CN103105230A - Mini-type spectrograph based on varied lattice spacing grating lens - Google Patents
Mini-type spectrograph based on varied lattice spacing grating lens Download PDFInfo
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- CN103105230A CN103105230A CN2012105478627A CN201210547862A CN103105230A CN 103105230 A CN103105230 A CN 103105230A CN 2012105478627 A CN2012105478627 A CN 2012105478627A CN 201210547862 A CN201210547862 A CN 201210547862A CN 103105230 A CN103105230 A CN 103105230A
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Abstract
The invention discloses a mini-type spectrograph based on a varied lattice spacing grating lens. The mini-type spectrograph comprises an incidence pinhole, varied lattice spacing gratings, a micro convex lens, a transparent substrate and an array photoelectric detector, wherein the varied lattice spacing gratings are arranged on a convex face of the micro convex lens, and the flat face of the micro convex lens is fixedly connected with the transparent substrate; otical signals to be detected enter from the incidence pinhole, and are divided into diffraction optical signals containing multiple wavelength lights; the micro convex lens focuses the diffraction optical signals, and then collects the diffraction optical signals on the array photoelectric detector to form light spots; and the array photoelectric detector detects the light spots collected by the array photoelectric detector. The mini-type spectrograph based on the varied lattice spacing grating lens eliminates aberration through adoption of combination of the varied lattice spacing gratings and the micro convex lens. Therefore, the purpose of improving spectral resolution is realized, and the varied lattice spacing gratings and the micro convex lens are manufactured through adoption of micro-nano machining technology, so size is greatly reduced, and the spectrograph can be conveniently integrated in an embedded type detection system.
Description
Technical field
The present invention relates to field of spectral analysis technology, relate in particular to a kind of micro spectrometer based on the grid pitch changing grating lens.
Background technology
Spectrometer is the important analysis instrument of amalyzing substances composition.Traditional spectrometer volume is larger, and service condition is harsh.And in modernization industry is produced, often need the online spectrometer of microminiature that can embed production line and carry out Real-Time Monitoring.Micro spectrometer of the prior art generally is integrated into collimating mirror, plane grating and focus lamp a multiple device, has dwindled to a certain extent volume.Yet, the not employing curved surface elements that above-mentioned micro spectrometer has, the pitch gratings such as some employings make that final imaging spectrum face is not straight, problem that aberration is larger still exists.
Summary of the invention
The present invention is intended to solve above-mentioned problems of the prior art, proposes a kind of micro spectrometer based on the grid pitch changing grating lens.
The micro spectrometer based on the grid pitch changing grating lens that the present invention proposes comprises: incident pin hole, grid pitch changing grating, dimpling lens, transparency carrier and array photodetectors.Wherein, described dimpling lens have a convex surface and a plane, and described grid pitch changing grating is arranged at convex surface one side of described dimpling lens, and the plane of described dimpling lens is fixedly connected with described transparency carrier; Diffraction occurs from the incident of described incident pin hole through after described grid pitch changing grating in light signal to be measured, and described light signal to be measured is divided into and comprises multi-wavelength's diffraction of light light signal; Described dimpling lens focus on described diffraction light signal, diffraction light signal after focusing converges on described array photodetectors by described transparency carrier and forms luminous point, wherein, the identical light of described diffraction light signal medium wavelength pools a bit on described array photodetectors, and described array photodetectors sensing converges the luminous point on it.
The micro spectrometer based on the grid pitch changing grating lens that the present invention proposes adopt the mode that grid pitch changing grating is combined with the dimpling lens eliminate aberration, make through the spectrum face of light formation straight, thereby reach the purpose that improves spectral resolution, simultaneously, grid pitch changing grating and dimpling lens all adopt the micro-nano processing technology to make, make the micro spectrometer volume based on the grid pitch changing grating lens significantly reduce, be convenient to be integrated in embedded detection system.In addition, the dimpling lens in the present invention are easy to make by micro fabrication, especially are easy to make the convex lens array, thereby provide possibility for making multi-channel spectrometer based.
Description of drawings
Fig. 1 is the micro spectrometer structural drawing based on the grid pitch changing grating lens of one embodiment of the invention;
Fig. 2 is the grid pitch changing grating local pattern schematic diagram of one embodiment of the invention.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage more clear, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, is not intended to limit the present invention.
The micro spectrometer based on the grid pitch changing grating lens that the present invention proposes is used for treating the photometry signal and carries out spectral analysis.
Figure 1 shows that the micro spectrometer structural drawing based on the grid pitch changing grating lens of one embodiment of the invention.Described micro spectrometer based on the grid pitch changing grating lens comprises: incident pin hole 100, grid pitch changing grating 200, dimpling lens 300, transparency carrier 400 and array photodetectors 500.
As shown in Figure 1, described dimpling lens 300 have a convex surface and a plane, and described grid pitch changing grating 200 is arranged at convex surface one side of described dimpling lens 300, and the plane of described dimpling lens 300 is fixedly connected with described transparency carrier 400.Particularly, can adopt MOEMS technique, make described dimpling lens 300 in conjunction with hot melt or little die casting on described transparent substrates 400, adopt the method for electron-beam direct writing or ultraviolet photolithographic to make described grid pitch changing grating 200.In the present embodiment, the diameter of described dimpling lens 300 is less than or equal to 3 millimeters, and the moire grids density of described grid pitch changing grating 200 is less than or equal to 2000 lines per millimeters.
Figure 2 shows that the partial schematic diagram of described grid pitch changing grating 200, in described grid pitch changing grating 200, the shape of each grid line is not identical, and the distance between each grid line does not wait, grid pitch changing grating 200 as above-mentioned design can carry out light splitting to different wave length, simultaneously can effectively reduce aberration, make the spectrum face that forms by its light straight, reach the purpose that improves spectral resolution.
The multiple different wave length of optical signals to be measured consists of, described light signal to be measured is from described incident pin hole 100 incidents, form the diffraction light signal through diffraction occurs after described grid pitch changing grating 200, and carry out aberration correction, in described diffraction light signal, the direction of propagation of various wavelength light is different.In the present embodiment, the diameter of described incident pin hole 100 is 5-100 μ m, and described incident pin hole 100 can limit parasitic light effectively to be passed through, and avoids the interference of parasitic light.
300 pairs of above-mentioned diffraction light signals that comprise various wavelength light of described dimpling lens focus on, and the described diffraction light signal after focusing converges on described array photodetectors 500 by described transparency carrier 400 and forms luminous point.Wherein, the light that described diffraction light signal medium wavelength is identical pools a bit on described array photodetectors 500, therefore, is formed with a plurality of luminous points on described array photodetectors 500, and each luminous point is assembled by a kind of light of wavelength and formed.Described array photodetectors 500 sensings converge each luminous point on it, thereby realize the express-analysis of all band spectrum.
In the present embodiment, described transparency carrier 400 is two-side transparent, and its material can be a kind of in the materials such as fused quartz, K9 optical glass, B270 optical glass, polymethylmethacrylate, polycarbonate.Described array photodetectors 500 is a kind of in the senser elements such as charge coupled array, complementary metal oxide semiconductor (CMOS), diode array.
The micro spectrometer based on the grid pitch changing grating lens that the present invention proposes adopt the mode that grid pitch changing grating is combined with the dimpling lens eliminate aberration, make through the spectrum face of light formation straight, thereby reach the purpose that improves spectral resolution, simultaneously, grid pitch changing grating and dimpling lens all adopt the micro-nano processing technology to make, make the micro spectrometer volume based on the grid pitch changing grating lens significantly reduce, be convenient to be integrated in embedded detection system.In addition, the dimpling lens in the present invention are easy to make by micro fabrication, especially are easy to make the convex lens array, thereby provide possibility for making multi-channel spectrometer based.
Although the present invention is described with reference to current better embodiment; but those skilled in the art will be understood that; above-mentioned better embodiment only is used for illustrating the present invention; be not to limit protection scope of the present invention; any within the spirit and principles in the present invention scope; any modification of doing, equivalence replacement, improvement etc. are within all should being included in the scope of the present invention.
Claims (4)
1. the micro spectrometer based on the grid pitch changing grating lens, be used for treating the photometry signal and carry out spectral analysis, it is characterized in that, comprising: incident pin hole, grid pitch changing grating, dimpling lens, transparency carrier and array photodetectors, wherein,
The spacing of described each grid line of grid pitch changing grating does not wait, shape different, and described dimpling lens have a convex surface and a plane, and described grid pitch changing grating is arranged at convex surface one side of described dimpling lens, and the plane of described dimpling lens is fixedly connected with described transparency carrier;
Diffraction occurs through after described grid pitch changing grating, and carries out aberration correction from the incident of described incident pin hole in light signal to be measured, and described light signal to be measured is divided into and comprises multi-wavelength's diffraction of light light signal;
Described dimpling lens focus on described diffraction light signal, diffraction light signal after focusing converges on described array photodetectors by described transparency carrier and forms luminous point, wherein, the identical light of described diffraction light signal medium wavelength pools a bit on described array photodetectors, and described array photodetectors sensing converges the luminous point on it.
2. the micro spectrometer based on the grid pitch changing grating lens according to claim 1, is characterized in that, described transparency carrier is two-side transparent.
3. the micro spectrometer based on the grid pitch changing grating lens according to claim 1 and 2, is characterized in that, the material of described transparency carrier is a kind of in fused quartz, K9 optical glass, B270 optical glass, polymethylmethacrylate, polycarbonate.
4. want 1 described micro spectrometer based on the grid pitch changing grating lens according to right, it is characterized in that, described array photodetectors is a kind of in charge coupled array, complementary metal oxide semiconductor (CMOS), diode array.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210547862.7A CN103105230B (en) | 2012-12-14 | 2012-12-14 | A kind of micro spectrometer based on grid pitch changing grating lens |
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| CN201210547862.7A CN103105230B (en) | 2012-12-14 | 2012-12-14 | A kind of micro spectrometer based on grid pitch changing grating lens |
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| CN103105230A true CN103105230A (en) | 2013-05-15 |
| CN103105230B CN103105230B (en) | 2015-09-23 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398778A (en) * | 2013-08-19 | 2013-11-20 | 深圳先进技术研究院 | Micro spectrograph and preparing and assembling method thereof |
| CN108020516A (en) * | 2016-11-03 | 2018-05-11 | 中国科学院大连化学物理研究所 | Spectrometer or imaging spectrometer |
| CN108680253A (en) * | 2018-04-11 | 2018-10-19 | 北京卫星环境工程研究所 | Full-time face multistage sun extreme ultraviolet spectrum imaging method |
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| JP2009103848A (en) * | 2007-10-23 | 2009-05-14 | Nippon Zeon Co Ltd | Polarizing element |
| JP2010277029A (en) * | 2009-06-01 | 2010-12-09 | Nippon Telegr & Teleph Corp <Ntt> | Optical wavelength selection device and method for correcting optical path of the same |
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Patent Citations (3)
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| US5406609A (en) * | 1992-04-09 | 1995-04-11 | Rigaku Industrial Corporation | X-ray analysis apparatus |
| JP2009103848A (en) * | 2007-10-23 | 2009-05-14 | Nippon Zeon Co Ltd | Polarizing element |
| JP2010277029A (en) * | 2009-06-01 | 2010-12-09 | Nippon Telegr & Teleph Corp <Ntt> | Optical wavelength selection device and method for correcting optical path of the same |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398778A (en) * | 2013-08-19 | 2013-11-20 | 深圳先进技术研究院 | Micro spectrograph and preparing and assembling method thereof |
| CN103398778B (en) * | 2013-08-19 | 2015-07-29 | 深圳先进技术研究院 | Micro spectrometer and preparation assembly method thereof |
| CN108020516A (en) * | 2016-11-03 | 2018-05-11 | 中国科学院大连化学物理研究所 | Spectrometer or imaging spectrometer |
| CN108680253A (en) * | 2018-04-11 | 2018-10-19 | 北京卫星环境工程研究所 | Full-time face multistage sun extreme ultraviolet spectrum imaging method |
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| CN103105230B (en) | 2015-09-23 |
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