TWI419781B - Method for manufacturing mold - Google Patents

Method for manufacturing mold Download PDF

Info

Publication number
TWI419781B
TWI419781B TW97119060A TW97119060A TWI419781B TW I419781 B TWI419781 B TW I419781B TW 97119060 A TW97119060 A TW 97119060A TW 97119060 A TW97119060 A TW 97119060A TW I419781 B TWI419781 B TW I419781B
Authority
TW
Taiwan
Prior art keywords
mold
small
molding
mold core
core
Prior art date
Application number
TW97119060A
Other languages
Chinese (zh)
Other versions
TW200948577A (en
Inventor
Tai Cherng Yu
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW97119060A priority Critical patent/TWI419781B/en
Publication of TW200948577A publication Critical patent/TW200948577A/en
Application granted granted Critical
Publication of TWI419781B publication Critical patent/TWI419781B/en

Links

Landscapes

  • Moulds For Moulding Plastics Or The Like (AREA)

Description

模具製造方法 Mold manufacturing method

本發明涉及一模具製造方法,特別係涉及一用於紫外線成型壓印製程之模具製造方法。 The present invention relates to a mold manufacturing method, and more particularly to a mold manufacturing method for an ultraviolet forming embossing process.

紫外線成型壓印技術(請參見Liang Ying-xin,Wang Tai-hong,“A New Technique for Fabrication of Nanodevices-Nanoimprint Lithography”,Micronanoelectronic Technology,2003,Vol.4-5)係採用紫外光照射室溫之聚合物實現固化成型之壓印技術,特別適用於大批量、重複性、精確製備微結構。紫外線成型壓印技術為先製造具有微結構之模具,然後利用該模具進行壓印過程,最後進行圖形轉移。 UV forming embossing technology (see Liang Ying-xin, Wang Tai-hong, "A New Technique for Fabrication of Nanodevices-Nanoimprint Lithography", Micronanoelectronic Technology, 2003, Vol. 4-5) is irradiated with ultraviolet light at room temperature. The imprinting technology for curing of polymers is especially suitable for high-volume, reproducible and precise preparation of microstructures. The UV forming embossing technique first manufactures a mold having a microstructure, and then uses the mold to perform an embossing process, and finally performs pattern transfer.

先前技術中模具製造方法包括如下步驟:提供一透光基底;於該透光基底一表面塗覆光阻層;曝光顯影;蝕刻該基板形成微結構圖案;晶種層金屬化;對該基板進行電鑄;脫模並去除晶種層,形成模具。 The prior art mold manufacturing method includes the steps of: providing a light transmissive substrate; coating a photoresist layer on a surface of the light transmissive substrate; exposing and developing; etching the substrate to form a microstructure pattern; seeding layer metallization; Electroforming; demolding and removing the seed layer to form a mold.

惟,該製造方法中需經過蝕刻、電鑄等步驟才可完成模具之製造,製程繁瑣,生產效率低。 However, in the manufacturing method, the steps of etching, electroforming, etc. are required to complete the manufacture of the mold, the process is cumbersome, and the production efficiency is low.

有鑒於此,提供一製程相對簡單容易、生產效率高之模具製備方法實為必要。 In view of this, it is necessary to provide a mold preparation method which is relatively simple and easy to manufacture and has high production efficiency.

於一基板表面設置一格板,該格板具有複數通孔,該複數通孔周圍之板壁與該基板相配合形成複數成型腔;使用一具有第一成型面之子模仁分別與各通孔周圍之板壁相配合於每一該成型腔內形成一小母模仁;移去該格板,獲得母模仁,該母模仁具有該基板及複數形成於該基板上之且相互分離之小母模仁;於該母模仁上設置一模具層,該模具層將該複數小母模仁之表面及兩兩該小母模仁之間之該基板之表面覆蓋;固化該模具層,並將固化後之該模具層與該母模仁分離,以獲得模具。 Providing a grid plate on a surface of the substrate, the grid plate having a plurality of through holes, the wall surrounding the plurality of through holes being matched with the substrate to form a plurality of molding cavities; using a sub-molded body having a first molding surface and surrounding each of the through holes Forming a small female mold core in each of the molding cavities; removing the grid plate to obtain a mother mold core having the substrate and a plurality of small mothers formed on the substrate and separated from each other a mold core; a mold layer is disposed on the mother mold core, the mold layer covers the surface of the plurality of small mold cores and the surface of the substrate between the two small mold cores; the mold layer is cured, and after curing The mold layer is separated from the master mold to obtain a mold.

與先前技術相比,本發明之模具製造方法不需要經過蝕刻、電鑄等步驟即可完成用於紫外線成型壓印製程之模具之製造,製程較簡單,提高了生產效率。 Compared with the prior art, the mold manufacturing method of the present invention can complete the manufacture of the mold for the ultraviolet forming imprinting process without etching, electroforming, etc., and the manufacturing process is simple and the production efficiency is improved.

4‧‧‧微小鏡片模具 4‧‧‧Small lens mold

30‧‧‧子模仁 30‧‧‧子模仁

301‧‧‧成型端 301‧‧‧Formed end

303‧‧‧第一成型面 303‧‧‧First molding surface

10‧‧‧基板 10‧‧‧Substrate

101‧‧‧第一表面 101‧‧‧ first surface

102‧‧‧第二表面 102‧‧‧ second surface

20‧‧‧格板 20‧‧‧ grid

201‧‧‧成型腔 201‧‧‧ molding cavity

40‧‧‧送料裝置 40‧‧‧Feeding device

50‧‧‧模仁預成體 50‧‧‧Molden Preform

60‧‧‧小母模仁 60‧‧‧Little Mother

601‧‧‧第二成型面 601‧‧‧Second molding surface

70‧‧‧母模仁 70‧‧‧Female model

80‧‧‧模具層 80‧‧‧Mold layer

401‧‧‧第三成型面 401‧‧‧ Third molding surface

圖1係本發明實施例中模具製造方法之流程圖。 1 is a flow chart of a method of manufacturing a mold in an embodiment of the present invention.

圖2係本發明實施例中基板及格板之示意圖。 2 is a schematic view of a substrate and a grid in the embodiment of the present invention.

圖3係本發明實施例中子模仁之示意圖。 3 is a schematic view of a neutrino in the embodiment of the present invention.

圖4係本發明實施例中藉由子模仁於基板上製備小母模仁之示意圖。 4 is a schematic view showing the preparation of a small master mold on a substrate by a sub-molded body in the embodiment of the present invention.

圖5係本發明實施例中所形成母模仁之示意圖。 Fig. 5 is a schematic view showing a mother mold formed in the embodiment of the present invention.

圖6係本發明實施例中於母模仁上設置模具層之示意圖。 Figure 6 is a schematic view showing the placement of a mold layer on a master mold in an embodiment of the present invention.

圖7係本發明實施中製成之模仁之示意圖。 Figure 7 is a schematic illustration of a mold core made in the practice of the present invention.

請參閱圖1,其為本發明實施例中模具製造方法之流程圖。該方法包括以下步驟:於一基板表面設置一格板,該格板具有複數通孔,該複數通孔周圍之板壁與該基板相配合形成複數成型腔;使用一具有第一成型面之子模仁分別與各通孔周圍之板壁相配合於每一該成型腔內形成一小母模仁;移去該格板,獲得母模仁,該母模仁具有該基板及複數形成於該基板上之且相互分離之小母模仁;於該母模仁上設置一模具層,該模具層將該複數小母模仁之表面及兩兩該小母模仁之間之該基板之表面覆蓋;固化該模具層,並將固化後之該模具層與該母模仁分離,以獲得模具。 Please refer to FIG. 1, which is a flow chart of a method for manufacturing a mold according to an embodiment of the present invention. The method comprises the steps of: disposing a grid on a surface of a substrate, the grid having a plurality of through holes, the wall surrounding the plurality of through holes cooperate with the substrate to form a plurality of molding cavities; and using a submolecule having a first molding surface Forming a small female mold core in each of the molding cavities respectively with the wall of each of the through holes; removing the grid plate to obtain a mother mold core having the substrate and a plurality of substrates formed thereon And a small mother mold separated from each other; a mold layer is disposed on the mother mold core, the mold layer covers the surface of the plurality of small mold cores and the surface of the substrate between the two small mold cores; curing the mold The layer is separated from the cured mold layer to obtain a mold.

下面將以製造微小鏡片模具4為例對本發明實施例中模具製造方法進行詳細說明。 The mold manufacturing method in the embodiment of the present invention will be described in detail below by taking the micro lens mold 4 as an example.

如圖2所示,提供一基板10。該基板10具有第一表面101及與第一表面101相對之第二表面102。本實施例中,該基板10為由石英製成之透光基板。當然,該基板10亦可由玻璃等其他可透光材料製成之透光基板。 As shown in FIG. 2, a substrate 10 is provided. The substrate 10 has a first surface 101 and a second surface 102 opposite the first surface 101. In this embodiment, the substrate 10 is a light-transmitting substrate made of quartz. Of course, the substrate 10 can also be a light-transmitting substrate made of other light-transmissive materials such as glass.

提供一具有複數通孔之格板20。該通孔可規則或不規則地分佈於格板20上。優選地,本實施例中,該通孔陣列式地分佈於格板20 上。 A grid 20 having a plurality of through holes is provided. The through holes may be regularly or irregularly distributed on the grid 20. Preferably, in this embodiment, the through holes are distributed in an array on the grid 20 on.

將格板20設於基板10之第一表面101上,使得該格板20與基板10相配合形成複數成型腔201。 The grid 20 is disposed on the first surface 101 of the substrate 10 such that the grid 20 cooperates with the substrate 10 to form a plurality of molding cavities 201.

如圖3所示,提供一子模仁30,其具有一圓柱形之成型端301。該成型端301之直徑與格板20之通孔之直徑相匹配以使后續製程中該成型端301可與該通孔周圍之板壁相貼合。該成型端301具有一第一成型面303。該第一成型面303可用來成型球面鏡片或非球面鏡片,本實施例中,該第一成型面303為向內凹陷之非球面。 As shown in Figure 3, a sub-mold 30 is provided having a cylindrical shaped end 301. The diameter of the forming end 301 matches the diameter of the through hole of the grid 20 so that the forming end 301 can conform to the wall around the through hole in a subsequent process. The forming end 301 has a first forming surface 303. The first molding surface 303 can be used to form a spherical lens or an aspherical lens. In this embodiment, the first molding surface 303 is an aspherical surface that is recessed inward.

如圖4所示,使用送料裝置40向一成型腔201中注入黏性流體狀態之模仁預成體50。該模仁預成體50由光固化型材料製成,本實施例中,該模仁預成體50由環氧樹脂製成。當然,亦可由丙烯酸系樹脂、聚氨基甲酸酯及聚矽氧樹脂等其他可光固化材料製成。 As shown in FIG. 4, a mold body pre-form 50 in a viscous fluid state is injected into a molding cavity 201 using a feeding device 40. The mold core preform 50 is made of a photocurable material. In the present embodiment, the mold core preform 50 is made of an epoxy resin. Of course, it can also be made of other photocurable materials such as acrylic resin, polyurethane, and polyoxymethylene resin.

將子模仁30之第一成型面303朝向模仁預成體50壓下,從而形成小母模仁60,隨後從基板10之第二表面102向小母模仁60照射紫外光使小母模仁60固化。 The first molding surface 303 of the mold core 30 is pressed toward the mold preform 50 to form a small mold core 60, and then the small mother mold 60 is irradiated with ultraviolet light from the second surface 102 of the substrate 10 to make the mother The mold core 60 is cured.

移走子模仁30,重複上述步驟,使得每一成型腔201中均形成有一小母模仁60。該小母模仁60具有一與子模仁30之第一成型面303相匹配之第二成型面601。本實施例中,該第二成型面601為向外凸出之非球面。 The sub-mold 30 is removed, and the above steps are repeated such that a small female mold core 60 is formed in each of the molding cavities 201. The small mold core 60 has a second molding surface 601 that matches the first molding surface 303 of the sub mold core 30. In this embodiment, the second molding surface 601 is an aspherical surface that protrudes outward.

如圖5所示,移去該格板20得到母模仁70。該母模仁70由基板10與複數互相分離之分佈於該基板10上之小母模仁60組成。 As shown in FIG. 5, the grid 20 is removed to obtain a female mold core 70. The mother mold 70 is composed of a substrate 10 and a plurality of small mold cores 60 which are separated from each other and distributed on the substrate 10.

如圖6所示,於該母模仁70上設置一模具層80。該模具層80之材料為聚二甲基矽氧烷或光固化型樹脂等其他可固化材料。該模具 層80之設置方法可採用旋塗方法,亦可採用噴塗方法或澆鑄方法,而其厚度可根據實際所需設計。本實施例中,採用澆鑄方法將黏度高之黏性流體狀態之聚二甲基矽氧烷填充於小母模仁60之表面、兩兩小母模仁60之間之空隙處,從而形成一模具層80。 As shown in FIG. 6, a mold layer 80 is disposed on the female mold core 70. The material of the mold layer 80 is other curable materials such as polydimethyl siloxane or photocurable resin. The mold The layer 80 can be set by a spin coating method, a spray method or a casting method, and the thickness can be designed according to actual needs. In this embodiment, a polydimethyl methoxy oxane having a high viscosity and a viscous fluid state is filled in a gap between the surface of the small mother mold core 60 and the two small female mold cores 60 by a casting method, thereby forming a Mold layer 80.

將該模具層80加熱固化。該加熱固化可利用烤箱之熱空氣對流、紅外線輻射或熱墊板之熱傳導來進行。本實施例中,採用熱墊板之熱傳導來進行。當然,若該模具層80選用光固化型樹脂,則相應地採用光固化方法來將該模具層80固化。 The mold layer 80 is heat cured. The heat curing can be carried out by hot air convection in the oven, infrared radiation or heat transfer from the thermal pad. In this embodiment, heat conduction using a thermal pad is performed. Of course, if the mold layer 80 is a photocurable resin, the mold layer 80 is cured by a photocuring method.

如圖7所示,將該模具層80與母模仁70分離。分離下來之模具層80即為微小鏡片模具4。該微小鏡片模具4具有複數與小母模仁60之第二成型面601相匹配之第三成型面401,即第三成型面401之形狀與子模仁30之第一成型面303形狀相同。本實施例中,該第三成型面401為向內凹陷之非球面。 As shown in FIG. 7, the mold layer 80 is separated from the female mold core 70. The separated mold layer 80 is the minute lens mold 4. The micro lens mold 4 has a plurality of third molding faces 401 matching the second molding faces 601 of the small mold cores 60, that is, the shape of the third molding faces 401 is the same as the shape of the first molding faces 303 of the sub mold cores 30. In this embodiment, the third molding surface 401 is an aspherical surface that is recessed inward.

當然,該子模仁30之第一成型面303亦可為向外凸出之非球面,此時,該微小鏡片模具4之第三成型面401相應地為向外凸出之非球面。 Of course, the first molding surface 303 of the sub-die 30 can also be an outwardly convex aspheric surface. At this time, the third molding surface 401 of the micro lens mold 4 is correspondingly an outwardly convex aspheric surface.

可理解,若基板10為由不透光材料製成之不透光基板,模仁預成體50之材料相應地選為可熱固化型材料(例如丙烯酸系樹脂、聚氨基甲酸酯及聚矽氧樹脂等)亦能實現本發明之目之。 It can be understood that if the substrate 10 is an opaque substrate made of an opaque material, the material of the mold preform 50 is correspondingly selected as a heat curable material (for example, acrylic resin, polyurethane, and poly The purpose of the present invention can also be achieved by a silicone resin or the like.

可理解,亦可先向各個成型腔201中注入模仁預成體50,然後將子模仁30之第一成型面303朝向一成型腔201中之模仁預成體50壓下,從而形成小母模仁60,隨後從基板10之第二表面102向小母模仁60照射紫外光使小母模仁60固化,移去該子模仁30,再次將 子模仁30之第一成型面303朝向另一成型腔201中之模仁預成體50壓下,從而形成另一小母模仁60,從基板10之第二表面102向該另一小母模仁60照射紫外光使該另一小母模仁60固化,移去子模仁30,重複使用該子模仁30使得各個成型腔201內之模仁預成體50成為小母模仁60,即,使得每一成型腔201中均形成有一小母模仁60。當然,於該方法中,將一小母模仁60固化時,一定要控制好紫外光線,使得未變形為小母模仁60之其他模仁預成體50未被固化。 It can be understood that the mold preform 50 can be injected into each molding cavity 201 first, and then the first molding surface 303 of the sub mold core 30 is pressed toward the mold preform 50 in a molding cavity 201, thereby forming The small mold core 60 is then irradiated with ultraviolet light from the second surface 102 of the substrate 10 to the small mold core 60 to cure the small mold core 60, and the sub mold core 30 is removed, again The first molding surface 303 of the sub-die 30 is pressed toward the mold preform 50 in the other molding cavity 201 to form another small mold core 60, from the second surface 102 of the substrate 10 to the other small The female mold core 60 irradiates ultraviolet light to cure the other small female mold core 60, removes the sub mold core 30, and reuses the sub mold core 30 so that the mold core preform 50 in each molding cavity 201 becomes a small female mold core. 60, that is, a small master mold 60 is formed in each of the molding cavities 201. Of course, in this method, when a small female mold core 60 is cured, it is necessary to control the ultraviolet light so that the other mold core preform 50 which is not deformed into the small female mold core 60 is not cured.

綜上所述,本發明符合發明專利要件,爰依法提出專利申請。惟,以上所述者僅為本發明之較佳實施例,舉凡熟悉本案技藝之人士,於爰依本發明精神所作之等效修飾或變化,皆應涵蓋於以下之申請專利範圍內。 In summary, the present invention complies with the requirements of the invention patent and submits a patent application according to law. However, the above description is only the preferred embodiment of the present invention, and equivalent modifications or variations made by those skilled in the art will be covered by the following claims.

Claims (7)

一模具製造方法,其包括以下步驟:於一基板表面設置一格板,該格板具有複數通孔,該複數通孔周圍之板壁與該基板相配合形成複數成型腔;使用一具有第一成型面之子模仁分別與各通孔周圍之板壁相配合於每一該成型腔內形成一小母模仁;移去該格板,獲得母模仁,該母模仁具有該基板及複數形成於該基板上之且相互分離之小母模仁;於該母模仁上設置一模具層,該模具層將該複數小母模仁之表面及兩兩該小母模仁之間之該基板之表面覆蓋;固化該模具層,並將固化後之該模具層與該母模仁分離,以獲得模具。 A mold manufacturing method comprising the steps of: providing a grid on a surface of a substrate, the grid having a plurality of through holes, the wall surrounding the plurality of through holes being matched with the substrate to form a plurality of molding cavities; using a first molding The mold cores of the face are respectively matched with the wall around each of the through holes to form a small mold core in each of the molding cavities; the plate is removed to obtain a mother mold, the mother mold having the substrate and a plurality of a small mold core on the substrate and separated from each other; a mold layer is disposed on the mother mold core, and the mold layer covers the surface of the plurality of small mold cores and the surface of the substrate between the two small mold cores The mold layer is cured, and the cured mold layer is separated from the mother mold to obtain a mold. 如申請專利範圍第1項所述之模具製造方法,其中,於每一該成型腔內形成一小母模仁之方法為,向一該成型腔內注入模仁預成體,該子模仁之第一成型面壓向該模仁預成體,受壓後之該模仁預成體變形為小母模仁,固化該小母模仁,移去該子模仁,重複,使得每一該成型腔內形成有一小母模仁。 The method for manufacturing a mold according to claim 1, wherein a method of forming a small mold core in each of the molding cavities is: injecting a mold pre-form into a molding cavity, the sub-module a molding surface is pressed against the mold preform, and the molded preform is deformed into a small mold core after being pressed, the small mold core is solidified, the mold core is removed, and the mold is repeated, so that each molding is performed. A small female mold is formed in the cavity. 如申請專利範圍第1項所述之模具製造方法,其中,於每一該成型腔內形成一小母模仁之方法為,向各個該成型腔內注入模仁預成體,該子模仁之第一成型面壓向一成型腔內之模仁預成體,受壓後之該模仁預成體變形為小母模仁,固化該小母模仁,移去該子模仁,重複使用該小母模仁使得各個該成型腔內均形成有一小母模仁。 The method for manufacturing a mold according to claim 1, wherein a method of forming a small mold core in each of the molding cavities is: injecting a mold pre-form into each of the molding cavities, the sub-module a molding surface is pressed against a mold preform in a molding cavity, and the molded preform is deformed into a small female mold core after being pressed, the small female mold core is solidified, the sub mold core is removed, and the mold core is reused. The small female mold body has a small female mold core formed in each of the molding cavities. 如申請專利範圍第2或3項所述之模具製造方法,其中,選用紫外光固化方法或熱固化方法將該小母模仁固化。 The mold manufacturing method according to claim 2, wherein the small mold core is cured by an ultraviolet curing method or a thermal curing method. 如申請專利範圍第4項所述之模具製造方法,其中,該小母模仁之材料為環氧樹脂、丙烯酸系樹脂、聚氨基甲酸酯或聚矽氧樹脂。 The method of manufacturing a mold according to the fourth aspect of the invention, wherein the material of the small mold core is an epoxy resin, an acrylic resin, a polyurethane or a polyoxymethylene resin. 如申請專利範圍第1項所述之模仁製造方法,其中,該模具層之材料為聚二甲基矽氧烷或光固化型樹脂。 The method for manufacturing a mold core according to claim 1, wherein the material of the mold layer is polydimethyl siloxane or a photocurable resin. 如申請專利範圍第1項所述之模具製造方法,其中,該模具具有與該第一成型面相同之第二成型面。 The method of manufacturing a mold according to claim 1, wherein the mold has a second molding surface which is the same as the first molding surface.
TW97119060A 2008-05-23 2008-05-23 Method for manufacturing mold TWI419781B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97119060A TWI419781B (en) 2008-05-23 2008-05-23 Method for manufacturing mold

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97119060A TWI419781B (en) 2008-05-23 2008-05-23 Method for manufacturing mold

Publications (2)

Publication Number Publication Date
TW200948577A TW200948577A (en) 2009-12-01
TWI419781B true TWI419781B (en) 2013-12-21

Family

ID=44870654

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97119060A TWI419781B (en) 2008-05-23 2008-05-23 Method for manufacturing mold

Country Status (1)

Country Link
TW (1) TWI419781B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6280661B1 (en) * 1997-08-25 2001-08-28 Seiko Epson Corporation Apparatus and process for producing optical recording medium
US20060214203A1 (en) * 2005-03-07 2006-09-28 Jin Li Formation of micro lens by using flowable oxide deposition
US20060273478A1 (en) * 2005-06-03 2006-12-07 Jin Young S Method of manufacturing a high sag lens and a lens manufactured by using the same method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6280661B1 (en) * 1997-08-25 2001-08-28 Seiko Epson Corporation Apparatus and process for producing optical recording medium
US20060214203A1 (en) * 2005-03-07 2006-09-28 Jin Li Formation of micro lens by using flowable oxide deposition
US20060273478A1 (en) * 2005-06-03 2006-12-07 Jin Young S Method of manufacturing a high sag lens and a lens manufactured by using the same method

Also Published As

Publication number Publication date
TW200948577A (en) 2009-12-01

Similar Documents

Publication Publication Date Title
TWI472444B (en) Production method of three dimensional pattern and production device of three dimensional pattern
CN101900936A (en) Impression mould and production method thereof
TWI439734B (en) Lens module and a method for fabricating the same
TWI659819B (en) Method for forming fine pattern of polyimide by imprint method and polyimide
JP2006337985A (en) Method of manufacturing high sag lens and lens manufactured by using the same method
CN103913784A (en) Method for preparing polymer micro lens array
CN101574840B (en) Cavity manufacturing method
WO2009069940A1 (en) Device and method for fabricating lens
CN101570045B (en) Manufacturing method for insert
TWI419781B (en) Method for manufacturing mold
JP2005122047A (en) Pattern forming method and optical element
JP2007517253A (en) Production of polymer optical waveguides using molds
JP2001315217A (en) Optical element producing method, optical element produced by the method, display element and display device having the optical element, and imaging element and imaging device having the optical element
JP2008290357A (en) Method for manufacturing microlens array
CN113608286B (en) Micro-fluidic technology-based micro-lens array manufacturing method
CN101850625B (en) Method for manufacturing optical components
CN112363367A (en) Method for nano-imprinting multi-order graph
Shen A novel fabrication method for the mold insert of microlens arrays by hot embossing molding
KR100526053B1 (en) Mold using amorphous fluorine resin and fabrication method thereof
JP2017007187A (en) Method and apparatus for manufacturing mold formed article and optical element
KR101127227B1 (en) Manufacturing Method For Microlens With Double Layers
JP2002210745A (en) Method for manufacturing mold and replica master as well as mold
KR101799560B1 (en) Stamp for Making Micro-scale Surface Wrinkles, Method for Manufacturing the Same, And Method for Fabricating Micro-scale Surface Wrinkles On Structures Using the Stamp
Cannistra et al. Microtransfer molding of SU-8 micro-optics
JP2006095901A (en) Plastic molding method, plastic molding device, and molding die

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees