JP2008290357A - Method for manufacturing microlens array - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a microlens array with high precision by a simple process without requiring expensive processing apparatus. <P>SOLUTION: This method comprises a first step of forming a plurality of through-holes 12 in a substrate 11; a second step of plugging each one end of the plurality of through-holes 12 with a lid material 13; a third step of injecting a resin 15 into the through-hole from the other end of the through-hole 12, while the one end of the through-hole 12 is plugged with the lid material 13; a fourth step of forming a molded surface 17 of the resin 15 where the surface shape of the lid material 13 is transcribed by curing the resin 15; a fifth step of removing the lid material 13 from the resin 15 so that the substrate 11 having the molded surface 17 formed for each of the plurality of through-holes 12 is prepared as a molding die 18 of the microlens array; and a sixth step of manufacturing the microlens array by using the molding mold 18. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a microlens array.

A microlens array is a liquid crystal projector that is placed between the light source and the liquid crystal to prevent loss of light quantity, or formed on the surface of the screen to brighten an image, or placed on a solid-state image sensor. It is used in many applications such as those that increase light and those that are used in glass fiber optical communication elements. As a method of manufacturing a microlens array, the methods of Patent Documents 1 to 4 below are known. In any method, a mold for forming a microlens array is produced and used quickly and efficiently. A microlens array manufacturing method is realized.
JP-A-8-72064 Japanese Patent Laid-Open No. 9-24557 JP 2000-301550 A JP 2005-227679 A

  Usually, when manufacturing a mold of a microlens array, a method is used in which a glass substrate is patterned using a photolithography method and a shape is formed by etching. As an etching method, either wet etching or dry etching can be used, but when forming a spherical lens, wet etching which is isotropic etching is preferable.

  However, when processing a glass substrate using etching, it is possible to cope with a lens having a small height, generally 100 μm or less, but it is necessary to create a shape as designed. This requires considerable difficulty. A microlens array in which several tens of microlenses with a large aperture are laid out is often manufactured by machining because it is difficult to manufacture by photolithography. Strictly speaking, it can be different for each individual. This becomes a big problem when the optical required accuracy of the microlens is high. Above all, in the case of machining, a dedicated precision processing device is required. However, since this device is very expensive and requires skill in operation, it cannot be easily processed at present.

  The present invention has been made in view of such circumstances, and manufacture of a microlens array capable of manufacturing a highly accurate microlens array by a simple method without requiring an expensive processing apparatus. It aims to provide a method.

In order to solve the above-described problems, a method for manufacturing a microlens array according to the present invention is a method for manufacturing a microlens array having a plurality of microlenses, and includes a first step of forming a plurality of through holes in a substrate. A second step of closing one end of the plurality of through-holes with a lid material, and the other end of the through-hole from the other end of the through-hole in a state where one end of the through-hole is closed with a lid material A third step of injecting a resin into the hole; a fourth step of curing the resin to form a molding surface in which the surface shape of the lid member is transferred to the resin; and the lid member from the resin. A fifth step of producing a substrate having a molding surface formed in each of the plurality of through-holes as a molding die for the microlens array, and the microlens array using the molding die. Including a sixth step of manufacturing And butterflies.
According to this method, the size and shape of each molding surface can be uniformly obtained by combining a base material with a through hole, a lid member that can close the through hole, and a simple material that is injected into the closed through hole. The molds for the microlens array with the same size can be manufactured, and thereby the microlens array with a uniform size and shape can be manufactured.
As the lid material, any shape of lid material such as a plate shape or a spherical shape can be used as long as the through-hole can be closed, and such a lid material is produced by utilizing existing technology. Is possible. Therefore, it is possible to easily prepare a lid member having a uniform size and shape. The molding surface formed from the through hole, the lid member, and the resin can be easily uniform in size and shape. Therefore, without using an expensive dedicated processing device for precisely molding a base material into a mold as in the conventional method, using a material that can be prepared by a combination of existing technologies, the lens shape is inexpensive and accurate. It is possible to manufacture a microlens array with uniform alignment.

In the present invention, it is desirable that the lid member is a true sphere.
According to this method, it is possible to use, as the lid member, a true spherical sphere that is manufactured using an existing manufacturing technique and whose size and shape are uniformly controlled. As an example of the manufacturing technique of the true spherical sphere, there is a manufacturing technique of a chrome sphere having a uniform size and shape used for a bearing ball of a ball bearing. It is possible to prepare a true spherical sphere in which the above is controlled. Therefore, the size and shape of the obtained microlens are also highly accurate. In addition, the size of the sphere can be easily changed by using the manufacturing technique. For this reason, it is possible to easily cope with a change in design of the microlens array.

In the present invention, the plurality of through holes are divided into a plurality of groups each consisting of a plurality of through holes arranged every other or every plurality, and the second step to the fifth step are performed for each group. It is desirable to form the molding surface for all the through holes by repeating the process.
According to this method, depending on how the lid material is arranged, such as when a plurality of lid materials are used and the distance (pitch) between the center points of adjacent through holes is narrow or the lid material is large. Even when the lid materials collide with each other, the molding surface can be formed by selecting an arrangement so that the lid materials do not collide with each other. Therefore, the molding surface can be formed for all the through holes. For example, when the pitch of the through holes is larger than the diameter of the lid material that is a spherical sphere, all the through holes can be closed simultaneously with the lid material, but the pitch of the through holes is larger than the diameter of the lid material. In the case of being small, adjacent lid members interfere with each other, so that all the through holes cannot be closed simultaneously with the lid member. In such a case, part of the through holes are closed with a lid so that the lids do not interfere with each other, a molding surface is formed in the through hole, the lid is removed, and the remaining through holes are covered again. By repeating the operation of closing with a material and forming the molding surface in the through hole, the molding surface can be reliably formed in all the through holes.

In the present invention, in the second step, the base material is placed on a table on which a plurality of lid materials are arranged, and the plurality of lid materials are moved between the base material and the table. It is desirable that the lid member is fitted into each end portion of the plurality of through holes.
When the lid material is disposed between the base material and the base, the lid material moves while rolling between the base material and the base, and is fitted into the through hole and stably held. Therefore, it is not necessary to accurately position the lid member with respect to the through hole, and the process becomes very easy. Moreover, even if a through hole having a larger diameter than the other through holes exists in the through hole produced in the first step, the height between the base and the base material is formed as designed. A predetermined height is defined by the relationship between the size of the through hole and the lid. Therefore, the depth of the molding surface formed in the fourth step can be made constant, and as a result, the lens height of the resulting microlens can be made constant. For example, in the case where a through hole having a diameter larger than that of other through holes exists among the through holes produced in the first step, if a method of covering the through hole with a cover material from above is adopted, The material fits deeper into the through hole having a larger diameter than the through hole having the set diameter. Then, the molding surface formed in the through hole becomes a molding surface having a lens depth deeper than the molding surface formed in the other through hole, and the lens height of the resulting microlens changes. However, even in such a case, according to this method, the gap between the base and the base material is defined to be a constant height according to the relationship between the through hole formed as designed and the size of the lid material to be used. Therefore, it is possible to make the lens height of the microlens manufactured in the fifth step uniform.

In the present invention, it is desirable to perform a deaeration process in the third step.
According to this method, when the resin is injected in the third step, it is possible to prevent bubbles from being mixed into the resin. It is possible to prevent a decrease in strength.

In the invention, it is desirable that the resin is an ultraviolet curable resin, and in the fourth step, the resin is cured by irradiating the resin with ultraviolet rays from the other end of the through hole.
According to this method, since the ultraviolet rays are irradiated from the side where the lid is not disposed, it is possible to eliminate the poor curing of the resin due to the shielding and absorption of ultraviolet rays by the lid and the refraction of ultraviolet rays derived from the shape and material of the lid. it can. In addition, the present invention can be applied to the case where the resin is cured by sandwiching the lid material between the base material and the base, so that the degree of freedom of the process is increased.

In the present invention, in the fifth step, it is desirable that a metal thin film is formed on the molding surface of the substrate, and the substrate including the metal thin film is produced as a mold.
According to this method, the surface of the mold produced in the fifth step can be reinforced with the metal thin film. Usually, the mold is made of glass by etching or machining the glass substrate. However, in the present invention, the surface of the mold produced in the fifth step is made of resin. . Therefore, there is a possibility that the shape of the molding surface changes due to mechanical impact, thermal history, etc., and the target shape cannot be maintained. Therefore, in the present invention, the surface of the molding surface is reinforced with a metal thin film so that the shape of the molding surface does not easily change. According to this configuration, since the shape of the molding surface does not deteriorate even after long-term use, the mold can be used for a long period of time, and a microlens array with a low manufacturing cost can be provided.

In the present invention, in the fifth step, it is preferable that a mold master is manufactured using the mold as a mother mold, and the microlens array is manufactured using the mold master.
According to this method, by producing a microlens array using the produced mold master, the risk of losing the mother die due to breakage can be avoided, and even if the mold master is damaged, it can be easily duplicated. it can. In addition, it is possible to produce a large amount of microlens arrays with high reproducibility by duplicating a large amount of mold masters.

In the present invention, it is desirable that a release treatment is applied to the surface of the lid member.
According to this method, the lid member can be easily removed from the cured resin in the fifth step. Therefore, the work efficiency can be improved, and the molding surface can be prevented from being damaged when the lid member is removed.

In the present invention, it is desirable that the depth of the molding surface is greater than 100 μm.
According to this method, it is possible to easily produce a microlens array having a lens depth of 100 μm or more, which is difficult with an ordinary microlens array manufacturing method using etching or the like.

[First Embodiment]
Hereinafter, a manufacturing method of the microlens array according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 1 shows a microlens array manufactured by a method of manufacturing a microlens array, in which (a) is a plan view, (b) is a front view, and FIG. 2 is a front view of lenses constituting the microlens array. . In all the drawings below, the film thicknesses and dimensional ratios of the constituent elements are appropriately changed in order to make the drawings easy to see. Further, since the microlens array has a large number of microlenses, some of them are omitted in the drawing.

  As shown in FIG. 1, a microlens array 1 manufactured by the method for manufacturing a microlens array in the present embodiment includes a substrate 2 and a plurality of microlenses 3 formed to protrude from one surface of the substrate 2. Yes. The substrate 2 is a plate member made of a translucent material that transmits light such as glass or quartz. The microlens 3 is a spherical lens made of a monomer type ultraviolet curable resin such as acrylic or epoxy.

  As shown in FIG. 2, the microlens 3 is defined by a lens radius 4, a lens height 5, and a lens curvature radius 6. In the present embodiment, the microlens 3 has a true spherical surface shape, and the lens radius 4 of the microlens 3 is smaller than the lens curvature radius 6.

  Next, a method for manufacturing the microlens array 1 will be described with reference to FIGS. Here, FIG. 3 is a process diagram showing a manufacturing process of the mold 18, and FIG. 4 is a process chart showing a process of manufacturing the microlens array 1 using the mold 18.

  FIG. 3A is a cross-sectional view of the base material after drilling and penetrating the base material 11 as the first step. The base material 11 is made of, for example, an SK material, and through holes 12 are formed in the base material 11 by wire electric discharge machining or milling to form the through holes 12. The radius of the through hole 12 is equal to the lens radius 4 shown in FIG. As an example, it is assumed that the radius of the through hole 12 is 240 μm.

  Next, as shown in FIG. 3B, as a second step, one end portion of the through hole 12 opened in the base material 11 is closed with a lid member 13. The lid member 13 is disposed on the base 14 and the base member 11 is placed thereon, whereby the lid member 13 is fitted into the end portion of the through hole 12. At that time, if the base material 11 or the base 14 is moved a little in the horizontal direction after placing the base material 11, the lid member 13 fits well in the through hole 12, and the through hole 12 can be closed.

  The lid member 13 is a true spherical sphere having the same radius as the lens curvature radius 6 of FIG. In the case of the present embodiment, for example, a chrome sphere used for a bearing sphere of a ball bearing can be used. As an example, it is assumed that the radius of the lid member 13 is 300 μm. When the lid member 13 closes the through hole 12, the lid member 13 is fitted into the through hole 12 by a depth defined by the radius of the through hole 12 and the radius of the lid member 13. From the radius of the through hole 12 and the radius of the lid member 13 given as examples, the depth at which the lid member 13 fits into the through hole 12 is calculated to be 120 μm.

  The lid member 13 is subjected to a mold release process. In the case of the present embodiment, the mold release treatment can be performed using, for example, Optool DSX (manufactured by Daikin) as the mold release treatment agent.

  Next, as shown in FIG. 3C, as a third step, the resin 15 is injected from the other end into the through hole 12 whose one end is closed by the lid member 13. In the present embodiment, an ultraviolet curable resin is used as the resin 15. The same amount of UV curable resin is injected using a dispenser so as to be cured under the same conditions when the resin is cured, and a deaeration process is performed so that bubbles are not mixed into the resin 15. The deaeration treatment can be performed by a method using reduced pressure, a method using heating, or the like, and is not particularly limited as long as the gas mixed in the injected resin can be removed.

  Next, as shown in FIG. 3D, as a fourth step, the resin 15 is irradiated with ultraviolet rays 16 to cure the resin 15. Irradiation of the ultraviolet rays 16 is performed from the same side as the injection of the resin 15. As a result, a molding surface 17 in which the surface shape of the lid member 13 is transferred to the surface of the resin 15 is formed.

  Next, as shown in FIG. 3 (e), as a fifth step, the lid member is removed from the cured resin 15, and the molding die 18 in which the molding surface 17 is formed in each of the through holes 12 is manufactured. The molding surface 17 has a shape in which the projections and depressions of the lens 3 in FIG. Here, as an example, the radius of the through hole 12 is 240 μm, and the radius of the lid member 13 is 300 μm. Therefore, the molding has a shape in which the concave and convex portions of the microlens having a lens radius of 240 μm, a lens height of 120 μm, and a lens curvature radius of 300 μm are reversed. A surface 17 is formed. Here, since the release treatment is performed on the lid member, it can be easily removed from the resin 15.

  As shown in FIG. 3F, the surface of the cured resin 15 can be protected by forming a metal thin film 19 on the surface of the mold 18 as necessary. A release treatment may be performed on the surface of the metal thin film 19 as necessary. Thus, the mold 18 is completed.

  Subsequently, the microlens array 1 is manufactured using the mold 18. First, as shown in FIG. 4A, an ultraviolet curable resin 20 is applied to the substrate 2 of the microlens array. One surface of the substrate 2 to which the ultraviolet curable resin 20 is applied can be subjected to a surface treatment for improving the adhesion with the ultraviolet curable resin 20 as necessary. As this surface treatment, for example, primer treatment using a 0.5 to 1% diluted solution of a silane coupling agent (KBM-903 manufactured by Shin-Etsu Chemical Co., Ltd.) can be suitably used. For example, as the solvent at this time, a mixed solution of 50% ethanol and 50% water (pure water) can be used.

  Next, as shown in FIG. 4B, after the molding die 18 is pressed against the ultraviolet curable resin, the ultraviolet curable resin 20 is cured by irradiating the ultraviolet rays 16 from the side of the substrate 2 that is a translucent material. The ultraviolet curable resin is cured while being in contact with the substrate 2, and the ultraviolet curable resin sandwiched between the mold 18 and the substrate 2 forms the microlens 3.

  Next, as shown in FIG. 4C, the mold is removed from the cured ultraviolet curable resin 20. Thus, the microlens array 1 in which the microlenses 3 are formed on the substrate 2 is completed.

  According to the manufacturing method of the microlens array as described above, the base 11 having the through-hole 12, the lid member 13 that can close the through-hole 12, and the resin 15 that is injected into the closed through-hole 12. By combining simple members that can be prepared in combination, a microlens array 1 having a lens shape with low cost and high accuracy can be obtained without the need for an expensive dedicated processing apparatus for precision molding as in the conventional method. It can be manufactured.

  Here, since the chrome balls having a uniform size and shape are used as the lid member 13, the size and shape of the obtained microlens are also highly accurate. In addition, since the size of the chrome sphere used as the lid member 13 can be easily changed, it is possible to easily cope with a design change of the microlens array 1. Since the surface of the lid member 13 is subjected to a mold release process, the lid member 13 can be easily removed from the cured resin 15. Therefore, work efficiency can be improved and the molding surface 17 can be prevented from being damaged when the lid member 13 is removed.

  In addition, each of the plurality of through holes 12 is obtained by placing the base material 11 on the base 14 on which the plurality of lid materials 13 are arranged and moving the plurality of lid materials 13 between the base material 11 and the base 14. Since the lid member 13 is fitted into the end of the lid member, it is not necessary to properly position the lid member with respect to the through hole, and the process becomes very easy. In addition, even when the through hole 12 having a diameter larger than the setting is mixed, a molding surface having a lens depth of 5 as designed is formed, and molding defects can be avoided. This effect will be described with reference to FIG. Depending on the forming accuracy of the through hole, there may be a case where a through hole 12a having a set diameter and a through hole 12b having a larger diameter than the set are mixed. In such a case, according to this configuration, the air gap 21 is opened in the through hole 12b to be closed by the lid member 13, but the base material 11 and the base 11 are set depending on the relationship between the through hole 12a having the set hole diameter and the lid member 13. The height 22 of the gap with respect to 14 is uniform. As a result, a molding surface having a lens depth as designed is formed also in the through hole 12b, and a molding defect of the microlens can be avoided.

  Further, since the deaeration process is performed here, it is possible to prevent bubbles from being mixed into the resin 15 when the resin 15 is injected into the through-hole 12, and molding defects in which bubbles remain on the molding surface 17, It is possible to prevent the strength of the mold 18 from being reduced due to air bubbles. Further, the resin 15 is cured by irradiating the resin 15 with ultraviolet rays 16 from the other end portion of the through-holes 12 covered with the lid material 13, so that the ultraviolet rays 16 produced by the lid material 13 can be cured. It is possible to eliminate poor curing of the resin 15 due to shielding, absorption, and refraction of the ultraviolet rays 16 derived from the shape and material of the lid member 13. Moreover, since it can apply also when pinching the cover material 13 between the base material 11 and the base 14, and hardening the resin 15, the freedom degree of a process also becomes high.

  Furthermore, since the metal thin film 19 is formed on the molding surface 17 of the base material 11 here, the shape of the molding surface 17 can be prevented from easily changing. According to this configuration, since the shape of the molding surface 17 does not deteriorate even after long-term use, the mold 18 can be used over a long period of time, and the microlens array 1 can be provided at a low manufacturing cost. .

  Since the depth of the molding surface 17 is calculated as 120 μm from the radius of the through-hole 12 and the radius of the lid member 13 given here as an example, a lens that is difficult to manufacture by an ordinary microlens array manufacturing method using etching or the like. A microlens array having a depth of 100 μm or more can be easily produced.

  In the present embodiment, all the through-holes 12 can be simultaneously closed with the plurality of lid members 13, but a plurality of through-holes are arranged at every other or every plurality of through-holes 12. It is also possible to divide into a plurality of groups of 12 and form the molding surfaces for all the through-holes through the step of forming the molding surface 17 in the through-hole 12 for each group. According to this method, depending on how the lid material is arranged, such as when a plurality of lid materials are used and the distance (pitch) between the center points of adjacent through holes is narrow or the lid material is large. Even when the lid members collide with each other, the molding surface can be formed by selecting an arrangement so that the lid members do not collide, and the molding surfaces can be reliably formed in all the through holes.

  In the present embodiment, a true spherical sphere is used as the lid member 13. However, the lid member 13 may have a shape other than the true sphere in order to transfer an arbitrary lens shape to the resin 15. . However, in that case, the lid member 13 is arranged accurately with respect to the through hole 12, or the lid member 13 is arranged on the base 14 with accurate positioning, and then the through hole 12 is closed. Consideration in the work of covering the material 11 is necessary.

  Moreover, in this embodiment, although the ultraviolet curable resin was used as the resin 15, you may use a thermosetting resin. However, in that case, when the molding surface 17 is formed in a plurality of times and an unnecessary resin is arranged in a through hole that has not been closed by the lid material, the unnecessary resin is cured by heating. It cannot be applied.

  Further, in the present embodiment, the depth of the molding surface 17 is set to be larger than 100 μm, but the depth of the molding surface 17 is an example, and the main type is changed according to the shape of the target microlens. Is possible.

[Second Embodiment]
FIG. 6 is an explanatory diagram of a method for manufacturing a microlens array according to the second embodiment of the present invention. The basic steps of the microlens array manufacturing method of the present embodiment are the same as the microlens array manufacturing method of the first embodiment. The difference is a mold used in the process of manufacturing the microlens array 1. Therefore, in this embodiment, the same code | symbol is attached | subjected about the component which is common in 1st Embodiment, and detailed description is abbreviate | omitted.

  First, as shown in FIG. 6A, by performing electroforming using the produced molding die 18 as a mother die, an electroforming mold 23 having a molding surface in which the molding die 18 and the irregularities are reversed on the surface of the molding die 18. Is made. When the metal thin film 19 shown in FIG. 4 is not formed on the surface of the mold 18, it is necessary to perform a conductive treatment before electroforming. The surface of the mold 18 may be subjected to a mold release treatment as necessary. The metal used for electroforming is not particularly limited as long as the resulting electroforming mold 23 has a required strength.

  Next, as shown in FIG. 6B, after the produced electroforming mold 23 is peeled from the forming mold, electroforming is performed again using the electroforming mold 23 as a mother mold, thereby forming the forming mold on the surface of the electroforming mold 23. A metal master 24 having the same uneven surface as 18 is produced. A mold release process may be performed on the surface of the electroforming mold 23 as necessary. The metal used for electroforming is not particularly limited as long as the resulting metal master 24 has the required strength.

  Next, as shown in FIG. 6C, the produced metal master 24 is peeled from the electroforming mold 23. Thus, the metal master 24 used in the process of manufacturing the microlens array instead of the mold 18 is completed. Using this metal master 24, the microlens array 1 can be manufactured in the same manner as when the mold 18 is used.

  According to the microlens array manufacturing method as described above, the risk of losing the mother die due to breakage can be avoided by producing the microlens array using the produced mold master, and the mold master is damaged. Can also be easily replicated. In addition, it is possible to produce a large amount of microlens arrays with high reproducibility by duplicating a large amount of mold masters.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but it goes without saying that the present invention is not limited to such examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

It is the top view and front view of a micro lens array. It is a front view of the micro lens which comprises a micro lens array. It is process drawing which shows the manufacturing method of a shaping | molding die. It is process drawing of 1st Embodiment of the manufacturing method of a micro lens array. It is a block diagram which shows the effect of this invention in case there exists a through-hole larger than design. It is process drawing of 2nd Embodiment of the manufacturing method of a micro lens array.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Microlens array, 2 Substrate, 3 Microlens, 11 Base material, 12 Through-hole, 13 Cover material, 14 units, 15 Resin, 16 Ultraviolet rays, 17 Molding surface, 18 Mold, 19 Metal thin film, 24 Metal master

Claims (10)

A method of manufacturing a microlens array having a plurality of microlenses,
A first step of forming a plurality of through holes in the substrate;
A second step of closing one end of the plurality of through holes with a lid;
A third step of injecting resin into the through-hole from the other end of the through-hole in a state where one end of the through-hole is closed with a lid;
A fourth step of forming a molding surface by transferring the surface shape of the lid material to the resin by curing the resin;
A fifth step of producing a substrate having a molding surface formed in each of the plurality of through-holes as a molding die of a microlens array by removing the lid material from the resin;
A method of manufacturing a microlens array, comprising a sixth step of manufacturing the microlens array using the mold.   The method for manufacturing a microlens array according to claim 1, wherein the lid member is a true sphere.   By dividing the plurality of through-holes into a plurality of groups each consisting of a plurality of through-holes arranged every other or every plurality, and repeating the second to fifth steps for each group The method for manufacturing a microlens array according to claim 1, wherein the molding surface is formed for all the through holes.   In the second step, the plurality of through-holes are formed by placing the base material on a table on which a plurality of lid materials are arranged and moving the plurality of lid materials between the base material and the table. The method for manufacturing a microlens array according to claim 2, wherein the lid member is fitted into each end of the hole.   The method for manufacturing a microlens array according to claim 1, wherein in the third step, deaeration treatment is performed. The resin is an ultraviolet curable resin;
2. The method of manufacturing a microlens array according to claim 1, wherein in the fourth step, curing is performed by irradiating the resin with ultraviolet rays from the other end of the through hole.   2. The microlens array according to claim 1, wherein in the fifth step, a metal thin film is formed on a molding surface of the base material, and the base material including the metal thin film is manufactured as a molding die. Method.   2. The microlens array according to claim 1, wherein in the fifth step, a mold master is manufactured using the mold as a mother mold, and the microlens array is manufactured using the mold master. Production method.   2. The method of manufacturing a microlens array according to claim 1, wherein a release treatment is performed on the surface of the lid member.   2. The method of manufacturing a microlens array according to claim 1, wherein the depth of the molding surface is greater than 100 [mu] m.

Images