CN105929475A - Method for manufacturing concave grating - Google Patents
Method for manufacturing concave grating Download PDFInfo
- Publication number
- CN105929475A CN105929475A CN201610526048.5A CN201610526048A CN105929475A CN 105929475 A CN105929475 A CN 105929475A CN 201610526048 A CN201610526048 A CN 201610526048A CN 105929475 A CN105929475 A CN 105929475A
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- Prior art keywords
- grating
- preparation
- optical grating
- mold plate
- concave
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
Abstract
The invention relates to a method for manufacturing a concave grating, which comprises the steps of 1) preparing or selecting a grating template, 2) selecting polymer glue, 3) cleaning the grating template, 4) coating the grating template with the polymer glue and solidifying the polymer glue, 5) demoulding the polymer glue so as to form a soft moulage, 6) sputtering a metal film at a grating structure surface of the soft moulage, 7) selecting an arc-shaped metal workpiece which is matched with the prepared concave grating in size and radian, 8) carrying out plasma modification on the back of the soft moulage and the inner surface of the arc-shaped metal workpiece, and 9) gluing the back of the soft moulage and the inner surface of the arc-shaped metal workpiece, wherein the steps 1) and 2) or the steps 2) and 3) can be interchanged. The manufacturing method provided by the invention is simple in process, can carry out concave grating preparation in a large-scale manner, and greatly reduces the manufacturing cost of the concave grating.
Description
Technical field
The present invention relates to a kind of preparing grating method, particularly relate to the preparation method of a kind of concave grating.
Background technology
Concave grating is also called Rowland grating, and its effect is to make light not only diffraction but also focus on, and is concave grating direct-reading light
Key core light-splitting device in spectrometer, can be used for far ultraviolet and far-infrared spectrum region.Within 1819, first block of grating occurs
Since, diffraction grating obtains significant progress through constantly innovation and development.Since nineteen forty-seven, mechanical scribing techniques is
The main output method of diffraction grating.Delineation mode significantly limit the speed of production of grating, causes productivity extremely low and becomes
This costliness.Particularly curved surface grating, owing to curved-surface structure opposite planar is the most special, uses the quality such as quartz, glass relatively
Hard inorganic material, difficulty of processing is big, is less susceptible to ensure, thus brings the highest system in terms of precision and uniformity
Standby cost.Therefore, tradition machinery output mode precision the highest, large area, the application level of micro-dimension diffraction grating and
Developing ability is extremely limited.
Summary of the invention
It is simple that the technical problem to be solved is to provide a kind of technique, it is possible to large area, carries out concave surface on a large scale
Prepared by grating, significantly reduce the cost of manufacture of concave grating.
The present invention solves the technical scheme that above-mentioned technical problem used: the preparation method of a kind of concave grating, its feature
It is: comprise the following steps:
1) prepare or choose optical grating mold plate；
2) polymer latex is prepared；
3) optical grating mold plate is carried out；
4) coated polymer glue and solidifying on optical grating mold plate；
5) polymer latex is carried out the demoulding and form soft die；
6) sputtering metal membrane on the optical grating construction face of soft die；
7) the curved metal workpiece matched with the concave grating size radian prepared is chosen；
8) back side of soft die and the inner surface of curved metal workpiece are carried out plasma modification；
9) by the back side and the inner surface bonding of curved metal workpiece of soft die；
Above-mentioned steps 1) and 2) or 2) and 3) can exchange.
Preferably, the material of described optical grating mold plate is glass, quartz or silicon.
Preferably, the host of described polymer latex is PDMS, and step 2) in, by host with curing agent by quality
Configure than 10:1, allocation process stirs, puts into and vacuum equipment is evacuated to vacuum state, cool down standby.
Preferably, step 3) in the idiographic flow that cleans be: by glass cleaning solution, acetone, isopropanol, deionized water
Each 15 minutes of ultrasonic cleaning successively, then it is standby to dry up surface moisture with the nitrogen of flowing.
Preferably, step 4) in, optical grating mold plate is positioned on sol evenning machine, carries out spin coating with the polymer latex configured,
Optical grating mold plate (1) after spin coating is placed in vacuum equipment repeatedly, removes unnecessary bubble.
Preferably, ten times of the profile of tooth height of the optical grating construction that the thickness of the polymer latex of spin coating is greater than on optical grating mold plate with
On.
Preferably, step 6) in soft die had optical grating construction towards being above placed on clean silicon chip, carry out magnetic
Control sputtering.
Preferably, the target used by sputtering is gold, silver or aluminium, and the thickness of the metal film of sputtering is 10nm-100nm.
In order to preferably solidify the polymer latex of spin coating, the optical grating mold plate after being repeatedly placed in vacuum equipment is placed in baking oven heating
In, it is then shut off baking oven and naturally cools to room temperature.
Compared with prior art, it is an advantage of the current invention that the present invention carves without the precision optical machinery in traditional raster manufacturing process
Draw, significantly simplify manufacture craft, with low cost, provide powerful technology for micro spectrometer with low cost and prop up
Hold.
Accompanying drawing explanation
Fig. 1 is the cross-sectional view of the optical grating mold plate of this bright embodiment.
Fig. 2 is step 4) after sectional structure chart.
Fig. 3 is step 6) generalized section of process.
Fig. 4 is the generalized section of metal works.
Fig. 5 is the generalized section of soft die and metal works.
Fig. 6 is the generalized section of the concave grating after completing.
Detailed description of the invention
Below in conjunction with accompanying drawing embodiment, the present invention is described in further detail.
The preparation method of the concave grating of the embodiment of the present invention, as shown in figures 1 to 6, including following step:
Step 1) prepare or choose optical grating mold plate 1, the concave grating knot that the structure of this optical grating mold plate 1 makes as required
Structure determines, material is glass, quartz or silicon, as it is shown in figure 1, the optical grating mold plate 1 after Zhi Bei is section is rectangle
Blazed grating structure, the cycle is 10um, and flare angle is 15 °.
Step 2) choose polymer latex, as the material of the soft die 2 of generation, this polymer latex allows for for revolving
Be coated with, preferably its host be PDMS (polydimethylsiloxane, dimethyl silicone polymer),
BCB (Benzocyclobutene, benzocyclobutene) or polyimides (Polyimide).Choose as in the present embodiment
The host of polymer latex be PDMS, its host configures with curing agent 10:1 in mass ratio, stirs in allocation process,
Whipping process can exist a large amount of bubble, put into and vacuum equipment is evacuated to vacuum state, after vacuumizing, put into refrigerator
Cool down standby.
Step 3) this optical grating mold plate 1 is carried out, cleaning process is: with glass cleaning solution, acetone, isopropanol,
Each 15 minutes of deionized water ultrasonic cleaning successively, then it is standby to dry up surface moisture with the nitrogen of flowing.
Step 4), coated polymer glue and solidifying on optical grating mold plate 1, optical grating mold plate 1 is positioned on sol evenning machine,
The even polymer latex prepared is carried out spin coating.Spin coating parameters is: use 500rpm, duration 50s.After spin coating,
By uniformly the optical grating mold plate 1 of coated polymer glue material be repeatedly placed in vacuum equipment, be evacuated to vacuum state, remove
Unnecessary bubble, and keep 10min.Then take out optical grating mold plate 1 and be placed in the baking oven of 120 ° after 30min, close and dry
Case naturally cools to room temperature.The profile of tooth height of the optical grating construction that the thickness of the polymer latex of spin coating is greater than on optical grating mold plate
More than ten times.
Step 5) polymer latex is gone from the optical grating mold plate 1 surface demoulding, by the polymer latex after solidification from optical grating mold plate
1 surface is taken off, and obtains the soft die 2 of polymer latex material.
Step 6) soft die 2 is placed on clean silicon chip, by there being facing up of optical grating construction, put into magnetron sputtering
On the sputtering unit of machine, by ion sputtering deposition film, target used is aluminium (Al), and sputtering vacuum is 8mTorr,
Power is 250W, and sputtering time is 10min.Deposited on the optical grating construction surface replicated by ion sputtering deposition technology
The aluminium film of one layer of 70nm.This metal film can be gold, silver or aluminium, and thickness is 10nm-100nm.
Step 7) take the curved metal workpiece 3 of internal diameter 5cm, external diameter 5.5cm, the inner surface of curved metal workpiece 3 is wanted
Smooth.The radian of this curved metal workpiece 3 to determine according to the size radian of concave grating to be made.
Step 8) utilize atmospheric plasma, the back side of soft die 2 and the inner surface of curved metal workpiece 3 are carried out
Plasma modification.The work surface of soft die 2 and curved metal workpiece 3 will expose and be put in plasma cleaning
Machine processes a period of time with oxygen.
Step 9) then the back side of soft die 2 and the inner surface bonding of curved metal workpiece 3 are i.e. completed concave grating
Making.
The preparation method that the present invention proposes, it is not necessary to mechanical scratching, the uniformity of making is high, and technique is simple, and cost is the lowest,
It is especially suitable for large-scale production.The present invention utilizes the good characteristic of polymeric material, first passes through in nanoimprinting process soft
The production method of matter die, in the spin coating spin coating of plane grating surface, then carries out solidifying the demoulding, obtain thickness uniformly, structure
Complete soft die；Then by the way of magnetron sputtering, plate layer of metal in stamp surfaces, increase reflectivity；Finally
The die back side is tightly bonded on the inner surface of curved metal workpiece by the high-flexibility utilizing polymeric material, forms concave surface
Optical grating construction.Compared to traditional concave grating production method, present invention process is simple, it is possible to large area, on a large scale
Carry out concave grating to prepare, significantly reduce the cost of manufacture of concave grating.
Claims (9)
1. the preparation method of a concave grating, it is characterised in that: comprise the following steps:
1) prepare or choose optical grating mold plate (1)；
2) polymer latex is prepared；
3) optical grating mold plate (1) is carried out；
4) go up coated polymer glue at optical grating mold plate (1) and solidify；
5) polymer latex is carried out the demoulding and form soft die (2)；
6) sputtering metal membrane on the optical grating construction face of soft die (2)；
7) the curved metal workpiece (3) matched with the concave grating size radian prepared is chosen；
8) back side of soft die (2) and the inner surface of curved metal workpiece (3) are carried out plasma modification；
9) by the back side and the inner surface bonding of curved metal workpiece (3) of soft die (2)；
Above-mentioned steps 1) and 2) or 2) and 3) can exchange.
2. the preparation method of concave grating as claimed in claim 1, it is characterised in that: described optical grating mold plate (1)
Material is glass, quartz or silicon.
3. the preparation method of concave grating as claimed in claim 1, it is characterised in that: the host of described polymer latex
For PDMS, and step 2) in, host is configured with curing agent 10:1 in mass ratio, allocation process stirs,
Put into and vacuum equipment is evacuated to vacuum state, cool down standby.
4. the preparation method of concave grating as claimed in claim 1, it is characterised in that: step 3) the middle tool cleaned
Body flow process is: use each 15 minutes of glass cleaning solution, acetone, isopropanol, deionized water ultrasonic cleaning successively, then with flowing
It is standby that dynamic nitrogen dries up surface moisture.
5. the preparation method of concave grating as claimed in claim 1, it is characterised in that: step 4) in, by grating
Template (1) is positioned on sol evenning machine, carries out spin coating with the polymer latex configured, by the optical grating mold plate (1) after spin coating
Repeatedly it is placed in vacuum equipment, removes unnecessary bubble.
6. the preparation method of concave grating as claimed in claim 5, it is characterised in that: the thickness of the polymer latex of spin coating
More than ten times of the profile of tooth height of the optical grating construction that degree is greater than on optical grating mold plate.
7. the preparation method of concave grating as claimed in claim 1, it is characterised in that: step 6) in by soft print
Mould (2) have optical grating construction towards being above placed on clean silicon chip, carry out magnetron sputtering.
8. the preparation method of concave grating as claimed in claim 7, it is characterised in that: the target used by sputtering be golden,
Silver or aluminium, the thickness of the metal film of sputtering is 10nm-100nm.
9. the preparation method of concave grating as claimed in claim 5, it is characterised in that: will repeatedly be placed in vacuum equipment
After optical grating mold plate (1) be placed in baking oven and add and hanker, be then shut off baking oven and naturally cool to room temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610526048.5A CN105929475B (en) | 2016-06-30 | 2016-06-30 | A kind of production method of concave grating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610526048.5A CN105929475B (en) | 2016-06-30 | 2016-06-30 | A kind of production method of concave grating |
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| Publication Number | Publication Date |
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| CN105929475A true CN105929475A (en) | 2016-09-07 |
| CN105929475B CN105929475B (en) | 2018-08-03 |
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| CN201610526048.5A Active CN105929475B (en) | 2016-06-30 | 2016-06-30 | A kind of production method of concave grating |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108020516A (en) * | 2016-11-03 | 2018-05-11 | 中国科学院大连化学物理研究所 | Spectrometer or imaging spectrometer |
| WO2023226018A1 (en) * | 2022-05-27 | 2023-11-30 | 京东方科技集团股份有限公司 | Grating structure and preparation method therefor, and display device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1455226A (en) * | 2003-05-30 | 2003-11-12 | 中国科学院上海光学精密机械研究所 | Bandwidth-adjustable bevelled optical fiber raster and its manufacturing method |
| EP1420274A1 (en) * | 1999-03-11 | 2004-05-19 | Agency Of Industrial Science And Technology | Method of manufacturing a diffraction grating |
| US20110008399A1 (en) * | 2007-11-27 | 2011-01-13 | Basf Se | Use of zero-order diffractive pigments |
| CN102163591A (en) * | 2010-12-02 | 2011-08-24 | 天水华天科技股份有限公司 | Spherical grating array IC (integrated circuit) chip packaging part and production method thereof |
-
2016
- 2016-06-30 CN CN201610526048.5A patent/CN105929475B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1420274A1 (en) * | 1999-03-11 | 2004-05-19 | Agency Of Industrial Science And Technology | Method of manufacturing a diffraction grating |
| CN1455226A (en) * | 2003-05-30 | 2003-11-12 | 中国科学院上海光学精密机械研究所 | Bandwidth-adjustable bevelled optical fiber raster and its manufacturing method |
| US20110008399A1 (en) * | 2007-11-27 | 2011-01-13 | Basf Se | Use of zero-order diffractive pigments |
| CN102163591A (en) * | 2010-12-02 | 2011-08-24 | 天水华天科技股份有限公司 | Spherical grating array IC (integrated circuit) chip packaging part and production method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108020516A (en) * | 2016-11-03 | 2018-05-11 | 中国科学院大连化学物理研究所 | Spectrometer or imaging spectrometer |
| WO2023226018A1 (en) * | 2022-05-27 | 2023-11-30 | 京东方科技集团股份有限公司 | Grating structure and preparation method therefor, and display device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105929475B (en) | 2018-08-03 |
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