CN103913784A - Method for preparing polymer micro lens array - Google Patents
Method for preparing polymer micro lens array Download PDFInfo
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- CN103913784A CN103913784A CN201410116697.9A CN201410116697A CN103913784A CN 103913784 A CN103913784 A CN 103913784A CN 201410116697 A CN201410116697 A CN 201410116697A CN 103913784 A CN103913784 A CN 103913784A
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- dimethyl silicone
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Abstract
The invention provides a method for preparing a polymer micro lens array, and relates to the field of micro mechanical machining. The problems that in an existing hot press molding method, the cycle is long, cost is high, efficiency is low, and the dimensional precision and the shape of micro lenses can not be guaranteed easily are solved. The method comprises the steps that a graphical photoresist mask is formed on the surface of a silicon substrate; a microporous array is etched through a dry method; the microporous array is evenly covered with a dimethyl silicone polymer thin film, the microporous array is in sealing connection with a cavity, the pressure of a cavity is adjusted to change the ball coronary deformation of the dimethyl silicone polymer thin film, and the pressure is kept constant; photosensitive gel is poured on the dimethyl silicone polymer thin film, and a photosensitive gel convex mold is obtained through ultraviolet curing demolding; a mixture of dimethyl silicone polymer prepolymer and a curing agent is poured in the photosensitive gel convex mold to be heated and cured to obtain a dimethyl silicone polymer concave mold; the concave mold is used for conducting hot pressing on carbonic ester base materials, and a carbonic ester base micro lens array is obtained after demolding. The method for preparing the polymer micro lens array is easy to operate, high in efficiency, low in cost, small in error, good in repeatability, lossless in demolding and suitable for mass production.
Description
Technical field
The present invention relates to micromachining technology field, be specifically related to a kind of preparation method of Polymer microlenses arrays.
Background technology
Microlens array is a series of diameters at several microns to the microminiature lens of hundreds of millimeter by the array necessarily rearranging.Microlens array, as important micro-optical device, is widely used in the fields such as optical communication, optical storage and numeral demonstration.Application at aspects such as focal plane light harvesting, laser alignment, large face battle array demonstration, optical efficiency enhancing, photometry calculation, optical interconnection and miniscannings is more and more extensive.At present, the microlens array using in industrial circle belongs to quartz or glass material mostly, its processing technology adopts etching technics more, and etching technics device therefor costliness, technological process complexity, finally cause the price of microlens array very expensive, affected greatly the application of microlens array in each field.
Due to the optical property of polymeric material excellence, cheap cost, and optical system miniaturization, integrated growth requirement, has promoted the rapid application of polymeric material in optical system, makes it replace gradually the making of traditional material for multiple optical device.Recent years, Polymer microlenses arrays has been widely used in the field such as optical communication and photoelectron, as for optically focused to array detector and for the illumination of flat pannel display etc.Manufacture method for Polymer microlenses arrays mainly contains: Photoresist reflow method, laser straight literary style, etching method, micro-spray printing method and hot pressing formation process etc.Wherein hot pressing formation process adopts polymer replication technology, and working (machining) efficiency is high, is more suitable for producing in enormous quantities.
Hot pressing formation process is a kind ofly directly mold graph to be transferred to the method in polymer substrate material.Mould therefor is generally metal material, makes by the micro fabrication such as photoetching and electroforming, and fabrication cycle is long, and processing cost is high, and the dimensional accuracy of optical microlens and the difficult assurance of pattern.As need change lenticular curvature, need again to make mould, manufacturing cost is further raise.In addition, the material of lens and pattern are directly determining the function of lens, and after the hot pressing of employing metal die, the sticking problem of the demoulding can have a strong impact on the pattern of lens, thereby affects its optical property.If sticking problem seriously also can be damaged mould, this has had a strong impact on the make efficiency of microlens array, and cost of manufacture is raise greatly.
Summary of the invention
In order to solve, the fabrication cycle that existing hot pressing formation process exists is long, processing cost is high, efficiency is low, the dimensional accuracy of optical microlens and pattern are difficult for assurance problem, the invention provides a kind of preparation method of Polymer microlenses arrays.
The present invention for the technical scheme that technical solution problem adopts as follows:
The preparation method of a kind of Polymer microlenses arrays of the present invention, comprises the following steps realization:
Step 1, employing photoetching process form the photoresist mask with microlens array figure at silicon wafer-based basal surface;
Step 2, the above microlens array figure of employing dry etching etch the microwell array that diameter is identical with lenslet diameter at the bottom of silicon wafer-based;
Step 3, by dimethyl silicone polymer film uniform fold on microwell array surface, again microwell array is connected with cavity sealing, regulate the negative pressure in cavity to change the spherical crown shape deformation curvature of dimethyl silicone polymer film at micropore place, after meeting the demands, keep the constant pressure in cavity;
Step 4, dimethyl silicone polymer film top casting light-sensitive emulsion after deformation obtain light-sensitive emulsion punch after the ultra-violet curing demoulding;
Step 5, dimethyl silicone polymer prepolymer and the mixed polydimethylsiloxanemixture mixture of hardening agent are poured in light-sensitive emulsion punch, after being heating and curing, obtained dimethyl silicone polymer die;
Step 6, utilize dimethyl silicone polymer die hot pressing polycarbonate substrate, after the demoulding, obtain polycarbonate-base microlens array.
In step 5, the ratio that described dimethyl silicone polymer prepolymer is 10:1 with hardening agent according to mass ratio is mixed.
In step 5, before pouring polydimethylsiloxanemixture mixture into light-sensitive emulsion punch, adopt Fruit storage polydimethylsiloxanemixture mixture, to eliminate the bubble in polydimethylsiloxanemixture mixture.
In step 5, after pouring polydimethylsiloxanemixture mixture into light-sensitive emulsion punch, 30min is heating and curing at 80 ℃.
The invention has the beneficial effects as follows:
1, the present invention adopts the duplication process such as casting and hot pressing to make microlens array, and without Machining of Curved Surface technique, simple to operate, process time is short, and efficiency is high, and error is little.
2, the present invention adopts pressure to regulate the deformation of dimethyl silicone polymer (PDMS) film, can effectively control lenticular radius-of-curvature.
3, the present invention adopts the method for photoetching and etching, makes microwell array on silicon chip, has good array homogeneity and repeatability.
4, dimethyl silicone polymer (PDMS) material surface energy is low, sticky hardly with hot pressing die and polycarbonate (PC) base material of its making, can realize easily the harmless demoulding.
5, the present invention adopts the method for hot pressing to realize the making of microlens array, has advantages of that technique is simple, cost of manufacture is cheap, is easy to mass, is more applicable to the mass preparation of large area microlens array.
Accompanying drawing explanation
Fig. 1 is the schematic flow sheet of preparing Polymer microlenses arrays;
Fig. 2 is the optical microscopy map of Polymer microlenses arrays.
In figure: 1, mask plate, 2, photoresist mask, 3, at the bottom of silicon wafer-based, 4, microwell array, 5, dimethyl silicone polymer film, 6, cavity, 7, light-sensitive emulsion, 8, light-sensitive emulsion punch, 9, polydimethylsiloxanemixture mixture, 10, dimethyl silicone polymer die, 11, polycarbonate substrate, 12, polycarbonate-base microlens array.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
As shown in Figure 1, the preparation method of a kind of Polymer microlenses arrays of the present invention, comprises the following steps:
(1) utilize mask plate 13 surface coverage photoresists at the bottom of silicon wafer-based, by exposing and developing, at the bottom of silicon wafer-based, 3 surfaces form patterned photoresist mask 2, and the figure on photoresist mask 2 is photoresist microlens array figure.
(2), by the microlens array figure on dry etching photoresist mask 2, at the bottom of silicon wafer-based, forming the microwell array 4 that diameter is identical with lenslet diameter on 3.
(3) dimethyl silicone polymer film 5 is covered uniformly to microwell array 4 surfaces, the cavity 6 that again microwell array 4 and can be produced to negative pressure seals and is connected, make dimethyl silicone polymer film 5 be the deformation of spherical crown shape at each micropore place of microwell array 4, by regulating negative pressure in cavity 6 can change the amount of curvature of each spherical crown shape deformation, after being adjusted to designing requirement, the curvature of each spherical crown shape deformation keeps the constant pressure in cavity 6.
(4) light-sensitive emulsion 7 is cast on the dimethyl silicone polymer film 5 after deformation, solidify light-sensitive emulsion 7 by UV-irradiation, through the demoulding, obtain light-sensitive emulsion microlens array on light-sensitive emulsion punch 8, now, microlens array is copied on light-sensitive emulsion punch 8.
(5) be to form polydimethylsiloxanemixture mixture 9 after 10:1 mixes by dimethyl silicone polymer prepolymer and hardening agent according to mass ratio, through vacuum outgas, eliminate the bubble in polydimethylsiloxanemixture mixture 9, polydimethylsiloxanemixture mixture 9 is poured in light-sensitive emulsion punch 8,30min is heating and curing at 80 ℃, produce and the dimethyl silicone polymer die 10 of light-sensitive emulsion punch 8 complementary structures, now, microlens array is copied on dimethyl silicone polymer die 10.
(6) by dimethyl silicone polymer die 10 hot pressing polycarbonate substrates 11.
(7) through the demoulding, obtain polycarbonate-base microlens array 12 on polycarbonate substrate 11, now, microlens array is copied on polycarbonate substrate 11, and the hot pressing that has realized microlens array copies with mass to be made.
In present embodiment, dimethyl silicone polymer prepolymer and hardening agent can be selected existing any.
Claims (4)
1. a preparation method for Polymer microlenses arrays, is characterized in that, comprises the following steps:
Step 1, employing photoetching process (3) surface at the bottom of silicon wafer-based forms the photoresist mask (2) with microlens array figure;
Step 2, the above microlens array figure of employing dry etching etch the microwell array that diameter is identical with lenslet diameter (4) on (3) at the bottom of silicon wafer-based;
Step 3, by dimethyl silicone polymer film (5) uniform fold on microwell array (4) surface, again microwell array (4) is connected with cavity (6) sealing, regulate the negative pressure in cavity (6) to change the spherical crown shape deformation curvature of dimethyl silicone polymer film (5) at micropore place, after meeting the demands, keep the constant pressure in cavity (6);
Step 4, dimethyl silicone polymer film (5) top casting light-sensitive emulsion (7) after deformation obtain light-sensitive emulsion punch (8) after the ultra-violet curing demoulding;
Step 5, dimethyl silicone polymer prepolymer and the mixed polydimethylsiloxanemixture mixture of hardening agent (9) are poured in light-sensitive emulsion punch (8), after being heating and curing, obtained dimethyl silicone polymer die (10);
Step 6, utilize dimethyl silicone polymer die (10) hot pressing polycarbonate substrate (11), after the demoulding, obtain polycarbonate-base microlens array (12).
2. the preparation method of a kind of Polymer microlenses arrays according to claim 1, is characterized in that, in step 5, the ratio that described dimethyl silicone polymer prepolymer is 10:1 with hardening agent according to mass ratio is mixed.
3. the preparation method of a kind of Polymer microlenses arrays according to claim 1, it is characterized in that, in step 5, pouring polydimethylsiloxanemixture mixture (9) into light-sensitive emulsion punch (8) before, adopt Fruit storage polydimethylsiloxanemixture mixture (9), to eliminate the bubble in polydimethylsiloxanemixture mixture (9).
4. the preparation method of a kind of Polymer microlenses arrays according to claim 1, is characterized in that, in step 5, is pouring polydimethylsiloxanemixture mixture (9) into light-sensitive emulsion punch (8) afterwards, and 30min is heating and curing at 80 ℃.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104678465A (en) * | 2015-02-10 | 2015-06-03 | 华南理工大学 | Integrated preparation method for microstructure lens and mold of microstructure lens |
| CN104730674A (en) * | 2015-02-10 | 2015-06-24 | 华南理工大学 | Manufacturing method for LED optical lens and mold of LED optical lens |
| CN105022235A (en) * | 2015-07-15 | 2015-11-04 | 中国科学院长春光学精密机械与物理研究所 | Manufacture method of extreme ultraviolet source collecting mirror with half-wave zone structure |
| CN106604809A (en) * | 2014-07-31 | 2017-04-26 | 弗劳恩霍夫应用研究促进协会 | Micromechanical component and method for producing same |
| CN108663730A (en) * | 2018-05-09 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method for the fly's-eye lens that curvature is controllable |
| CN110187417A (en) * | 2019-06-27 | 2019-08-30 | 电子科技大学 | The production method of PDMS film microlens array |
| CN110333562A (en) * | 2019-05-30 | 2019-10-15 | 深圳通感微电子有限公司 | A method of making silicon lens |
| CN110426761A (en) * | 2018-10-29 | 2019-11-08 | 中国科学院长春光学精密机械与物理研究所 | Cyclic olefine copolymer microlens array with metal diaphragm and preparation method thereof |
| CN110954977A (en) * | 2019-12-06 | 2020-04-03 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of cycloolefin copolymer microlens array and cycloolefin copolymer microlens array |
| CN111717886A (en) * | 2020-06-30 | 2020-09-29 | 香港中文大学（深圳） | Microstructure preparation device and method |
| CN112180477A (en) * | 2019-07-01 | 2021-01-05 | 梅姆斯莱克斯 | Diffuser with asymmetric light output pattern and method of making same |
| CN112649905A (en) * | 2020-12-28 | 2021-04-13 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of fly-eye lens with free-form surface substrate |
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106604809A (en) * | 2014-07-31 | 2017-04-26 | 弗劳恩霍夫应用研究促进协会 | Micromechanical component and method for producing same |
| CN106604809B (en) * | 2014-07-31 | 2019-06-11 | 弗劳恩霍夫应用研究促进协会 | Micromechanical component and its manufacturing method |
| CN104678465A (en) * | 2015-02-10 | 2015-06-03 | 华南理工大学 | Integrated preparation method for microstructure lens and mold of microstructure lens |
| CN104730674A (en) * | 2015-02-10 | 2015-06-24 | 华南理工大学 | Manufacturing method for LED optical lens and mold of LED optical lens |
| CN105022235A (en) * | 2015-07-15 | 2015-11-04 | 中国科学院长春光学精密机械与物理研究所 | Manufacture method of extreme ultraviolet source collecting mirror with half-wave zone structure |
| CN108663730A (en) * | 2018-05-09 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method for the fly's-eye lens that curvature is controllable |
| CN108663730B (en) * | 2018-05-09 | 2020-04-10 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of curvature-controllable fly-eye lens |
| CN110426761A (en) * | 2018-10-29 | 2019-11-08 | 中国科学院长春光学精密机械与物理研究所 | Cyclic olefine copolymer microlens array with metal diaphragm and preparation method thereof |
| CN110333562A (en) * | 2019-05-30 | 2019-10-15 | 深圳通感微电子有限公司 | A method of making silicon lens |
| CN110187417A (en) * | 2019-06-27 | 2019-08-30 | 电子科技大学 | The production method of PDMS film microlens array |
| CN112180477A (en) * | 2019-07-01 | 2021-01-05 | 梅姆斯莱克斯 | Diffuser with asymmetric light output pattern and method of making same |
| US11774645B2 (en) | 2019-07-01 | 2023-10-03 | Memslux | Diffuser having asymmetric light output pattern and method of manufacturing same |
| CN110954977A (en) * | 2019-12-06 | 2020-04-03 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of cycloolefin copolymer microlens array and cycloolefin copolymer microlens array |
| CN111717886A (en) * | 2020-06-30 | 2020-09-29 | 香港中文大学（深圳） | Microstructure preparation device and method |
| CN111717886B (en) * | 2020-06-30 | 2023-08-25 | 香港中文大学（深圳） | Microstructure preparation device and method |
| CN112649905A (en) * | 2020-12-28 | 2021-04-13 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of fly-eye lens with free-form surface substrate |
| CN112649905B (en) * | 2020-12-28 | 2022-02-11 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of fly-eye lens with free-form surface substrate |
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Application publication date: 20140709 |