | 2017-02-23 | 2018-09-07 | 常州巴斯光年激光科技有限公司 | A kind of continuous multiplying power beam-expanding system of infrared laser suitable for 1064nm wavelength |
| CN108681086A (en) * | 2018-07-06 | 2018-10-19 | 温州大学激光与光电智能制造研究院 | Laser facula apparatus for shaping and its method |
| CN109186958A (en) * | 2018-09-19 | 2019-01-11 | 西安工业大学 | A kind of coaxial laser damage threshold test device of more light and implementation method |
| CN109689279A (en) * | 2016-04-29 | 2019-04-26 | 努布鲁有限公司 | Visible light lasers increasing material manufacturing |
| CN110568588A (en) * | 2019-09-06 | 2019-12-13 | 中国科学院合肥物质科学研究院 | Beam expanding lens |
| CN111272013A (en) * | 2020-03-20 | 2020-06-12 | 中国人民解放军陆军装甲兵学院士官学校 | Portable all-weather general laser gun calibration instrument |
| CN115032806A (en) * | 2022-04-22 | 2022-09-09 | 北京遥测技术研究所 | Multi-wavelength laser beam expanding method and beam expanding system |
| CN115031930A (en) * | 2022-06-13 | 2022-09-09 | 浙江大学 | Phase recovery wavefront detection device and method with adjustable measurement frequency |
| CN117452655A (en) * | 2023-12-22 | 2024-01-26 | 武汉光至科技有限公司 | High-magnification spherical aberration eliminating ultraviolet beam expander |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0453822A1 (en) * | 1990-04-26 | 1991-10-30 | International Business Machines Corporation | Zoom beam expander |
| CN101211002A (en) * | 2006-12-30 | 2008-07-02 | 深圳市大族激光科技股份有限公司 | Laser zooming expander lens and regulating method |
| CN101414052A (en) * | 2008-11-26 | 2009-04-22 | 中国科学院上海技术物理研究所 | Galileo type multiple-wave length magnification changeable laser bundle-enlarging collimation system |
| CN101750744A (en) * | 2009-12-23 | 2010-06-23 | 深圳市大族激光科技股份有限公司 | Laser beam expanding lens system |
| CN101762879A (en) * | 2010-01-25 | 2010-06-30 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0453822A1 (en) * | 1990-04-26 | 1991-10-30 | International Business Machines Corporation | Zoom beam expander |
| CN101211002A (en) * | 2006-12-30 | 2008-07-02 | 深圳市大族激光科技股份有限公司 | Laser zooming expander lens and regulating method |
| CN101414052A (en) * | 2008-11-26 | 2009-04-22 | 中国科学院上海技术物理研究所 | Galileo type multiple-wave length magnification changeable laser bundle-enlarging collimation system |
| CN101750744A (en) * | 2009-12-23 | 2010-06-23 | 深圳市大族激光科技股份有限公司 | Laser beam expanding lens system |
| CN101762879A (en) * | 2010-01-25 | 2010-06-30 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109689279A (en) * | 2016-04-29 | 2019-04-26 | 努布鲁有限公司 | Visible light lasers increasing material manufacturing |
| CN106199983B (en) * | 2016-08-25 | 2018-11-13 | 大族激光科技产业集团股份有限公司 | It expands component and expands the laser process equipment of component with this |
| CN106199983A (en) * | 2016-08-25 | 2016-12-07 | 大族激光科技产业集团股份有限公司 | Expand assembly and there is this laser process equipment expanding assembly |
| CN108508614A (en) * | 2017-02-23 | 2018-09-07 | 常州巴斯光年激光科技有限公司 | A kind of continuous multiplying power beam-expanding system of infrared laser suitable for 1064nm wavelength |
| CN108508614B (en) * | 2017-02-23 | 2024-05-03 | 常州巴斯光年激光科技有限公司 | Infrared laser continuous multiplying power beam expanding system suitable for 1064nm wavelength |
| CN108681086A (en) * | 2018-07-06 | 2018-10-19 | 温州大学激光与光电智能制造研究院 | Laser facula apparatus for shaping and its method |
| CN109186958B (en) * | 2018-09-19 | 2023-07-21 | 西安工业大学 | Multi-light coaxial laser damage threshold testing device and implementation method |
| CN109186958A (en) * | 2018-09-19 | 2019-01-11 | 西安工业大学 | A kind of coaxial laser damage threshold test device of more light and implementation method |
| CN110568588A (en) * | 2019-09-06 | 2019-12-13 | 中国科学院合肥物质科学研究院 | Beam expanding lens |
| CN111272013A (en) * | 2020-03-20 | 2020-06-12 | 中国人民解放军陆军装甲兵学院士官学校 | Portable all-weather general laser gun calibration instrument |
| CN115032806A (en) * | 2022-04-22 | 2022-09-09 | 北京遥测技术研究所 | Multi-wavelength laser beam expanding method and beam expanding system |
| CN115031930A (en) * | 2022-06-13 | 2022-09-09 | 浙江大学 | Phase recovery wavefront detection device and method with adjustable measurement frequency |
| CN115031930B (en) * | 2022-06-13 | 2023-03-28 | 浙江大学 | Phase recovery wavefront detection device and method with adjustable measurement frequency |
| CN117452655A (en) * | 2023-12-22 | 2024-01-26 | 武汉光至科技有限公司 | High-magnification spherical aberration eliminating ultraviolet beam expander |
| CN117452655B (en) * | 2023-12-22 | 2024-03-19 | 武汉光至科技有限公司 | High-magnification spherical aberration eliminating ultraviolet beam expander |
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