CN106248564A - A kind of can on-line measurement energy extreme ultraviolet irradiation damage test system - Google Patents
A kind of can on-line measurement energy extreme ultraviolet irradiation damage test system Download PDFInfo
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- CN106248564A CN106248564A CN201610548432.5A CN201610548432A CN106248564A CN 106248564 A CN106248564 A CN 106248564A CN 201610548432 A CN201610548432 A CN 201610548432A CN 106248564 A CN106248564 A CN 106248564A
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- energy
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- chamber
- extreme ultraviolet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
- G01N17/004—Investigating resistance of materials to the weather, to corrosion, or to light to light
Abstract
The invention discloses one extreme ultraviolet irradiation damage test system, including light source chamber, collect mirror chamber and measure chamber, collect and can be changed the subsequent propagation of light beam by the switching of open/close state equipped with shutter, shutter between mirror chamber and measurement chamber；Test chamber accommodates sample regulating platform, energy calibration unit and irradiation energy on-line testing unit, sample regulating platform is used for loading irradiation damage test sample, irradiation energy on-line testing unit is arranged in the light path between shutter and sample regulating platform, for testing the irradiation energy at sample surfaces, energy calibration unit is arranged in the light path between on-line testing unit and sample regulating platform, is used for calibrating irradiation energy on-line testing unit.The system of the present invention can in irradiation damage test process real-time testing irradiation energy, improve the accuracy of irradiation damage test result and reliability, and simple in construction, easy for installation, easily operate.
Description
Technical field
The present invention relates to a kind of extreme ultraviolet irradiation damage test system, be specifically related to a kind of by using metal wire and calibration
Detector detects energy thus realizes the irradiation damage test system of energy on-line measurement, and particularly extreme ultraviolet irradiation damage is surveyed
Test system, belongs to field of optical measurements.
Background technology
In extreme ultra violet lithography system, high-power extreme ultraviolet irradiation and the effect of material, it will cause the spoke of material
According to damage.Therefore, it is necessary to develop extreme ultraviolet irradiation damage test system, for various materials irradiation damage under extreme ultraviolet
Performance is tested, to select to meet the material of extreme ultra violet lithography job requirement.
Carry out material radiation damage research process, need measurement irradiation in the energy size on material sample surface, tested
Journey needs repeatedly regulate energy size, while therefore carrying out sample surfaces photoirradiation, measures the irradiation energy size of correspondence,
To irradiation damage testing research and important.Relatively early, investigative technique is the most ripe, built vertical ISO in laser-induced damage research
Two international standards of 11254-1 and ISO 11254-2.The laser-induced damage Study system carried in two standards, is intended to
Ask irradiation energy can on-line measurement, for laser-induced damage system, can be realized by beam splitter.And for extreme ultraviolet irradiation
The research of damage, owing to not having the beam splitter of extreme ultraviolet waveband to be split light, so being typically extreme ultraviolet energy detection
Device is placed directly near sample irradiation point in light path, first completes the detection of energy, then removes energy-probe, starts sample
Irradiation damage is tested, it is impossible to real-time detection irradiation energy.By optic such as reflecting mirrors in light source works stability, light path
Part performance changes etc. affect, and owing to cannot measure the change of energy in real time, accuracy and the reliability of last test result also can
It is affected.
Summary of the invention
(1) to solve the technical problem that
Present invention seek to address that existing extreme ultraviolet radiation system for testing damage cannot be measured energy in real time and affect test
The problem of the accuracy of result.
(2) technical scheme
The present invention proposes a kind of extreme ultraviolet irradiation damage test system, including light source chamber, collects mirror chamber and measures chamber
Room, is provided with photoirradiation source in light source chamber, the light that photoirradiation source sends incides collection mirror chamber, collects in mirror chamber and is provided with one
Individual reflecting mirror, it is used for the luminous reflectance from light-source chamber room to measuring chamber, between described collection mirror chamber and measurement chamber
Equipped with shutter, shutter can change the subsequent propagation of light beam by the switching of open/close state；Described test chamber accommodates sample
Regulating platform, energy calibration unit and irradiation energy on-line testing unit, sample regulating platform is used for loading irradiation damage test sample,
Irradiation energy on-line testing unit is arranged in the light path between described shutter and sample regulating platform, is used for testing irradiation at sample
The energy on surface, described energy calibration unit is arranged in the light path between on-line testing unit and sample regulating platform, for school
Quasi-irradiation energy on-line testing unit.
According to the detailed description of the invention of the present invention, described irradiation energy on-line testing unit includes that the two ends of a tubular are opened
The containing cavity of mouth, is mounted with energy measurement parts in the inner side cavity wall of containing cavity.
According to the detailed description of the invention of the present invention, described energy test parts include a plurality of point of electric lead, insulation annulus and
Total electric lead, wherein, the two ends of each point of electric lead are each attached to insulate the inner side of annulus, and all points of electric leads all with total conductance
Line is electrically connected with, and total electric lead externally exports the signal of telecommunication.
According to the detailed description of the invention of the present invention, described point of electric lead is the metal or alloy with opto-electronic conversion effect.
According to the detailed description of the invention of the present invention, described point of electric lead 20 diameter is preferably between 1 μm～100 μm, point
Cloth interval is about between 10 μm～1000 μm.
According to the detailed description of the invention of the present invention, the periphery of described insulation annulus is arranged with a supporting construction.
According to the detailed description of the invention of the present invention, the containing cavity of described irradiation energy on-line testing unit is also mounted with optical filtering
Sheet.
According to the detailed description of the invention of the present invention, described energy calibration unit includes photodetector, energy attenuation sheet, should
Photodetector and energy attenuation sheet are through detection calibration, for calibrating the energy letter that irradiation energy on-line testing unit measures
Number.
According to the detailed description of the invention of the present invention, described energy calibration unit also includes rotation of adjustment knob, photodetection
Device and attenuator are fixed on fixed mount, and are connected with rotation of adjustment knob, the position of rotation of adjustment knob scalable fixed mount.
According to the detailed description of the invention of the present invention, described energy calibration unit also includes protecting baffle plate, and it is used for preventing non-
Test phase detector and attenuator are by the irradiation of veiling glare.
(3) beneficial effect
The present invention proposes one, and by use metal wire and calibration detectors detection energy thus realization can on-line measurement
The irradiation damage test system of energy, the problem solving energy on-line testing in irradiation damage test process.
The system of the present invention can in irradiation damage test process real-time testing irradiation energy, improve irradiation damage test knot
The accuracy of fruit and reliability, and simple in construction, easy for installation, easily operate.
Accompanying drawing explanation
Figure 1A and Figure 1B is the extreme ultraviolet irradiation damage that centre wavelength the is 13.5nm test system of embodiments of the invention
Structural representation, Figure 1B is the partial enlarged drawing of Figure 1A；
Fig. 2 is the structural representation of irradiation energy on-line testing unit, and wherein, (a) and (b) figure are that irradiation energy exists respectively
The line test cell front view when unloaded test component and middle axial section, (c) and (d) figure are only to load optical filter respectively
Load axial section in the irradiation energy on-line testing unit after optical filter and energy measurement parts simultaneously；
Fig. 3 is the detailed construction schematic diagram of energy measurement parts, wherein (a) and (b) be respectively energy test parts just
View and middle axial section；
Fig. 4 is the schematic diagram of an embodiment of latticed energy test parts；
Fig. 5 A is the top view of the energy calibration unit of one embodiment of the present of invention, and Fig. 5 B is an enforcement of the present invention
The energy calibration unit 11 of example is along the front view of optical propagation direction.
Detailed description of the invention
The irradiation damage experimentation of irradiation damage experimentation, particularly extreme ultraviolet, be assessment, select can meet
The important channel of the material of extreme ultra violet lithography job requirement.Exist to realize the energy in extreme ultraviolet irradiation damage testing research
Line is measured, and improves the accuracy of test result and reliability, the present invention propose a kind of can the extreme ultraviolet irradiation of on-line measurement energy
System for testing damage.
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in further detail.
The following examples, with as a example by the centre wavelength extreme ultraviolet irradiation damage test system as 13.5nm, illustrate this
The primary structure of the system of invention and working effect.
Figure 1A and Figure 1B is the extreme ultraviolet irradiation damage that centre wavelength the is 13.5nm test system of embodiments of the invention
Structural representation, Figure 1B is the partial enlarged drawing of Figure 1A.As shown in FIG. 1A and 1B, system mainly includes EUV light source chamber
1, collecting mirror chamber 4 and measure chamber 8, being provided with EUV photoirradiation source 2 in EUV light source chamber 1, EUV photoirradiation source 2 is used for sending
EUV wide spectrum optical 3 also incides collection mirror chamber 4, collects in mirror chamber 4 and is provided with a reflecting mirror 5, and being used for will be from EUV light source
The EUV wide spectrum optical 3 of chamber 1 reflexes to measure chamber 8, and reflecting mirror 5 is preferably Mo/Si multilayer film focusing mirror.
Owing to EUV light can only be propagated in vacuum environment, so each chamber is both needed to configure a set of air pump group and phase
Answer the vacuometer of range, figure is not drawn into.
Collect and can be changed by the switching of open/close state equipped with shutter 6, shutter 6 between mirror chamber 4 and measurement chamber 8
The subsequent propagation of light beam, during irradiation is tested, shutter 6 is opened, and carries out irradiation experiment；During non-test, shutter 6 is closed,
To avoid the optics of sample and subsequent optical path by photoirradiation during non-test, reduce the irradiation to each parts and damage.
It is online that test chamber 8 accommodates sample regulating platform 9, laser spot detection device 10, energy calibration unit 11 and irradiation energy
Test cell 12.Sample regulating platform 9 is used for loading irradiation damage test sample 7, and laser spot detection device 10 is used for measuring through reflection
Spot size at focused spot after mirror 5, i.e. irradiation is in the size of the hot spot of sample surfaces.Laser spot detection device 10 can be along optical axis
Direction moves forward and backward.Before starting irradiation experiment, test sample 7 is regulated to light path by sample regulating platform 9, laser spot detection device
10 regulate to light focal spot along optical axis, carry out irradiation facula measurement.Afterwards laser spot detection device 10 along optical axis regulation, away from
Light focal spot, then by regulating platform 9, test sample 7 is regulated to light path, and light focus point falls on sample 7 surface, carries out
The irradiation damage test of sample 7.
Irradiation energy on-line testing unit 12 is arranged in the light path between shutter 6 and sample regulating platform 9, is used for testing spoke
Impinge upon the energy on sample 7 surface.Energy calibration unit 11 is arranged at the light path between on-line testing unit 12 and sample regulating platform
On, it is used for calibrating irradiation energy on-line testing unit 12.
Fig. 2 be the structural representation of irradiation energy on-line testing unit 12, (a) therein and (b) figure be irradiation energy respectively
Measure the on-line testing unit 12 front view when unloaded test component and middle axial section.As in figure 2 it is shown, irradiation energy is online
Measuring unit 12 includes the containing cavity 12a of the both ends open of a tubular, and containing cavity 12a is in the one end along its central axis direction
Being fixed with panel 13, the center of panel 13 has through hole 14, and through hole 14 connects with the inside cavity space of containing cavity.Panel 13
Periphery has annular portion 12b protruded laterally, by the knob bolts through the fixing hole 15 in panel 13 annular portion 12b
15, on-line testing unit 12 can be fixed on test chamber 8.
In the inner side cavity wall of containing cavity 12a, and it is being perpendicular on axial in-plane, is offering two and be parallel to each other
The first groove 16-1 and the second groove 16-2, the first groove 16-1 is closer to panel 13 side.First groove 16-1 and second
Groove 16-2 is respectively used to load optical filter 17 and energy measurement parts 18.
(c), (d) of Fig. 2 be respectively only load optical filter 17 and simultaneously loading optical filter 17 and energy measurement parts 18 it
After irradiation energy on-line testing unit 12 in axial section.Light is entered irradiation energy on-line testing unit 12 by through hole 14, thoroughly
After crossing optical filter 17, energy measurement parts 18, travel in follow-up test sample 7.
Fig. 3 is the detailed construction schematic diagram of energy measurement parts 18, and wherein (a) and (b) is energy test parts 18 respectively
Front view and middle axial section.As it is shown on figure 3, energy test parts 18 include a plurality of point of electric lead 20, insulation annulus 23, total
Electric lead 24, insulated hollow conduit 19.Also can be provided with supporting construction 22 and parts handle 21.The two ends of each point of electric lead 20 are equal
It is fixed on the inner side of insulation annulus 23, and all points of electric leads 20 are all electrically connected with total electric lead 24.Insulated hollow conduit 19
Through the ring wall of insulation annulus 23, total electric lead 24 penetrates this insulated hollow conduit 19 and is communicated to the outside of insulation annulus 23.
Insulation annulus 23 periphery can a sheathed supporting construction 22, supporting construction 22 can be metal material constitute.Can measure
Amount parts 18 top also can set a handle 21 with easy disassembly.
In the system of this embodiment, through the EUV light of optical filter 17, major part is through the interval plain conductor 20
Continue to propagate on sample, but have small part light dividing on electric lead 20 by irradiation.The material of point electric lead 20 can be copper,
Aluminum, silver, ferrum, nickel etc. have the metal or alloy of opto-electronic conversion effect to extreme ultraviolet.Divide electric lead 20 high-octane extremely purple
The free electron of respective amount is produced under outer photostimulation.Owing to all points of electric leads 20 are connected, therefore with total electric lead 24
Voltage can be produced after a point electronics for electric lead 20 generation is gathered in total electric lead 24, i.e. total electric lead 24 can produce telecommunications
Number, thus realize the light energy conversion to the corresponding signal of telecommunication.Total electric lead 24 can external electric signal measurement parts, such as oscillography
Device.
According to the present invention, point electric lead 20 diameter is preferably between 1 μm～100 μm, layout pitch be about 10 μm～
Between 1000 μm, can design according to the actual requirements, the interval making the extreme ultraviolet of the overwhelming majority may pass through between metal continues to pass
Broadcast, and after the signal of telecommunication that point electric lead 20 detects is calibrated by energy calibration unit 11, i.e. can be used for assessing whole irradiation
Gross energy at the light beam of sample surfaces.Owing to the energy measurement parts 18 installed in the optical path neither affect the propagation of light beam,
Can indirectly measure again the gross energy propagating light beam, thus realize the on-line measurement of irradiation energy in the experiment of extreme ultraviolet irradiation damage.
Point electric lead of energy test parts 18 set-up mode in insulation annulus 23 can be various, but is preferably uniformly
Distribution, such as Fig. 3, it can also be latticed structure as shown in Figure 4.
It it is the structural representation of the energy calibration unit 11 of embodiments of the invention such as Fig. 5 A and Fig. 5 B.Fig. 5 A is to overlook
Figure, Fig. 5 B is the front view along optical propagation direction.As shown in Figure 5 A and 5B, energy calibration unit 11 mainly includes photodetector
27, energy attenuation sheet 28, rotation of adjustment knob 29, protection baffle plate 31, photodetector 27 and attenuator 28 are fixed on fixed mount
On 26, and being connected with rotation of adjustment knob 29 by measuring the vacuum interface flange 30 in the cavity wall 32 of chamber 8, knob 29 is adjustable
Save its position.Photodetector 27 and energy attenuation sheet 28, through detection calibration, are used for calibrating irradiation energy on-line testing list
The energy signal that energy measurement parts 18 in unit 12 are measured.
It is adjusted in light path at calibration phase, detector 27 and attenuator 28, i.e. the solid line position of Fig. 5 B, light beam
Detected by energy calibration unit 11 after energy measurement parts 18, by energy calibration unit 11, energy measurement parts 18
The signal of telecommunication measured, i.e. can get the corresponding relation between whole light beam gross energy and the signal of telecommunication of energy measurement parts 18,
I.e. exposure beam gross energy and the scale factor F of energy measurement parts 18 signal of telecommunication, this scale factor F can be used for irradiation damage and survey
The reckoning of irradiation energy in examination.In the non-calibrated stage, detector 27 and attenuator 28 are adjusted to protection along direction 33 half-twist
After baffle plate 31, i.e. the broken line representation position of Fig. 5 B, protection baffle plate 31 can prevent non-test phase detection device 27 and attenuator 28
Irradiation by veiling glare.Protection baffle plate 31 is fixed at the bottom of vacuum chamber 34.
Below the method for the extreme ultraviolet irradiation damage test system on-line measurement irradiation energy of above-described embodiment is said
Bright.
During sample irradiation damage measurement, EUV photoirradiation source 2 gives off wide spectrum optical 3, through collecting mirror chamber 4
Reflecting mirror 5 reflects, and through after irradiation energy on-line testing unit 12, leaches the arrowband EUV light that centre wavelength is 13.5nm,
Irradiation, on sample 7, carries out the irradiation damage experiment of sample.Irradiation energy on-line testing unit 12 in the optical path is installed permissible
Realize the real-time measurement of irradiation energy.
Before carrying out irradiation energy measurement, first carry out the calibration of energy measurement parts 18.Specifically, by energy school
Quasi-unit 11 rotates and regulates to light path, and the plain conductor 24 of energy measurement parts 18 connects oscillograph, diode detector 27
It is respectively S with the pulse integration signal of energy measurement parts 181、S2(unit Vs), oscillographic input impedance is respectively Ω1、
Ω2(unit is ohm), and the response factor of known diode detector 27 be T (unit A/W), the attenuation rate of attenuator 28 be
1/D, then pass through S1/Ω1/ T × D can calculate irradiation pulse gross energy E (unit J) at sample surfaces, and calibration factor E/S2
It is calibration scale factor F (unit J/Vs) of energy measurement parts 18.In calibration test process, can be repeated several times measurement, take
Average proportions factor Faver, improve the accuracy of energy test in follow-up irradiation experiment.
After the calibration completing energy measurement parts 18, carry out radiation damage test, and measure in real time in test process
Irradiation energy.Specifically, energy calibration unit 11 is rotated after regulation extremely protection baffle plate 31, now exist through irradiation energy
The direct irradiation of light of line test cell 12 carries out irradiation damage experiment test on the surface of sample 7.Load energy in the optical path
Measure parts 18 and can monitor irradiation signal of telecommunication S in real timeirrad(unit Vs), then pass through Faver×SirradIrradiation can be extrapolated in real time to exist
The single pulse energy E of sample surfacesirrad(unit J), i.e. realizes the energy on-line measurement in the test of extreme ultraviolet irradiation damage.
Particular embodiments described above, has been carried out the purpose of the present invention, technical scheme and beneficial effect the most in detail
Describe in detail bright it should be understood that the foregoing is only the specific embodiment of the present invention, be not limited to the present invention, all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. done, should be included in the protection of the present invention
Within the scope of.
Claims (10)
1. an extreme ultraviolet irradiation damage test system, including light source chamber, collects mirror chamber and measures chamber, in light source chamber
Being provided with photoirradiation source, the light that photoirradiation source sends incides collection mirror chamber, collects in mirror chamber and is provided with a reflecting mirror, and it is used
In by the luminous reflectance from light-source chamber room to measuring chamber, it is characterised in that:
Light beam can be changed by the switching of open/close state equipped with shutter, shutter between described collection mirror chamber and measurement chamber
Subsequent propagation；
Described test chamber accommodates sample regulating platform, energy calibration unit and irradiation energy on-line testing unit, and sample regulates
Platform is used for loading irradiation damage test sample, and irradiation energy on-line testing unit is arranged between described shutter and sample regulating platform
Light path on, for testing the irradiation energy at sample surfaces, described energy calibration unit is arranged at on-line testing unit and sample
In light path between product regulating platform, it is used for calibrating irradiation energy on-line testing unit.
2. extreme ultraviolet irradiation damage test system as claimed in claim 1, it is characterised in that described irradiation energy on-line testing
Unit includes the containing cavity of the both ends open of a tubular, is mounted with energy measurement parts in the inner side cavity wall of containing cavity.
3. extreme ultraviolet irradiation damage test system as claimed in claim 2, it is characterised in that described energy test parts include
A plurality of point of electric lead, insulation annulus and total electric lead, wherein, the two ends of each point of electric lead are each attached to insulate the inner side of annulus,
And all points of electric leads are all electrically connected with total electric lead, total electric lead externally exports the signal of telecommunication.
4. extreme ultraviolet irradiation damage test system as claimed in claim 3, it is characterised in that described point of electric lead is for having light
The metal or alloy of electricity transition effects.
5. extreme ultraviolet irradiation damage test system as claimed in claim 4, it is characterised in that described point of electric lead 20 diameter is excellent
Electing as between 1 μm～100 μm, layout pitch is about between 10 μm～1000 μm.
6. extreme ultraviolet irradiation damage test system as claimed in claim 4, it is characterised in that the peripheral set of described insulation annulus
It is provided with a supporting construction.
7. extreme ultraviolet irradiation damage test system as claimed in claim 2, it is characterised in that described irradiation energy on-line testing
The containing cavity of unit is also mounted with optical filter.
8. extreme ultraviolet irradiation damage test system as claimed in claim 1, it is characterised in that described energy calibration unit includes
Photodetector, energy attenuation sheet, this photodetector and energy attenuation sheet, through detection calibration, are used for calibrating irradiation energy
The energy signal that on-line testing unit measures.
9. extreme ultraviolet irradiation damage test system as claimed in claim 8, it is characterised in that described energy calibration unit also wraps
Include rotation of adjustment knob, photodetector and attenuator to be fixed on fixed mount, and be connected with rotation of adjustment knob, rotate regulation
The position of knob scalable fixed mount.
10. extreme ultraviolet irradiation damage test system as claimed in claim 8, it is characterised in that described energy calibration unit is also
Including protection baffle plate, it is for preventing non-test phase detection device and attenuator by the irradiation of veiling glare.
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| CN108918094A (en) * | 2018-06-11 | 2018-11-30 | 同济大学 | A kind of desktop type high-energy density extreme ultraviolet irradiation damage test device |
| CN110879199A (en) * | 2019-11-25 | 2020-03-13 | 中国科学院微电子研究所 | System for testing hydrogen brittleness of material under irradiation of extreme ultraviolet light |
| CN110879198A (en) * | 2019-11-25 | 2020-03-13 | 中国科学院微电子研究所 | Extreme ultraviolet photoresist gassing pollution test system |
| CN110895192A (en) * | 2019-11-25 | 2020-03-20 | 中国科学院微电子研究所 | Extreme ultraviolet optical element performance parameter test system |
| CN110967944A (en) * | 2019-11-29 | 2020-04-07 | 中国科学院微电子研究所 | Photoelectric conversion electronic device used in EUV vacuum environment and photoetching machine |
| CN111504889A (en) * | 2020-04-23 | 2020-08-07 | 中国科学院微电子研究所 | Extreme ultraviolet cumulative irradiation damage test system and method |
| WO2022110101A1 (en) * | 2020-11-30 | 2022-06-02 | 中国科学院微电子研究所 | Photoelectric detection device having closed design and capable of preventing distortion of optical signals and implementation method therefor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110879198A (en) * | 2019-11-25 | 2020-03-13 | 中国科学院微电子研究所 | Extreme ultraviolet photoresist gassing pollution test system |
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| CN111504889A (en) * | 2020-04-23 | 2020-08-07 | 中国科学院微电子研究所 | Extreme ultraviolet cumulative irradiation damage test system and method |
| WO2022110101A1 (en) * | 2020-11-30 | 2022-06-02 | 中国科学院微电子研究所 | Photoelectric detection device having closed design and capable of preventing distortion of optical signals and implementation method therefor |
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| CN106248564B (en) | 2019-01-08 |
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