CN205485030U - Ultrashort work distance heavy -calibre quasi -molecule laser focusing objective - Google Patents
Ultrashort work distance heavy -calibre quasi -molecule laser focusing objective Download PDFInfo
- Publication number
- CN205485030U CN205485030U CN201620044801.2U CN201620044801U CN205485030U CN 205485030 U CN205485030 U CN 205485030U CN 201620044801 U CN201620044801 U CN 201620044801U CN 205485030 U CN205485030 U CN 205485030U
- Authority
- CN
- China
- Prior art keywords
- curvature
- lens
- quasi
- radius
- ultrashort
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004429 Calibre Substances 0.000 title abstract 2
- 239000000463 material Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 210000001747 pupil Anatomy 0.000 abstract description 5
- 238000005459 micromachining Methods 0.000 abstract description 2
- 230000000007 visual effect Effects 0.000 abstract description 2
- 241000219739 Lens Species 0.000 abstract 3
- 210000000695 crystalline len Anatomy 0.000 abstract 3
- 230000003287 optical effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Abstract
The utility model provides an ultrashort work distance heavy -calibre quasi -molecule laser focusing objective mainly relates to the laser micromachine field. The utility model aims at providing a quasi -molecule laser beam amasthenic lens contains a plurality of single positive lenss and cemented doublet, the performance parameter that its this camera lens of characterized in that will reach is: pupil D=30mm goes into, focus f / 18mm, and back focal length f=0.5mm, the optics curvature of field <= 5%, the maximum field of view is 5, and full visual field MYF value is greater than 0.7 when 50lpmm. The focusing spot diameter that obtains after finally making quasi -molecule laser beam that the wavelength is 248nm through the system can reach the micron dimension, directly writes the micro machining and provides a feasible program for realizing the quasi -molecule laser focusing.
Description
Technical field
This utility model relates to Laser Micro-Machining field, is primarily related in a kind of excimer laser focusing system the amasthenic lens used.
Background technology
Excimer laser has with it and shows in material processing field compared with short wavelength that photon energy is big, machining resolution is high, capacity usage ratio advantages of higher, thus is applied to the fields such as microelectronics, micro-optic, micromechanics the most widely.When utilizing excimer laser to be focused direct write microfabrication, owing to excimer pulsed laser beam is asymmetric Gauss distribution, hardly resulted in the focal beam spot of diameter micron dimension by common focus lamp.At present for obtaining micron order excimer laser hot spot, generally using the way that mask blocks, this method causes excimer laser capacity usage ratio to decline to a great extent so that excimer laser is restricted in the application of field of laser processing.And in current existing focusing technology, rarely have and be specifically designed for the report that excimer pulsed laser beam focuses on.For above content, it is necessary to design and a kind of receive the laser focusing camera lens that light ability is strong and makes excimer pulsed laser beam focal beam spot reach micron dimension.
Summary of the invention
The purpose of this utility model is: according to the design of excimer pulsed laser beam feature, a kind of heavy caliber casual labourer makees Range Focusing camera lens, meets the technology requirement of laser direct-writing processing, and the focal beam spot diameter micron dimension obtained.
This utility model is achieved through the following technical solutions: a kind of ultrashort operating distance heavy caliber excimer laser focusing objective len, eyeglass material is quartz glass, it is followed successively by the first single-positive-lens (1) from the object side to the image side, first cemented doublet (2), second cemented doublet (3), second single-positive-lens (4), 3rd single-positive-lens (5), it is characterized in that reached performance parameter is: entrance pupil D=30mm, focal distance f '=18mm, back focal length f=0.5mm, the optics curvature of field≤5%, optical distortion≤2%, maximum field of view is 5 °, full filed MYF value is more than 0.7 when 50lp/mm, when light is full of entrance pupil, focal point spot radius is about 6.765 μm.
Radius of curvature R 1=36.9602mm of described the first single-positive-lens (1), R2=infinity, thickness d 1=4.1386mm, airspace d2=1mm (the most described airspace is the distance between lens centre).
Radius of curvature R 1=16.1359mm of first of described the first cemented doublet (2), thickness d 1=1.8284mm, cemented surface radius of curvature R 2=12.6613mm, thickness d 2=2.6343mm, radius of curvature R 3=12.5507mm of second, airspace d3=12.2806mm.
Radius of curvature R 1=-19.1892mm of first of described the second cemented doublet (3), thickness d 1=4.5321mm, cemented surface radius of curvature R 2=129.3102mm, thickness d 2=6.0275mm, radius of curvature R 3=-22.4038mm of second, airspace d3=14.2689mm.
Radius of curvature R 1=16.3443mm of described the second single-positive-lens (4), R2=infinity, thickness d 1=7.0480mm, airspace d2=6.6463mm.
Radius of curvature R 1=4.9400mm of the 3rd described single-positive-lens (5), R2=4.5335mm, thickness d 1=6.8634mm, airspace d2=0.5228mm.
Accompanying drawing explanation
Fig. 1 is optical system diagram of the present utility model.Label in figure, (1) is the first single-positive-lens, and (2) are the first cemented doublets, and (3) are the second cemented doublets, and (4) are the second single-positive-lens, and (5) are the 3rd single-positive-lens.
Fig. 2 is MTF schematic diagram of the present utility model.
Fig. 3 is 0 ° of visual field focal point and near focal point spot size figure.
Detailed description of the invention
Below in conjunction with specific embodiment, this utility model is illustrated.
As shown in Figure 1 to Figure 3, a kind of amasthenic lens, it includes from light source to the first single-positive-lens (1) becoming image side to be arranged in order, the first cemented doublet (2), the second cemented doublet (3), the second single-positive-lens (4), the 3rd single-positive-lens (5).Native system uses mode that the first single-positive-lens (1) and the first cemented doublet (2) combine to strengthen the light ability of receiving of camera lens, and the effective focal length shortening system by increasing by the 3rd single-positive-lens (5) reaches to obtain the purpose of little focal spot.
The performance parameter that this utility model is to be reached is: entrance pupil D=30mm, focal distance f '=18mm, back focal length f=0.5mm, overall length of system is 67.79mm, the optics curvature of field≤5%, optical distortion≤2%, maximum field of view is 5 °, full filed MYF value is when 50lp/mm more than 0.7, and when the light of normal incidence is full of entrance pupil, focal point spot radius is about 6.765 μm.
For meeting the requirement of above-mentioned performance parameter, below by embodiment, the structural parameters of each lens in short focus amasthenic lens optical system are further described.
In FIG, from left to right: radius of curvature R 1=36.9602mm of the first single-positive-lens (1), R2=infinity, thickness d 1=4.1386mm, airspace d2=1mm (the most described airspace is the distance between lens centre).
Radius of curvature R 1=16.1359mm of first of the first cemented doublet (2), thickness d 1=1.8284mm, cemented surface radius of curvature R 2=12.6613mm, thickness d 2=2.6343mm, radius of curvature R 3=12.5507mm of second, airspace d3=12.2806mm.
Radius of curvature R 1=-19.1892mm of first of the second cemented doublet (3), thickness d 1=4.5321mm, cemented surface radius of curvature R 2=129.3102mm, thickness d 2=6.0275mm, radius of curvature R 3=-22.4038mm of second, airspace d3=14.2689mm.
Radius of curvature R 1=16.3443mm of the second single-positive-lens (4), R2=infinity, thickness d 1=7.0480mm, airspace d2=6.6463mm.
Radius of curvature R 1=4.9400mm of the 3rd single-positive-lens (5), R2=4.5335mm, thickness d 1=6.8634mm, airspace d2=0.5228mm.
Claims (6)
1. a ultrashort operating distance heavy caliber excimer laser focusing objective len, eyeglass material is quartz glass, it is characterised in that: it is followed successively by the first single-positive-lens (1), the first cemented doublet (2), the second cemented doublet (3), the second single-positive-lens (4), the 3rd single-positive-lens (5) from the object side to the image side.
Ultrashort operating distance heavy caliber excimer laser focusing objective len the most as claimed in claim 1, it is characterized in that: radius of curvature R 1=36.9602mm of the first single-positive-lens (1), R2=infinity, thickness d 1=4.1386mm, airspace d2=1mm, described airspace is the distance between lens centre.
Ultrashort operating distance heavy caliber excimer laser focusing objective len the most as claimed in claim 1, it is characterized in that: radius of curvature R 1=16.1359mm of first of the first cemented doublet (2), thickness d 1=1.8284mm, cemented surface radius of curvature R 2=12.6613mm, thickness d 2=2.6343mm, radius of curvature R 3=12.5507mm of second, airspace d3=12.2806mm.
Ultrashort operating distance heavy caliber excimer laser focusing objective len the most as claimed in claim 1, it is characterized in that: radius of curvature R 1=-19.1892mm of first of the second cemented doublet (3), thickness d 1=4.5321mm, cemented surface radius of curvature R 2=129.3102mm, thickness d 2=6.0275mm, radius of curvature R 3=-22.4038mm of second, airspace d3=14.2689mm.
Ultrashort operating distance heavy caliber excimer laser focusing objective len the most as claimed in claim 1, it is characterized in that: radius of curvature R 1=16.3443mm of the second single-positive-lens (4), R2=infinity, thickness d 1=7.0480mm, airspace d2=6.6463mm.
Ultrashort operating distance heavy caliber excimer laser focusing objective len the most as claimed in claim 1, it is characterized in that: radius of curvature R 1=4.9400mm of the 3rd single-positive-lens (5), R2=4.5335mm, thickness d 1=6.8634mm, airspace d2=0.5228mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620044801.2U CN205485030U (en) | 2016-01-18 | 2016-01-18 | Ultrashort work distance heavy -calibre quasi -molecule laser focusing objective |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620044801.2U CN205485030U (en) | 2016-01-18 | 2016-01-18 | Ultrashort work distance heavy -calibre quasi -molecule laser focusing objective |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205485030U true CN205485030U (en) | 2016-08-17 |
Family
ID=56670911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620044801.2U Expired - Fee Related CN205485030U (en) | 2016-01-18 | 2016-01-18 | Ultrashort work distance heavy -calibre quasi -molecule laser focusing objective |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205485030U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108802979A (en) * | 2017-08-29 | 2018-11-13 | 成都理想境界科技有限公司 | A kind of short focus projection objective and optical fiber scanning projection device |
-
2016
- 2016-01-18 CN CN201620044801.2U patent/CN205485030U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108802979A (en) * | 2017-08-29 | 2018-11-13 | 成都理想境界科技有限公司 | A kind of short focus projection objective and optical fiber scanning projection device |
| CN108802979B (en) * | 2017-08-29 | 2020-09-15 | 成都理想境界科技有限公司 | Short-focus projection objective and optical fiber scanning projection equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103576316B (en) | A kind of infrared laser zoom beam-expanding system and laser process equipment | |
| CN105527706A (en) | Ultraviolet laser telecentric F-theta scanning field lens and optical scanning system based on field lens | |
| CN103984078A (en) | F-theta optical lens for making laser spot and indicating light spot coincide with each other | |
| CN107797224B (en) | Optical lens, laser processing equipment and laser processing method | |
| CN102004319B (en) | Ultraviolet zoom beam expander | |
| CN205485030U (en) | Ultrashort work distance heavy -calibre quasi -molecule laser focusing objective | |
| CN101788716B (en) | Laser beam expanding system | |
| CN102313968A (en) | Ultraviolet laser f theta lens, laser marking machine and laser carving machine | |
| CN104769474A (en) | F-theta lens and laser processing device for far-infrared laser processing | |
| CN103576317B (en) | A kind of ultraviolet laser variable power beam-expanding system and laser process equipment | |
| CN104297897A (en) | High-power optical lens applying ultraviolet laser | |
| CN210776002U (en) | F40 large-numerical-aperture high-power laser diffraction limit collimating objective lens | |
| CN103576318B (en) | A kind of green laser zoom beam-expanding system and laser process equipment | |
| CN110824682A (en) | Microscopic imaging objective lens for fiber core identification of optical fiber fusion splicer and imaging method thereof | |
| CN105474065B (en) | Big visual field achromat | |
| CN112578538B (en) | Telecentric F-Theta scanning lens for blue laser processing | |
| JP2017538953A (en) | 3D printer, printing method, and lens barrel module | |
| CN114326055A (en) | Infrared field lens with large scanning angle | |
| CN210803879U (en) | Flaky Bessel light beam generating device | |
| US20170199359A1 (en) | Optical lens | |
| CN216133245U (en) | Ultraviolet monochromatic laser objective lens | |
| CN104880807B (en) | A kind of F θ optical lens for dual-wavelength laser processing | |
| CN205091489U (en) | Optic fibre coupled laser coupling optical system | |
| CN213764515U (en) | Laser micro-machining long-working-distance objective lens group | |
| CN110328445B (en) | Near-infrared monochromatic objective lens |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160817 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |