CN103185964B - Ultraviolet multi-wavelength achromatic beam expander lens device - Google Patents

Ultraviolet multi-wavelength achromatic beam expander lens device Download PDF

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Publication number
CN103185964B
CN103185964B CN201110460862.9A CN201110460862A CN103185964B CN 103185964 B CN103185964 B CN 103185964B CN 201110460862 A CN201110460862 A CN 201110460862A CN 103185964 B CN103185964 B CN 103185964B
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China
Prior art keywords
lens
quartz
curvature radius
calcium fluoride
beam expander
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Expired - Fee Related
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CN201110460862.9A
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Chinese (zh)
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CN103185964A (en
Inventor
曹开法
邵石生
胡顺星
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Anhui Institute of Optics and Fine Mechanics of CAS
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Anhui Institute of Optics and Fine Mechanics of CAS
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Abstract

The invention discloses an ultraviolet multi-wavelength achromatic beam expander lens device. The device is composed of a lens arranged on a laser light path (7), particularly, a quartz concave lens (1), a quartz lens (3) and a calcium fluoride lens (4) are sequentially connected in series to form the lens, wherein the curvature radius of the front face of the quartz concave lens (1) is ranged from -17.368mm to -15.368mm, the curvature radius of the rear face of the quartz concave lens (1) is ranged from -27.64mm to -25.64mm, the curvature radius of the front face of the quartz lens (3) is ranged from -943.4mm to -941.4mm, the curvature radius of the rear face of the quartz lens (3) is 60-62mm, the curvature radius of the front face of the calcium fluoride lens (4) is 60-62mm, the curvature radius of the rear face of the calcium fluoride lens (4) is ranged from -95.84mm to -93.84mm, the distance between the quartz concave lens (1) and the quartz lens (3) is 130-150mm, and the distance between the quartz lens (3) and the calcium fluoride lens (4) is 1.5-2.5mm. Beam expanding output can be conducted on multi-wavelength lasers simultaneously through a same beam, and the ultraviolet multi-wavelength achromatic beam expander lens device is used as a transmission light source in an ultraviolet differential absorption laser radar, and can be widely used in optical gauges which have the requirements on the same light source.

Description

Ultraviolet multi-wavelength achromatic beam expander device
Technical Field
The invention relates to a beam expander device, in particular to an ultraviolet multi-wavelength achromatic beam expander device.
Background
At present, in various applications of laser, the problem of adjusting laser beams and laser spots is often involved, such as an "ultraviolet laser zoom beam expander" disclosed in chinese patent application CN 101887173a published on 11, 17/2010. The zoom beam expander mentioned in the application document comprises a first lens, a second lens and a third lens which are arranged along the transmission direction of incident light, wherein the first lens is a convex-flat positive lens, the second lens is a biconcave negative lens, and the third lens is a convex positive lens; the maximum allowable incident light diameter of the zoom beam expander is 2-8 mm, and the wavelength is 355 nm. Although the ultraviolet laser zoom beam expander can enable a laser focusing system to obtain a larger image space aperture angle, the energy density at the focal point during laser focusing is greatly improved, and the laser processing efficiency is further improved; however, it is only suitable for expanding the laser beam of a single ultraviolet wavelength, and cannot be used as a beam expander in an ultraviolet differential absorption lidar, because the differential absorption lidar is often required to emit laser beams of multiple wavelengths simultaneously and simultaneously.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides the ultraviolet multi-wavelength achromatic beam expander lens device which is reasonable in structure and can expand multi-wavelength laser simultaneously and simultaneously with a light beam.
In order to solve the technical problem of the invention, the adopted technical scheme is as follows: the ultraviolet multi-wavelength achromatic beam expander device consists of a lens arranged on a laser light path, in particular,
the lens is a quartz negative lens, a quartz lens and a calcium fluoride lens which are sequentially connected in series.
As a further improvement of the ultraviolet multi-wavelength achromatic beam expander device, the front curvature radius of the quartz negative lens is-17.368 to-15.368 mm, and the rear curvature radius of the quartz negative lens is-27.64 to-25.64 mm; the front curvature radius of the quartz lens is-943.4-941.4 mm, and the rear curvature radius of the quartz lens is 60-62 mm; the front curvature radius of the calcium fluoride lens is 60-62 mm, and the rear curvature radius of the calcium fluoride lens is-95.84-93.84 mm; the distance between the quartz negative lens and the quartz lens is 130-150 mm, and the distance between the quartz lens and the calcium fluoride lens is 1.5-2.5 mm; the surfaces of the quartz negative lens, the quartz lens and the calcium fluoride lens are plated with antireflection films with transmission wavelengths of 200-350 nm; a polyvinyl fluoride positioning ring is arranged between the quartz lens and the calcium fluoride lens; the quartz lens, the polyvinyl fluoride positioning ring and the calcium fluoride lens are positioned in a constant-temperature constant-humidity box, and an incident window and an exit window which are positioned on a laser light path are arranged at two ends of the constant-temperature constant-humidity box; the incident window and the exit window are both quartz slides; the constant-temperature constant-humidity box is connected with the guide rail in a movable fit manner, and the track of the guide rail is in the same direction as the laser light path; the quartz negative lens, the quartz lens and the quartz slide are all made of fused quartz.
Compared with the prior art, the ultraviolet multi-wavelength laser beam expander has the advantages that the ultraviolet multi-wavelength laser beam expander is used for the laser path and consists of the quartz negative lens, the quartz lens and the calcium fluoride lens which are sequentially connected in series, the problem that the requirement that the laser beams with multiple wavelengths can not be simultaneously emitted by the same light beam by adjusting the matching distance between the lenses made of the same material is solved, the technical effects of achromatization and spherical aberration correction are simultaneously brought by organically integrating the refractive index and dispersion characteristics of the quartz and the calcium fluoride which are two lens materials, the ultraviolet multi-wavelength laser can be simultaneously expanded and outputted by the same light beam, and the laser beam outputted by the ultraviolet multi-wavelength laser beam expander completely meets the requirement of an ultraviolet differential absorption laser radar on a light source. Meanwhile, it can also be widely used in optical measuring instruments having the same light source requirements.
As a further embodiment of the beneficial effects, the front curvature radius of the quartz negative lens is preferably-17.368 to-15.368 mm, and the rear curvature radius is preferably-27.64 to-25.64 mm, and the meniscus negative lens with the curvature radius is beneficial to reducing spherical aberration and reducing the nonuniformity of the light beam after diverging and expanding. The front curvature radius of the quartz lens is preferably-943.4-941.4 mm, the rear curvature radius of the quartz lens is preferably 60-62 mm, the front curvature radius of the calcium fluoride lens is preferably 60-62 mm, and the rear curvature radius of the calcium fluoride lens is preferably-95.84-93.84 mm, and the combined lens formed by the quartz lens and the calcium fluoride lens with the curvature radii is matched with the quartz negative lens, so that the ultraviolet laser beam expanded and diffused by the quartz negative lens is further achromatic, corrected for spherical aberration and collimated on the combined lens, and the divergence angle of the ultraviolet laser beam can be controlled within 0.15 mrad. And the distance between the quartz negative lens and the quartz lens is preferably 130-150 mm, and the distance between the quartz lens and the calcium fluoride lens is preferably 1.5-2.5 mm, so that the quartz negative lens, the quartz lens and the calcium fluoride lens are perfectly matched, and the quartz negative lens has the characteristics of compact structure and small volume. And fourthly, the surfaces of the quartz negative lens, the quartz lens and the calcium fluoride lens are preferably plated with antireflection films with the transmission wavelengths of 200-350 nm, so that the loss of laser beams passing through the lenses is reduced, and the quartz negative lens, the quartz lens and the calcium fluoride lens also have the function of moisture protection. And fifthly, a polyvinyl fluoride positioning ring is preferably arranged between the quartz lens and the calcium fluoride lens, so that the positioning between the fragile and softer calcium fluoride lens and the quartz lens is facilitated. And sixthly, the quartz lens, the polyvinyl fluoride positioning ring and the calcium fluoride lens are preferably positioned in the constant-temperature and constant-humidity box, an incident window and an exit window positioned on a laser light path are preferably arranged at two ends of the constant-temperature and constant-humidity box, and the incident window and the exit window are both preferably quartz slides, so that the calcium fluoride with high expansion coefficient and slight hygroscopicity is effectively prevented from being thermally deformed by passing light beams and deliquesced by moisture absorption, the working stability of the calcium fluoride is ensured, and the normal performance of the functions of the calcium fluoride is not influenced. And seventhly, the constant-temperature and constant-humidity box is preferably in movable fit connection with the guide rail, and the track of the guide rail is preferably in the same direction as the laser light path, so that the distance between the constant-temperature and constant-humidity box and the quartz negative lens can be conveniently adjusted. And eighthly, the quartz material of the quartz negative lens, the quartz lens and the quartz slide is preferably fused quartz, so that the quality of the quartz material is ensured.
Drawings
Preferred embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
Fig. 1 is a schematic diagram of a basic structure of the present invention.
Detailed Description
Referring to fig. 1, the uv multi-wavelength achromatic beam expander device is constructed as follows:
the device consists of a quartz negative lens 1, an incidence window 2, a quartz lens 3, a calcium fluoride lens 4 and an exit window 6 which are arranged on a laser light path 7 and connected in series in sequence. Wherein,
the front curvature radius of the quartz negative lens 1 is-16.368 (can be-17.368 to-15.368) mm, and the rear curvature radius is-26.64 (can be-27.64 to-25.64) mm. The front curvature radius of the quartz lens 3 is-942.4 (may be-943.4 to-941.4) mm, and the rear curvature radius is 61 (may be 60 to 62) mm. The front curvature radius of the calcium fluoride lens 4 is 61 (60-62) mm, and the rear curvature radius is-94.84 (95.84-93.84). The distance between the quartz negative lens 1 and the quartz lens 3 is 140 (130-150) mm, and the distance between the quartz lens 3 and the calcium fluoride lens 4 is 2 (1.5-2.5) mm. The surfaces of the quartz negative lens 1, the quartz lens 3 and the calcium fluoride lens 4 are plated with antireflection films with transmission wavelengths of 200-350 nm.
A polyvinyl fluoride positioning ring 9 is arranged between the quartz lens 3 and the calcium fluoride lens 4, and the three are all positioned in the constant temperature and humidity box 5. The two ends of the constant temperature and humidity box 5 are provided with an incident window 2 and an exit window 6 which are positioned on a laser light path 7 and are composed of quartz slides. The constant-temperature constant-humidity box 5 is movably matched and connected with the guide rail 8, and the track of the guide rail 8 is in the same direction as the laser light path 7.
The quartz negative lens 1, the quartz lens 3 and the quartz slide are all made of fused quartz.
During beam expanding, the wavelengths of incident laser on the laser light path 7 are 289nm and 299nm respectively, the beam diameters are 10mm, and the divergence angles are 0.5mrad respectively. After the beam is expanded by the device, the beam diameters are respectively 33.8mm and 33.81mm, and the divergence angles are respectively 0.167mrad and 0.1675 mrad. The two emitted laser beams are almost completely consistent, and the laser beam is very suitable for the requirement of the ultraviolet differential absorption laser radar on the use of a light source.
It will be apparent to those skilled in the art that various modifications and variations can be made in the ultraviolet multi-wavelength achromatic beam expander lens apparatus of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is intended to include such modifications and variations.

Claims (7)

1. The utility model provides an ultraviolet multi-wavelength achromatism beam expander lens device, comprises the lens of placing on laser light path (7), its characterized in that:
the lens is a quartz negative lens (1), a quartz lens (3) and a calcium fluoride lens (4) which are sequentially connected in series;
the curvature radius of the incident surface of the quartz negative lens (1) is-17.368 to-15.368 mm, and the curvature radius of the emergent surface of the quartz negative lens (1) is-27.64 to-25.64 mm;
the curvature radius of the incident surface of the quartz lens (3) is-943.4-941.4 mm, and the curvature radius of the emergent surface of the quartz lens is 60-62 mm;
the curvature radius of the incident surface of the calcium fluoride lens (4) is 60-62 mm, and the curvature radius of the emergent surface of the calcium fluoride lens is-95.84-93.84 mm.
2. The ultraviolet multi-wavelength achromatic beam expander device according to claim 1, wherein a distance between the quartz negative lens (1) and the quartz lens (3) is 130-150 mm, and a distance between the quartz lens (3) and the calcium fluoride lens (4) is 1.5-2.5 mm.
3. The ultraviolet multi-wavelength achromatic beam expander device according to claim 1, wherein antireflection films with transmission wavelengths of 200-350 nm are coated on the surfaces of the quartz negative lens (1), the quartz lens (3) and the calcium fluoride lens (4).
4. The ultraviolet multi-wavelength achromatic beam expander lens device according to claim 3, wherein a polyvinyl fluoride positioning ring (9) is disposed between the quartz lens (3) and the calcium fluoride lens (4).
5. The ultraviolet multi-wavelength achromatic beam expander lens device according to claim 4, wherein the quartz lens (3), the polyvinyl fluoride positioning ring (9) and the calcium fluoride lens (4) are positioned in a constant temperature and humidity box (5), and an incident window (2) and an exit window (6) positioned on a laser light path (7) are arranged at two ends of the constant temperature and humidity box (5).
6. The ultraviolet multi-wavelength achromatic beam expander lens device according to claim 5, wherein said entrance window (2) and said exit window (6) are both quartz slides.
7. The ultraviolet multi-wavelength achromatic beam expander lens device according to claim 6, wherein the constant temperature and humidity box (5) is in movable fit connection with the guide rail (8), and the track of the guide rail (8) is in the same direction as the laser light path (7).
CN201110460862.9A 2011-12-30 2011-12-30 Ultraviolet multi-wavelength achromatic beam expander lens device Expired - Fee Related CN103185964B (en)

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* Cited by examiner, † Cited by third party
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CN104898109A (en) * 2015-05-20 2015-09-09 中国科学院合肥物质科学研究院 Receiving-transmitting integrated cloud information measurement system with compact structure
CN109445114A (en) * 2018-12-12 2019-03-08 常州英诺激光科技有限公司 Two waveband beam expanding lens optical system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5121255A (en) * 1988-06-21 1992-06-09 Dainippon Screen Mfg. Co. Objective lens system for microscope
US5532880A (en) * 1994-07-01 1996-07-02 Lockhead Missiles & Space Company, Inc. Laser beam expanders
CN101762879A (en) * 2010-01-25 2010-06-30 深圳市大族激光科技股份有限公司 Laser beam expanding system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01252923A (en) * 1988-03-31 1989-10-09 Shimadzu Corp Laser beam expander

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5121255A (en) * 1988-06-21 1992-06-09 Dainippon Screen Mfg. Co. Objective lens system for microscope
US5532880A (en) * 1994-07-01 1996-07-02 Lockhead Missiles & Space Company, Inc. Laser beam expanders
CN101762879A (en) * 2010-01-25 2010-06-30 深圳市大族激光科技股份有限公司 Laser beam expanding system

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