CN106199983A - Expand assembly and there is this laser process equipment expanding assembly - Google Patents
Expand assembly and there is this laser process equipment expanding assembly Download PDFInfo
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- CN106199983A CN106199983A CN201610726567.6A CN201610726567A CN106199983A CN 106199983 A CN106199983 A CN 106199983A CN 201610726567 A CN201610726567 A CN 201610726567A CN 106199983 A CN106199983 A CN 106199983A
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- lens
- curved surface
- assembly
- incident beam
- expand
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
Abstract
The present invention relates to a kind of expand assembly and there is this laser process equipment expanding assembly.Above-mentioned expands the first lens, the second lens and the 3rd lens that assembly includes setting gradually along the transmission direction of incident beam, first lens and the second lens can relative movements, first lens and the 3rd lens can relative movement, and the second lens and the 3rd lens geo-stationary；First lens are double concave type minus lens, and the second lens are curved month type minus lens, and the 3rd lens are biconvex plus lens.Above-mentioned expands assembly and has this laser process equipment expanding assembly, can regulate the distance between the first lens and the second lens during use, and the distance between regulation the first lens and the 3rd lens, with realize the incident beam of different wave length etc. multiplying power expand；In the high-power laser instrument of the incident beam that can also be applied to different wave length, so the above-mentioned strong adaptability expanding assembly, range of application is wider.
Description
Technical field
The present invention relates to the technical field of Laser Processing, particularly relate to a kind of expand assembly and there is this expand assembly
Laser process equipment.
Background technology
In laser processing procedure, the energy of the focal spot of the laser of the outgoing of laser process equipment need to be concentrated very much,
To guarantee, at laser focusing point, there is higher energy density, so that laser can work effectively, and laser can be improved
Work efficiency.For same laser instrument, to improve the focus energy density of laser, laser need to be made by the regulation of beam expanding lens
Light beam becomes collimating (parallel) light beam, and focus lamp could be utilized to obtain the least focal beam spot.
According to Laplace invariant theorem: nD θ=n'D' θ '=J
Wherein: J is to draw conspicuous invariant；N, n' represent that optical system, in object space, the refractive index of image space, works as optics
When system is placed in air, n=n'=1；D and D' represents Entry pupil diameters and the exit pupil diameter of optical system；θ and θ ' represents incident
Light and the angle of visual field of emergent light, when the angle of visual field is the least, can represent with radian.From above formula, when incident laser beam
When having the angle of divergence, when i.e. θ is bigger, is made by beam-expanding system the lasing beam diameter of incidence amplify β=D'/D times, laser beam can be made
The angle of divergence reduces β times, thus reaches the purpose of shaped laser bundle.
On the other hand, according to diffraction limit theoretical relationship: δ=2.44 λ f/D'
Wherein, δ is focus point spot diameter, and λ is laser works wavelength, and f is the focal length of focusing system, and D' is to focus on system
The entrance pupil diameter of system.
Visible, by adding the beam-expanding system of a suitable multiplying power, just can get preferable focal beam spot.But in reality
In, beam-expanding system is only applicable to the laser beam of certain wavelength, and laser beam to be made amplifies certain multiplying power so that different wave length
The laser beam that laser instrument sends need to use different beam-expanding systems, and therefore for the beam-expanding system of set laser instrument, it is suitable for
Property by bigger restriction.
Summary of the invention
Based on this, it is necessary to for the suitability of beam-expanding system of laser instrument by the problem of bigger restriction, it is provided that a kind of
Expand assembly and there is this laser process equipment expanding assembly.
One expands assembly, including along incident beam transmission direction set gradually the first lens, the second lens and
3rd lens, described first lens and described second lens can relative movement, described first lens and described 3rd lens energy
Enough relative movements, and described second lens and described 3rd lens geo-stationary；Described first lens are double concave type minus lens, institute
Stating the second lens is curved month type minus lens, and described 3rd lens are biconvex plus lens.
Wherein in an embodiment, described first lens be respectively provided on two sides with first surface and the second curved surface, described
First surface is away from described second lens, and described second curved surface is adjacent to described second lens, the radius of curvature of described first surface
For-30mm ± 1.5mm, the radius of curvature of described second curved surface is 8mm ± 0.4mm；
Described second lens be respectively provided on two sides with the 3rd curved surface and the 4th curved surface, described 3rd curved surface is adjacent to described second
Curved surface, described 4th curved surface is adjacent to described 3rd lens, and the radius of curvature of described 3rd curved surface is 120mm ± 6mm, and the described 4th
The radius of curvature of curved surface is 40mm ± 2mm；
Described 3rd lens be respectively provided on two sides with the 5th curved surface and the 6th curved surface, described 5th curved surface is adjacent to the described 4th
Curved surface, described 6th curved surface is away from described 4th curved surface, and the radius of curvature of described 5th curved surface is 50mm ± 2.5mm, and described
The radius of curvature of six curved surfaces is-50mm ± 2.5mm；Between described 4th curved surface and described 5th curved surface, the distance on optical axis is
1mm±0.05mm。
Wherein in an embodiment, described first lens center thickness on optical axis is 2mm ± 0.1mm；Described
Two lens center thickness on optical axis is 3mm ± 0.15mm；Described 3rd lens center thickness on optical axis be 6mm ±
0.3mm。
Wherein in an embodiment, the folding of the material of described first lens, described second lens and described 3rd lens
The ratio penetrating rate and Abbe number is 1.4/67 ± 0.07/67.
Wherein in an embodiment, between described second curved surface and described 3rd curved surface, the distance on optical axis is
63.8mm ± 3.19mm, the wavelength of described incident beam is 1064nm.
Wherein in an embodiment, between described second curved surface and described 3rd curved surface, the distance on optical axis is
62.2mm ± 3.11mm, the wavelength of described incident beam is 532nm.
Wherein in an embodiment, between described second curved surface and described 3rd curved surface, the distance on optical axis is 60mm
± 3mm, the wavelength of described incident beam is 355nm.
Wherein in an embodiment, described in expand the multiple that expands of assembly be 6.
A kind of laser process equipment, including laser instrument with above-mentioned expand assembly, described laser instrument produces described incident illumination
Bundle, described incident beam inject described in expand assembly, described in expand assembly and regulate described incident beam export regulation light beam.
Wherein in an embodiment, laser process equipment also includes that focus pack, described focus pack are positioned at described expansion
Tread assembly injects described focus pack away from the side of described laser instrument, described regulation light beam, and described focus pack is to described tune
Joint light beam is focused and exports focusing light beam.
Above-mentioned expands assembly and has this laser process equipment expanding assembly, and incident beam exposes to the first lens
On one side, major part incident beam is refracted into from the first side of the first lens and rolls over from the second side of the first lens
Penetrate；Exposing on the first side of the second lens by the incident beam of the first lens, major part is by the first lens
Incident beam is refracted into from the first side of the second lens and reflects from the second side of the second lens and go out；With this type of
Push away, by the incident beam major part of the first lens by the 3rd lens, be finally focused into the outgoing beam that beam diameter is thinner；
Due to the first lens and the second lens can relative movement, the first lens and the 3rd lens can relative movement, and the second lens
With the 3rd lens geo-stationary, the distance between the first lens and the second lens, and regulation the first lens during use, can be regulated
And the distance between the 3rd lens, between i.e. can regulating between the second side of the first lens and the first side of the second lens
Away from, with realize the incident beam of different wave length etc. multiplying power expand；Expand assembly and can also be applied to the incident illumination of different wave length
In the high-power laser instrument of bundle, so the above-mentioned strong adaptability expanding assembly, range of application is wider；Owing to above-mentioned expands
The space simple and compact for structure, easy to adjust and that take of assembly is less, is advantageously implemented the miniaturization of laser process equipment；This
Outward, the first lens are double concave type minus lens, for dissipating parallel incident beam；Second lens are curved month type minus lens, are used for
Remove by the aberration in the incident beam of the first lens；3rd lens are biconvex plus lens, and being used for will be by the second lens
Incident beam in light pool directional light further, so that the collimation of the light of the outgoing beam after Ju Jiaoing is relatively
Good.
Accompanying drawing explanation
Fig. 1 is the structural representation expanding assembly of an embodiment；
Fig. 2 is the index path expanding assembly shown in Fig. 1；
Fig. 3 be the wavelength of incident beam be 1064nm through expanding the figure of the MTF after assembly expands shown in Fig. 1；
Fig. 4 be the wavelength of incident beam be 532nm through expanding the figure of the MTF after assembly expands shown in Fig. 1；
Fig. 5 be the wavelength of incident beam be 355nm through expanding the figure of the MTF after assembly expands shown in Fig. 1；
Fig. 6 be the wavelength of incident beam be that 1064nm is through expanding the disc of confusion figure after assembly expands shown in Fig. 1；
Fig. 7 be the wavelength of incident beam be that 532nm is through expanding the disc of confusion figure after assembly expands shown in Fig. 1；
Fig. 8 be the wavelength of incident beam be that 355nm is through expanding the disc of confusion figure after assembly expands shown in Fig. 1；
Fig. 9 be the wavelength of incident beam be 1064nm through expanding the figure of the Ray fan after assembly expands shown in Fig. 1；
Figure 10 be the wavelength of incident beam be 532nm through expanding the figure of the Ray fan after assembly expands shown in Fig. 1；And
Figure 11 be the wavelength of incident beam be 355nm through expanding the figure of the Ray fan after assembly expands shown in Fig. 1.
Detailed description of the invention
For the ease of understanding the present invention, below with reference to relevant drawings to expanding assembly and there is this laser expanding assembly
Process equipment is described more fully.Accompanying drawing gives and expands assembly and there is this laser process equipment expanding assembly
First-selected embodiment.But, expand assembly and there is this laser process equipment expanding assembly can come in many different forms
Realize, however it is not limited to embodiment described herein.On the contrary, providing the purpose of these embodiments is to make expanding assembly and tool
This is had to expand the disclosure of the laser process equipment of assembly more thorough comprehensively.
Unless otherwise defined, all of technology used herein and scientific terminology and the technical field belonging to the present invention
The implication that technical staff is generally understood that is identical.Expanding assembly and there is saying of this laser process equipment expanding assembly herein
Term used in bright book is intended merely to describe the purpose of specific embodiment, it is not intended that in limiting the present invention.Institute herein
The term that uses " and/or " include the arbitrary and all of combination of one or more relevant Listed Items.
It should be noted that numerical value corresponding to parameters herein is all expressed as " basic size ± deviation ", wherein,
" basic size+deviation " is the maximum limit numerical value that this parameter is corresponding, and " basic size-deviation " is the minimum pole that this parameter is corresponding
Limit numerical value, therefore the numerical value of this parameter is between least limit numerical value and maximum limit numerical value.Such as, the numeric representation of R1 be "-
30mm ± 1.5mm ", i.e.-31.5mm≤R1≤-28.5mm.
As it is shown in figure 1, the laser process equipment (not shown) of an embodiment include laser instrument (not shown) and
Expanding assembly 10, laser instrument produces incident beam, and incident beam is injected and expanded assembly 10, expands assembly 10 and regulates incident beam also
Output regulation light beam.In the present embodiment, the multiple that expands expanding assembly 10 is 6.The ripple of the incident beam of the output of laser instrument
Length can be 1064nm or 532nm or 355nm.As in figure 2 it is shown, expand assembly 10 include along incident beam transmission direction successively
The first lens the 100, second lens 200 and the 3rd lens 300 arranged, the first lens 100 can be relative with the second lens 200
Mobile, the first lens 100 and the 3rd lens 300 can relative movement, and the second lens 200 and the 3rd lens 300 geo-stationary.
As it is shown in figure 1, the first lens 100 are double concave type minus lens, the second lens 200 are curved month type minus lens, and the 3rd is saturating
Mirror 300 is biconvex plus lens.In the present embodiment, the second lens 200 and the 3rd lens 300 form lens subassembly, and second
Lens 200 and the 3rd lens 300 geo-stationary.Distance between first lens 100 and lens subassembly can regulate, and i.e. first is saturating
Can be with relative movement between mirror 100 and lens subassembly.Wherein in an embodiment, the first lens 100 are arranged at the first slip
In frame (not shown), the second lens 200 and the 3rd lens 300 may be contained within the second travelling carriage (not shown), the
One travelling carriage and the second travelling carriage all can slide relative to fixed mount (not shown).
As it is shown in figure 1, wherein in an embodiment, the first lens 100 be respectively provided on two sides with first surface 110 and
Two curved surfaces 120, first surface 110 is away from the second lens 200, and the second curved surface 120 is adjacent to the second lens 200.First surface 110
Radius of curvature R 1 is-30mm ± 1.5mm, and the radius of curvature R 2 of the second curved surface 120 is 8mm ± 0.4mm.The two of second lens 200
Side is respectively equipped with the 3rd curved surface 210 and the 4th curved surface 220, and the 3rd curved surface 210 is adjacent to the second curved surface 120, and the 4th curved surface 220 is neighbouring
3rd lens 300.The radius of curvature R 3 of the 3rd curved surface 210 is 120mm ± 6mm, and the radius of curvature R 4 of the 4th curved surface 220 is 40mm
±2mm.3rd lens 300 be respectively provided on two sides with the 5th curved surface 310 and the 6th curved surface 320, the 5th curved surface 310 is bent adjacent to the 4th
Face 220, the 6th curved surface 320 is away from the 4th curved surface 220.The radius of curvature R 5 of the 5th curved surface 310 is 50mm ± 2.5mm, and the 6th is bent
The radius of curvature R 6 in face 320 is-50mm ± 2.5mm.Distance on optical axis 20 between 4th curved surface 220 and the 5th curved surface 310
d45For 1mm ± 0.05mm, incident beam has preferably after first lens the 100, second lens 200 and the 3rd lens 300
Focusing.The most in the present embodiment, the radius of curvature R 1 of first surface 110 is-30mm, the radius of curvature of the second curved surface 120
R2 is 8mm, and the radius of curvature R 3 of the 3rd curved surface 210 is 120mm, and the radius of curvature R 4 of the 4th curved surface 220 is 40mm, the 5th curved surface
The radius of curvature R 5 of 310 is 50mm, and the radius of curvature R 6 of the 6th curved surface 320 is-50mm, the 4th curved surface 220 and the 5th curved surface 310
Between distance D on optical axis 2045For 1mm.
As it is shown in figure 1, wherein in an embodiment, first lens 100 center thickness d1 on optical axis 20 be 2mm ±
0.1mm.Second lens 200 center thickness d2 on optical axis 20 is 3mm ± 0.15mm.3rd lens 300 are on optical axis 20
Center thickness d3 is 6mm ± 0.3mm.The most in the present embodiment, first lens 100 center thickness d1 on optical axis 20 is
2mm, second lens 200 center thickness d2 on optical axis 20 is 3mm, the 3rd lens 300 center thickness d3 on optical axis 20
For 6mm.
Wherein in an embodiment, (Abbe number is Germany for refractive index Nd1 of the material of the first lens 100 and Abbe number
Physicist Ernest & Whitney. physics's number of Abbe invention, also referred to as " V-number ".Abbe number is used for weighing the dispersion journey of the light of medium
Degree) ratio of Vd1 is 1.4/67 ± 0.07/67, refractive index Nd2 of the material of the second lens 200 with the ratio of Abbe number Vd2 is
1.4/67 ± 0.07/67, refractive index Nd3 of the material of the 3rd lens 300 and the ratio of Abbe number Vd3 are 1.4/67 ± 0.07/
67, make incident beam less through the dispersion of first lens the 100, second lens 200 and the 3rd lens 300.Specifically, in this reality
Execute in example, refractive index Ndn (n is 1 or 2 or 3) of the material of first lens the 100, second lens 200 and the 3rd lens 300 and Ah
The ratio of shellfish number Vdn is 1.4/67.
Wherein in an embodiment, the Entry pupil diameters expanding assembly 10 is 3.3mm.Wherein in an embodiment, expand
The multiple that expands of tread assembly 10 is 6.Wherein in an embodiment, at optical axis 20 between the second curved surface 120 and the 3rd curved surface 210
On distance D23For 63.8mm ± 3.19mm, the wavelength of incident beam is 1064nm, now expands assembly 10 and can be to wavelength
The incident beam of 1064nm expands.Specifically, in the present embodiment, at light between the second curved surface 120 and the 3rd curved surface 210
Distance D on axle 2023For 63.8mm, now expanding assembly 10 preferably can expand the incident beam that wavelength is 1064nm
Bundle.
Wherein in an embodiment, distance D on optical axis 20 between the second curved surface 120 and the 3rd curved surface 21023For
62.2mm ± 3.11mm, the wavelength of incident beam is 532nm, and now expanding assembly 10 can be the incident beam of 532nm to wavelength
Expand.Specifically, in the present embodiment, distance D on optical axis 20 between the second curved surface 120 and the 3rd curved surface 21023For
62.2mm, now expanding assembly 10 preferably can expand the incident beam that wavelength is 532nm.
Wherein in an embodiment, distance D on optical axis 20 between the second curved surface 120 and the 3rd curved surface 21023For
60mm ± 3mm, the wavelength of incident beam is 355nm, and now expanding assembly 10 can expand the incident beam that wavelength is 355nm
Bundle.Specifically, in the present embodiment, distance D on optical axis 20 between the second curved surface 120 and the 3rd curved surface 21023For 60mm,
Now expand assembly 10 can the incident beam that wavelength is 355nm preferably be expanded.
Following table is the specific design parameter value of the preferred embodiment expanding assembly 10.
By to the first lens 100 and the second lens 200 space D on optical axis 2023It is adjusted, i.e. to the second curved surface
120 and the 3rd distances D on optical axis 20 between curved surface 21023Being adjusted, expanding assembly 10 can be to incident beam
The multiplying powers such as the laser beam realization of 1064nm or 532nm or 355nm equiwavelength expand.Work as D23During for 63.8mm, expanding assembly 10 can
Expand so that the wavelength incident beam as 1064nm is carried out 6 times.Work as D23During for 62.2mm, expanding assembly 10 can be to wavelength
The incident beam of 532nm carries out 6 times and expands.Work as D23During for 60mm, expanding assembly 10 can be the incident beam of 355nm to wavelength
Carry out 6 times to expand.Expand assembly 10 according to above-mentioned parameter designing, be possible not only to the expansion of the incident beam of compatible multi-wavelength
Bundle, thereby may be ensured that preferable incident beam quality, can obtain ideal focal beam spot simultaneously, and then ensure laser
The precision of process equipment and efficiency.
Fig. 3 shows that the wavelength of incident beam is 1064nm MTF (Modulation after expanding assembly 10 and expanding
Transfer Function, modulation transfer function (MTF)) figure.Fig. 4 shows that the wavelength of incident beam is that 532nm is through expanding assembly
10 expand after MTF figure.Fig. 5 shows that the wavelength of incident beam is 355nm MTF figure after expanding assembly 10 and expanding.As
Shown in Fig. 3 to Fig. 5, the grazing of curve is all preferable, and the uniformity of the imaging i.e. expanding assembly 10 edge and center is preferable, expands
Assembly 10 is respectively provided with higher resolution after expanding for the incident beam of wavelength respectively 1064nm or 532nm or 355nm
Rate, meets the processing request of laser process equipment.As shown in Figure 6 to 8, wavelength is respectively 1064nm's or 532nm or 355nm
The distribution of incident beam all light speckles in 0 ° of angle of visual field direction, wavelength respectively 1064nm or 532nm or 355nm enters
The irradiating light beam all actual light speckles in 0 ° of angle of visual field direction are respectively positioned in preferable hot spot circle, show that wavelength is respectively 1064nm
Or the incident beam of 532nm or 355nm is the highest through the image quality expanding assembly 10.Fig. 9 to Figure 11 respectively illustrates wavelength
For the incident beam of 1064nm, 532nm and 355nm Ray fan figure after expanding assembly 10 and expanding.Ray fan figure is referred to as
Light sector diagram, is also called light difference figure, and Ray fan figure differs for quantitative analysis light.As shown in Figures 9 to 11, wavelength
For the incident beam of 1064nm or 532nm or 355nm after expanding assembly 10 and being adjusted, the hot spot of the regulation light beam of output
Concordance preferable, further demonstrated that expand assembly 10 the incident beam for different wave length compatible preferably, i.e. expand
Tread assembly 10 adaptability is preferable.
Wherein in an embodiment, laser process equipment also includes focus pack (not shown), focus pack position
In expanding the assembly 10 side away from laser instrument, regulation light beam injects focus pack, and regulation light beam is focused by focus pack
And export focusing light beam.In the present embodiment, focus pack is arranged at the rear end expanding assembly 10, and regulation light beam is through over-focusing group
Part is focused, to obtain preferable focal beam spot.
Above-mentioned expands assembly 10 and has this laser process equipment expanding assembly 10, and it is saturating that incident beam exposes to first
On mirror 100 first side, major part incident beam is refracted into from the first side of the first lens 100 and from the first lens 100
The second side on refraction and go out.Expose on the first side of the second lens 200 by the incident beam of the first lens 100,
Major part is refracted into and from the second lens 200 from the first side of the second lens 200 by the incident beam of the first lens 100
The second side on refraction and go out.By that analogy, by the incident beam major part of the first lens 100 by the 3rd lens 300,
Finally it is focused into the outgoing beam that beam diameter is thinner.Due to the first lens 100 and the second lens 200 can relative movement,
One lens 100 and the 3rd lens 300 can relative movement, and the second lens 200 and the 3rd lens 300 geo-stationary, during use
Can regulate between the distance between the first lens 100 and the second lens 200, and regulation the first lens 100 and the 3rd lens 300
Distance, i.e. can regulate the spacing between the second side of the first lens 100 and the first side of the second lens 200, with reality
The incident beam of existing different wave length etc. multiplying power expand.
Expand in the high-power laser instrument of the incident beam that assembly 10 can also be applied to different wave length, thus above-mentioned
Expanding the strong adaptability of assembly 10, range of application is wider.Owing to above-mentioned expands the simple and compact for structure, easy to adjust of assembly 10
And the space that takies is less, is advantageously implemented the miniaturization of laser process equipment.Additionally, the first lens 100 are negative thoroughly for double concave type
Mirror, for dissipating parallel incident beam.Second lens 200 are curved month type minus lens, for removing by the first lens 100
Aberration in incident beam.3rd lens 300 are biconvex plus lens, for by the incident beam by the second lens 200
Light pool directional light further, so that the collimation of the light of the outgoing beam after Ju Jiaoing is preferable.
Each technical characteristic of embodiment described above can combine arbitrarily, for making description succinct, not to above-mentioned reality
The all possible combination of each technical characteristic executed in example is all described, but, as long as the combination of these technical characteristics is not deposited
In contradiction, all it is considered to be the scope that this specification is recorded.
Embodiment described above only have expressed the several embodiments of the present invention, and it describes more concrete and detailed, but also
Can not therefore be construed as limiting the scope of the patent.It should be pointed out that, come for those of ordinary skill in the art
Saying, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement, these broadly fall into the protection of the present invention
Scope.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (10)
1. one kind expands assembly, it is characterised in that include along incident beam transmission direction set gradually the first lens, second
Lens and the 3rd lens, described first lens and described second lens can relative movement, described first lens and described the
Three lens can relative movement, and described second lens and described 3rd lens geo-stationary；Described first lens are double concave type
Minus lens, described second lens are curved month type minus lens, and described 3rd lens are biconvex plus lens.
The most according to claim 1 expand assembly, it is characterised in that described first lens to be respectively provided on two sides with first bent
Face and the second curved surface, described first surface away from described second lens, described second curved surface adjacent to described second lens, described
The radius of curvature of one curved surface is-30mm ± 1.5mm, and the radius of curvature of described second curved surface is 8mm ± 0.4mm；
Described second lens be respectively provided on two sides with the 3rd curved surface and the 4th curved surface, described 3rd curved surface is adjacent to described second bent
Face, described 4th curved surface is adjacent to described 3rd lens, and the radius of curvature of described 3rd curved surface is 120mm ± 6mm, and the described 4th is bent
The radius of curvature in face is 40mm ± 2mm；
Described 3rd lens be respectively provided on two sides with the 5th curved surface and the 6th curved surface, described 5th curved surface is adjacent to described 4th bent
Face, described 6th curved surface is away from described 4th curved surface, and the radius of curvature of described 5th curved surface is 50mm ± 2.5mm, and the described 6th
The radius of curvature of curved surface is-50mm ± 2.5mm；Between described 4th curved surface and described 5th curved surface, the distance on optical axis is
1mm±0.05mm。
The most according to claim 2 expand assembly, it is characterised in that described first lens center thickness on optical axis is
2mm±0.1mm；Described second lens center thickness on optical axis is 3mm ± 0.15mm；Described 3rd lens are on optical axis
Center thickness is 6mm ± 0.3mm.
The most according to claim 3 expand assembly, it is characterised in that described first lens, described second lens and described
The refractive index of the material of the 3rd lens and the ratio of Abbe number are 1.4/67 ± 0.07/67.
The assembly that expands the most according to claim 2, between described second curved surface and described 3rd curved surface on optical axis away from
From for 63.8mm ± 3.19mm, the wavelength of described incident beam is 1064nm.
The assembly that expands the most according to claim 2, between described second curved surface and described 3rd curved surface on optical axis away from
From for 62.2mm ± 3.11mm, the wavelength of described incident beam is 532nm.
The assembly that expands the most according to claim 2, between described second curved surface and described 3rd curved surface on optical axis away from
From for 60mm ± 3mm, the wavelength of described incident beam is 355nm.
8. according to expanding assembly described in any one of claim 1 to 7, described in expand the multiple that expands of assembly be 6.
9. a laser process equipment, it is characterised in that include expanding group described in laser instrument and any one of claim 1 to 8
Part, described laser instrument produce described incident beam, described incident beam inject described in expand assembly, described in expand assembly regulation institute
State incident beam and export regulation light beam.
Laser process equipment the most according to claim 9, also includes that focus pack, described focus pack are positioned at described expansion
Tread assembly injects described focus pack away from the side of described laser instrument, described regulation light beam, and described focus pack is to described tune
Joint light beam is focused and exports focusing light beam.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610726567.6A CN106199983B (en) | 2016-08-25 | 2016-08-25 | It expands component and expands the laser process equipment of component with this |
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| CN201610726567.6A CN106199983B (en) | 2016-08-25 | 2016-08-25 | It expands component and expands the laser process equipment of component with this |
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| CN106199983A true CN106199983A (en) | 2016-12-07 |
| CN106199983B CN106199983B (en) | 2018-11-13 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN110198794A (en) * | 2017-06-01 | 2019-09-03 | 大族激光科技产业集团股份有限公司 | Laser cleaning camera lens |
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| CN108508614A (en) * | 2017-02-23 | 2018-09-07 | 常州巴斯光年激光科技有限公司 | A kind of continuous multiplying power beam-expanding system of infrared laser suitable for 1064nm wavelength |
| CN108508614B (en) * | 2017-02-23 | 2024-05-03 | 常州巴斯光年激光科技有限公司 | Infrared laser continuous multiplying power beam expanding system suitable for 1064nm wavelength |
| CN110198794A (en) * | 2017-06-01 | 2019-09-03 | 大族激光科技产业集团股份有限公司 | Laser cleaning camera lens |
| CN110198794B (en) * | 2017-06-01 | 2022-02-18 | 大族激光科技产业集团股份有限公司 | Laser cleaning lens |
| CN110181179A (en) * | 2019-05-31 | 2019-08-30 | 大族激光科技产业集团股份有限公司 | Laser cutting device and laser cutting method |
| CN110181179B (en) * | 2019-05-31 | 2021-12-14 | 大族激光科技产业集团股份有限公司 | Laser cutting equipment and laser cutting method |
| US11931827B2 (en) | 2019-05-31 | 2024-03-19 | Han's Laser Technology Industry Group Co., Ltd. | Laser cutting device and laser cutting method |
| CN115032806A (en) * | 2022-04-22 | 2022-09-09 | 北京遥测技术研究所 | Multi-wavelength laser beam expanding method and beam expanding system |
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