CN112960643A - MEMS micro-mirror high-temperature reliability test method based on optical rotation angle measuring device - Google Patents
MEMS micro-mirror high-temperature reliability test method based on optical rotation angle measuring device Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
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Abstract
An MEMS micromirror to be tested is placed in a high-low temperature test box, a reflecting mirror surface of the micromirror is adjusted to be parallel to an observation window, the distance between the observation window and an MEMS micromirror packaging glass sheet is measured, an optical rotation angle measuring device is installed, a laser is turned on, a laser emergent point falls on a focus of a collimating lens, a divergence angle of an emergent laser beam is reduced by utilizing the light convergence characteristic of a convex lens, the relative pose relation of a front end mechanism and a rear end mechanism is adjusted by adjusting the screwing-in and screwing-out degrees of a double-head reverse fine tuning screw rod, the collimated laser vertically enters the observation window and is aligned to an MEMS micromirror working reflecting mirror surface, the optical scanning length of the MEMS micromirror is read on a light screen coordinate paper by utilizing the optical rotation angle measuring device, and the optical rotation angle of the MEMS to be tested is calculated by a trigonometric function relation. The invention has the advantages of convenient realization, high reliability and easy production and processing of the detection mechanism.
Description
Technical Field
The invention relates to a measuring device in the field of Micro Electro Mechanical Systems (MEMS), in particular to an optical corner measuring device applied to a high-temperature reliability test of an MEMS micro-mirror and a testing method thereof.
Background
The existing MEMS micro-mirror has the advantages of low power consumption, low cost, high response speed, flexible beam control and the like, and shows wide development space in the field of automobile radars. The temperature reliability is an important component in a reliability test, and the laser deflection capability can be used as an index for measuring the reliability of the MEMS micro-mirror.
The existing MEMS micro-mirror optical rotation angle detection means basically rely on a piezoresistive strain sensor on a micro-mirror fast-slow axis beam, but the response output of the piezoresistive strain sensor is also influenced by the external temperature. When the high-temperature reliability of the MEMS micro-mirror is tested, the environment temperature is high, and at the moment, the monitoring information of the piezoresistive strain sensor is not reliable any more and cannot be used as the observation index of the performance of the micro-mirror sample.
Disclosure of Invention
The invention provides an MEMS micro-mirror reliability testing method based on an optical corner measuring device, aiming at the defects and the defects that in the existing temperature reliability test, an MEMS micro-mirror needs to be placed in a closed high-low temperature experiment box for experiment, the working condition of a current test sample can only be observed through an observation window on the MEMS micro-mirror, and the current optical deflection information of the MEMS micro-mirror cannot be quantitatively analyzed, and the MEMS micro-mirror reliability testing method is convenient to realize, high in reliability and easy to produce and process a detection mechanism.
The invention is realized by the following technical scheme:
the invention relates to a method for testing the reliability of an MEMS micro-mirror based on an optical rotation angle measuring device, which comprises the steps of placing the MEMS micro-mirror to be tested in a high-low temperature test box, adjusting the reflecting mirror surface of the micro-mirror to be parallel to the observation window, measuring the distance between the observation window and the MEMS micro-mirror packaging glass sheet, installing an optical rotation angle measuring device and turning on a laser, so that the laser emergent point falls on the focus of the collimating lens, the divergence angle of the emergent laser beam is reduced by utilizing the light convergence characteristic of the convex lens, the relative pose relationship of the front end mechanism and the rear end mechanism is adjusted by adjusting the screwing-in and screwing-out degrees of the double-head reverse fine adjustment screw rod, so that the collimated laser is vertically incident to the observation window and is aligned to the working reflection mirror surface of the MEMS micromirror, the optical scanning length of the MEMS micromirror is read on the optical screen coordinate paper by using an optical rotation angle measuring device, and the optical rotation angle of the tested MEMS micromirror is calculated by a trigonometric function relational expression.
And (4) measuring at least three times and taking an average value.
The optical rotation angle measuring device comprises: front end mechanism, rear end mechanism and both ends respectively with front end mechanism and rear end mechanism swing joint's reverse fine setting double-screw bolt subassembly of double-end, wherein: the front end mechanism is arranged on an observation window of the high-low temperature test box.
The front end mechanism comprises: ya keli light screen, light trap, coordinate paper and support frame, wherein: coordinate paper sets up in ya keli optical screen one side in order to form the reflection laser reception optical screen that has the scale, support frame and yakeli optical screen have the one end swing joint of coordinate paper one side bonding when with the reverse fine setting double-screw bolt subassembly of double-end.
The backend mechanism include: centre gripping base member, collimating lens, laser instrument, holding screw and lens clamp plate, wherein: the lens pressing plate and the clamping base body are coaxially arranged, the collimating lens is arranged in the middle of the lens pressing plate, and the upper semicircular pressing plate and the lower semicircular pressing plate are fastened by the pressing bolt so as to fix the collimating lens; the laser is arranged in the clamping base body movably connected with the double-end reverse fine tuning stud component, and laser emitted by the laser is incident in a centering way at the focal point position of the collimating lens and converged by the convex lens, so that the aim of reducing the divergence angle of the laser is fulfilled.
The reverse fine setting screw rod subassembly of double-end include: compared with the common stud, the double-end reverse fine-tooth stud can realize that two ends of the stud are screwed in or out simultaneously in the front end mechanism and the rear end mechanism, and the adjusting speed of the distance between the front device and the rear device is improved.
The bonding is carried out by adopting cyanoacrylate adhesive.
The center of the acrylic light screen is provided with a light hole, and the radius of the light hole is preferably 1 mm.
And the front end mechanism is provided with coordinate paper as a reflected laser receiving light screen so as to obtain the current optical scanning length of the MEMS micro-mirror.
The laser is fixed in the clamping base body through four set screws, the change of the space position of the laser can be realized by adjusting the screwing degrees of the four set screws, and the adjustability of the four set screws allows the device to be matched with lasers with different models and diameters.
The clamping base body adopts a circular sleeve structure.
The sleeve is provided with four threaded holes which are distributed at intervals of 90 degrees along the circumferential direction.
The lens pressing plate is composed of two semicircular pressing plates.
The four double-head reverse fine-tooth studs can not only adjust the distance between the front and rear devices, but also adjust the pitching degree of the front and rear end mechanisms, thereby realizing larger stroke and more efficient relative pose adjustment in a limited motion space.
The double-head reverse fine adjustment screw rods preferably adopt fine threads.
Technical effects
The invention integrally solves the technical problem of measuring the optical rotation angle of the MEMS micromirror in a high-temperature reliability test. The high-temperature test environment can cause the built-in piezoresistive strain sensor of the MEMS micro-mirror to drift, and the optical rotation angle of the current micro-mirror sample cannot be measured.
Compared with the prior art, the invention can measure the optical rotation angle of the MEMS micro-mirror in real time from the outside of the high-low temperature test chamber in a normal temperature environment, and quantitatively evaluate the performance of the current test sample. The adopted testing device has simple structure and low processing cost and is easy to realize; the device has strong universality, can simply measure the laser deflection capability of a micromirror sample for high-temperature reliability test, and can also test the optical deflection angle of the MEMS micromirror in an open environment; the device and the corresponding trigonometric relation can accurately acquire the optical rotation angles of the MEMS micro-mirror in the current two directions.
The device adopts a mechanical structure with fine adjustment, and the observation window of the incident laser vertical incidence high-low temperature test box can be ensured by manual adjustment, so that the laser alignment difficulty in the optical rotation angle measurement process is reduced, and the accuracy and the reliability of a high-temperature reliability test are improved. In addition, the convex lens in the device can effectively reduce the divergence angle of the laser beam and obtain the incident laser beam with smaller divergence angle, so that the edge of a scanning pattern formed on the light screen by the laser reflected by the micro-mirror is clearer, the accurate optical scanning length can be measured, and the high-temperature reliability test result of the MEMS micro-mirror is more convincing.
Drawings
FIG. 1 is a perspective view of the present invention;
figure 2 is an assembly explosive body of the present invention;
FIG. 3 is a schematic diagram of the front end mechanism of the present invention;
FIG. 4 is a schematic view of the present invention stud;
FIG. 5 is a schematic view of the backend mechanism of the present invention;
FIG. 6 is a schematic diagram of the optical rotation angle calculation of the present invention;
FIG. 7 is a schematic diagram illustrating the effects of the embodiment;
in the figure: the device comprises an observation window 1, a light-transmitting opening (light screen) 2, a support frame 3, an acrylic light screen 4, a collimating lens 5, a double-headed reverse stud 6, a right-handed thread 6.1, a left-handed thread 6.2, a fine-tuning coded disc 6.3, a clamping base body 7, a laser 8, a set screw 9, a lens pressing plate 10 and a compression bolt nut 11.
Detailed Description
As shown in fig. 1, the present embodiment relates to a method for testing high temperature optical performance of a MEMS micro-mirror based on an optical rotation angle measuring device, which specifically includes the following steps:
1) pasting the coordinate paper to 4 one sides of ya keli optical screen flatly, pasting the in-process and guaranteeing that the coordinate paper is well laminated with the optical screen, do not have arch and fold.
2) Assembling the front end mechanism, the rear end mechanism and the double-head reverse fine-tuning stud component together, wherein one end of each double-head reverse fine-thread stud is screwed into a support frame of the front end mechanism, and the other end of each double-head reverse fine-thread stud is screwed into a clamping base body of the rear end mechanism. And adjusting the precession degree of the four studs, and preliminarily adjusting the relative poses of the front and rear devices.
The device can accommodate lasers with diameters of 9-15 mm.
3) One side of the acrylic optical screen 4, which is not adhered with the coordinate paper, is adhered to the observation window 1 of the experimental box through acrylic adhesive, and the optical screen of the coordinate paper is ensured not to deflect in the fixing process.
4) The laser 8 is inserted into the clamping base body 7, a power switch of the laser 8 is turned on, the laser emergent point falls on the focus of the collimating lens 5 by adjusting the screwing degree of the four set screws 9, the adjusting process is judged by observing light spots falling on the light screen 4, when a round light spot with clear edge and high brightness can be observed on the light screen 4, the position adjustment of the laser 8 is proved to be finished, the alignment of the laser 8 and the lens 5 is successful, and the adjusting process is finished.
5) After the centering is successful, the relative pose relationship between the rear end mechanism and the front end mechanism is adjusted by respectively adjusting the precession degrees of the four double-headed fine-tuning reverse studs 6. As the diameter of the light hole 2 is small enough, when the light spot observed in the previous step cannot be observed on the coordinate paper, the fact that the laser beam vertically penetrates through the light hole at the moment is proved, the relative pose adjustment of the front device and the rear device is successful, the vertical adjustment process is finished, the laser achieves the dissipation effect through the light convergence effect of the collimating lens 5, the laser vertically enters the observation window 1 and is output to the reflector of the MEMS micromirror, the MEMS micromirror is driven, and the high-temperature reliability test is started.
6) And measuring the distance between the mirror surface of the MEMS micro-mirror to be measured and the light screen, and recording the distance as D. Reading the scanning length of the reflected laser on the optical screen coordinate paper, as shown in fig. 6, recording the laser scanning length L in two directions, and calculating the mechanical rotation angle of the current MEMS micromirror to be measured according to the trigonometric relation: as can be seen from fig. 6, the optical scanning length L and the distance D from the light screen to the MEMS micro-mirror sample form a right triangle, in which the mechanical rotation angle α of the MEMS micro-mirror to be measured is equal to the acute angle θ of the right triangle, wherein L, D can be measured, and the mechanical rotation angle of the MEMS micro-mirror to be measured is obtained
The deviation performance of the MEMS micromirror to be measured under a certain specific working condition can be obtained by recording the curve of the laser scanning length L changing along with time and combining the above formulaCurve, i.e., α -t curve, is normalized to evaluate the temperature reliability of the micromirror.
Through concrete actual experiment, carry out the high temperature reliability experiment to MEMS micromirror in 150 ℃ temperature test box, select wavelength to be 660nm ruddiness diode as laser source, lens focal length is 15mm, adjust whole measuring device according to above-mentioned step and test, the experimental data that can obtain is: the laser scanning length L in the horizontal and vertical directions on the optical screen is increased along with the test time, so as to obtain the FOV field angle of the MEMS micromirror, and partial test results are shown in fig. 7, from which it can be known that the laser deflection performance of the MMES micromirror to be tested does not significantly degrade within 230 hours of the test.
Compared with the prior art, the method can directly read the current laser scanning length through the coordinate paper on the optical screen; the divergence angle of the laser is reduced by the converging function of the convex lens; reduced difficulty of angle of incidence adjustment using fine mechanical structures; the mechanical rotation angle of the current sample can be obtained through a simple trigonometric mathematical relation, so that the deflection performance of the MEMS micro-mirror to be measured can be accurately evaluated.
The foregoing embodiments may be modified in many different ways by those skilled in the art without departing from the spirit and scope of the invention, which is defined by the appended claims and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Claims (9)
1. A MEMS micro-mirror reliability test method based on an optical rotation angle measuring device is characterized in that an MEMS micro-mirror to be tested is placed in a high-low temperature test box, adjusting the reflecting mirror surface of the micro-mirror to be parallel to the observation window, measuring the distance between the observation window and the MEMS micro-mirror packaging glass sheet, installing an optical rotation angle measuring device and turning on a laser, so that the laser emergent point falls on the focus of the collimating lens, the divergence angle of the emergent laser beam is reduced by utilizing the light convergence characteristic of the convex lens, adjusting the relative pose relationship of the front end mechanism and the rear end mechanism by adjusting the screwing-in and screwing-out degrees of the double-end reverse fine adjustment screw rod to enable the collimated laser to vertically enter the observation window and align the MEMS micromirror working reflection mirror surface, reading the optical scanning length of the MEMS micromirror on a light screen coordinate paper by using an optical rotation angle measuring device, and calculating the optical rotation angle of the tested MEMS micromirror by a trigonometric function relational expression;
the optical rotation angle measuring device comprises: front end mechanism, rear end mechanism and both ends respectively with front end mechanism and rear end mechanism swing joint's reverse fine setting double-screw bolt subassembly of double-end, wherein: the front end mechanism is arranged on an observation window of the high-low temperature test box.
2. The method as claimed in claim 1, wherein the front end mechanism comprises: ya keli light screen, light trap, coordinate paper and support frame, wherein: coordinate paper sets up in ya keli optical screen one side in order to form the reflection laser reception optical screen that has the scale, support frame and yakeli optical screen have the one end swing joint of coordinate paper one side bonding when with the reverse fine setting double-screw bolt subassembly of double-end.
3. The method as claimed in claim 1, wherein the backend mechanism comprises: centre gripping base member, collimating lens, laser instrument, holding screw and lens clamp plate, wherein: the lens pressing plate and the clamping base body are coaxially arranged, the collimating lens is arranged in the middle of the lens pressing plate, and the upper semicircular pressing plate and the lower semicircular pressing plate are fastened by the pressing bolt so as to fix the collimating lens; the laser is arranged in the clamping base body movably connected with the double-end reverse fine tuning stud component, and laser emitted by the laser is incident in a centering way at the focal point position of the collimating lens and converged by the convex lens, so that the aim of reducing the divergence angle of the laser is fulfilled.
4. The MEMS micro-mirror reliability testing method based on the optical rotation angle measuring device as claimed in claim 1, wherein the double-headed reverse fine tuning screw assembly comprises: compared with the common stud, the double-end reverse fine-tooth stud can realize that two ends of the stud are screwed in or out simultaneously in the front end mechanism and the rear end mechanism, and the adjusting speed of the distance between the front device and the rear device is improved.
5. The MEMS micro-mirror reliability test method based on the optical rotation angle measuring device as claimed in claim 2, wherein a light hole is formed at the center of the acrylic light screen, and the radius of the light hole is 1 mm.
6. The method as claimed in claim 1, 2 or 4, wherein the front end mechanism is provided with a coordinate paper as a reflected laser receiving screen to obtain the current optical scanning length of the MEMS micro-mirror.
7. The method as claimed in claim 3, wherein the laser is fixed in the clamping substrate by four set screws, the spatial position of the laser can be changed by adjusting the degree of screwing of the four set screws, and the adjustability of the four set screws allows the device to match lasers of different models and diameters.
8. The MEMS micromirror reliability test method according to claim 3, wherein the lens pressing plate is composed of two semicircular pressing plates.
9. The MEMS micromirror reliability testing method based on the optical rotation angle measuring device as claimed in claim 1, wherein the concrete steps include:
1) flatly pasting the coordinate paper to one side of the acrylic optical screen, and ensuring that the coordinate paper is well attached to the optical screen without bulges and wrinkles in the pasting process;
2) assembling a front end mechanism, a rear end mechanism and a double-headed reverse fine-tuning stud component together, wherein one end of each of four double-headed reverse fine-thread studs is screwed into a support frame of the front end mechanism, and the other end of each of the four double-headed reverse fine-thread studs is screwed into a clamping base body of the rear end mechanism; adjusting the precession degree of the four studs, and preliminarily adjusting the relative poses of the front and rear devices;
3) one side of the acrylic optical screen, which is not adhered with the coordinate paper, is adhered to an observation window of the experiment box through acrylic adhesive, and the optical screen of the coordinate paper needs to be ensured not to deflect in the fixing process;
4) inserting a laser into the clamping base body, turning on a power switch of the laser, enabling a laser emergent point to fall on a focus of the collimating lens by adjusting the screwing-in degree of four set screws, judging by observing light spots falling on a light screen in the adjusting process, and when circular light spots with clear edges and high brightness can be observed on the light screen, proving that the position adjustment of the laser is finished, the alignment of the laser and the lens is successful, and ending the adjusting process;
5) after the centering is successful, the relative pose relationship between the rear end mechanism and the front end mechanism is adjusted by respectively adjusting the precession degrees of the four double-headed fine-tuning reverse studs; the diameter of the light hole is small enough, so that when the light spot observed in the previous step cannot be observed on the coordinate paper, the fact that the laser beam vertically penetrates through the light hole at the moment is proved, the relative pose adjustment of the front device and the rear device is successful, the vertical adjustment process is finished, the laser achieves the dissipation effect through the light convergence effect of the collimating lens at the moment, the laser vertically enters the observation window and is output to the reflector of the MEMS micromirror, the MEMS micromirror is driven, and the high-temperature reliability test is started;
6) measuring the distance between the mirror surface of the MEMS micro-mirror to be measured and the light screen, and recording the distance as D; reading the scanning length of the laser reflected on the light screen coordinate paper, recording the laser scanning length L in two directions, and calculating the mechanical rotation angle of the current MEMS micro-mirror to be tested through a trigonometric relation, namely the mechanical rotation angle of the MEMS micro-mirror to be tested
Wherein: d is the distance from the light screen to the MEMS micro-mirror sample, and theta is an acute angle in a right-angled triangle; the deflection performance degradation curve, namely an alpha-t curve, of the MEMS micromirror to be measured under a certain specific working condition can be obtained by recording the curve of the laser scanning length L changing along with time and combining the above formula, so that the temperature reliability of the micromirror can be evaluated.
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Citations (4)
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|---|---|---|---|---|
| US20020135748A1 (en) * | 2001-03-23 | 2002-09-26 | Automatic Timing & Controls, Inc. | Adjustable mirror for collimated beam laser sensor |
| CN206876579U (en) * | 2017-05-09 | 2018-01-12 | 浙江大学 | A kind of simple light beam focuses on strengthening system |
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| CN110514595A (en) * | 2019-08-28 | 2019-11-29 | 中国科学院长春光学精密机械与物理研究所 | Optical measuring device with Beam Control function |
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2021
- 2021-02-25 CN CN202110209567.XA patent/CN112960643B/en active Active
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|---|---|---|---|---|
| US20020135748A1 (en) * | 2001-03-23 | 2002-09-26 | Automatic Timing & Controls, Inc. | Adjustable mirror for collimated beam laser sensor |
| CN206876579U (en) * | 2017-05-09 | 2018-01-12 | 浙江大学 | A kind of simple light beam focuses on strengthening system |
| CN109540803A (en) * | 2019-01-04 | 2019-03-29 | 北京环境特性研究所 | A kind of ellipsometer device and the detection method based on the device |
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