CN112630193A - Angle modulation type SPR sensor based on digital micromirror device and SPR detection equipment - Google Patents
Angle modulation type SPR sensor based on digital micromirror device and SPR detection equipment Download PDFInfo
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Abstract
The invention provides an angle modulation type SPR sensor based on a digital micromirror device and SPR detection equipment, which comprise a transmitting module, a modulating module, a detecting module and a first receiving module, wherein the transmitting module comprises a light source, the transmitting module is used for generating detection light, the modulating module comprises the digital micromirror device and a focusing lens, the digital micromirror device is used for reflecting the detection light, the detecting module comprises a detecting pool, a metal layer and a prism, the metal layer is arranged on the detecting pool, the prism is arranged on the metal layer, the first receiving module comprises a first receiver, and the detection light sequentially passes through the digital micromirror device, the focusing lens and the detecting module to enter the first receiving module. The digital micromirror device is adopted for angle modulation, the digital micromirror device comprises a reflection array consisting of a plurality of micromirrors, the micromirrors can rapidly switch on-off states, and the digital micromirror device can improve the angle modulation speed of the angle modulation type SPR sensor based on the digital micromirror device.
Description
Technical Field
The invention relates to the field of sensor research, in particular to an angle modulation type SPR sensor based on a digital micromirror device and SPR detection equipment.
Background
Surface Plasmon Resonance (SPR) is a physical optical phenomenon, which is an optical technique for characterizing the change of Surface refractive index coefficient, and the SPR technique can be used to observe the Surface phenomena such as the interaction between molecules and the formation of a thin film in real time. Surface Plasmon (SP) refers to an electromagnetic wave that propagates along a surface between a metal and a dielectric. When a metal film of dozens of nanometers exists between the two medium interfaces, the P polarization component of evanescent waves generated by total reflection enters the metal film and interacts with free electrons in the metal film to generate surface plasma, and under the condition that the incident angle or the wavelength is a certain proper value, the surface plasma and the evanescent waves resonate, so that light energy is absorbed, and the energy of reflected light is rapidly reduced.
The SPR detection technique has been widely used in the research fields of life science, biology, pharmacology, analytical chemistry, etc. as a high-precision, label-free, real-time responsive detection means. The SPR detection technology has the characteristics of capability of detecting the interaction between biological molecules in real time, convenience, rapidness, higher resolution than that of the traditional method, no need of marking samples, less sample requirement and the like, is widely applied to the life science fields of proteomics, cell signal conduction, receptor/ligand, antibody/antigen molecule fishing, immune recognition, cancer research, new drug screening and the like, and is used for dynamically monitoring the interaction process of biological molecules such as protein/protein, protein/nucleic acid, new drug molecules/target protein and the like in real time.
The SPR sensor has three coupling modes, namely prism coupling, optical fiber coupling and grating coupling, and the Kretschmann sensor based on the prism coupling mode has the advantages of simple manufacture, convenient use, easy preparation of a sensing chip and the like, so the SPR sensor is widely adopted. The principle of angle modulation is that an angle scanning curve can be obtained by changing the angle between incident light and a normal and measuring the corresponding light intensity under different angles, the angle corresponding to the lowest light intensity point in the angle scanning curve is called as an SPR resonance angle, and the size of the SPR resonance angle is in direct proportion to the change of the surface refractive index coefficient of a measured sample.
The angle modulation type SPR sensor in the prior art generally adopts three modes of a mechanical scanning mode, a galvanometer scanning mode and a light beam converging mode to realize angle modulation. The mechanical scanning mode has the disadvantages of low angular resolution, slow scanning speed and no contribution to quick and real-time detection; compared with a mechanical scanning mode, the galvanometer scanning mode can obviously improve the scanning speed, but has high requirement on the synchronism between the control of an incident angle and the acquisition of an optical signal, and the larger the angle scanning range is, the higher the angle resolution is, and the lower the time resolution of measurement is; the light beam focusing mode has the advantages that all light intensity data in an angle range can be detected at one time, but a linear array CCD or an area array CCD detector is generally required, the angle resolution ratio is not high due to the limited detection area, and the dynamic range of the detected light intensity signal is narrow.
Disclosure of Invention
In view of the above-mentioned prior art, the present invention is directed to solving at least one of the problems in the prior art. Therefore, the invention provides an angle modulation type SPR sensor based on a digital micro-mirror device and SPR detection equipment.
The invention provides an angle modulation type SPR sensor based on a digital micromirror device, which comprises a transmitting module, a modulating module, a detecting module and a first receiving module, wherein the transmitting module comprises a light source, the transmitting module is used for generating detection light, the detection light is a collimated light beam in a horizontal polarization state, the modulating module comprises the digital micromirror device and a focusing lens, the digital micromirror device is used for reflecting the detection light, the digital micromirror device comprises a plurality of micromirrors for angle modulation, the detecting module comprises a detecting cell, a metal layer and a prism, the metal layer is arranged on the detecting cell, the prism is arranged on the metal layer, the first receiving module comprises a first receiver, and the detection light sequentially passes through the digital micromirror device, the focusing lens and the detecting module to enter the first receiving module.
According to the angle modulation type SPR sensor based on the digital micro-mirror device, at least the following technical effects are achieved: the digital micromirror device is adopted for angle modulation, because the digital micromirror device comprises a reflection array consisting of a plurality of micromirrors, each micromirror can rapidly switch the on-off state, the angle scanning is realized by time-sharing drive control of different row and column micromirrors in the digital micromirror device, and the digital micromirror device can be utilized to improve the angle modulation speed of the angle modulation type SPR sensor based on the digital micromirror device.
According to some embodiments of the invention, a plurality of sample channels are formed between the metal layer and the detection cells.
According to some embodiments of the invention, the first receiver employs a single point detector.
According to some embodiments of the invention, the first receiving module comprises a first collimating lens and a first converging lens, and the detection light passing through the detecting module sequentially passes through the first collimating lens and the first converging lens to enter the first receiver.
According to some embodiments of the present invention, a digital micromirror device-based angle modulation SPR sensor includes a second receiving module including a second receiver, and the modulation module includes a beam splitter for splitting sensing light into at least two beams, one of which enters the sensing module and the other of which enters the second receiving module.
According to some embodiments of the invention, the second receiver employs a single point detector.
According to some embodiments of the invention, the second receiving module comprises a second converging lens, the beam splitter is disposed between the digital micromirror device and the focusing lens, and a beam of detection light passing through the beam splitter enters the second receiver through the second converging lens.
According to some embodiments of the present invention, the emitting module includes a second aperture, and a polarizer, the detecting light emitted from the light source sequentially passes through the second aperture and the polarizer to enter the modulating module, the second aperture is configured to select the detecting light in a certain angle range, and the polarizer is configured to polarize the detecting light.
According to some embodiments of the present invention, the light source is an LED lamp, the emitting module includes a first diaphragm and a second collimating lens, and the detection light emitted by the LED lamp sequentially passes through the first diaphragm and the second collimating lens and enters the second diaphragm.
According to the SPR detection equipment provided by the invention, the angle modulation type SPR sensor based on the digital micro-mirror device provided by the invention is included.
According to the SPR detection device provided by the invention, at least the following technical effects are achieved: the digital micromirror device is adopted for angle modulation, because the digital micromirror device comprises a reflection array consisting of a plurality of micromirrors, each micromirror can rapidly switch the on-off state, the angle scanning is realized by time-sharing drive control of different row and column micromirrors in the digital micromirror device, and the digital micromirror device can be utilized to improve the angle modulation speed of the angle modulation type SPR sensor based on the digital micromirror device.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic diagram of an SPR sensor of the angle modulation type based on a digital micromirror device provided in accordance with the present invention;
FIG. 2 is a schematic diagram of a detection module provided in accordance with the present invention;
fig. 3 is a schematic view of a sample channel provided according to the present invention.
Reference numerals:
a light source 11, a second diaphragm 12, a polarizing plate 13, a first diaphragm 14, a second collimating lens 15,
A digital micromirror device 21, a focusing lens 22, a beam splitter 23,
A detection cell 31, a metal layer 32, a prism 33,
A first receiver 41, a first collimating lens 42, a first converging lens 43,
A second receiver 51, a second converging lens 53.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, the meaning of a plurality of means is one or more, the meaning of a plurality of means is two or more, and larger, smaller, larger, etc. are understood as excluding the number, and larger, smaller, inner, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
The SPR sensor based on the digital micromirror device comprises a transmitting module, a modulating module, a detecting module and a first receiving module, wherein the transmitting module comprises a light source 11, the transmitting module is used for generating detection light, the detection light is a collimated light beam with polarization, the modulating module comprises a digital micromirror device 21 and a focusing lens 22, the digital micromirror device 21 is used for reflecting the detection light, the digital micromirror device 21 comprises a plurality of micromirrors for angle modulation, the detecting module comprises a detecting cell 31, a metal layer 32 and a prism 33, the metal layer 32 is arranged on the detecting cell 31, the prism 33 is arranged on the metal layer 32, the first receiving module comprises a first receiver 41, and the detection light sequentially passes through the digital micromirror device 21, the focusing lens 22 and the detecting module to enter the first receiving module.
The Digital Micromirror Device 21(Digital Micromirror Device, DMD) is a spatial light modulation Device, and is composed of millions of independently controllable high-speed Digital light reflection switches, each light reflection switch includes a Micromirror, the Micromirror has two stable working states, the working states are determined by the geometric structure and the electrostatic characteristics of the Micromirror, the two working states respectively correspond to the on and off of the Micromirror, the incident light can be reflected to a target position when the Micromirror is on, the incident light cannot be reflected to the target position when the Micromirror is off, and the Micromirror can deflect back and forth between the two states, thereby realizing the light switch control function of a single pixel point.
When the device is used, the angle between the detection light reflected by the digital micromirror device 21 and the normal line is adjusted by selectively opening or closing the micromirror row or the micromirror column of the digital micromirror device 21, and the micromirror row or the micromirror column is sequentially opened, so that the angle scanning within the angle range can be realized, and the angle modulation of the detection light of the surface plasmon resonance is realized.
According to the angle modulation type SPR sensor based on the digital micro-mirror device, the digital micro-mirror device 21 is arranged, so that the working state of a micro-mirror can be rapidly changed by the digital micro-mirror device 21, and the angle modulation speed of the angle modulation type SPR sensor based on the digital micro-mirror device is improved. In addition, the digital micromirror device 21 is used for angle modulation, so that the components of the angle modulation SPR sensor based on the digital micromirror device do not need to move when adjusting the angle, the positions of all the components can be kept relatively fixed, and errors caused by the movement of the components can be avoided.
The detection module adopts a Kretschmann sensor structure, a sample is placed between the metal layer 32 and the detection cell 31, polarized detection light is irradiated onto the metal layer 32 through the prism 33, and the surface plasmon resonance phenomenon is excited by changing the incident angle of incident light. The prism 33 may be a semi-cylindrical prism or an isosceles triangular prism, for example, in some embodiments, as shown in fig. 1, the prism 33 is a semi-cylindrical prism, and the semi-cylindrical prism enables the detection light to enter and exit perpendicularly, thereby avoiding refraction of the detection light on the surface of the prism 33. In some embodiments, the metal layer 32 has a thickness of 50nm, and the metal layer 32 and the prism 33 are coupled together by a matching fluid, which can fill the gap of the contact surface, thereby improving the accuracy of the SPR sensor based on the dmd. In some embodiments, the metal layer 32 and the detection cell 31 are sealed by a sealing member, which can protect the sample and prevent leakage when the sample is in a liquid state.
According to some embodiments of the present invention, several sample channels are formed between the metal layer 32 and the detection cells 31. The plurality of sample channels enable the SPR sensor based on the angle modulation type of the digital micro-mirror device to realize multi-channel surface plasmon resonance detection. For example, as shown in fig. 3, several sample channels are arranged side by side in the detection cell, the digital micromirror device 21 is divided into a plurality of regions in the horizontal or vertical direction, each region corresponds to one channel, and the angle modulation of each channel is realized by turning on or off the micromirrors of each region.
In some prior art, the SPR sensor based on the dmd employs a CCD (Charge-Coupled Device) sensor, which is expensive. According to some embodiments of the present invention, first receiver 41 employs a single point detector. The single point detector may be a single channel sensor such as a photocell, photodiode, silicon photocell, or the like. The single-point detector can improve the dynamic measurement range and the signal-to-noise ratio of the light intensity signal and can also reduce the cost of the angle modulation type SPR sensor based on the digital micro-mirror device.
In some embodiments, the first receiving module includes a first collimating lens 42 and a first converging lens 43, and the detection light passing through the detecting module sequentially passes through the first collimating lens 42 and the first converging lens 43 and enters the first receiver 41. As shown in fig. 1, the divergent detection light passes through the first collimator lens 42 to become a collimated beam, and the first condensing lens 43 condenses the detection light onto the single-point detector.
According to some embodiments of the present invention, the SPR sensor based on the dmd includes a second receiving module including a second receiver 51, the modulating module includes a beam splitter 23, and the beam splitter 23 is configured to split the detecting light into at least two beams, wherein one beam enters the detecting module and the other beam enters the second receiving module. The second receiving module is used as a reference, and the ratio of the measurement results of the first receiver 41 and the second receiver 51 is used as a final response result, so that the influence of factors such as light source fluctuation and external noise on the measurement results can be eliminated, and the detection accuracy of the angle modulation type SPR sensor based on the digital micro-mirror device is improved.
In some embodiments, second receiver 51 employs a single point detector. In some embodiments, the second receiving module includes a second converging lens 53, the beam splitter 23 is disposed between the digital micromirror device 21 and the focusing lens 22, and one of the detection lights passing through the beam splitter 23 enters the second receiver 51 through the second converging lens 53. For example, as shown in fig. 1, the beam splitter 23 may be provided with a half mirror, the detection light reflected by the dmd 21 passes through the beam splitter 23 and finally enters the first receiver 41, and the detection light reflected by the dmd 21 passes through the beam splitter 23 and finally enters the second receiver 51.
According to some embodiments of the present invention, the emitting module comprises a second aperture 12 and a polarizer 13, the detecting light emitted from the light source 11 sequentially passes through the second aperture 12 and the polarizer 13 to enter the modulating module, the second aperture 12 is used for selecting the detecting light in a certain angle range, and the polarizer 13 is used for polarizing the detecting light. In some embodiments, the light source 11 is an LED lamp, the emitting module includes a first diaphragm 14 and a second collimating lens 15, and the detection light emitted by the LED lamp sequentially passes through the first diaphragm 14 and the second collimating lens 15 and enters the second diaphragm 12. As shown in fig. 1, the first diaphragm 14 is an aperture diaphragm, the first diaphragm 14 can screen the light emitted from the LED lamp, so that the detection light passing through the first diaphragm 14 is more similar to the light emitted from the point light source, the second collimating lens 15 changes the divergent detection light into a collimated light beam, and then the collimated light beam with polarization is finally obtained through selection of the second diaphragm 12 and polarization of the polarizing plate 13.
According to the SPR detection equipment provided by the invention, the angle modulation type SPR sensor based on the digital micro-mirror device provided by the invention is included.
According to the SPR detection apparatus provided by the present invention, by using the SPR sensor of the angle modulation type based on the digital micromirror device provided by the present invention, the angle modulation is performed using the digital micromirror device 21, and the angle modulation speed can be improved. The positions of all components of the angle modulation type SPR sensor based on the digital micromirror device can be kept relatively fixed, errors caused by component movement can be avoided, and integration of the angle modulation type SPR sensor based on the digital micromirror device in SPR detection equipment can be conveniently realized.
The following describes in detail an SPR sensor of an angle modulation type based on a digital micromirror device provided according to the present invention in a specific embodiment with reference to fig. 1, 2 and 3. It is to be understood that the following description is only exemplary, and not a specific limitation of the invention.
The angle modulation type SPR sensor based on the digital micromirror device comprises an emission module, a modulation module, a detection module, a first receiving module and a second receiving module.
The emitting module comprises a light source 11, a second diaphragm 12, a polarizing plate 13, a first diaphragm 14 and a second collimating lens 15, and is used for generating detection light which is a collimated light beam with polarization. The light source 11 adopts an LED lamp, the first diaphragm 14 adopts a small-hole diaphragm, the second diaphragm 12 is used for selecting detection light in a certain angle range, and the detection light emitted by the light source 11 sequentially passes through the first diaphragm 14, the second collimating lens 15, the second diaphragm 12 and the polaroid 13 and enters the modulation module.
The modulation module comprises a digital micro-mirror device 21, a focusing lens 22 and a beam splitter 23, wherein the beam splitter 23 is arranged between the digital micro-mirror device 21 and the focusing lens 22, the digital micro-mirror device 21 is used for reflecting detection light, and four areas are divided on the digital micro-mirror device 21. The detection light emitted from the emitting module passes through the digital micromirror device 21 and is then split into two beams by the beam splitter 23, wherein one beam enters the detecting module through the focusing lens 22, and the other beam enters the second receiving module.
The detection module comprises a detection cell 31, a metal layer 32 and a prism 33, wherein the metal layer 32 is arranged on the detection cell 31, the thickness of the metal layer 32 is 50nm, four sample channels are formed between the metal layer 32 and the detection cell 31, the sample channels and the digital micromirror device 21 are configured in regions, a sample is placed in the sample channels, the prism 33 is a semi-cylindrical prism, the prism 33 is arranged on the metal layer 32, and the metal layer 32 and the prism 33 are coupled together through matching fluid. The detection light is irradiated to the surface of the metal layer 32 through the prism 33, reflected by the metal layer 32, and enters the first receiving module through the prism.
The first receiving module includes a first receiver 41, a first collimating lens 42, and a first converging lens 43, and the detection light passing through the detecting module sequentially passes through the first collimating lens 42 and the first converging lens 43 and enters the first receiver 41. The first receiver 41 employs a single point detector.
The second receiving module includes a second receiver 51 and a second converging lens 53, and a beam of detection light passing through the beam splitter 23 enters the second receiver 51 through the second converging lens 53. The second receiver 51 employs a single point detector.
According to the angle modulation type SPR sensor based on the digital micro-mirror device, at least the following functions can be realized by adopting the design: by providing the digital micromirror device 21, the digital micromirror device 21 can rapidly change the operating state of the micromirror, thereby improving the angle modulation speed of the SPR sensor of angle modulation type based on the digital micromirror device. In addition, the digital micromirror device 21 is used for angle modulation, so that the components of the angle modulation SPR sensor based on the digital micromirror device do not need to move when adjusting the angle, the positions of all the components can be kept relatively fixed, and errors caused by the movement of the components can be avoided.
The angle modulation type SPR sensor based on the digital micromirror device can realize multi-channel detection, and improves the flexibility and efficiency of detection.
The second receiving module is used as a reference, and the ratio of the measurement results of the first receiver 41 and the second receiver 51 is used as a final response result, so that the influence of factors such as light source fluctuation and external noise on the measurement results can be eliminated, and the detection accuracy of the angle modulation type SPR sensor based on the digital micro-mirror device is improved.
The single-point detector can improve the dynamic measurement range and the signal-to-noise ratio of the light intensity signal and can also reduce the cost of the angle modulation type SPR sensor based on the digital micro-mirror device.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. An angle modulation type SPR sensor based on a digital micro-mirror device, comprising:
an emission module comprising a light source (11) for generating detection light as a collimated beam of horizontal polarization;
the modulation module comprises a digital micromirror device (21) and a focusing lens (22), wherein the digital micromirror device (21) is used for reflecting detection light, and the digital micromirror device (21) comprises a plurality of micromirrors for angle modulation;
the detection module comprises a detection cell (31), a metal layer (32) and a prism (33), wherein the metal layer (32) is arranged on the detection cell (31), and the prism (33) is arranged on the metal layer (32);
the first receiving module comprises a first receiver (41), and the detection light sequentially passes through the digital micromirror device (21), the focusing lens (22) and the detecting module to enter the first receiving module.
2. The SPR sensor of claim 1 wherein: a plurality of sample channels are formed between the metal layer (32) and the detection cell (31).
3. The SPR sensor of claim 1 or 2, wherein: the first receiver (41) employs a single point detector.
4. The SPR sensor of claim 3, wherein: the first receiving module comprises a first collimating lens (42) and a first converging lens (43), and the detection light passing through the detection module sequentially passes through the first collimating lens (42) and the first converging lens (43) to enter the first receiver (41).
5. The SPR sensor of claim 1 or 2, wherein: the SPR sensor based on the digital micro-mirror device comprises a second receiving module, the second receiving module comprises a second receiver (51), the modulating module comprises a beam splitter (23), the beam splitter (23) is used for splitting detection light into at least two beams, one beam of the detection light enters the detecting module, and the other beam of the detection light enters the second receiving module.
6. The SPR sensor of claim 5, wherein said SPR sensor further comprises: the second receiver (51) employs a single point detector.
7. The SPR sensor of claim 6, wherein: the second receiving module comprises a second converging lens (53), the beam splitter (23) is arranged between the digital micromirror device (21) and the focusing lens (22), and one detection light beam passing through the beam splitter (23) enters the second receiver (51) through the second converging lens (53).
8. The SPR sensor of claim 1 wherein: the transmitting module comprises a second diaphragm (12) and a polaroid (13), the detection light emitted by the light source (11) sequentially passes through the second diaphragm (12) and the polaroid (13) to enter the modulating module, the second diaphragm (12) is used for selecting the detection light within a certain angle range, and the polaroid (13) is used for polarization detection light.
9. The SPR sensor of claim 8, wherein: the light source (11) adopts the LED lamp, the emission module includes first diaphragm (14), second collimating lens (15), the detection light that the LED lamp sent passes through in proper order first diaphragm (14) with second collimating lens (15) get into second diaphragm (12).
10. An SPR detection apparatus, comprising: the SPR detection apparatus includes the digital micromirror device-based angle modulation-type SPR sensor of any one of claims 1 to 9.
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| CN113189709A (en) * | 2021-04-19 | 2021-07-30 | 之江实验室 | Input optical signal generating device for optical fiber array and photoetching system |
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