CN108680251B - Subdivision spectrum scanning calibration device based on super continuous laser and monochromator - Google Patents
Subdivision spectrum scanning calibration device based on super continuous laser and monochromator Download PDFInfo
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- 238000001228 spectrum Methods 0.000 title claims abstract description 35
- 238000012544 monitoring process Methods 0.000 claims abstract description 27
- 238000005259 measurement Methods 0.000 claims abstract description 14
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 230000005855 radiation Effects 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims abstract description 7
- 238000013519 translation Methods 0.000 claims description 16
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- -1 polytetrafluoroethylene Polymers 0.000 claims description 9
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 9
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 7
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 210000001747 pupil Anatomy 0.000 claims description 6
- 239000013307 optical fiber Substances 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 230000008033 biological extinction Effects 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 abstract description 15
- 238000000034 method Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The invention discloses a subdivision spectrum scanning calibration device based on a super-continuous laser and a monochromator. The monochromator tunes to output monochromatic light, after collimation, focusing and beam splitting, a part of light energy is reflected by the surface of the beam splitter and enters the laser wavelength meter, and real-time monitoring of output wavelength and bandwidth is realized. The rest part of the light enters the decoherence integrating sphere through the beam splitter to generate a uniform monochromatic area light source. The absolute spectral radiance of the integrating sphere is obtained by a standard radiance detector traced from a low-temperature absolute radiometer, the alternative measurement of the standard radiance detector and the equipment to be calibrated is realized through a linear displacement table, and a monochromator sequentially tunes and outputs monochromatic light with different wavelengths, so that the spectral subdivision scanning calibration of the equipment to be calibrated is realized. The invention has wide application prospect in optical radiation measurement and high-precision calibration of remote sensors.
Description
Technical Field
The invention relates to the technical field of optical radiation measurement and remote sensor calibration, in particular to a subdivision spectrum scanning calibration device based on a super-continuous laser and a monochromator.
Background
Tracing to the low-temperature absolute radiometer, a radiation transfer link based on a standard detector is a high-precision radiometric calibration technology link accepted in the industry at the present stage. The absolute spectral power responsivity of the standard transfer detector can be obtained by adopting a low-temperature absolute radiometer, and the spectral radiance responsivity can be obtained by adopting a radiance geometric conversion structure (such as a Gershun tubular form), so that the spectral radiance tracing to a high-precision optical power primary reference is realized.
Low temperature absolute radiometers are the currently most accurate optical power radiometric reference recognized in the industry, but when spectral radiometric information is delivered using low temperature absolute radiometers, monochromatic optical radiation is used as the excitation light source. In remote earth observation, the radiant quantity value observed by most remote sensors is spectral radiance information, which requires that the test light source should be a uniform radiance surface light source (e.g., integrating sphere surface light source).
There are two main approaches to provide a tuned output of monochromatic light: monochromator-based dispersion techniques and tunable laser techniques. Generally, most monochrometer systems used in radiometric calibration are double monochrometers, and monochromatic light of the monochrometers has high purity and low stray light level, so that the calibration accuracy level is improved. The monochromator system applied to radiometric calibration at the present stage mainly uses a halogen tungsten lamp as a light source, the power level of the halogen tungsten lamp is low, and the efficiency of the monochromator system is low, so that the monochromator system can only be suitable for the spectral calibration and the calibration of the relative spectral (power) responsivity of a remote sensor, and cannot be suitable for the calibration of the absolute spectral radiance responsivity of the remote sensor. The tunable laser has the characteristics of high optical power level and good monochromaticity, can realize the system-level calibration of the spectral radiance responsivity of the remote sensor by guiding laser into the integrating sphere to generate a uniform monochromatic surface light source, and is also suitable for the high-precision spectral calibration of the remote sensor due to the excellent monochromaticity of the laser. At present, a plurality of measurement departments at home and abroad establish a radiation calibration standard light source system based on a tunable laser, such as the National Institute of Standards and Technology (NIST), the german institute of technology and Physics (PTB) and the institute of optical precision mechanics (AIOFM) of the national academy of sciences.
When monochromatic light is used for radiation transmission and timing, all working bands of the remote sensor can be traversed only by scanning channels of the remote sensor. The monochromator has mature technology, is convenient for program control operation, is very suitable for spectrum subdivision scanning, but can only be used for spectrum calibration and relative spectrum responsivity calibration of a remote sensor at present; the wavelength tuning of the present tunable laser is more dependent on professional operators and is not automated to a high degree. If a spectrally subdivided scan is performed, a significant amount of time is consumed and the calibration period is long. Tunable lasers are relatively expensive, and especially, building full laser coverage that completely covers the solar reflection band requires multiple laser combinations to be realized, and also requires the provision of necessary auxiliary equipment such as wavemeters, power meters, beam quality analyzers, laser power stabilizers, and the like. Comprehensive evaluation requires millions, or even tens of millions, of capital investments. In addition, the operation of the laser has high requirements on the environment, such as cleanliness, indoor temperature and humidity, and the operation and maintenance of the laser also need to be implemented by professional personnel. These objective factors have led to the focus of the spectrum scanning calibration technique based on tunable laser in professional and practical measurement laboratories, which is not favorable for the popularization and application of this high-precision calibration technique.
Disclosure of Invention
The invention aims to make up the defects of the prior art and provides a subdivision spectrum scanning calibration device based on a supercontinuum laser and a monochromator.
The invention is realized by the following technical scheme:
a scanning and calibrating device for subdivided spectrum based on a super-continuous laser and a monochromator comprises a super-continuous laser source, a slit coupling light path, the monochromator, a monochromator output collimator, a focusing lens, a beam splitter, a laser wavelength meter, a decoherence integrating sphere, an electric control translation table, a standard radiance detector and a device to be calibrated, wherein the super-continuous laser source outputs broadband laser through the collimator, a light beam is coupled into an incident slit of the monochromator after passing through the slit coupling light path, monochromatic light is output in an emergent slit of the monochromator after tuning of the monochromator, the emergent slit of the monochromator is positioned at an effective focus of the monochromator output collimator, the collimated light beam is output after being collimated by the monochromator output collimator, the light beam is focused again after passing through the focusing lens, the focused light beam passes through the beam splitter at the rear end of the light path, and a part of the light beam is reflected by the surface of the, the part of reflected light beams are focused on the incident optical fiber end face of a laser wavelength meter, and the laser wavelength meter interprets the wavelength and the bandwidth output by the current monochromator in real time; the other part of the light beam focused by the focusing lens penetrates through the beam splitter, enters the incoherent integrating sphere through a light inlet of the incoherent integrating sphere, a rotary diffuse reflection plate, a baffle and a monitoring detector are arranged in the incoherent integrating sphere, the light entering the incoherent integrating sphere falls on the rotary diffuse reflection plate, the baffle prevents primary reflected light of the rotary diffuse reflection plate from directly emitting from a light outlet of the incoherent integrating sphere, the uniform light is reflected for multiple times in the incoherent integrating sphere and then emitted from the light outlet of the incoherent integrating sphere, the monitoring detector monitors the stability of a light source of the incoherent integrating sphere in real time, the output power of the supercontinuum laser is fed back and finely adjusted according to the change of radiance in the incoherent integrating sphere, the standard radiance detector and the equipment to be calibrated are arranged on an electric control translation table, the light inlets of the standard radiance detector and the equipment to be calibrated are respectively opposite to the light outlet of the incoherent integrating sphere through the electric control translation table for moving and switching, and the standard radiance detector measures the reference spectrum radiance of the light outlet of the decoherence integrating sphere, and the reference spectrum radiance is compared with the measurement result of equipment to be calibrated to realize the alternative radiometric calibration based on the standard detector.
The working waveband of the super-continuous laser light source covers 400-2400 nm.
The slit coupling light path consists of three off-axis parabolic reflectors, namely a first off-axis parabolic reflector, a second off-axis parabolic reflector and a third off-axis parabolic reflector, wherein the supercontinuum laser beam is focused after passing through the first off-axis parabolic reflector, the focus is positioned at the focus of the second off-axis parabolic reflector, so the beam is collimated again after passing through the second off-axis parabolic reflector, the focal length of the second off-axis parabolic reflector is m times of that of the first off-axis parabolic reflector, so the first off-axis parabolic reflector and the second off-axis parabolic reflector form a reflective Kepler type laser beam expander, the diameter of the beam after passing through the second off-axis parabolic reflector is m x D, wherein D is the diameter of the wide-waveband laser output by the collimator of the supercontinuum laser source, and the third off-axis parabolic reflector is used for refocusing the beam after passing through the second off-axis parabolic reflector, the focal point is positioned at the entrance slit of the monochromator, and the effective focal length of the off-axis parabolic reflector III is set as f3Then the meridianThe relative aperture of the focused beam is f3V (mD), let the relative aperture of the monochromator be FNUM _ mono, if f3/(mD) = FNUM mono, the supercontinuum laser is coupled into the monochromator with the best match.
The slit of the monochromator is adjustable, the built-in gratings are all blazed gratings, the grating combination is suitable for 400-plus 2400nm working wavelength bands, and a graded-order optical filter rotating wheel is arranged in the monochromator, so that pure output of a narrow-band spectrum with any wavelength in a 400-plus 2400nm range can be realized.
The laser wavelength meter is a laser wavelength meter of an echelle grating spectrometer type, the working waveband range covers 400 nm-1100 nm, and the laser wavelength meter is used for monitoring the output wavelength and the bandwidth of a monochromator; the laser wavelength meter adopts a light beam input mode of optical fiber coupling input, and can measure wavelength and bandwidth information in real time; the laser wavelength meter is arranged behind the reflecting surface of the beam splitter and receives the output of the monochromator which is focused by the focusing lens and reflected by the surface of the beam splitter. If the output wavelength of the monochromator exceeds the working waveband range of the laser wavelength meter, the extinction order filter rotating wheel of the monochromator is adjusted to a channel without the filter, the laser wavelength meter is used for measuring the high diffraction order spectrum of the monochromator system, and the output wavelength is determined.
The inner liner coating of the decoherence integrating sphere is made of polytetrafluoroethylene materials and is provided with a light inlet, a light outlet, a monitoring detector mounting port and a rotating diffuse reflection plate mounting port, and the rotating diffuse reflection plate mounting port is positioned on the sphere wall opposite to the light inlet. A built-in baffle coated with a polytetrafluoroethylene coating is arranged on the spherical wall between the rotating diffuse reflection plate and the light outlet of the integrating sphere, so that the once reflected light of the rotating diffuse reflection plate is prevented from directly exiting from the light outlet of the integrating sphere. Quasi-monochromatic light emitted from the monochromator is focused by the focusing lens and split by the beam splitter, light spots fall on the central area of the rotating diffuse reflection plate, and decoherence of laser is realized under the action of the rotating diffuse reflection plate. Under the action of the rotating diffuse reflection plate and the high-reflectivity diffusion coating on the inner wall of the integrating sphere, incident light is fully homogenized, and a uniform radiance surface light source is formed at the opening of the integrating sphere. The monitoring detector is arranged on the sphere wall near the light outlet of the integrating sphere, directly monitors the change of the radiance of the inner wall of the integrating sphere, feeds back and finely adjusts the output power of the super-continuous laser according to the change of the radiance in the integrating sphere, and ensures the stability of the output of the super-continuous laser. The installation position of the monitoring detector should avoid the monitoring detector from directly observing the light inlet of the integrating sphere, the rotating diffuse reflection plate and the built-in baffle.
The rotating diffuse reflection plate consists of a diffuse reflection plate and a direct current motor, wherein the diffuse reflection plate is fixed on a rotating shaft of the direct current motor and rotates around the rotating shaft along with the rotation of the motor. The diffuse reflection plate surface coating material is polytetrafluoroethylene, the diffuse reflection surface of the diffuse reflection plate faces the interior of the integrating sphere, and the reflection surface is flush with the inner wall of the integrating sphere.
The standard radiance detector comprises three types of a silicon standard radiance detector, an indium gallium arsenic standard radiance detector and an expanded indium gallium arsenic standard radiance detector, and the three types of standard radiance detectors jointly cover 400-2400nm working wave bands; the absolute radiation values of the three standard radiance detectors are traced to the low-temperature absolute radiometer, and in the standard transmission process, the corresponding standard radiance detector or the standard radiance detector combination is selected according to the working waveband of the equipment to be calibrated.
The electric control translation stage is an electric control linear displacement translation stage and is used for realizing the alternate measurement of the standard radiance detector and the instrument to be calibrated.
The supercontinuum laser light source, the laser wavelength meter, the monitoring detector, the standard radiance detector and the equipment to be calibrated are all controlled by a control computer.
If the entrance pupil of the device to be calibrated exceeds the size of the light outlet of the decoherence integrating sphere, a fourth off-axis parabolic reflector is arranged at the rear end of the light outlet of the decoherence integrating sphere, the effective focus of the fourth off-axis parabolic reflector is positioned at the light outlet of the decoherence integrating sphere, as long as the divergence angle of the light beam collimated by the fourth off-axis parabolic reflector is not smaller than the field angle of the device to be calibrated, and the effective caliber of the fourth off-axis parabolic reflector is not smaller than the size of the entrance pupil of the device to be calibrated, the field-of-view matching and the aperture matching between the light source and the device to be calibrated can be realized, and the light beam collimated by the fourth off-axis parabolic reflector respectively faces the standard radiance detector positioned on the electric control translation stage and the light inlet of the device.
The output collimating mirror of the monochromator is an off-axis paraboloid reflecting mirror, the focal point of the output collimating mirror is positioned at the exit slit of the monochromator, and the output monochromatic light of the monochromator is collimated and output.
The focusing lens focuses the collimated light beams output by the monochromator into small light spots, so that the subsequent light path can be conveniently received.
The beam splitter realizes the light splitting of the output beam of the monochromator according to the intensity, and a small amount of light energy is reflected by the surface of the beam splitter and then received by the laser wavelength meter. Most of the light energy passes through the beam splitter and enters the decoherence integrating sphere.
The invention has the advantages that: the invention adopts the supercontinuum laser as the illumination light source of the monochromator, realizes the great improvement of the output monochromatic light intensity of the traditional monochromator system, ensures that the monochromator system can be suitable for the calibration of the absolute spectral radiance responsivity of the remote sensor, and enlarges the application range of the monochromator system in radiometry and remote sensor radiometry. By means of the characteristic of flexible control of a monochromator system, the convenience of spectrum scanning calibration in radiometric calibration is greatly improved, and the period of spectrum calibration and radiometric calibration of a remote sensor can be effectively reduced. Compared with the traditional monochromator calibration method based on a spectral line lamp and a single-point laser, the laser wavelength meter can effectively increase the wavelength detection points of the monochromator calibration and even monitor the output wavelength and the bandwidth of the monochromator system in real time, effectively improve the calibration precision of the monochromator, and further effectively improve the calibration precision level of a remote sensor laboratory.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a structural diagram after adding a fourth off-axis parabolic reflector.
Detailed Description
As shown in figure 1, a subdivided spectrum scanning calibration device based on a supercontinuum laser and a monochromator comprises a supercontinuum laser light source 1, a slit coupling light path 2, a monochromator 3, a monochromator output collimator 4, a focusing lens 5, a beam splitter 6, a laser wavelength meter 7, a decoherence integrating sphere 8, an electric control translation table 10, a standard radiance detector 9 and a device to be calibrated 11, wherein the supercontinuum laser light source 1 outputs broadband laser through the collimator, the light beam is coupled into an incident slit of the monochromator 3 after passing through the slit coupling light path 2, monochromatic light is output from an emergent slit of the monochromator 3 after tuning of the monochromator 3, the emergent slit of the monochromator 3 is positioned at an effective focus of the monochromator output collimator 4, collimated light is output after passing through the monochromator output collimator 4, collimated light is output, the collimated light beam passes through the focusing lens 5 and then is focused again, the focused light beam passes through a beam splitter 6 at the rear end of the light path, the surface of the focused light beam reflects a part of light beam, the part of reflected light beam is focused on the incident optical fiber end face of a laser wavelength meter 7, and the laser wavelength meter 7 interprets the wavelength and the bandwidth output by the current monochromator 3 in real time; the other part of the light beam focused by the focusing lens 5 passes through the beam splitter 6, enters the decoherence integrating sphere 8 through the light inlet 81 of the decoherence integrating sphere 8, a rotary diffuse reflection plate 82, a baffle 83 and a monitoring detector 84 are arranged in the decoherence integrating sphere 8, the light entering the decoherence integrating sphere 8 falls on the rotary diffuse reflection plate 82, the baffle 83 prevents the primary reflected light of the rotary diffuse reflection plate 82 from directly emitting from the light outlet 85 of the decoherence integrating sphere 8, after the uniform light is reflected for a plurality of times in the decoherence integrating sphere 8, the light is emitted from the light outlet 85 of the decoherence integrating sphere 8, the monitoring detector 84 monitors the stability of the light source of the decoherence integrating sphere 8 in real time, and the output power of the supercontinuum laser is finely adjusted by feedback according to the variation of the radiance in the decoherence integrating sphere 8, the standard radiance detector 9 and the device to be calibrated 11 are arranged on the electric control, the light inlets of the standard radiance detector 9 and the equipment to be calibrated 11 are respectively opposite to the light outlet 85 of the incoherent integrating sphere 8 through the moving switching of the electric control translation table 10, the reference spectrum radiance of the incoherent integrating sphere light outlet 85 is obtained through the measurement of the standard radiance detector 9, and the alternative radiometric calibration based on the standard detector is realized through the comparison with the measurement result of the equipment to be calibrated 11.
The working waveband of the super-continuous laser light source 1 covers 400-2400 nm.
The slit coupling optical path 2 is polished by three off-axesThe object plane reflector comprises a first off-axis parabolic reflector 21, a second off-axis parabolic reflector 22 and a third off-axis parabolic reflector 23, wherein the supercontinuum laser beam is focused after passing through the first off-axis parabolic reflector 21, the focus is positioned at the focus of the second off-axis parabolic reflector 22, so the beam is collimated again after passing through the second off-axis parabolic reflector 22, the focal length of the second off-axis parabolic reflector 22 is m times of that of the first off-axis parabolic reflector, so the first off-axis parabolic reflector 21 and the second off-axis parabolic reflector 22 form a reflective Kepler type laser beam expander, the diameter of the beam after passing through the second off-axis parabolic reflector 22 is m x D, wherein D is the diameter of the wide-wave-band laser output by the collimator of the supercontinuum laser source, and the third off-axis parabolic reflector 23 focuses the beam after passing through the second off-axis parabolic reflector 22 again, the focal point is located at the entrance slit of the monochromator 3, and the effective focal length of the off-axis parabolic reflector III 23 is set as f3The relative aperture of the beam after focusing is f3V (mD), let the relative aperture of the monochromator 3 be FNUM _ mono, if f3If (mD) = FNUM mono, then the supercontinuum laser is coupled into the monochromator 3 with the best match.
The slit of the monochromator 3 is adjustable, the built-in gratings are all blazed gratings, the grating combination is suitable for the working waveband of 400-plus 2400nm, and the graded-order optical filter rotating wheel is arranged in the monochromator 3, so that the pure output of the narrow-band spectrum with any wavelength in the 400-plus 2400nm interval can be realized.
The laser wavelength meter 7 is a laser wavelength meter of an echelle grating spectrometer type, the working waveband range covers 400 nm-1100 nm, and the laser wavelength meter is used for monitoring the output wavelength and the bandwidth of the monochromator; the laser wavelength meter 7 adopts a light beam input mode of optical fiber coupling input, and can measure wavelength and bandwidth information in real time; the laser wavelength meter is arranged behind the reflecting surface of the beam splitter and receives the output of the monochromator which is focused by the focusing lens and reflected by the surface of the beam splitter. If the output wavelength of the monochromator exceeds the working waveband range of the laser wavelength meter, the extinction order filter rotating wheel of the monochromator is adjusted to a channel without the filter, the laser wavelength meter is used for measuring the high diffraction order spectrum of the monochromator system, and the output wavelength is determined.
The inner container coating of the decoherence integrating sphere 8 is made of polytetrafluoroethylene materials and is provided with a light inlet, a light outlet, a monitoring detector mounting port and a rotating diffuse reflection plate mounting port, and the rotating diffuse reflection plate mounting port is positioned on the spherical wall opposite to the light inlet. A built-in baffle 83 coated with polytetrafluoroethylene coating is arranged on the spherical wall between the rotating diffuse reflection plate 82 and the integrating sphere light outlet 85, so that the primary reflected light of the rotating diffuse reflection plate 82 is prevented from directly exiting from the integrating sphere outlet. Quasi-monochromatic light emitted from the monochromator is focused by the focusing lens 5 and split by the beam splitter 6, light spots fall on the central area of the rotating diffuse reflection plate 82, and under the action of the rotating diffuse reflection plate 82, decoherence of laser is achieved. Under the action of the rotating diffuse reflection plate 82 and the high-reflectivity diffusion coating on the inner wall of the integrating sphere, incident light is sufficiently homogenized, and a uniform radiance surface light source is formed at the opening of the integrating sphere. The monitoring detector 84 is mounted on the sphere wall near the light outlet of the integrating sphere, directly monitors the change of radiance of the inner wall of the integrating sphere, feeds back and finely adjusts the output power of the super-continuous laser according to the change of radiance in the integrating sphere, and ensures the stability of the output of the super-continuous laser. The mounting position of the monitor probe should be such that the monitor probe does not directly observe the integrating sphere entrance 81, the rotating diffuse reflecting plate 82 and the built-in baffle 83.
The rotating diffuse reflection plate 82 is composed of a diffuse reflection plate and a direct current motor, wherein the diffuse reflection plate is fixed on a rotating shaft of the direct current motor and rotates around the rotating shaft along with the rotation of the motor. The diffuse reflection plate surface coating material is polytetrafluoroethylene, the diffuse reflection surface of the diffuse reflection plate faces the interior of the integrating sphere, and the reflection surface is flush with the inner wall of the integrating sphere.
The standard radiance detector 9 comprises three types of a silicon standard radiance detector, an indium gallium arsenic standard radiance detector and an expanded indium gallium arsenic standard radiance detector, and the three types of standard radiance detectors jointly cover 400-2400nm working wave bands; the absolute radiation values of the three standard radiance detectors are traced to the low-temperature absolute radiometer, and in the standard transmission process, the corresponding standard radiance detector or the standard radiance detector combination is selected according to the working waveband of the equipment to be calibrated.
The electric control translation stage 10 is an electric control linear displacement translation stage and is used for realizing alternate measurement of a standard radiance detector and an instrument to be calibrated.
The supercontinuum laser light source 1, the laser wavelength meter 7, the monitoring detector 84, the standard radiance detector 9 and the equipment to be marked 11 are all controlled by the control computer 12.
Another approach may be used if the entrance pupil of the device to be calibrated exceeds the size of the exit aperture 85 of the integrating sphere 8. Referring to fig. 2, an off-axis parabolic reflector 13 is disposed at the rear end of the light outlet 85 of the integrating sphere 8, the effective focus of the off-axis parabolic reflector 13 is located right at the light outlet 85 of the integrating sphere 8, and the light beam emitted from the off-axis parabolic reflector 13 is a collimated light beam with a certain divergence angle and is used for simulating an infinite target. Under the scheme, by selecting a proper focal length and a proper caliber of the off-axis parabolic reflector 13 and ensuring that the light outlet 85 of the integrating sphere 8 is positioned at an effective focus of the off-axis parabolic reflector 13, as long as a divergence angle of a light beam collimated by the parabolic reflector 13 is not smaller than a field angle of the device to be calibrated 11 and an effective caliber of the off-axis parabolic reflector 13 is not smaller than an entrance pupil size of the device to be calibrated 11, field matching and aperture matching between the calibration light source and the device to be calibrated 11 can be realized. The standard radiance detector 9 and the equipment 11 to be calibrated are installed on the linear displacement table 10 and are switched by the linear displacement table 10 in a moving mode, light inlets of the standard radiance detector 9 and the equipment 11 to be calibrated respectively face light beams collimated by the off-axis parabolic reflector 13, and the monitoring detector 84 monitors the stability of the integrating sphere light source in real time. The standard radiance detector 9 obtains the reference spectrum radiance of the light outlet 85 of the integrating sphere 8 through measurement, and the reference spectrum radiance is compared with the measurement result of the device to be calibrated 11, so that the alternative radiometric calibration based on the standard detector is realized. The method comprises the steps of controlling a monochromator 3 to tune output wavelength, measuring the output wavelength of the monochromator 3 in real time by using a laser wavelength meter 7, controlling a linear displacement table 10 to enable a light inlet of a device 11 to be calibrated to be opposite to a light beam collimated by an off-axis parabolic reflector 13, monitoring the stability of an integrating sphere light source by a monitoring detector 84 in real time, feeding back and finely adjusting the output power of the super-continuous laser according to the change of radiance in the integrating sphere, and ensuring the stability of the output of the super-continuous laser. And the equipment to be calibrated 11 acquires data and realizes the spectral calibration of the equipment to be calibrated after data processing. In the scheme, the ultra-continuous laser light source 1, the laser wavelength meter 7, the monitoring detector 84, the standard radiance detector 9 and the equipment to be calibrated 11 are all controlled by the control computer 12.
Claims (10)
1. A subdivision spectrum scanning calibration device based on a supercontinuum laser and a monochromator is characterized in that: the device comprises a super-continuous laser light source, a slit coupling light path, a monochromator output collimator, a focusing lens, a beam splitter, a laser wavelength meter, a decoherence integrating sphere, an electric control translation stage, a standard radiance detector and a device to be calibrated, wherein the super-continuous laser light source outputs broadband laser through the collimator of the super-continuous laser light source, a light beam is coupled into an incident slit of the monochromator after passing through the slit coupling light path and is tuned by the monochromator to output monochromatic light in an emergent slit of the monochromator, the emergent slit of the monochromator is positioned at an effective focus of the monochromator output collimator and is collimated by the monochromator output collimator to output a collimated light beam, the light beam is focused again after passing through the focusing lens, the focused light beam passes through the beam splitter at the rear end of the light path, the surface of the focused light beam reflects a part of the light beam, and the part of the reflected, the laser wavelength meter judges the wavelength and the bandwidth output by the current monochromator in real time; the other part of the light beam focused by the focusing lens penetrates through the beam splitter, enters the incoherent integrating sphere through a light inlet of the incoherent integrating sphere, a rotary diffuse reflection plate, a baffle and a monitoring detector are arranged in the incoherent integrating sphere, the light entering the incoherent integrating sphere falls on the rotary diffuse reflection plate, the baffle prevents primary reflected light of the rotary diffuse reflection plate from directly emitting from a light outlet of the incoherent integrating sphere, the uniform light is reflected for multiple times in the incoherent integrating sphere and then emitted from the light outlet of the incoherent integrating sphere, the monitoring detector monitors the stability of a light source of the incoherent integrating sphere in real time, the output power of the supercontinuum laser is fed back and finely adjusted according to the change of radiance in the incoherent integrating sphere, the standard radiance detector and the equipment to be calibrated are arranged on an electric control translation table, the light inlets of the standard radiance detector and the equipment to be calibrated are respectively opposite to the light outlet of the incoherent integrating sphere through the electric control translation table for moving and switching, and the standard radiance detector measures the reference spectrum radiance of the light outlet of the decoherence integrating sphere, and the reference spectrum radiance is compared with the measurement result of equipment to be calibrated to realize the alternative radiometric calibration based on the standard detector.
2. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 1, characterized in that: the working waveband of the super-continuous laser light source covers 400-2400 nm.
3. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 1, characterized in that: the slit coupling light path consists of three off-axis parabolic reflectors, namely a first off-axis parabolic reflector, a second off-axis parabolic reflector and a third off-axis parabolic reflector, after passing through the first off-axis parabolic reflector, the super-continuous laser beam is focused, the focus is located at the focus of the second off-axis parabolic reflector, so that the beam is collimated again after passing through the second off-axis parabolic reflector, the focal length of the second off-axis parabolic reflector is m times of that of the first off-axis parabolic reflector, so that the first off-axis parabolic reflector and the second off-axis parabolic reflector form a reflective Kepler type laser beam expander, the diameter of the beam after passing through the second off-axis parabolic reflector is m x D, wherein D is the diameter of the wide-waveband laser output by the collimator of the super-continuous laser source, and the third off-axis parabolic reflector is used for focusing again the beam after passing through the second off-axis parabolic reflector, the focal point is positioned at the entrance slit of the monochromator, and the effective focal length of the off-axis parabolic reflector III is set as f3The relative aperture of the beam after focusing is f3V (mD), let the relative aperture of the monochromator be FNUM _ mono, if f3/(mD) = FNUM mono, the supercontinuum laser is coupled into the monochromator with the best match.
4. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 1, characterized in that: the slit of the monochromator is adjustable, the built-in gratings are all blazed gratings, the grating combination is suitable for 400-2400nm working wave band, and a graded-order optical filter rotating wheel is arranged in the monochromator.
5. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 4, characterized in that: the laser wavelength meter is a laser wavelength meter of an echelle grating spectrometer type, the working waveband range covers 400 nm-1100 nm, and the laser wavelength meter is used for monitoring the output wavelength and the bandwidth of a monochromator; the laser wavelength meter adopts a light beam input mode of optical fiber coupling input, and measures wavelength and bandwidth information in real time; the laser wavelength meter is arranged behind the reflecting surface of the beam splitter and receives the output of the monochromator focused by the focusing lens and reflected by the surface of the beam splitter, if the output wavelength of the monochromator exceeds the working waveband range of the laser wavelength meter, the extinction order filter rotating wheel of the monochromator is adjusted to a channel without the filter, the laser wavelength meter is used for measuring the high diffraction order spectrum of the monochromator, and the output wavelength is determined.
6. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 5, characterized in that: the decoherence integrating sphere inner container coating is made of polytetrafluoroethylene materials and is provided with a light inlet, a light outlet, a monitoring detector mounting port and a rotating diffuse reflection plate mounting port, the monitoring detector and the rotating diffuse reflection plate are respectively mounted on the monitoring detector mounting port and the rotating diffuse reflection plate mounting port, the rotating diffuse reflection plate mounting port is positioned on the sphere wall opposite to the light inlet, the baffle is mounted on the sphere wall between the rotating diffuse reflection plate and the decoherence integrating sphere light outlet, the polytetrafluoroethylene coating is sprayed on the baffle, the monitoring detector is positioned on the sphere wall near the integrating sphere light outlet and avoids directly observing the integrating sphere light inlet, the rotating diffuse reflection plate and the baffle, the rotating diffuse reflection plate is composed of the diffuse reflection plate and a direct current motor, the diffuse reflection plate is fixed on the rotating shaft of the direct current motor and rotates around the rotating shaft as the center, the coating on the surface of the diffuse reflection plate is made of polytetrafluoroethylene materials, the diffuse reflection surface faces the interior of the integrating sphere, and the reflection surface is flush with the inner wall of the integrating sphere.
7. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 1, characterized in that: the standard radiance detector comprises three types of a silicon standard radiance detector, an indium gallium arsenic standard radiance detector and an expanded indium gallium arsenic standard radiance detector, and the three types of standard radiance detectors jointly cover 400-2400nm working wave bands; the absolute radiation values of the three standard radiance detectors are traced to the low-temperature absolute radiometer, and in the standard transmission process, the corresponding standard radiance detector or the standard radiance detector combination is selected according to the working waveband of the equipment to be calibrated.
8. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 1, characterized in that: the electric control translation stage is an electric control linear displacement translation stage and is used for realizing the alternate measurement of the standard radiance detector and the instrument to be calibrated.
9. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 1, characterized in that: the supercontinuum laser light source, the laser wavelength meter, the monitoring detector, the standard radiance detector and the equipment to be calibrated are all controlled by a control computer.
10. The subdivision spectrum scanning calibration device based on the supercontinuum laser and the monochromator as claimed in claim 1, characterized in that: if the entrance pupil of the device to be calibrated exceeds the size of the light outlet of the decoherence integrating sphere, a fourth off-axis parabolic reflector is arranged at the rear end of the light outlet of the decoherence integrating sphere, the effective focus of the fourth off-axis parabolic reflector is positioned at the light outlet of the decoherence integrating sphere, as long as the divergence angle of the light beam collimated by the fourth off-axis parabolic reflector is not smaller than the field angle of the device to be calibrated, and the effective caliber of the fourth off-axis parabolic reflector is not smaller than the size of the entrance pupil of the device to be calibrated, the field-of-view matching and the aperture matching between the light source and the device to be calibrated can be realized, and the light beam collimated by the fourth off-axis parabolic reflector respectively faces the standard radiance detector positioned on the electric control translation stage and the light inlet of the device.
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| CN112683396A (en) * | 2021-03-18 | 2021-04-20 | 武汉精创电子技术有限公司 | Integrating sphere quantitative spectrum output method and system and electronic equipment |
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