CN102004319B - Ultraviolet zoom beam expander - Google Patents
Ultraviolet zoom beam expander Download PDFInfo
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- CN102004319B CN102004319B CN2010105000349A CN201010500034A CN102004319B CN 102004319 B CN102004319 B CN 102004319B CN 2010105000349 A CN2010105000349 A CN 2010105000349A CN 201010500034 A CN201010500034 A CN 201010500034A CN 102004319 B CN102004319 B CN 102004319B
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Abstract
The invention provides an ultraviolet zoom beam expander for ultraviolet laser expansion, comprising a first lens, a second lens and a third lens sequentially arranged along the incidence direction of light beams. The incidence aperture of the ultraviolet zoom beam expander is 1mm; the wavelength of the incidence laser is 355mm; the first lens and the third lens are biconvex lenses, and the second lens is a biconcave lens; the three lenses are located on the same optical shaft; the space d2 between the first lens and the second lens on the optical shaft ranges from 3mm to 10.3mm; and the space d4 between the second lens and the third lens on the optical shaft ranges from 149mm to 158.1mm. The invention has the advantages that the laser focusing system can obtain larger square hole aperture, the energy density at a focal point during laser focusing is improved, the processing efficiency of the laser is improved; and the ultraviolet zoom beam expander can be processed by using the same optical application system based on different laser parameters output by different lasers because beam expansion multiples of laser beams can be adjusted.
Description
[technical field]
The present invention relates to optical lens, relate in particular to a kind of Ultra-Violet Laser beam expanding lens.
[background technology]
The optical beam-expanding mirror occupies considerable status in the Laser Processing optical system, according to Laplace invariant (Lagrange) theorem:
J＝nDθ＝n′D′θ′
Wherein: n and the refractive index of n ' expression optical system in medium, when medium is air, n=n '=1, the entrance pupil diameter and the exit pupil diameter of D and D ' expression optical system; The field angle of θ and θ ' expression incident light and the field angle of emergent light when field angle is very little, can be represented with radian; Visible by following formula, when the emitting laser bundle has the angle of divergence, when promptly θ is big; Through beam expanding lens by D → D '; Promptly amplify β=D '/D doubly, all can make the angle of divergence of laser beam dwindle β doubly, thereby reach the purpose of shaping laser beam.
On the other hand, general laser beam bright dipping diameter all very little (about about Φ=1mm) for this reason, directly focus on so thin light beam, and its Rayleigh disk is just very big, according to the Rayleigh disk formula:
Rayleigh disk diameter δ=2.44 λ f/D
It is thus clear that D is more little, δ is just big more, can reduce the machining precision of system so widely.In view of above two basic demands, the optical system of Laser Processing is generally all wanted the adapted beam expanding lens.
[summary of the invention]
The invention provides a kind of ultraviolet laser variable power beam expansion lens, this beam expanding lens can be regulated laser beam output size in the larger context.
The technical scheme that the present invention taked is: a kind of ultraviolet Zooming expander; Be used for Ultra-Violet Laser and expand bundle; It comprises first lens (L1), second lens (L2) and the 3rd lens (L3) that are arranged in order along the light beam incident direction; The input aperture of this ultraviolet Zooming expander is 1mm, and wavelength is 355mm; Described first lens (L1) and the 3rd lens (L3) all are biconvex lens, and second lens (L2) are biconcave lens, and three lens are positioned on the same optical axis; Described first lens (L1) are d2=3～10.3mm with the spacing of second lens (L2) on optical axis, and described second lens (L1) are d4=149～158.1mm with the spacing of the 3rd lens (L1) on optical axis; Described first lens (L1) are made up of two curved surface S1 and the S2 that the curvature of face is respectively R1 and R2, and R1 is 100.00mm, and R2 is-13.24mm, and the center thickness d1 on optical axis is 3.00mm; Described second lens (L2) are made up of two curved surface S3 and the S4 that the curvature of face is respectively R3 and R4, and R3 is-10.00mm that R4 is 7.40mm, and the center thickness d3 on optical axis is 2.00mm; Described the 3rd lens (L3) are made up of two curved surface S5 and the S6 that the curvature of face is respectively R5 and R6, and R5 is 517.32mm, and R6 is-99.22mm, and the center thickness d5 on optical axis is 3.00mm; The material of described first, second and third lens is identical, is Nd/Vd=1.46/67.80.
Wherein, described d2=10.3mm, described d4=149mm, the expansion bundle multiple of this ultraviolet Zooming expander is 4.
Wherein, described d2=6.6mm, described d4=155.4mm, the expansion bundle multiple of this ultraviolet Zooming expander is 7.
Wherein, described d2=3mm, described d4=158.1mm, the expansion bundle multiple of this ultraviolet Zooming expander is 10.
The laser focusing system that ultraviolet laser variable power beam expansion lens of the present invention can make obtains bigger picture side's aperture angle, the energy density of along when greatly improving laser focusing, and the working (machining) efficiency of raising laser; Simultaneously, because the expansion bundle multiple of laser beam can regulate at any time, can use to the different laser parameters of various lasers output with a kind of optical applications system; The laser output parameter that also can be used for simultaneously same type is applied to the different laser applied optics system has demands of different to the laser input parameter.
[description of drawings]
Combine embodiment that the present invention is done further description with reference to the accompanying drawings.
Fig. 1 is a structural representation of the present invention;
Fig. 2 is optical transfer function MTF figure of the present invention;
Fig. 3 is a maximum optical path difference diagrammatic sketch of the present invention.
[specific embodiment]
In the laser processing procedure, require laser very concentrated usually, guarantee the energy density of laser processing procedure focus point, make laser work effectively, and improve the work efficiency of laser at the energy of focus point.Improve the focus energy density of laser, will obtain as far as possible little focus point.Theoretical according to diffraction limit: the angle of divergence θ of laser and waist diameter d
0Relation do
Wherein for using certain laser instrument, Wavelength of Laser λ is certain, so, the angle of divergence θ of laser and waist diameter d
0Product be constant.Generally less from the laser beam diameter of laser instrument output, before the convergence optical system through certain focus focuses on, require the expanded light beam diameter to reduce angle of divergence θ, obtain bigger incident beam diameter simultaneously.Suppose in laser instrument and focal length are the convergence optical system of f, to add a laser beam expanding system, select suitable expansion bundle multiple β as requested for use, making laser beam enlarge to diameter is D=β d
0, this moment laser angle of divergence θ
Go intoStill satisfy the diffraction limit theoretical relationship
So,
Like this, desirable convergent laser hot spot
So, obtain suitable D value through selecting suitable multiple β for use, just can obtain desirable focal beam spot δ to improve the energy density at job spotlight place.
For adapting to the needs of various lasers beam diameter and angle of divergence shaping, the present invention provides a kind of ultraviolet laser variable power beam expansion lens that changes the beam expanding lens multiplying power.
Ultraviolet Zooming expander of the present invention comprises the first lens L1, the second lens L2 and the 3rd lens L3 that are arranged in order along the light beam incident direction, and three lens are positioned on the same optical axis.The input aperture of this Zooming expander is 1mm, and lambda1-wavelength is 355nm.Wherein, said first lens L1 and the 3rd lens L3 are biconvex lens, and the said second lens L2 is a biconcave lens.The first lens L1 is made up of two curved surface S1 and the S2 that the curvature of face is respectively R1 and R2, and its center thickness on optical axis is d1, and material is Nd1/Vd1; The second lens L2 is made up of two curved surface S3 and the S4 that the curvature of face is respectively R3 and R4, and its center thickness on optical axis is d3, and material is Nd2/Vd2; The 3rd lens L3 is made up of two curved surface S5 and the S6 that the curvature of face is respectively R5 and R6, and its center thickness on optical axis is d5, and material is Nd3/Vd3.The first lens L1 and the second lens L2 are spaced apart d2, and the second lens L2 and the 3rd lens L3 are spaced apart d4.According to the requirement of using, interval d2 of the lens on optical axis and d4 are regulated.
The concrete data parameters of ultraviolet laser variable power beam expansion lens of the present invention is distinguished as follows:
Input aperture: 1mm
Become times scope: 4
x-10
x
Incident beam wavelength: 355mm
Annotate: the implication of negative is the left side that the centre of sphere of curved surface is positioned at curved surface
According to different actual needs, regulate curved surface d2 at interval, d4 realizes becoming doubly adjustment, and corresponding relation is following:
| Multiple n x | Interval d2 (mm) | Interval d4 (mm) |
| 4 x | 10.3 | 149 |
| 5 x | 9.06 | 152.1 |
| 6 x | 7.8 | 154.1 |
| 7 x | 6.6 | 155.4 |
| 8 x | 5.4 | 156.6 |
| 9 x | 4.2 | 157.4 |
| 10 x | 3 | 158.1 |
The optical transfer function MTF figure of ultraviolet Zooming expander of the present invention is as shown in Figure 2, and maximum optical path difference is as shown in Figure 3.
More than be the optimum implementation of ultraviolet Zooming expander of the present invention, can accurately draw upon request increasing the Ultra-Violet Laser light beam of multiple according to the above data that provide.
The laser focusing system that ultraviolet laser variable power beam expansion lens of the present invention can make obtains bigger picture side's aperture angle, the energy density of along when greatly improving laser focusing, and the working (machining) efficiency of raising laser; Simultaneously, because the expansion bundle multiple of laser beam can regulate at any time, can use to the different laser parameters of various lasers output with a kind of optical applications system; The laser output parameter that also can be used for simultaneously same type is applied to the different laser applied optics system has demands of different to the laser input parameter.
Although ultraviolet Zooming expander of the present invention is illustrated with reference to accompanying drawing; But above-mentioned disclosed content only is in order to understand the present invention better; Rather than limit the scope of claim by any way; So all according to the described structure of patent claim of the present invention, characteristic and principle do etc. change or modify, include in protection scope of the present invention.
Claims (4)
1. ultraviolet Zooming expander; Be used for Ultra-Violet Laser and expand bundle; It is characterized in that: it comprises first lens (L1), second lens (L2) and the 3rd lens (L3) that are arranged in order along the light beam incident direction, and the input aperture of this ultraviolet Zooming expander is 1mm, and wavelength is 355mm; Described first lens (L1) and the 3rd lens (L3) all are biconvex lens, and second lens (L2) are biconcave lens, and three lens are positioned on the same optical axis; Described first lens (L1) are d2=3～10.3mm with the spacing of second lens (L2) on optical axis, and described second lens (L1) are d4=149～158.1mm with the spacing of the 3rd lens (L1) on optical axis; Described first lens (L1) are made up of two curved surface S1 and the S2 that the curvature of face is respectively R1 and R2, and R1 is 100.00mm, and R2 is-13.24mm, and the center thickness d1 on optical axis is 3.00mm; Described second lens (L2) are made up of two curved surface S3 and the S4 that the curvature of face is respectively R3 and R4, and R3 is-10.00mm that R4 is 7.40mm, and the center thickness d3 on optical axis is 2.00mm; It is 517.32mm that two curved surface S5 and the S6 that described the 3rd lens (L3) are respectively R5 and R6 by the curvature of face constitutes R5, and R6 is-99.22mm, and the center thickness d5 on optical axis is 3.00mm;
2. ultraviolet Zooming expander according to claim 1 is characterized in that: described d2=10.3mm, and described d4=149mm, the expansion bundle multiple of this ultraviolet Zooming expander is 4.
3. ultraviolet Zooming expander according to claim 1 is characterized in that: described d2=6.6mm, and described d4=155.4mm, the expansion bundle multiple of this ultraviolet Zooming expander is 7; The material of described first, second and third lens is identical, is Nd/Vd=1.46/67.80.
4. ultraviolet Zooming expander according to claim 1 is characterized in that: described d2=3mm, and described d4=158.1mm, the expansion bundle multiple of this ultraviolet Zooming expander is 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105000349A CN102004319B (en) | 2010-09-30 | 2010-09-30 | Ultraviolet zoom beam expander |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105000349A CN102004319B (en) | 2010-09-30 | 2010-09-30 | Ultraviolet zoom beam expander |
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| Publication Number | Publication Date |
|---|---|
| CN102004319A CN102004319A (en) | 2011-04-06 |
| CN102004319B true CN102004319B (en) | 2012-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105000349A Active CN102004319B (en) | 2010-09-30 | 2010-09-30 | Ultraviolet zoom beam expander |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103217805A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Photoelectricity coaxial collimator of beam expander |
| CN103217795A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Beam expander |
| CN103576318B (en) * | 2012-07-18 | 2015-09-09 | 大族激光科技产业集团股份有限公司 | A kind of green laser zoom beam-expanding system and laser process equipment |
| CN103576317B (en) | 2012-07-18 | 2015-10-14 | 大族激光科技产业集团股份有限公司 | A kind of ultraviolet laser variable power beam-expanding system and laser process equipment |
| CN103576316B (en) * | 2012-07-18 | 2015-09-09 | 大族激光科技产业集团股份有限公司 | A kind of infrared laser zoom beam-expanding system and laser process equipment |
| CN105527716B (en) * | 2016-02-03 | 2018-09-21 | 上海仪万光电科技有限公司 | A kind of ultraviolet laser continuous zoom beam expanding lens |
| CN110320635A (en) * | 2019-08-07 | 2019-10-11 | 北京东方锐镭科技有限公司 | A kind of beam expanding lens of the adjustable angle of divergence |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5359457A (en) * | 1991-10-03 | 1994-10-25 | Minolta Camera Co., Ltd. | Wide-angle zoom lens system |
| CN101750744A (en) * | 2009-12-23 | 2010-06-23 | 深圳市大族激光科技股份有限公司 | Laser beam expanding lens system |
| CN101762879A (en) * | 2010-01-25 | 2010-06-30 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
| CN101788716A (en) * | 2010-02-24 | 2010-07-28 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004062118A (en) * | 2002-06-04 | 2004-02-26 | Nikon Corp | Near-ultraviolet objective lens |
-
2010
- 2010-09-30 CN CN2010105000349A patent/CN102004319B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5359457A (en) * | 1991-10-03 | 1994-10-25 | Minolta Camera Co., Ltd. | Wide-angle zoom lens system |
| CN101750744A (en) * | 2009-12-23 | 2010-06-23 | 深圳市大族激光科技股份有限公司 | Laser beam expanding lens system |
| CN101762879A (en) * | 2010-01-25 | 2010-06-30 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
| CN101788716A (en) * | 2010-02-24 | 2010-07-28 | 深圳市大族激光科技股份有限公司 | Laser beam expanding system |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2004-62118A 2004.02.26 |
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| CN102004319A (en) | 2011-04-06 |
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Owner name: HAN S LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Free format text: FORMER NAME: DAZU LASER SCI. + TECH. CO., LTD., SHENZHEN |
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| CP01 | Change in the name or title of a patent holder |
Address after: Dazu laser Building No. 9 Nanshan District high tech Park North new road Shenzhen city Guangdong province 518055 Patentee after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Address before: Dazu laser Building No. 9 Nanshan District high tech Park North new road Shenzhen city Guangdong province 518055 Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |