CN105093538B - A kind of amendment type Galilean type Zooming expander and its application - Google Patents
A kind of amendment type Galilean type Zooming expander and its application Download PDFInfo
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- CN105093538B CN105093538B CN201510650891.XA CN201510650891A CN105093538B CN 105093538 B CN105093538 B CN 105093538B CN 201510650891 A CN201510650891 A CN 201510650891A CN 105093538 B CN105093538 B CN 105093538B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
Abstract
The invention discloses a kind of amendment type Galilean type Zooming expander and its application.Amendment type Galilean type Zooming expander, including the first lens, the second lens, the 3rd lens and the 4th lens being arranged in order along light beam incident direction；Wherein, the diopter of the first lens, the second lens, the 3rd lens and the 4th lens is followed successively by negative, positive, negative, positive；The distance between first lens and the second lens are adjustable, and the distance between the 3rd lens and the 4th lens are adjustable, and the distance between the second lens and the 3rd lens are non-adjustable；The enlargement ratio of amendment type Galilean type Zooming expander is 28, in the adjustable extent of enlargement ratio, in the size of the beam sizes always greater than incident beam of each lens surface.Amendment type Galilean type Zooming expander of the present invention, translation distance is small, safe；Can be used for the CO of 10.6um2Laser, by the distance for finely tuning adjacent elements, it can also be used in other wavelength or wavelength band.
Description
Technical field
The present invention relates to a kind of amendment type Galilean type Zooming expander and its application, belong to optical field.
Background technology
Beam expanding lens is a kind of instrument of extension collimation (parallel) light (such as laser beam) beam size.Beam expanding lens has two
Major function：Extension collimated light beam size and reduction beam divergence angle.Same focus lamp is such as used, with larger light beam chi
The collimated light of the very little and less angle of divergence can be focused into less spot size.Meanwhile, should in laser marking, laser welding etc.
With aspect, the system of may require that can as requested change the size of focal beam spot to realize different mark/welding fineness degrees, together
When, also require that beam expanding lens can cross zoom for correcting by the light beam that laser difference output state is brought changes.Therefore,
In these various applications using laser treatment material, it has been widely used the beam expanding lens of energy zoom to realize variable gathering
Burnt hot spot and correction light beam change.
From a structural point, beam expanding lens has two types：Galilean type and Keplerian.Determine multiplying power gal for standard
Li Lveshi beam expanding lens, there is the input element and an output element for positive diopter of negative diopter.The structure of Keplerian
It is then opposite：It has the input element and an output element for negative diopter of positive diopter.For Zooming expander
Structure, Galilean type has an input element for negative diopter, middle the zoom element and a positive dioptric of positive diopter
The collimating element of degree, because needing larger translation distance, Galilean type to be only widely used in design of the magnifying power zoom ratio less than 2
In, zoom ratio is defined as the ratio of maximum magnifying power and minimum magnifying power；On the other hand, the structure of zoomable Keplerian, be
Positive diopter element is input into, and zoom is realized in centre for negative diopter element, positive diopter element output below, due to same
Magnifying power zoom ratio, it is only necessary to more short translation distance so that the structure of Keplerian is more suitable for zoom ratio more than 2 times
Zooming expander.However, in superpower laser application aspect, Keplerian beam expanding lens has an inherent shortcoming：Input element
With positive diopter, size of the beam sizes much smaller than input light in intermediary element is beaten, less laser beam size is caused
The surface of intermediary element bears the light intensity higher than the surface of input element, the element of centre is not known in client easily
Broken in the case of feelings, therefore the damage threshold of whole optical system is lowered.
On Zooming expander, domestic patent aspect, No. 2010102077391 for being announced by Li Jiaying et al. for 2010 are specially
Profit, and the 201410795058.X patents invented by Peng Hongpan et al. for 2014, are all Keplerians from a structural point,
There are problems that damage threshold is low.International monopoly aspect, by the Cobb of on July 28th, 1992 the U.S. patent No.5,134,523
A kind of Galilean type Zooming expander is disclosed, in structure type, the patent of Cobb belongs to traditional Galilean type zoom and expands
Shu Jing, enlargement ratio be 4.251 × -6.79 ×, magnifying power zoom ratio be 1.6X, translation distance is 97.4mm, there is magnifying power
Zoom ratio is small, the problems such as translation distance is big.
In sum, develop a kind of energy and realize that more short translation distance, light beam inside diameter can be more than inputs light beam again
The Zooming expander of diameter is badly in need of very much.
The content of the invention
In order to solve, translation distance in the prior art is big, the low defect of damage threshold, and the present invention provides a kind of amendment type gal
Li Lveshi Zooming expanders and its application.
In order to solve the above technical problems, the technical solution adopted in the present invention is as follows：
A kind of amendment type Galilean type Zooming expander, including the first lens, being arranged in order along light beam incident direction
Two lens, the 3rd lens and the 4th lens；Wherein, the diopter of the first lens, the second lens, the 3rd lens and the 4th lens according to
Secondary is negative, positive, negative, positive；The distance between first lens and the second lens are adjustable, between the 3rd lens and the 4th lens away from
From adjustable, the distance between the second lens and the 3rd lens are non-adjustable；The enlargement ratio of amendment type Galilean type Zooming expander
It is 2-8, in the adjustable extent of enlargement ratio, in the size of the beam sizes always greater than incident beam of each lens surface.
The enlargement ratio of above-mentioned Zooming expander from 2 × to 8 × adjustable；Second lens and the 3rd lens as it is overall together
Mobile, the distance between the first lens and the second lens are corresponding with enlargement ratio with the distance between the 3rd lens and the 4th lens
Ground is mobile.
The structure of existing Zooming expander generally comprises three elements, and while first element is positive, it is such
Structure is relatively easy to design, and often has a shorter translation distance and shorter total length.However, with positive diopter
First element will make incident beam focus inside beam expanding lens, generally cause that the beam sizes on internal certain minute surface compare incident light
Beam is small 3~4 times, therefore the laser damage threshold of this beam expanding lens will be made to reduce 10 times or so.For being swashed using lower-wattage
The application of light device, internal hot spot focus issues are not problem to element, however, when desired laser reaches a certain intensity,
Wanted as needed for laser cutting, the inner member of beam expanding lens there will be the high risk broken by laser, and cannot from outward appearance
Discover, leverage the beam quality and intensity of focal beam spot.
And the application by using negative lens as the first element, it is to avoid internal focus issues.With traditional Jia Li
Slightly formula beam expanding lens is different, to shorten translation distance scope also for wavefront difference is reduced, adds after second positive lens of zoom
Add an additional negative lens element so that size of the beam sizes always greater than incident beam inside beam expanding lens, because
This ensure that the security of inner member.And, the translation distance of the structure is shortened dramatically than traditional Galilean type, and is had
Have it is good expand quality, be adapted in use to superpower laser field.
In order to reduce translation distance, ensure enlargement ratio, the distance between the first lens and the second lens from 12.1mm to
1.8mm is adjustable；The distance between 3rd lens and the 4th lens are adjustable from 81.7mm to 131.3mm.So translation distance is less than
50mm, this makes it possible that manufacture has the beam expanding lens microscope base of concentricity high.
In order to further improve the security of each element, while ensureing to expand quality, the first lens front surface is concave surface, song
Rate is 73.44mm, and surface is that concave surface, curvature are 37.93mm after the first lens, and the center thickness of the first lens is 3.0mm；Second
Lens front surface be convex surface, curvature be 21.50mm, after the second lens surface be concave surface, curvature be 63.40mm, the second lens
Center thickness is 3.0mm；3rd lens front surface is concave surface, curvature is 301.3mm, and surface is concave surface, curvature after the 3rd lens
It is 51.35mm, the center thickness of the 3rd lens is 3.5mm；4th lens front surface is plane, and surface is convex after the 4th lens
Face, curvature are 223.48mm, and the center thickness of the 4th lens is 5.0mm, direction of the surface of each lens the past to rear surface and light
Beam incident direction is consistent.That is the vertical direction of the application is consistent with the direction of propagation of light beam.
In order to be further ensured that the quality of amendment type Galilean type Zooming expander, the first lens are by bearing the ZnSe of diopter
Lens are constituted, and the second lens are made up of the ZnSe lens of positive diopter, and the 3rd lens are made up of the ZnSe lens for bearing diopter, the
Four lens are made up of the ZnSe lens of positive diopter.
Above-mentioned amendment type Galilean type Zooming expander, in the adjustable extent of enlargement ratio, the peak valley ripple of output beam
Preceding error is less than 0.1 number of wavelengths.
Above-mentioned amendment type Galilean type Zooming expander can be used to be operated in the CO2 lasers of 10.6um.However, by adjusting
The distance between whole first lens and the second lens and the distance between the 3rd lens and the 4th lens, the application amendment type gal profit
Slightly formula Zooming expander can be operated in other wavelength from visible LONG WAVE INFRARED.
The NM technology of the present invention is with reference to prior art.
Amendment type Galilean type Zooming expander of the present invention, enlargement ratio is 2 × -8 ×, zoom ratio is 4, maximum it is mobile away from
It is safe from less than 50mm so that manufacture and the eccentricity for having kept are possibly realized；Can be used for the CO2 lasers of 10.6um,
By the distance for finely tuning adjacent elements, it can also be used in other wavelength or wavelength band.
Brief description of the drawings
Fig. 1 is generalized section of the amendment type Galilean type Zooming expander of the present invention in 2 × enlargement ratio.
Fig. 2 is generalized section of the amendment type Galilean type Zooming expander of the present invention in 5 × enlargement ratio.
Fig. 3 is generalized section of the amendment type Galilean type Zooming expander of the present invention in 8 × enlargement ratio.
Fig. 4 is the dispersion angle of amendment type Galilean type Zooming expander of the present invention 2 × -8 × enlargement ratio of correspondence
(mrad) comparison diagram.
When Fig. 5 a are amendment type Galilean type Zooming expander difference enlargement ratio of the present invention at first lens front surface
The scale diagrams of incident beam.
When Fig. 5 b are amendment type Galilean type Zooming expander difference enlargement ratio of the present invention at 3rd lens front surface
Beam sizes schematic diagram.
Wave front chart when Fig. 6 a are amendment type Galilean type 2 × enlargement ratio of Zooming expander of the present invention.
Wave front chart when Fig. 6 b are amendment type Galilean type 5 × enlargement ratio of Zooming expander of the present invention.
Wave front chart when Fig. 6 c are amendment type Galilean type 8 × enlargement ratio of Zooming expander of the present invention.
In figure, 10 is the first lens, and 11 is the first lens front surface, and 12 is surface after the first lens, and 20 is the second lens,
21 is the second lens front surface, and 22 is surface after the second lens, and 30 is the 3rd lens, and 31 is the 3rd lens front surface, and 32 is the
Surface after three lens, 40 is the 4th lens, and 41 is the 4th lens front surface, and 42 is surface after the 4th lens.
Specific embodiment
For a better understanding of the present invention, it is with reference to the embodiment content that the present invention is furture elucidated but of the invention
Content is not limited solely to the following examples.
Embodiment 1
A kind of amendment type Galilean type Zooming expander, including the first lens, being arranged in order along light beam incident direction
Two lens, the 3rd lens and the 4th lens；Wherein, the diopter of the first lens, the second lens, the 3rd lens and the 4th lens according to
Secondary is negative, positive, negative, positive；The distance between first lens and the second lens are adjustable, between the 3rd lens and the 4th lens away from
From adjustable, the distance between the second lens and the 3rd lens are non-adjustable；The enlargement ratio of amendment type Galilean type Zooming expander
It is 2-8, in the adjustable extent of enlargement ratio, in the size of the beam sizes always greater than incident beam of each lens surface,
And the peak valley wavefront error of output beam is less than 0.1 number of wavelengths.
The distance between first lens and the second lens are adjustable from 12.1mm to 1.8mm；3rd lens and the 4th lens it
Between distance it is adjustable from 81.7mm to 131.3mm；
First lens front surface is that concave surface, curvature are 73.44mm, and surface is that concave surface, curvature are after the first lens
37.93mm, the center thickness of the first lens is 3.0mm；Second lens front surface is convex surface, curvature is 21.50mm, the second lens
Surface is that concave surface, curvature are 63.40mm afterwards, and the center thickness of the second lens is 3.0mm；3rd lens front surface is concave surface, song
Rate is 301.3mm, and surface is that concave surface, curvature are 51.35mm after the 3rd lens, and the center thickness of the 3rd lens is 3.5mm；4th
Lens front surface is plane, and surface is that convex surface, curvature are 223.48mm after the 4th lens, and the center thickness of the 4th lens is
5.0mm；
First lens are made up of the ZnSe lens for bearing diopter, and the second lens are made up of the ZnSe lens of positive diopter, the
Three lens are made up of the ZnSe lens for bearing diopter, and the 4th lens are made up of the ZnSe lens of positive diopter.
As shown in figure 1, input light enters beam expanding lens from the first lens, the second lens and the 3rd lens are zoom element, the
Four lens are collimating mirror and output element, and the first lens and the 3rd lens have negative diopter, the second lens and the 4th lens
With positive diopter；Second lens and the 3rd lens are moved together as overall, mistakes of the distance between they D2 in zoom
It is fixed in journey；The distance between first lens and the second lens are defined as D1, between the second lens and the 3rd lens away from
From referred to as D2, it is variable element that the distance between the 3rd lens and the 4th lens are defined as D3, D1 and D3, with enlargement ratio
Change and change.
Fig. 1 to Fig. 3 be respectively the present embodiment enlargement ratio be 2 ×, 5 ×, the profile of the Zooming expander of 8 × when：
In Fig. 1 to Fig. 3, the collimated light beam no more than 4mm is transferred to the right of beam expanding lens from the left side of beam expanding lens, depending on element it
Between distance, outgoing beam will can be respectively 2 times of incident beam, 5 times, and 8 times, by between the first lens and the second lens
Distance definition is D1, and the distance between the 3rd lens and the 4th lens are defined as D3, and table 1 amplifies for the present embodiment Zooming expander
The value of corresponding D1 and D3 when multiplying power is 2 to 8 times, the form display D1 excursion be from 2 × (referring to 2 times) when
12.1mm to 8 × when 1.8mm, meanwhile, the excursion of D3 is from the 81.7mm of 2 × when to the 131.3mm of 8 × when, whole
In the range of individual enlargement ratio, the excursion of D1 is less than 10.5mm, and the excursion of D3 is less than 50mm, the change model of entire length
Enclose less than 40mm.
Table 2 gives the technical parameter of each lens in the present embodiment, the surface label in table refer to each lens preceding surface and
Surface (identical with the reference meaning in Fig. 1) afterwards, i.e., 11,12 represent the forward and backward surface of the first lens, and 21,22 represent the
The forward and backward surface of two lens, the like；On surface type column, all of surface is all herein standard type, it means that only
Spherical surface type or plane face type are included in this beam expanding lens；Eight radius of curvature in face are listed on radius of curvature column, on the occasion of meaning
Think of is the corresponding direction bending propagated towards light, and negative value represents the corresponding opposite direction bending propagated towards light；Thickness column
Represent the distance between center thickness and adjacent two lens of each lens, be followed successively by from top to bottom the first lens center thickness,
The distance between the distance between first lens and the second lens, the center thickness of the second lens, the second lens and the 3rd lens,
The distance between the center thickness of the 3rd lens, the 3rd lens and the 4th lens, the center thickness of the 4th lens；Material column is represented
The material that respective lens are used, here entirely ZnSe；The thang-kng diameter of each lens, the 4th are given in clear aperture column
The clear aperture of lens is 40mm, and the 8 × enlargement ratio incident for 4mm, the value is sufficiently used for the output through 32mm diameters
Light beam is without having any blocking.
Fig. 4 is the present embodiment Zooming expander, the beam divergence angle in 2 × -8 × different enlargement ratios, the simulation drawing
It is consistent with theory, i.e. the enlargement ratio of beam expanding lens is bigger, the beam divergence angle of acquisition is smaller, the ratio that beam divergence angle reduces
Example is identical with enlargement ratio.
Because the second lens in beam expanding lens in the present embodiment have positive diopter, restrain light, internal minimum light beam
Size will be located at the preceding surface 31 of the 3rd lens.To illustrate the beam sizes inside beam expanding lens always more than the size of incident beam,
Fig. 5 a and Fig. 5 b sets forth correspondence 2 × to the minimum beam size inside the size and beam expanding lens of 8 × unpolarized light beam；From
Fig. 5 a are visible, and the size of incident beam is constant, the light beam of the 4mm diameters for as setting, from Fig. 5 b, with beam expanding lens
On the preceding surface 31 of the 3rd lens of internal minimum beam, beam sizes increase as magnifying power increases, so minimum
It is 2 × when that light beam occurs in magnifying power, but as shown in the drawing, on the preceding surface 31 of the 3rd lens, light beam during 2 × magnifying power
Diameter value is still more than 4mm, hence it was demonstrated that the chi to the beam sizes inside the present embodiment beam expanding lens always greater than incident beam
It is very little.
Fig. 6 a, 6b and 6c show the present embodiment enlargement ratio be respectively 2 ×, 5 × and 8 × when beam expanding lens output beam
Wave front chart, in the range of all enlargement ratios, the peak-to-valley value of wave front chart fluctuation is respectively less than 0.1 number of wavelengths, and this shows the present embodiment
Beam expanding lens have in the range of whole enlargement ratio and extraordinary expand quality.Above-mentioned amendment type Galilean type Zooming expander
Can be used to be operated in the CO2 lasers of 10.6um.However, by adjusting the distance between the first lens and the second lens and the 3rd
The distance between lens and the 4th lens, the application amendment type Galilean type Zooming expander can be operated in red from visible long wave
Other outer wavelength.
In the application such as laser cutting/welding/mark, the laser beam of collimation focuses on material surface by an object lens
For processing：To the object lens of a fixed focal length, the size of the spot size of focusing and the laser beam of collimation is inversely proportional, to change
Become the beam sizes for focusing on, the laser beam of collimation is also sized to change accordingly by Zooming expander；With laser power
Become more and more higher, the light beam inside size inside beam expanding lens should be not less than the size of incident beam, in order to avoid in regulation times magnification
Internal infringement is produced during rate, and above-mentioned amendment type Galilean type Zooming expander then smoothly realizes this target.
Table 1 is that amendment type Galilean type Zooming expander of the present invention sets in the distance of the different enlargement ratios of 2 × -8 × correspondence
Put table
| Enlargement ratio | 2X | 3X | 4X | 5X | 6X | 7X | 8X |
| D1 | 12.1 | 10.4 | 8.7 | 7.0 | 5.3 | 3.5 | 1.8 |
| D3 | 81.7 | 102.7 | 113.5 | 120.1 | 124.6 | 127.9 | 131.3 |
Table 2 is the design parameter table of lens element in amendment type Galilean type Zooming expander of the present invention
| Surface label | Surface type | Radius of curvature | Thickness | Material | Clear aperture |
| 11 | Standard | -73.44 | 3.0 | ZnSe | 12 |
| 12 | Standard | 37.93 | Variable | 10 | |
| 21 | Standard | 21.50 | 3.0 | ZnSe | 12 |
| 22 | Standard | 63.40 | 29.7 | 12 | |
| 31 | Standard | -301.30 | 3.5 | ZnSe | 12 |
| 32 | Standard | 51.35 | Variable | 10 | |
| 41 | Standard | It is infinitely great | 5.0 | ZnSe | 40 |
| 42 | Standard | -223.48 | 40 |
Claims (6)
1. a kind of amendment type Galilean type Zooming expander, it is characterised in that：Including be arranged in order along light beam incident direction
One lens, the second lens, the 3rd lens and the 4th lens；Wherein, the first lens, the second lens, the 3rd lens and the 4th lens
Diopter be followed successively by negative, positive, negative, positive；The distance between first lens and the second lens are adjustable, the 3rd lens and the 4th saturating
The distance between mirror is adjustable, and the distance between the second lens and the 3rd lens are non-adjustable；Amendment type Galilean type Zooming expander
Enlargement ratio be 2-8, in the adjustable extent of enlargement ratio, each lens surface beam sizes more than incident beam
Size；
First lens front surface is that concave surface, curvature are 73.44mm, and surface is that concave surface, curvature are 37.93mm, the after the first lens
The center thickness of one lens is 3.0mm；Second lens front surface is convex surface, curvature is 21.50mm, and surface is recessed after the second lens
Face, curvature are 63.40mm, and the center thickness of the second lens is 3.0mm；3rd lens front surface is concave surface, curvature is
301.3mm, surface is that concave surface, curvature are 51.35mm after the 3rd lens, and the center thickness of the 3rd lens is 3.5mm；4th lens
Preceding surface is plane, and surface is that convex surface, curvature are 223.48mm after the 4th lens, and the center thickness of the 4th lens is 5.0mm, respectively
Lens the past, surface was consistent with light beam incident direction to the direction on rear surface.
2. amendment type Galilean type Zooming expander as claimed in claim 1, it is characterised in that：First lens and the second lens
The distance between it is adjustable from 12.1mm to 1.8mm.
3. amendment type Galilean type Zooming expander as claimed in claim 1 or 2, it is characterised in that：3rd lens and the 4th
The distance between lens are adjustable from 81.7mm to 131.3mm.
4. amendment type Galilean type Zooming expander as claimed in claim 1 or 2, it is characterised in that：First lens are bent by negative
The ZnSe lens composition of luminosity, the second lens are made up of the ZnSe lens of positive diopter, and the 3rd lens are by bearing the ZnSe of diopter
Lens are constituted, and the 4th lens are made up of the ZnSe lens of positive diopter.
5. amendment type Galilean type Zooming expander as claimed in claim 1 or 2, it is characterised in that：In enlargement ratio can
In the range of tune, the peak valley wavefront error of output beam is less than 0.1 number of wavelengths.
6. the purposes of the amendment type Galilean type Zooming expander described in claim 1-5 any one, it is characterised in that：For
It is operated in the CO of 10.6um2Laser.
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| CN111283320B (en) * | 2020-03-06 | 2022-02-15 | 深圳市大族数控科技股份有限公司 | Laser beam expanding lens and laser processing equipment |
| CN112404704A (en) * | 2020-11-03 | 2021-02-26 | 深圳市韵腾激光科技有限公司 | Variable-power laser beam expander and laser processing system |
| CN112858341B (en) * | 2020-12-23 | 2022-11-18 | 北京纬百科技有限公司 | Detection method, shooting system and detection system |
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| JPS6125117A (en) * | 1984-07-14 | 1986-02-04 | Akio Suzuki | Galilean zoom telescope |
| US4802717A (en) * | 1986-04-21 | 1989-02-07 | Hughes Aircraft Company | Infrared afocal zoom telescope |
| JP6125649B2 (en) * | 2012-10-31 | 2017-05-10 | ハンズ レーザー テクノロジー インダストリー グループ カンパニー リミテッド | Ultraviolet laser marking Fθ lens and laser processing device |
| CN204964888U (en) * | 2015-10-09 | 2016-01-13 | 南京波长光电科技股份有限公司 | Correction type galileo formula becomes times beam expanding lens |
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Address after: 211121 18 Jiangning Lake Industrial Zone, Jiangning, Nanjing. Co-patentee after: Edinburgh (Nanjing) Optoelectronic Equipment Co., Ltd. Patentee after: NANJING WAVELENGTH OPTOELECTRONICS TECHNOLOGY CO., LTD. Address before: 211121 18 Jiangning Lake Industrial Zone, Jiangning, Nanjing. Co-patentee before: NANJING EDINGBURGH ENVIRONMENTAL TECHNOLOGY CO., LTD. Patentee before: NANJING WAVELENGTH OPTOELECTRONICS TECHNOLOGY CO., LTD. |
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