CN108020516A - Spectrometer or imaging spectrometer - Google Patents

Spectrometer or imaging spectrometer Download PDF

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Publication number
CN108020516A
CN108020516A CN201610953012.5A CN201610953012A CN108020516A CN 108020516 A CN108020516 A CN 108020516A CN 201610953012 A CN201610953012 A CN 201610953012A CN 108020516 A CN108020516 A CN 108020516A
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Prior art keywords
grating
spectrometer
lens
condenser lens
lenticulation
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李�灿
冯兆池
张莹
王鹏
唐宇轩
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Dalian Institute of Chemical Physics of CAS
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Dalian Institute of Chemical Physics of CAS
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Priority to CN201610953012.5A priority Critical patent/CN108020516A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The present invention is to provide spectrometer or imaging spectrometer, specially by transmission grating and condenser lens integration or by collimating element, transmission grating and the integrated spectrometer of condenser lens or imaging spectrometer, including entrance slit, detector, collimating element, focused transmission grating or collimation focusing lenticulation.The spectrometer includes condenser lens grating, which is carved with grating fringe in the side of condenser lens, which can realize light splitting, focusing function at the same time or realize collimation, light splitting, focusing function at the same time;The condenser lens grating is achromatism condenser lens grating.Due to grating and condenser lens one, therefore solves the problem that usual through mode grating cannot rotate at the same time, the rotary advantage of reflective gratings and transmission-type grating transmitance is high, and transmitance is uniform, the advantages of identical to polarization photoresponse, is combined together, and completes spectrum and focus on to export.

Description

Spectrometer or imaging spectrometer
Technical field
The present invention relates to by transmission grating and condenser lens integration or by collimating element, transmission grating and condenser lens one The spectrometer or imaging spectrometer of body.
Background technology
Spectrometer or imaging spectrometer are widely used in the spectral detection such as spectrophotometer detection, absorption light to sample Spectrum detection, fluorescence spectrum detection, Raman spectrum detection etc..Spectral technique can fast and accurately analyze sample.Spectrum Technology is widely used, and can be applied to food, safety, material evidence, mineral, environment, chemistry, material, biology, multiple necks such as ocean Domain.Sample type includes the variforms such as solid, powder, liquid, gas, interface, colloid.Currently, spectrometer is widely used in Every field, application are also more and more extensive.
The principle of spectrometer is:The light of sample focuses on the entrance slit for inciding spectrometer, is formed by collimator objective flat Row light beam;Parallel beam incident is divided into grating;The collimated object lens of diffraction light through grating beam splitting are irradiated to exit Focussing plane on;Jiao that detector such as CCD photoelectric couplings detector and MPT photomultiplier tube detectors are located to emergent light puts down Face;Detector record spectroscopic signal realizes the detection of spectral signal.
The grating of Modern optical spectrometers can be divided into through mode grating and reflective gratings.More than the comparison that Modern optical spectrometers use Reflecting light grating spectrograph.Reflecting light grating spectrograph can save the space shared by spectrometer, realize the miniaturization of spectrometer. But reflective gratings plate one layer of reflectance coating due to needing, and the wavelength response of the reflectivity of reflectance coating is different, have impact on spectrometer Spectral detection scope.Through mode grating spectrograph, grating use through mode grating, the response of the transmitance of grating to each wavelength All same, but need focusing objective len to carry out further focal imaging.The grating of through mode grating spectrograph usually immobilizes, shadow The collection flexibility of spectrometer is rung.
The content of the invention
In view of the above-mentioned problems, the present invention realizes grating and standard by the way of carrying out portraying grating on transmission focusing mirror Being combined into one for straight object lens, rotates transmission-type grating, convenient to change centre wavelength, easy to adjust, stable structure.It is comprehensive The advantages of reflecting light grating spectrograph and transmission-type grating spectrometer.Fluorescence spectrum, Raman suitable for various excitation wavelengths Spectrum, ultraviolet-visible absorption spectroscopy, circular dichroism research.The especially spectral detection of ultraviolet band.
The technical solution adopted by the present invention:
Spectrometer or imaging spectrometer, specially by transmission grating and condenser lens integration or by collimating element, transmission Grating and the integrated spectrometer of condenser lens or imaging spectrometer, including entrance slit, detector, collimating element, focus on saturating Mirror grating or including entrance slit, detector, collimation focusing lenticulation:
The spectrometer includes condenser lens grating, which is carved with gratings strips in the side of condenser lens Line;
The imaging spectrometer includes condenser lens grating, which is carved with light in the side of condenser lens Grizzly bar line, which being capable of achromatism;
The condenser lens grating is that can collimate (4-6,4-7) or can not collimate (4-1,4-2,4-3,4-4,4-5) The lenticulation of light beam, first lens of the condenser lens grating are carved with grating fringe on incident light side, incident It has been directional light during light arrival grating fringe, directional light first passes through grating fringe through the condenser lens grating and is divided again It is focused by other lens;
Second lens of the collimation focusing lenticulation are carved with grating fringe on incident light side, and incident light arrives First lens up to the collimation focusing lenticulation are collimated, and the grating fringe for reaching second lens is divided, Three pieces lens are reached to be focused.
The lenticulation includes double glued achromatism condenser lens gratings, double glued cylinder achromatism condenser lens light Grid, air-gap achromatism condenser lens grating;The collimation lens grating is selected from three glued achromatism condenser lens gratings, ultraviolet One kind in three pieces mirror condenser lens grating is corrected to infrared (UV-to-NIR).
Double glued achromatism condenser lens gratings are glued by low scattered positive lens and high dispersive negative lens, and just Grating is portrayed on the outside of lens;
Double glued cylinder achromatism condenser lens gratings are glued by cylindrical lens and negative lens, and are put down in cylindrical mirror Portray grating in face side;
The air-gap achromatism condenser lens grating is into the two it by low scattered positive lens and high dispersive negative lens group Between have the air gap, grating is portrayed on the outside of positive lens;
Described three glued achromatism condenser lens gratings are by hitting exactly one piece of low scattered each one piece of high dispersive in positive lens both sides Negative lens is glued, and portrays grating on the outside of any negative lens;
It is described it is ultraviolet to infrared (UV-to-NIR) correction three pieces mirror condenser lens grating be according to low scattered positive lens, High dispersive negative lens, low scattered positive lens groups on the outside of any positive lens into portraying grating.
It is by transmission grating and the integrated lenticulation of condenser lens:It is carved with condenser lens close to incident beam side Grating fringe, incident beam have been directional light when reaching grating fringe, and directional light is realized the light splitting of light through lenticulation and gathered It is burnt;
It is by collimating element, transmission grating and the integrated lenticulation of condenser lens:In condenser lens away from incident light Grating fringe is carved with beam side, which realizes collimation, light splitting and the focusing of light through lenticulation;
Trued up directly in spectrometer or imaging spectrometer installation or uneasiness according to whether the lenticulation can collimate selection Element.
The groove direction of the grating fringe of lenticulation is vertical with the optical axis of incident parallel light, and with the slit of entrance slit Direction is parallel.
The detector is multiple tracks imaging detector CCD or photomultiplier PMT.
Optical signal enters spectrometer by entrance slit or imaging spectrometer is entering into diverging light, diverging light by focal plane The collimating element penetrated at slit becomes directional light or directly reaches the diffraction surfaces of lenticulation, different by lenticulation diffraction To different directions, diffraction light focuses on multiple tracks imaging detector CCD or photomultiplier PMT the optical diffraction of wavelength at the same time, Spectrum is recorded, exports;
The groove direction of the grating fringe of lenticulation is vertical with the optical axis of incident parallel light, and with the slit of entrance slit Direction is parallel, and lenticulation is in after collimating element, before multiple tracks imaging detector CCD or photomultiplier PMT.Detector Plane is on the focal plane of lenticulation.
The collimating element is collimation reflective concave surface mirror;Collimated reflected concave mirror uses common optical axis light path mode, incident narrow On focal plane of the seam in collimated reflected concave mirror, light beam after collimated reflected concave mirror by becoming parallel after entrance slit Light.In spectrometer or imaging spectrometer without collimating element, former and later two focal planes of collimation focusing lenticulation are respectively at At entrance slit and on detector plane.
Above-mentioned spectrometer or imaging spectrometer can install filter plate before entrance slit or after entrance slit;Incident light Beam is converged after being divided by lenticulation, left by passing through by collimating element after filter plate or shining directly into lenticulation surface It is imaged after lenticulation spectrometer at detector.
The spectrometer or imaging spectrometer for Fluorescence Spectrometer, ultraviolet-visible absorption spectroscopy instrument, circular dichroism instrument, into As spectrometer, Raman spectrometer.
A kind of following proposal is specifically provided:
The condenser lens grating is used for the light splitting and focusing of light;The condenser lens grating includes double glued achromatisms and gathers Focus lens grating, double glued cylinder achromatism condenser lens gratings, air-gap achromatism condenser lens grating, three glued achromatisms One kind in condenser lens grating, the ultraviolet three pieces mirror condenser lens grating to infrared (UV-to-NIR) correction;
Double glued achromatism condenser lens grating is by positive lens and negative lens group into the convex surface of positive lens and negative lens Concave surface it is glued, the opposite side of positive lens cemented surface is carved with grating;
Double glued cylinder achromatism condenser lens grating is by cylindrical lens and negative lens group into the cylinder of cylindrical lens Glued with the concave surface of negative lens, grating is carved with the side of cylindrical lens plane;
The air-gap achromatism condenser lens grating is by positive lens and negative lens group into the convex surface of positive lens and negative lens Concave surface it is opposite, the other side opposite with negative lens concave surface is carved with grating in positive lens;
Described three glued achromatism condenser lens gratings are negative saturating by middle one piece of positive lens and each one piece of the positive lens both sides Microscope group is into two convex surfaces of positive lens and the concave surface of two pieces of negative lenses are glued, and the opposite side of any negative lens cemented surface is carved with light Grid;
It is described it is ultraviolet to infrared (UV-to-NIR) correction three pieces mirror condenser lens grating by middle one piece of negative lens and should Each one piece of positive lens groups in negative lens both sides into, leave the air gap between each lens, both ends sealing, two concave surfaces of negative lens Opposite with the convex surface of two pieces of positive lens, the other side opposite with negative lens is carved with grating in any positive lens;
The collimation focusing lenticulation is used for collimation, light splitting and the focusing of light;The collimation focusing lenticulation includes It is three glued achromatism collimation focusing lenticulations, ultraviolet to infrared (UV-to-NIR) correction three pieces mirror collimation focusing lens light One kind in grid;
Described three glued achromatism collimation focusing lenticulations are by middle one piece of positive lens and the positive lens both sides each one Block negative lens group is into two convex surfaces of positive lens and the concave surface of two pieces of negative lenses are glued, any side in two convex surfaces of positive lens It is carved with grating;
Described ultraviolet infrared (UV-to-NIR) correction three pieces mirror collimation focusing lenticulation that arrives is by middle one piece of negative lens With each one piece of positive lens groups in the negative lens both sides into, leave the air gap between each lens, both ends sealing, two of negative lens Concave surface is opposite with the convex surface of two pieces of positive lens, and grating is carved with any side in two concave surfaces of negative lens;
Described first lens of condenser lens grating are carved with grating fringe on incident light side, and incident light reaches grating It has been directional light during striped, directional light first passes through grating fringe through the condenser lens grating and carries out light splitting refocusing;
Described second lens of collimation focusing lenticulation are carved with grating fringe on incident light side, and incident light reaches The collimation focusing lenticulation is first collimated, and light splitting refocusing is carried out by grating fringe.
Optical filter may be mounted at before entrance slit 1, and filter holder is fixed on slit, the geometric center of optical filter with Optical axis coincidence.The optical filter of corresponding wave band, such as Fig. 6-1 can be replaced with the change of spectrometer excitation wavelength;
Optical filter may be mounted at after entrance slit 1, and filter holder is fixed on spectrometer bottom plate, the geometry of optical filter Center and optical axis coincidence.The optical filter of corresponding wave band, such as Fig. 6-2 can be replaced with the change of spectrometer excitation wavelength;
Entrance slit 1 is on a focal plane of collimated reflected concave mirror 2, the flashlight warp incident from entrance slit 1 Crossing after collimated reflected concave mirror 2 becomes directional light, such as Fig. 1, and 2;
Entrance slit 1 is on the focal plane of collimation lens grating 2, and the flashlight incident from entrance slit 1 is by collimation Become directional light, such as Fig. 3 after lenticulation 2;
Flashlight becomes directional light after collimated reflected concave mirror 2, and directional light is incided on the grating face of lenticulation 3 Afterwards by grating beam splitting, the light of different wave length incides the different picture of detector after the focusing of 3 rear lens of lenticulation after light splitting On element, such as Fig. 5-1;
Flashlight becomes directional light after collimation lens grating 2, after directional light is incided on the grating face of lenticulation 3 By grating beam splitting, the light of different wave length incides the different pixel of detector after the focusing of 3 rear lens of lenticulation after light splitting On, such as Fig. 5-1;
Flashlight passes through entrance slit 1, collimated reflected concave mirror 2, after lenticulation 3 on multiple tracks imaging detector CCD Corresponding imaging, such as Fig. 5-2;
Flashlight passes through entrance slit 1, is accordingly imaged on multiple tracks imaging detector CCD after collimation lens grating 2, such as schemes 3。
Beneficial effects of the present invention:
Lenticulation spectrometer, which is utilized in, to be portrayed the mode of indentation and makes transmission-type grating on condenser lens, the transmission-type Grating has the function of that through mode grating and focusing objective len are utilized the lens light of transmission-type grating and condenser lens integrated function Grid, realize being combined into one for grating and collimator objective, rotate transmission-type grating, convenient to change centre wavelength, adjusting side Just, stable structure, solves the problem that usual through mode grating cannot rotate, by the rotary advantage of reflective gratings and thoroughly Formula grating transmitance height is penetrated, transmitance is uniform, is combined together to polarizing the advantages of photoresponse is identical, completes spectrum and gathers Jiao's output.
Spectrometer collimated reflected object lens use common optical axis light path mode, collimated reflected concave mirror and transmission-type grating focus lamp Aberration correction can be further carried out, spectrometer is become imaging spectrometer.In wider wave-length coverage, aberration and aberration effects Small, spectral resolution is high, and throughput is high, and veiling glare is few, and transmission-type grating can rotate, convenient to change centre wavelength, adjusts It is convenient, stable structure.
Lenticulation spectrometer of the present invention is suitable for fluorescence spectrum, the ultravioletvisible absorption light of various excitation wavelengths Spectrum, circular dichroism and imaging spectral research.The especially research of the Raman spectrum of ultraviolet band (below 400nm).
Brief description of the drawings
Fig. 1 is one of structure principle chart of the present invention, (Multichannel detection device mode);
Transmission-type grating spectrometer:Entrance slit 1, collimated reflected concave mirror 2, lenticulation 3, multiple tracks imaging detector CCD 4。
Fig. 2 is one of structure principle chart of the present invention, (single track PMT detectors mode);
Transmission-type grating spectrometer:Entrance slit 1, collimated reflected concave mirror 2, lenticulation 3, single track PMT detectors 4.
Fig. 3 is one of structure principle chart of the present invention, (collimation light splitting focuses on integral type);
Transmission-type grating spectrometer:Entrance slit 1, collimation lens grating 2, imaging detector (single channel or multichannel) 3.
Fig. 4 is the lens type grating schematic diagram in the present invention, wherein, 4-1 is double glue and achromatism focus grating;4-2 is Double glue and cylinder achromatism focus gratings;4-3 is three glued achromatism focus gratings;4-4 is air-gap achromatism focus grating; 4-5 corrects three pieces mirror focus grating to be ultraviolet to infrared (UV-to-NIR);4-6 is three glued achromatism collimation focusing gratings; 4-7 corrects three pieces mirror collimation focusing grating to be ultraviolet to infrared (UV-to-NIR).
Fig. 5 is the Imaging grating schematic diagram in the present invention, and plane of light incidence is grating face, is focused on after grating beam splitting.5-1 is The schematic diagram that lenticulation light splitting focuses on;5-2 is spectrometer imaging schematic diagram.
Fig. 6 is to provide a kind of image Raman spectrometer schematic diagram of 532nm laser as excitation source.
532nm laser Raman spectrometers:Entrance slit 1, collimated reflected concave mirror 2, lenticulation 3, multiple tracks imaging detection Device CCD 4,532nm band edge wave filter (notch filter) 5.
Embodiment
Embodiment 1
Fig. 1 and 2 show the index path of spectrometer or imaging spectrometer including condenser lens grating 3, focusing therein Lenticulation 3 can select the condenser lens grating shown in 4-1,4-2,4-3,4-4 and 4-5 in Fig. 4, and entrance slit 1 is in standard On one focal plane of straight reflective concave surface mirror 2, the flashlight incident from entrance slit 1 becomes after collimated reflected concave mirror 2 Directional light, then be divided and focused on by condenser lens grating 3.
Embodiment 2
Fig. 3 show the index path of spectrometer or imaging spectrometer including collimation focusing lenticulation 2, wherein collimation is poly- Focus lens grating 2 can pass through entrance slit 1, collimation focusing lenticulation 2 selected from one kind in 4-6,4-7 in Fig. 4, flashlight Accordingly it is imaged on multiple tracks imaging detector CCD afterwards.
Embodiment 3
Fig. 6 provides a kind of Raman spectrometer, including entrance slit 1, and optical filter 5, collimated reflected concave mirror 2, focuses on saturating Mirror grating 3, the part of detector more than 4.Exciting light is 532nm laser, and the Raman scattering signal produced after inciding on sample enters To Raman spectrometer, 532nm optical filters can be placed on before slit (as in fig. 6-2) or after slit (as in Figure 6-1).Draw Graceful signal will be after wherein Rayleigh line filters out, after inciding on reflecting concave lenses 2 by optical filter, and becoming directional light, (light path is as schemed Shown in 5-1,5-2).Directional light incides 3 surface of condenser lens grating, i.e. grating facet, and grating parameter 1200/mm, focuses on saturating Mirror grating such as Fig. 4-1,4-2,4-3,4-4.Scattering light is gathered after being divided according to grating equation (Bragg equations) by lens below Jiao, the flashlight of different wave length are focused on below in the different pixels of detector.
Embodiment 4
When being illustrated in figure 6 ultraviolet Raman spectrometer, including entrance slit 1, optical filter 5, collimated reflected concave mirror 2, gathers Focus lens grating 3, the part of detector more than 4.Exciting light is Ultra-Violet Laser, laser linewidth<0.1nm, generation after inciding on sample Raman scattering signal enter ultraviolet Raman spectrometer, corresponding uv filter can be placed on (6-2) or narrow before slit After seam (6-1).Raman signal after inciding on collimated reflected concavees lens, will become after wherein Rayleigh line filters out by optical filter Directional light (light path is as shown in Fig. 5-1,5-2).Directional light incides condenser lens grating surface, i.e. grating facet, grating parameter 2400/mm or 3600/mm, condenser lens grating such as Fig. 4-5.Scattering light is gathered after being divided according to grating equation by lens below Jiao, the flashlight of different wave length are focused on below in the different pixels of detector.
When optical filter described in embodiment 3 and 4 is installed on entrance slit 1 before, filter holder is fixed on slit, filter The geometric center and optical axis coincidence of mating plate.The optical filter of corresponding wave band can be replaced with the change of spectrometer excitation wavelength, Such as Fig. 6-2;
When optical filter is installed on entrance slit 1 afterwards, filter holder is fixed on spectrometer bottom plate, in the geometry of optical filter The heart and optical axis coincidence.The optical filter of corresponding wave band, such as Fig. 6-1 can be replaced with the change of spectrometer excitation wavelength.
Conventional transmitting intensity distribution, since beam splitting system below and focusing system are separated, spectrometer outlet is solid It is fixed, therefore the centre wavelength of grating is fixed.And the spectrometer or imaging that include condenser lens grating that the present invention designs Spectrometer will be divided and focusing system is combined into one, and on rotatable platform, can change centre wavelength, Ke Yizeng by rotating Add spectrographic detection scope;
The present invention have also been devised to be lost in spectrometer or imaging beam transmission including collimation focusing lenticulation, is improved Signal strength.Space has been saved at the same time, has reduced the volume of spectrometer, has been laid the foundation for the miniaturization of spectrometer.

Claims (10)

1. spectrometer or imaging spectrometer, specially by transmission grating and condenser lens integration or by collimating element, transmitted light Grid and the integrated spectrometer of condenser lens or imaging spectrometer, including entrance slit, detector, collimating element, condenser lens Grating or including entrance slit, detector, collimation focusing lenticulation, it is characterised in that:
The spectrometer includes condenser lens grating, which is carved with grating fringe in the side of condenser lens;
The imaging spectrometer includes condenser lens grating, which is carved with gratings strips in the side of condenser lens Line, which being capable of achromatism;
The condenser lens grating is can collimate (4-6,4-7) or can not collimate (4-1,4-2,4-3,4-4,4-5) light beam Lenticulation, first lens of the condenser lens grating are carved with grating fringe on incident light side, and incident light arrives Up to being directional light during grating fringe, directional light first passes through grating fringe and be divided through the condenser lens grating to be passed through again Other lens are focused;
Second lens of the collimation focusing lenticulation are carved with grating fringe on incident light side, and incident light reaches institute First lens for stating collimation focusing lenticulation are collimated, and the grating fringe for reaching second lens is divided, and are reached Three pieces lens are focused.
2. spectrometer according to claim 1 or imaging spectrometer, it is characterised in that:
The lenticulation includes double glued achromatism condenser lens gratings, double glued cylinder achromatism condenser lens gratings, sky Air gap achromatism condenser lens grating;The collimation lens grating is selected from three glued achromatism condenser lens gratings, ultraviolet to red (UV-to-NIR) corrects one kind in three pieces mirror condenser lens grating outside.
3. spectrometer according to claim 2 or imaging spectrometer, it is characterised in that:
Double glued achromatism condenser lens gratings are glued by low scattered positive lens and high dispersive negative lens, and in positive lens Portray grating in outside;
Double glued cylinder achromatism condenser lens gratings are glued by cylindrical lens and negative lens, and in cylinder mirror plane one Portray grating in side;
The air-gap achromatism condenser lens grating is into having therebetween by low scattered positive lens and high dispersive negative lens group The air gap, portrays grating on the outside of positive lens;
Described three glued achromatism condenser lens gratings are born by hitting exactly one piece of low scattered each one piece of high dispersive in positive lens both sides Mirror is glued, and portrays grating on the outside of any negative lens;
It is described it is ultraviolet to infrared (UV-to-NIR) correction three pieces mirror condenser lens grating be according to low scattered positive lens, high score Negative lens, low scattered positive lens groups are dissipated into portraying grating on the outside of any positive lens.
4. spectrometer according to claim 1 or imaging spectrometer, it is characterised in that:
It is by transmission grating and the integrated lenticulation of condenser lens:In condenser lens grating is carved with close to incident beam side Striped, incident beam have been directional light when reaching grating fringe, and directional light realizes the light splitting and focusing of light through lenticulation;
It is by collimating element, transmission grating and the integrated lenticulation of condenser lens:In condenser lens away from incident beam one Grating fringe is carved with side, which realizes collimation, light splitting and the focusing of light through lenticulation;
Whether selection can be collimated in spectrometer or imaging spectrometer installation or uneasy dress collimating element according to the lenticulation.
5. spectrometer according to claim 1 or imaging spectrometer, it is characterised in that:The quarter of the grating fringe of lenticulation Line direction is vertical with the optical axis of incident parallel light, and parallel with the slit direction of entrance slit.
6. spectrometer according to claim 1 or imaging spectrometer, it is characterised in that:The detector is visited for multiple tracks imaging Survey device CCD or photomultiplier PMT.
7. spectrometer according to claim 6 or imaging spectrometer, it is characterised in that:
Optical signal enters spectrometer or imaging spectrometer into diverging light by entrance slit, and diverging light is by focal plane incident narrow Collimating element at seam becomes directional light or directly reaches the diffraction surfaces of lenticulation, by lenticulation diffraction, different wave length Optical diffraction to different directions, diffraction light focuses on multiple tracks imaging detector CCD or photomultiplier PMT at the same time, spectrum It is recorded, exports;
The groove direction of the grating fringe of lenticulation is vertical with the optical axis of incident parallel light, and with the slit direction of entrance slit Parallel, lenticulation is in after collimating element, before multiple tracks imaging detector CCD or photomultiplier PMT, detector plane On focal plane in lenticulation.
8. spectrometer or imaging spectrometer according to claim 1 or 7, it is characterised in that:The collimating element is collimation Reflective concave surface mirror;Collimated reflected concave mirror uses common optical axis light path mode, and Jiao that entrance slit is in collimated reflected concave mirror puts down On face, light beam after collimated reflected concave mirror by becoming directional light after entrance slit.Spectrometer without collimating element or into As in spectrometer, former and later two focal planes of collimation focusing lenticulation are respectively at entrance slit and on detector plane.
9. according to claim the 1-8 any spectrometer or imaging spectrometer, it is characterised in that:Before entrance slit or enter Filter plate is installed after penetrating slit;Incident beam by collimating element or shines directly into lenticulation surface by being passed through after filter plate, Converge after being divided by lenticulation, be imaged after leaving lenticulation spectrometer at detector.
10. spectrometer according to claim 1 or imaging spectrometer, it is characterised in that:The spectrometer or imaging spectral Instrument is Fluorescence Spectrometer, ultraviolet-visible absorption spectroscopy instrument, circular dichroism instrument, imaging spectrometer, Raman spectrometer.
CN201610953012.5A 2016-11-03 2016-11-03 Spectrometer or imaging spectrometer Pending CN108020516A (en)

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WO2020181583A1 (en) * 2019-03-14 2020-09-17 华域视觉科技 (上海) 有限公司 Infrared ray-based road surface monitoring system and method, and vehicle
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CN113412415A (en) * 2019-01-28 2021-09-17 统雷有限公司 Interleaved diffraction grating
CN113485020A (en) * 2021-05-31 2021-10-08 上海悠睿光学有限公司 Light splitter based on transmission grating

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