CN206696535U - A kind of dual-wavelength laser continuous zoom beam expanding lens - Google Patents

A kind of dual-wavelength laser continuous zoom beam expanding lens Download PDF

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CN206696535U
CN206696535U CN201720220340.4U CN201720220340U CN206696535U CN 206696535 U CN206696535 U CN 206696535U CN 201720220340 U CN201720220340 U CN 201720220340U CN 206696535 U CN206696535 U CN 206696535U
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lens
laser
dual
beam expanding
wavelength
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庄怀港
谭羽
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Shanghai Evenoptics Technology Co Ltd
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Shanghai Evenoptics Technology Co Ltd
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Abstract

It the utility model is related to a kind of dual-wavelength laser continuous zoom beam expanding lens, the laser of two kinds of wavelength can be expanded, allow to input 532nm laser and 1064nm laser, along laser light incident direction, dual-wavelength laser continuous zoom beam expanding lens includes the first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens continuously set, wherein the first lens are biconvex positive lens, second lens are the negative lens of plano-concave, 3rd lens are the negative lens of concave-concave, 4th lens are the negative lens of concave-concave, and the 5th lens are the positive lens of plano-convex.Compared with prior art, the utility model two waveband laser zooming beam expanding lens can modulate the laser of the laser of two wavelength, i.e. 532nm and 1064nm simultaneously, and the beam expanding lens can allow incident light diameter phi=3~8mm, it is β=2~10 to expand multiplying power scope, wavelength X=532nm/1064nm.The laser for the different parameters that the beam expanding lens can export various lasers is applied to same laser application system;Simultaneously, it can also be used to have the various laser applied optics systems of different requirements to laser parameter.

Description

A kind of dual-wavelength laser continuous zoom beam expanding lens
Technical field
Laser technology field is the utility model is related to, more particularly, to a kind of dual-wavelength laser continuous zoom beam expanding lens.
Background technology
Laser has fabulous monochromaticjty, coherence and directionality, and has high brightness.Therefore, laser has been Through the multiple fields for being widely used in national economy.The beam diameter that laser is sent is general all smaller, but swashs in many In light application scenarios, the larger laser beam of beam diameter is generally required, such as:In laser-processing system, in order to improve work Make efficiency, obtain larger laser illumination, then need to obtain the incident laser beam of larger beam diameter before amasthenic lens; In laser illumination system and holographic imaging systems, it is necessary to larger beam diameter and compared with small divergence angle LASER Light Source as system light Source.Therefore, the adjustable beam expanding lens of beam expanding lens, especially multiplying power can be all equipped with most laser application systems, it is sharp for extending The diameter of light beam, improve the angle of divergence of laser beam.
Laser beam expanding lens are divided into two kinds of fixed multiplying power beam expanding lens and Zooming expander.Laser application system is commonly using difference Laser, and every kind of laser output laser beam size have difference, Zooming expander can be to the diameter of output beam It is adjusted, so as to adapt to more application environments.
At present, most laser beam expanding lens design for certain specific wavelength, are simply possible to use in specific wavelength light beam and are expanded. Therefore, multiple beam expanding lens for being respectively suitable for different wave length are just needed respectively to each wavelength light beam for multi-wavelength optical system Expanded, cause system architecture complicated.
Patent CN 101211002A describe a kind of 1064nm laser zoomings beam expanding lens, and the beam expanding lens is only capable of inputting 1064nm Single wavelength laser, while the available multiplying power that expands of the beam expanding lens is 2-8 times;There is following deficiency:1) it is variable to expand times Rate scope is smaller, only 2-8 times;2) beam expanding lens only adapts to the laser of specific wavelength -1064nm wavelength, application scenarios by Limitation.
The U of patent CN 203217180 describe a kind of fixed times 1064nm/532nm dual wavelength beam expanding lens, because it is fixed times Laser beam spot sizes can not be adjusted, application scenarios are restricted by design according to the actual requirements.
Utility model content
The purpose of this utility model is exactly to provide a kind of dual wavelength the defects of overcoming above-mentioned prior art to exist and swash Light continuous zoom beam expanding lens.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of dual-wavelength laser continuous zoom beam expanding lens, the dual-wavelength laser continuous zoom beam expanding lens can be to two kinds of wavelength Laser is expanded, that is, allows to input 532nm laser and 1064nm laser, along laser light incident direction, dual-wavelength laser continuously becomes Power beam expansion lens include the first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens continuously set, wherein described The first lens be biconvex positive lens, the second lens are the negative lens of plano-concave, and the 3rd lens are the negative lens of concave-concave, the 4th lens For the negative lens of concave-concave, the 5th lens are the positive lens of plano-convex.
Further, the spacing of the second lens and the 3rd lens on optical axis is d4, d4Scope be:4.5mm≤d4≤ 27mm;The spacing of 3rd lens and the 4th lens on optical axis is d6, d6Scope be:100≤d6≤ 135mm, and d4With d6's The margin of tolerance is 5%.
Further, described d4For 25.2mm, described d6For 114.6mm, the expansion of the dual-wavelength laser Zooming expander Beam multiplying power is 2.
Further, described d4For 20.1mm, described d6For 124.5mm, the expansion of the dual-wavelength laser Zooming expander Beam multiplying power is 4.
Further, described d4For 15mm, described d6For 127.4mm, the dual-wavelength laser Zooming expander expands Multiplying power is 6.
Further, described d4For 10mm, described d6For 128.9mm, the dual-wavelength laser Zooming expander expands Multiplying power is 8.
Further, described d4For 4.8mm, described d6For 129.7mm, the expansion of the dual-wavelength laser Zooming expander Beam multiplying power is 10.
Further, the first described lens are respectively R including radius of curvature1、R2Two curved surface S1、S2, on its optical axis Center thickness be d1, its material stated with the ratio between refractive index and Abbe number, i.e. Nd1:Vd1, R1For 16.2mm, R2For- 16.2mm d1For 2.4mm, Nd1:Vd1For 1.46:68, and d1With Nd1:Vd1The margin of tolerance be 5%.
Further, the second described lens are respectively R including radius of curvature3、R4Two curved surface S3、S4, on its optical axis Center thickness be d3, its material stated with the ratio between refractive index and Abbe number, i.e. Nd3:Vd3, described R3For 16.5mm, R4 For 0mm, d3For 1mm, Nd3:Vd3For 1.57:42, and d3With Nd3:Vd3The margin of tolerance be 5%.
Further, the 3rd described lens are respectively R including radius of curvature5、R6Two curved surface S5、S6, on its optical axis Center thickness be d5, its material stated with the ratio between refractive index and Abbe number, i.e. Nd5:Vd5, described R5For -9mm, R6For 9mm, d5For 2mm, Nd3:Vd3For 1.46:68, and d5With Nd5:Vd5The margin of tolerance be 5%.
Further, the 4th described lens are respectively R including radius of curvature7、R8Two curved surface S7、S8, on its optical axis Center thickness be d7, its material stated with the ratio between refractive index and Abbe number, i.e. Nd7:Vd7, described R7For -124mm, R8 For 40mm, d7For 4.4mm, Nd7:Vd7For 1.57:42, and d7With Nd7:Vd7The margin of tolerance be 5%.
Further, the 5th described lens are respectively R including radius of curvature9、R10Two curved surface S9、S10, its optical axis On center thickness be d9, its material stated with the ratio between refractive index and Abbe number, i.e. Nd9:Vd9, described R9For 43.9mm R10For -43.9mm, d9For 11mm, Nd9:Vd9For 1.46:68, and d9With Nd9:Vd9The margin of tolerance be 5%.
Compared with prior art, dual-wavelength laser continuous zoom beam expanding lens overall structure of the present utility model is simple, compact, It is conveniently adjusted.Expanding multiplying power and (2-10 times) can be adjusted in a big way due to laser beam, meanwhile, again can be compatible The laser beam of 1064nm and 532nm wavelength.Therefore, the different ginsengs that beam expanding lens of the present utility model can export various lasers The laser of number and different wave length is applied to same laser application system;Simultaneously, it can also be used to have different requirements to laser parameter Various laser applied optics systems.
Brief description of the drawings
Fig. 1 is the optical system structure schematic diagram of dual-wavelength laser Zooming expander of the present utility model.
Fig. 2 is the figure of optical lens preferred embodiment in the preferred embodiment of dual-wavelength laser Zooming expander one of the present utility model.
Fig. 3 is the encircled energy figure in the preferred embodiment of dual-wavelength laser Zooming expander one of the present utility model.
Fig. 4 is the optical transfer function figure in the preferred embodiment of dual-wavelength laser Zooming expander one of the present utility model.
Embodiment
The utility model is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
In laser processing procedure, usually require that laser is concentrated very much in the energy of focus point, ensure that laser processing procedure gathers The energy density of focus so that laser process equipment can expeditiously work.It is theoretical according to diffraction limit:The angle of divergence of laser θ and waist diameter d0Product be constant.It is general all smaller from the laser beam spot sizes of laser output, focused by one Away from optical convergence system focus on before, it is desirable to expanded light beam diameter is to reduce angle of divergence θ, while it is straight to obtain larger incident beam Footpath.Assuming that a laser beam expanding system is added in laser and focal length is f optical convergence systems, as requested from appropriate Expand multiple β so that laser beam expand arrives a diameter of D=β d0, the now angle of divergence θ of laserEnterStill meet diffraction limit Theoretical relationship:θEnterD=θ d0=4 λ/π, so, θEnter=θ/β=4 λ/π D.So, preferable convergent laser hot spot δ= θEnterF=4 λ f/ π D.So by obtaining suitable D values from suitable multiplying power β, preferable focal beam spot δ can be obtained, To improve the energy density at job spotlight.
To adapt to various lasers wavelength, beam diameter and the needs of angle of divergence shaping, the utility model provides one kind can With the dual-wavelength laser Zooming expander of consecutive variations beam expanding lens multiplying power.So use strong adaptability, it is easier to meet light Beam shaping and the requirement of different wave length, have selected the diameter of the most frequently used laser beam and multiplying power is used as design starting point, work as laser light During incident a diameter of 3mm-8mm of beam, the multiplying power excursion of the beam expanding lens is 10-2.
Reference picture 1, the utility model provide a kind of dual-wavelength laser Zooming expander, and it is included along incident light transmission direction The the first lens L set1, the second lens L2, the 3rd lens L3, the 4th lens L4With the 5th lens L5, wherein the first lens are double Convex positive lens, the second lens are the negative lens of plano-concave, and the 3rd lens are the negative lens of concave-concave, and the 4th lens are negative for concave-concave Mirror, the 5th lens are the positive lens of biconvex.
First lens L1It is respectively R including radius of curvature1、R2Two curved surface S1、S2, the center thickness d on its optical axis1, Its material is expressed as Nd1(refractive index):Vd1(Abbe number);Second lens L2It is respectively R including radius of curvature3、R4Two curved surfaces S3、S4, the center thickness d on its optical axis3, its material is expressed as Nd3(refractive index):Vd3(Abbe number);3rd lens L3Including song Rate radius is respectively R5、R6Two curved surface S5、S6, the center thickness d on its optical axis5, its material is expressed as Nd5(refractive index): Vd5(Abbe number);4th lens L4It is respectively R including radius of curvature7、R8Two curved surface S7、S8, the center thickness on its optical axis d7, its material is expressed as Nd7(refractive index):Vd7(Abbe number);5th lens L5It is respectively R including radius of curvature9、R10Two songs Face S9、S10, the center thickness d on its optical axis9, its material is expressed as Nd9(refractive index):Vd9(Abbe number).
The spacing of second lens and the 3rd lens on optical axis is d4, d4Scope be:4.5mm≤d4≤27mm;3rd is saturating The spacing of mirror and the 4th lens on optical axis is d6, d6Scope be:100≤d6≤ 135mm, and d4With d6The margin of tolerance be 5%.
The specific data parameters of the dual wavelength Zooming expander of the present embodiment are as shown in table 1, wherein:
φEnter=3mm-8mm, β=2-10, λ=1064nm/532nm, φEnterFor dual-wavelength laser zoom of the present utility model The incident beam diameter scope that beam expanding lens is allowed, for β to expand multiple, λ is the wavelength of inputs light beam.
The ultraviolet laser variable power beam expansion lens design parameter of table 1
d4And d6It is adjustable.By adjusting d4With d6, can make beam expanding lens produce it is different expand multiple, its corresponding relation Citing is as shown in table 2:
Table 2d4With d6Relation corresponding to expand multiple caused by beam expanding lens
d4(mm) d6(mm) β
25.2 114.6 2
20.1 124.5 4
15 127.4 6
10 128.9 8
4.8 129.7 10
In upper table, the subsequent corrosion of ultraviolet laser variable power beam expansion lens, curved surface interval and material parameter can be with ± 5% Solve technical problems to be solved in above-described embodiment, reach same technique effect, it is described in detail below:
1) surface curvature R1–10 ΔR1-10≤ ± 5%R1–10
2) curved surface interval d1–9 Δd1-9≤ ± 5%d1–9
3) refractive index:Abbe number Nd1-9:Vd1–9 ΔNd1-9:Vd1-9≤ ± 5%Nd1-9:Vd1–9
The figure of optical lens preferred embodiment of the dual-wavelength laser Zooming expander of the present embodiment is as shown in Fig. 2 can be significantly from figure Go out, when incident beam is in the case of 0 ° of -0.055 ° of incident angle, the beam quality of its outgoing beam is all in diffraction limit. Encircled energy figure is as shown in figure 3, from the graph, it is apparent that when incident beam is in the situation of 0 ° of -0.055 ° of incident angle Under, the disc of confusion radius that the beam quality of its outgoing beam can be formed is all in 0.015 micron.Optical transfer function figure is as schemed Shown in 4, from the graph, it is apparent that work as incident beam in the case of 0 ° of -0.055 ° of incident angle, the light of its outgoing beam Learn transmission function and all reach diffraction limit.
The above-mentioned description to embodiment is understood that for ease of those skilled in the art and using practicality It is new.Person skilled in the art obviously can easily make various modifications to these embodiments, and illustrating herein General Principle be applied in other embodiment without by performing creative labour.Therefore, the utility model is not limited to above-mentioned Embodiment, those skilled in the art according to announcement of the present utility model, do not depart from improvement that the utility model category made and Modification all should be within the scope of protection of the utility model.

Claims (8)

1. a kind of dual-wavelength laser continuous zoom beam expanding lens, it is characterised in that the dual-wavelength laser continuous zoom beam expanding lens can be right The laser of two kinds of wavelength is expanded, that is, allows to input 532nm laser and 1064nm laser, along laser light incident direction, dual wavelength The first lens that laser continuous zoom beam expanding lens includes continuously setting, the second lens, the 3rd lens, the 4th lens and the 5th saturating Mirror, wherein the first described lens are biconvex positive lens, the second lens are the negative lens of plano-concave, and the 3rd lens are negative for concave-concave Mirror, the 4th lens are the negative lens of concave-concave, and the 5th lens are the positive lens of plano-convex.
2. a kind of dual-wavelength laser continuous zoom beam expanding lens according to claim 1, it is characterised in that the second lens and Spacing of three lens on optical axis is d4, d4Scope be:4.5mm≤d4≤27mm;3rd lens and the 4th lens are on optical axis Spacing be d6, d6Scope be:100≤d6≤ 135mm, and d4With d6The margin of tolerance be 5%.
A kind of 3. dual-wavelength laser continuous zoom beam expanding lens according to claim 2, it is characterised in that described d4For 25.2mm, described d6For 114.6mm, the multiplying power that expands of the dual-wavelength laser Zooming expander is 2, or,
Described d4For 20.1mm, described d6For 124.5mm, the multiplying power that expands of the dual-wavelength laser Zooming expander is 4, or,
Described d4For 15mm, described d6For 127.4mm, the multiplying power that expands of the dual-wavelength laser Zooming expander is 6, or,
Described d4For 10mm, described d6For 128.9mm, the multiplying power that expands of the dual-wavelength laser Zooming expander is 8, or,
Described d4For 4.8mm, described d6For 129.7mm, the dual-wavelength laser Zooming expander expands multiplying power as 10.
4. a kind of dual-wavelength laser continuous zoom beam expanding lens according to claim 1, it is characterised in that described first is saturating Mirror is respectively R including radius of curvature1、R2Two curved surface S1、S2, the center thickness on its optical axis is d1, its material is with refractive index Stated with the ratio between Abbe number, i.e. Nd1:Vd1, R1For 16.2mm, R2For -16.2mm, d1For 2.4mm, Nd1:Vd1For 1.46: 68, and d1 and Nd1:Vd1The margin of tolerance be 5%.
5. a kind of dual-wavelength laser continuous zoom beam expanding lens according to claim 1, it is characterised in that described second is saturating Mirror is respectively R including radius of curvature3、R4Two curved surface S3、S4, the center thickness on its optical axis is d3, its material is with refractive index Stated with the ratio between Abbe number, i.e. Nd3:Vd3, described R3For 16.5mm, R4For 0mm, d3For 1mm, Nd3:Vd3For 1.57: 42, and d3With Nd3:Vd3The margin of tolerance be 5%.
6. a kind of dual-wavelength laser continuous zoom beam expanding lens according to claim 1, it is characterised in that described the 3rd is saturating Mirror is respectively R including radius of curvature5、R6Two curved surface S5、S6, the center thickness on its optical axis is d5, its material is with refractive index Stated with the ratio between Abbe number, i.e. Nd5:Vd5, described R5For -9mm, R6For 9mm, d5For 2mm, Nd5:Vd5For 1.46:68, And d5With Nd5:Vd5The margin of tolerance be 5%.
7. a kind of dual-wavelength laser continuous zoom beam expanding lens according to claim 1, it is characterised in that described the 4th is saturating Mirror is respectively R including radius of curvature7、R8Two curved surface S7、S8, the center thickness on its optical axis is d7, its material is with refractive index Stated with the ratio between Abbe number, i.e. Nd7:Vd7, described R7For -124mm, R8For 40mm, d7For 4.4mm, Nd7:Vd7For 1.57:42, and d7With Nd7:Vd7The margin of tolerance be 5%.
8. a kind of dual-wavelength laser continuous zoom beam expanding lens according to claim 1, it is characterised in that described the 5th is saturating Mirror is respectively R including radius of curvature9、R10Two curved surface S9、S10, the center thickness on its optical axis is d9, its material is to reflect The ratio between rate and Abbe number are stated, i.e. Nd9:Vd9, described R9For 43.9mm, R10For -43.9mm, d9For 11mm, Nd9:Vd9 For 1.46:68, and d9With Nd9:Vd9The margin of tolerance be 5%.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108519680A (en) * 2018-05-22 2018-09-11 苏州市天凯光电配件厂 The adjustable two waveband laser focusing system of focus
LU100753B1 (en) * 2018-03-28 2019-10-01 Highyag Lasertechnologie Gmbh ZOOM OPTICS
CN111283320A (en) * 2020-03-06 2020-06-16 大族激光科技产业集团股份有限公司 Laser beam expanding lens and laser processing equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU100753B1 (en) * 2018-03-28 2019-10-01 Highyag Lasertechnologie Gmbh ZOOM OPTICS
DE102019108084A1 (en) 2018-03-28 2019-10-02 Highyag Lasertechnologie Gmbh zoom optics
CN108519680A (en) * 2018-05-22 2018-09-11 苏州市天凯光电配件厂 The adjustable two waveband laser focusing system of focus
CN111283320A (en) * 2020-03-06 2020-06-16 大族激光科技产业集团股份有限公司 Laser beam expanding lens and laser processing equipment

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