CN113126188A - Curved fly-eye lens and preparation method thereof - Google Patents

Curved fly-eye lens and preparation method thereof Download PDF

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Publication number
CN113126188A
CN113126188A CN202110465140.6A CN202110465140A CN113126188A CN 113126188 A CN113126188 A CN 113126188A CN 202110465140 A CN202110465140 A CN 202110465140A CN 113126188 A CN113126188 A CN 113126188A
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eye
sub
eye lens
fly
concave surface
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刘永顺
冯昕
陶可楷
连高歌
吴一辉
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen

Abstract

The invention provides a curved fly-eye lens and a preparation method thereof, wherein the curved fly-eye lens comprises an upper concave surface and a lower concave surface; light rays vertically enter from the upper part of the concave surface of the curved fly-eye lens and are transmitted to the lower concave surface from the upper concave surface; the lower concave surface is provided with sub-eye lenses, the transmitted light rays with different angles pass through the optical centers of all stages of sub-eye lenses, and then the focal points of all stages of sub-eyes fall on the plane of the detector. According to the invention, a hot pressing process is adopted to transfer a micro-lens pattern on a silicon wafer substrate to a polymer layer, pressure is uniformly applied to the surface of the polymer layer, the sub-eye rise is uniform, and the size of the sub-eye rise can be controlled by controlling the preset hot pressing thickness; accurately controlling the curvature radius of the film deformation according to the linear relation between the PDMS film deformation and the atmospheric pressure; the lens is prepared by adopting an ultraviolet curing process, so that the time is short, the efficiency is high, the repeatability is good, and the surface appearance is uniform; the variable-curvature quartz glass is adopted to prepare the meniscus fly-eye lens during ultraviolet curing, so that the influence of spherical aberration and aberration is reduced, and the resolution is improved.

Description

Curved fly-eye lens and preparation method thereof
Technical Field
The invention relates to the field of micro-machining, in particular to a curved fly-eye lens and a preparation method thereof.
Background
In recent years, artificial bionic compound eyes have gained more and more attention of researchers due to the fact that the artificial bionic compound eyes can be imaged at a large field angle, are highly sensitive to moving objects and are compact in structure. The artificial bionic compound eye becomes a new subject in the high-tech field and is widely applied to multiple fields such as military affairs, communication, industry, information industry, medicine, building industry, scientific research and the like. The traditional optical imaging system generally adopts a lens group for imaging, has more lenses, large volume and complex structure, and is difficult to realize integration and fusion with various miniaturized systems. Therefore, the artificial compound eye has great potential application value in the fields of military, aviation and the like.
At the beginning of the 21 st century, the university of osaka, japan was inspired by the dragonfly parallel compound eye, and a compact artificial compound eye imaging system TOMBO was proposed, which consisted of a microlens array layer, a light isolation layer, and a photodetector array layer. Each micro lens and the corresponding light detector form a small imaging system unit, and the light isolation layer is used for isolating light of the adjacent imaging system units to prevent light crosstalk. Since the micro lens arrays adopted by the TOMBO are independent of each other and the structure of each imaging system unit is separable, the TOMBO is liable to have a deviation in integrated mounting, deteriorating the imaging effect. At this time, researchers at home and abroad have proposed a combined application mode of the curved fly-eye lens and the planar photosensitive sensor. However, due to the existence of the field curvature, when an object is imaged by a curved fly-eye lens, the object is not a plane to which the vision is accustomed but a corresponding curved focal plane. The defocusing phenomenon can occur between the curved focal plane and the plane pixel surface of the photosensitive sensor, the more far away from the central area, the more remarkable the defocusing phenomenon is, and the imaging quality of the curved fly-eye lens is influenced to a great extent. In the conventional optical system, a lens group is generally used to correct aberrations, but as mentioned above, the conventional optical system has the problems of large volume, complex structure, difficult processing and assembly, high cost, tolerance accumulation and the like.
With the development of micro-nano processing technology, researchers at home and abroad propose various experimental schemes to prepare the curved fly-eye lens. The following methods are available: 1. performing femtosecond laser hot pressing, namely processing a micro-lens array on a silicon chip by using femtosecond laser, demolding by using PMMA, and then hot pressing the PMMA onto a sphere; 2. laser direct writing, and directly processing a micro-lens array on the curved surface; 3. performing femtosecond laser chemical corrosion, enabling the femtosecond laser to stay on the curved surface for 0.5s to form a small pit, and performing isotropic chemical corrosion by using 10% HF acid to obtain a curved surface micro-lens array; and 4, making a PDMS mold, etching a required planar microlens array on the planar PDMS film, covering the planar microlens array on a container filled with PDMS pre-polymerization liquid, placing a small ball on the PDMS film, enabling the film to generate spherical deformation by using the gravity of the small ball, and preparing the curved microlens array after the PDMS pre-polymerization liquid is cured. However, the main flow process described above has the following problems: the processing cycle is long, the cost is high, the curvature of the curved fly-eye lens is uncontrollable, the repeatability is low, and the consistency of the sub-eye morphology is poor.
Patent CN105467477A proposes a curved bionic compound eye imaging device of a gradually-changed focal length lens array, which changes the focal length of the lens by calculating different distances from each stage of sub-eye lens to the photoelectric image sensor. And presetting that the lens crowns of the monocular lens subsystems are the same, and manufacturing each level of sub-eyes by using a photoetching column hot melting method. However, at present, a planar photolithography process is mostly adopted, and the finally prepared structure is a curved surface structure. How to complete the conversion from the planar structure to the curved structure and control the position of the sub-eye on the curved surface to match with the design value does not provide a specific feasible scheme, so that the method has some defects in practical operation.
Patent CN103616738A proposes a method for manufacturing a curved fly-eye microlens with different focal lengths, which uses a micro-processing technology to make an array of multiple units on a substrate, and covers an electrostatic thin film thereon, and the deformation of the electrostatic thin film can be changed by changing the magnitude of the applied voltage on different unit groups. Because each unit needs to be controlled independently, the method is not suitable for preparing small-unit and large-area array structures, the compound eye limitation is large, the requirement on the structure is high, and the design and manufacturing cost is increased.
Disclosure of Invention
The invention mainly provides a curved fly-eye lens and a preparation method thereof, which reduce the influence of spherical aberration and improve the resolution.
The invention provides a curved fly-eye lens, which comprises an upper concave surface and a lower concave surface; light rays vertically enter from the upper part of the concave surface of the curved fly-eye lens and are transmitted to the lower concave surface from the upper concave surface; the lower concave surface is provided with sub-eye lenses, the transmitted light rays with different angles pass through the optical centers of all stages of sub-eye lenses, and then the focal points of all stages of sub-eyes fall on the plane of the detector.
Preferably, the curved fly-eye lens is embodied as a meniscus fly-eye lens.
Preferably, the most central part of the concave surface of the curved fly-eye lens is 0-level sub-eye, and all levels of sub-eyes are extended to the periphery in a centrosymmetric mode, and the level number of the sub-eyes is increased to n levels; the aperture of the sub-eye is gradually increased.
Preferably, the focal point of each stage of the sub-eye falls on the detector plane; the perpendicular distance from the 0-order sub-eye to the detector plane is l0(ii) a The distance from the 1, 2, 3 … … n-order sub-eye to the detector plane along the incident direction of the optical axis is l1、l2……ln，lnAnd gradually increases.
Preferably, the detector is a light sensitive chip sensor.
Preferably, the focal length l is adjusted for each sub-eyenIs calculated as follows:
refraction occurs when light passes through the upper surface:
n0sinα＝n sinθ (1)
lnis equal to image space focal lengthPoint f':
Figure BDA0003038580850000031
from the geometric relationship, one can obtain:
Figure BDA0003038580850000032
simultaneous equations (2), (3) can be found:
Figure BDA0003038580850000033
wherein n is0Is the refractive index of air, and n is the refractive index of the photosensitive adhesive; alpha is a light incident angle, theta is a light refraction angle, and the refracted light coincides with the optical axis of the sub-eye lens; r isnIs the radius of curvature of the sub-eye; lnThe focal length of each sub-eye; r0Is the radius of curvature of the curved fly-eye lens base; h isnIs the sagittal height of the spherical cap of the sub-eye lens.
The invention also provides a preparation method of the curved fly-eye lens, which comprises the following steps:
s1: the curved fly-eye lens is optically designed and comprises an upper concave surface and a lower concave surface; light rays vertically enter from the upper part of the concave surface of the curved fly-eye lens and are transmitted to the lower concave surface from the upper concave surface; the lower concave surface is provided with sub-eye lenses, and the transmitted light rays with different angles pass through the optical centers of all stages of sub-eye lenses to obtain the radial size and arrangement of each stage of sub-eyes, so that the focal points of each stage of sub-eyes fall on the same focal plane, and are matched with the image plane of the photosensitive chip sensor;
s2: spin-coating photoresist on the surface of a substrate, and obtaining a photoresist mask plate with a micro-lens array through exposure and development; transferring the pattern on the photoresist mask plate to the substrate through dry etching to obtain a micropore array of the substrate;
s3: cleaning photoresist on the surface of the substrate, and passivating the substrate; paving a polymer on the micropore array of the passivated substrate, and carrying out hot-pressing treatment; and cooling to obtain the polymer micro-lens array.
Preferably, the step S3 is followed by the following steps:
s4: carrying out reverse demolding on the polymer micro-lens array by using PDMS pre-polymerization liquid to obtain a PDMS film;
s5: and copying the micro-lens array on the PDMS film through an ultraviolet curing process to prepare the meniscus fly-eye lens.
Preferably, step S2 further includes: performing pre-baking after uniformly spin-coating photoresist on the substrate; photoetching the photoresist through a photoresist mask plate, and developing to obtain a photoresist mask with a micro-lens array structure; and carrying out ICP etching on the position where the photoresist mask plate is not attached to obtain the micropore array with the same pattern as the photoresist mask plate.
Preferably, step S3 further includes: the photoresist is cleaned by the following steps: soaking the substrate in an acetone solution, and then putting the substrate into a solution containing concentrated sulfuric acid and hydrogen peroxide in a ratio of 3: 1, boiling the mixed preparation solution, and finally cleaning the substrate by using clear water; use of C after washing4F8And passivating the substrate, and forming a passivation layer on the surface of the substrate.
Preferably, step S4 further includes: and placing the polymer microlens array in a mold, pouring PDMS (polydimethylsiloxane) pre-polymerization liquid, and placing the PDMS pre-polymerization liquid in a vacuum drying oven for heating and curing to obtain the PDMS film with elastic deformation.
Preferably, the microlens array pattern on the PDMS film is the inverse of the polymer microlens array pattern.
Preferably, the PDMS film is sealed on a closed air pumping cavity, and the PDMS film is concave downwards after air pumping; pouring photosensitive adhesive in a concave spherical crown formed by the PDMS film, and placing quartz glass above the photosensitive adhesive; and curing the mixture under an ultraviolet lamp to obtain the meniscus fly-eye lens.
The invention has the beneficial effects that:
(1) the processing precision is high: processing a planar microlens array on a silicon wafer substrate by adopting photoetching and ICP ion etching;
(2) in the process of transferring the microlens pattern on the silicon wafer substrate to the polymer layer by adopting a hot pressing process, pressure is uniformly applied to the surface of the copolymerization layer, the sub-eye rise is uniform, and meanwhile, the size of the sub-eye rise is controlled by controlling the preset hot pressing thickness;
(3) according to the linear relation between the PDMS film deformation and the atmospheric pressure, the negative pressure inside the mold is measured by using a differential pressure gauge, so that the curvature radius of the film deformation can be accurately controlled;
(4) the lens is prepared by adopting an ultraviolet curing process, so that the time is short, the efficiency is high, the repeatability is good, and the surface appearance is uniform;
(5) the variable-curvature quartz glass is adopted to prepare the meniscus fly-eye lens during ultraviolet curing, so that the influence of spherical aberration and aberration is reduced, and the resolution is improved.
Drawings
FIG. 1 is a design model diagram of a curved fly-eye lens and a method of making the same according to the present invention;
FIG. 2 is a cross-sectional view of a photoresist mask for a curved fly-eye lens and a method of making the same according to the present invention;
FIG. 3 is a diagram of a substrate of a silicon wafer covered with a photoresist mask after development for a curved fly-eye lens and a method of making the same according to the present invention;
FIG. 4 is a diagram of a silicon wafer substrate with an array of micro-holes after passivation for a curved fly-eye lens and a method of making the same according to the present invention;
FIG. 5 is a schematic diagram of a hot-pressed polymer layer replication transfer of an array of micro-holes on a silicon wafer for a curved fly-eye lens and a method of making the same according to the present invention;
FIG. 6 is a schematic view of a polymer layer with a microlens array after hot pressing for a curved fly-eye lens and a method of making the same according to the present invention;
FIG. 7 is a schematic diagram of the back demolding of PDMS pre-polymerized liquid for a curved fly-eye lens and a method for preparing the same according to the present invention;
FIG. 8 is a schematic view of a PDMS film with an array of recessed microlenses obtained by reverse demolding of a curved fly-eye lens and a method for making the same according to the present invention;
FIG. 9 is a schematic view of the UV curing of a photosensitive adhesive for a curved fly-eye lens and a method for making the same according to the present invention;
fig. 10 is a structural view of a meniscus fly-eye lens of a curved fly-eye lens and a method for manufacturing the same according to the present invention.
Wherein the reference numerals are:
the device comprises a photoresist mask plate 1, a photoresist mask 2, a substrate 3, a micropore array 4, a polymer layer 5, a hot-pressing limiting ring 6, a polymer microlens array 7, a PDMS film 8, an air pumping cavity 9, quartz glass 10, photosensitive glue 11 and a meniscus fly-eye lens 12.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The design and preparation of the curved compound eye according to the present invention will be described in detail with reference to the following examples.
Fig. 1 is a design model diagram of a curved fly-eye lens and a method for manufacturing the same according to the present invention.
As shown in fig. 1, the present invention provides a curved fly-eye lens, wherein light is vertically incident from above the concave surface of the curved fly-eye lens, and is transmitted from the upper concave surface to the lower concave surface of the curved fly-eye lens, sub-eyes are disposed on the lower concave surface of the curved fly-eye lens, and transmitted light of different angles passes through optical centers of the sub-eyes, so that refractive focuses of all light fall on the plane of a detector.
The core design of the invention is that the curved fly-eye lens is designed into a meniscus fly-eye lens 12 with a hyperboloid, so as to reduce the influence of spherical aberration and aberration; meanwhile, the number of the sub-eyes is greatly related to the field angle of the meniscus fly-eye lens 12, and the field angle is increased when the number of the sub-eyes is larger, and can reach 140-180 degrees.
In one embodiment of the present invention, the detector plane is a light sensor chip sensor, which is 1 inch in size.
In designing the meniscus fly-eye lens 12, it is necessary to grade the sub-eye lens. The most central part of the lower surface of the meniscus compound eye corresponds to a 0-grade sub-eyeThen expanding to the periphery, the sub-eye stage number is gradually increased to n stages, and the sub-eye caliber is increased step by step. The vertical distance from the 0-level sub-eye to the image surface of the photosensitive component is set as l0I.e. focal length of 0-order sub-eye is l0. The distances from the 1, 2, 3 … … n-level sub-eyes to the image plane along the incident optical axis direction are respectively l1，l2，l3……ln. In the progressive increasing process from 0 stage to n stage, lnThe focal point of each sub-eye is located on the image surface of the photosensitive component by increasing step by step, and the central axis of each micro-lens passes through the central point o of curvature. Focal length l of each sub-eyenThe calculation process of (2) is as follows:
refraction occurs when light passes through the upper surface:
n0sinα＝n sinθ (1)
lnis equal to the image-side focal point f':
Figure BDA0003038580850000071
from the geometric relationship, one can obtain:
Figure BDA0003038580850000072
simultaneous equations (2), (3) can be found:
Figure BDA0003038580850000073
wherein n is0Is the refractive index of air; n refractive index of photosensitive glue 11; r isnIs the radius of curvature of the sub-eye; lnThe focal length of each sub-eye; alpha is the light incident angle; r0Is the curvature radius of the substrate 3 of the meniscus fly-eye lens 12; h isnIs the rise of the spherical cap of the sub-eye lens; theta is a ray refraction angle and enables the refracted ray to be coincident with the optical axis of the sub-eye lens.
Fig. 2-8 show schematic diagrams of steps for manufacturing a curved fly-eye lens according to an embodiment of the present invention.
According to the above design, the steps of preparing the curved fly-eye lens of this embodiment are as follows:
s1: the curved fly-eye lens is optically designed and comprises an upper concave surface and a lower concave surface; light rays vertically enter from the upper part of the concave surface of the curved fly-eye lens and are transmitted to the lower concave surface from the upper concave surface; the lower concave surface is provided with sub-eye lenses, and the transmitted light rays with different angles pass through the optical centers of all stages of sub-eye lenses to obtain the radial size and arrangement of each stage of sub-eyes, so that the focal points of each stage of sub-eyes fall on the same focal plane, and are matched with the image plane of the photosensitive chip sensor;
s2: spin-coating photoresist on the surface of a substrate 3, and obtaining a photoresist mask plate 1 with a micro-lens array through exposure and development; transferring the pattern on the photoresist mask plate 1 to the substrate 3 through dry etching to obtain a micropore array 4 of the substrate 3;
s3: cleaning the photoresist on the surface of the substrate 3, and passivating the substrate 3; paving a polymer on the micro-pore array 4 of the passivated substrate 3, and carrying out hot-pressing treatment; after cooling, a polymer microlens array 7 is obtained.
In one embodiment of the present invention, step 1 performs an optical design for a curved fly-eye lens. In the invention, the sub-eye aperture is gradually increased, the rise of the sub-eyes is set to be 0.030mm, the 0-level sub-eye aperture is set to be 0.3mm, namely the 0-level sub-eye is 0.3mm, and the focal length of the 0-level sub-eye is calculated by using the initial value. The calculation process has been described in detail in the above design scheme for the pair of eyes, and will not be described in detail herein; then, the focal lengths of all the sub-eyes are sequentially calculated. The specific data are shown in the following table:
number of sub-eye stages θ/° Caliber/mm Focal length/mm
0 0 0.3 0.690
1 2.5 0.305 0.701
2 5 0.31 0.735
3 7.5 0.32 0.791
4 10 0.34 0.869
5 12.5 0.356 0.969
6 15 0.38 1.091
7 17.5 0.4 1.235
8 20 0.43 1.400
9 22.5 0.45 1.566
In one embodiment of the present invention, step 2 is the fabrication of a microwell array 4 of a substrate 3. As shown in fig. 2, a cross-sectional view of the photoresist mask 1 is shown, wherein the pattern of the photoresist mask 1 is designed according to the above, and the aperture of the pattern is gradually increased in a centrosymmetric manner with the circle center as 0 level. Selecting a silicon wafer as a substrate 3, spin-coating an adhesive, uniformly spin-coating a photoresist by using a high-speed centrifugation method, and pre-baking the substrate 3 after spin-coating; and then developing the substrate 3, and then post-baking to obtain the silicon wafer substrate 3 covered with the photoresist mask plate 1 as shown in fig. 3. And then performing ICP etching on the position where the photoresist mask plate 1 is not attached to obtain a micropore array 4 of the substrate 3 with the same pattern as the photoresist mask plate 1, as shown in FIG. 4.
In one embodiment of the present invention, step 3 is the fabrication of a polymer microlens array 7. Soaking the substrate 3 subjected to ICP etching in the step 2 in an acetone solution to primarily remove the photoresist on the substrate 3; and then putting the substrate 3 into concentrated sulfuric acid and hydrogen peroxide 3: boiling the mixed preparation solution in the proportion of 1 to remove the residual photoresist and part of impurities; finally, the substrate 3 is cleaned with clear water to remove sulfuric acid, and then is cleaned with C4F8The gas passivates the substrate 3 to form a passivation layer on the surface of the substrate 3.
In one embodiment of the present invention, as shown in fig. 5, after passivating the substrate 3, the substrate 3 with the microlens array is placed in a mold, and a polymer layer 5, such as COC, COP, PMMA, PC, etc., is laid thereon, and the polymer plate is hot-pressed at a glass transition temperature, and a hot-pressed limit ring 6 with an equal thickness is provided around the polymer plate and the outer periphery of the micropore array 4 of the substrate 3; after cooling, the polymer layer 5 is peeled off from the substrate 3, and the polymer microlens array 7 shown in fig. 6 is obtained.
In one embodiment of the invention, the autoclave pressure ranges from 25kPa to 50kPa, the temperature ranges from 135 ℃ to 145 ℃, and the convex microlens array has a rise of 20 to 40 μm.
In one embodiment of the present invention, a Cyclic Olefin Copolymer (COC) is laid on the microwell array 4 of the passivated substrate 3 and subjected to a hot press process. A hot-pressing limiting ring 6 with the same thickness is arranged on the periphery of the micro-pore array 4 of the cycloolefin copolymer and the substrate 3, and is heated to the glass transition temperature of the cycloolefin copolymer of more than 138 ℃, and simultaneously, the pressure of 40kPa is applied for 15 min. And cooling to room temperature and peeling to obtain the COC-based micro lens array structure.
The following steps are also included after step S3:
s4: carrying out reverse demoulding on the polymer micro-lens array 7 by using PDMS pre-polymerization liquid to obtain a PDMS film 8;
s5: and copying the micro-lens array on the PDMS film 8 by an ultraviolet curing process to prepare the meniscus fly-eye lens 12.
In one embodiment of the present invention, as shown in fig. 7, in step S4, the polymer microlens array 7 is placed in a mold, the PDMS prepolymer is cast, and the mold is placed in a vacuum oven and heated at 80 ° for 8 hours. After the PDMS pre-polymerization liquid is cured, a PDMS film 8 with elastic deformation can be obtained, as shown in fig. 8, the pattern of the microlens array of the PDMS film 8 is opposite to the pattern of the polymer microlens array 7.
In an embodiment of the present invention, as shown in fig. 9, the PDMS film 8 obtained in step S4 is sealed in the air-extracting cavity 9, air is extracted to generate spherical deformation on the surface of the PDMS film 8, the photosensitive adhesive 11 is poured into the concave spherical cap formed by the deformed PDMS film 8, a piece of passivated quartz glass 10 with variable curvature is placed above the photosensitive adhesive 11, and then the piece of passivated quartz glass is placed under an ultraviolet lamp for curing, so as to prepare the meniscus fly' S eye lens 12 shown in fig. 10.
The invention uses a light-sensitive glue 11 of type NOA 63. Pouring a photosensitive adhesive 11 into the concave spherical crown, wherein the quartz glass 10 positioned above is transparent in ultraviolet and visible spectrum ranges, and the transmittance is more than 92%; and the quartz glass 10 with variable curvature is adopted, so that different curvatures can be designed according to different requirements during preparation, and further the curvature radius of the substrate 3 of the meniscus fly-eye lens 12 is changed.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.

Claims (13)

1. A curved fly-eye lens is characterized by comprising an upper concave surface and a lower concave surface; light rays vertically enter from the upper part of the concave surface of the curved fly-eye lens and are transmitted to the lower concave surface from the upper concave surface; the lower concave surface is provided with sub-eye lenses, the transmitted light rays with different angles pass through the optical centers of all stages of sub-eye lenses, and then the focal points of all stages of sub-eyes fall on the plane of the detector.
2. Curved fly-eye lens according to claim 1, characterized in that it is in particular a meniscus fly-eye lens (12).
3. The curved fly-eye lens of claim 1, wherein the lowest concave surface of the curved fly-eye lens is a 0-order sub-eye, and the sub-eyes of each order are extended to the periphery in a centrosymmetric manner, and the order of the sub-eyes is increased to n-order; the aperture of the sub-eye is gradually increased.
4. The curved fly-eye lens of claim 3 wherein the focal point of each sub-eye falls on the detector plane; the vertical distance from the 0-level sub-eye to the plane of the detector is l0(ii) a The distance from the 1, 2, 3 … … n-order sub-eye to the detector plane along the incident direction of the optical axis is l1、l2……ln，lnAnd gradually increases.
5. The curved fly-eye lens of claim 4, wherein the detector is a light sensitive chip sensor.
6. The curved fly-eye lens of claim 4 wherein said each sub-eye focal length/, isnIs calculated as follows:
refraction occurs when light passes through the upper surface:
n0sin α＝n sinθ (1)
lnis equal to the image-side focal point f':
Figure FDA0003038580840000011
from the geometric relationship, one can obtain:
Figure FDA0003038580840000012
simultaneous equations (2), (3) can be found:
Figure FDA0003038580840000013
wherein n is0Is the refractive index of air, and n is the refractive index of the photosensitive adhesive (11); alpha is a light incident angle, theta is a light refraction angle, and the refracted light coincides with the optical axis of the sub-eye lens; r isnIs the radius of curvature of the sub-eye; lnThe focal length of each sub-eye; r0Is the curvature radius of the curved fly-eye lens base (3); h isnIs the sagittal height of the spherical cap of the sub-eye lens.
7. A method for preparing a curved fly-eye lens is characterized by comprising the following steps:
s1: the curved fly-eye lens is optically designed and comprises an upper concave surface and a lower concave surface; light rays vertically enter from the upper part of the concave surface of the curved fly-eye lens and are transmitted to the lower concave surface from the upper concave surface; the lower concave surface is provided with sub-eye lenses, and the transmitted light rays with different angles pass through the optical centers of all stages of sub-eye lenses to obtain the radial size and arrangement of each stage of sub-eyes, so that the focal points of each stage of sub-eyes fall on the same focal plane, and are matched with the image plane of the photosensitive chip sensor;
s2: spin-coating photoresist on the surface of a substrate (3), and obtaining a photoresist mask plate (1) with a micro-lens array through exposure and development; transferring the pattern on the photoresist mask plate (1) to the substrate (3) through dry etching to obtain a micropore array (4) of the substrate (3);
s3: cleaning the photoresist on the surface of the substrate (3), and passivating the substrate (3); paving a polymer on the micropore array (4) of the passivated substrate (3), and carrying out hot-pressing treatment; after cooling, a polymer microlens array (7) is obtained.
8. The method for producing a curved fly-eye lens according to claim 7, further comprising, after the step S3, the steps of:
s4: carrying out reverse demolding on the polymer micro-lens array (7) by using PDMS pre-polymerization liquid to obtain a PDMS film (8);
s5: and copying the micro-lens array on the PDMS film (8) through an ultraviolet curing process to prepare the meniscus fly-eye lens (12).
9. The method for producing a curved fly-eye lens according to claim 7, wherein the step S2 further comprises: uniformly spin-coating photoresist on the substrate (3) and then performing pre-baking; photoetching the photoresist through the photoresist mask plate (1), and developing to obtain a photoresist mask (2) with a micro-lens array structure; and carrying out ICP etching at the position where the photoresist mask plate (1) is not attached to obtain the micropore array (4) with the same pattern as the photoresist mask plate (1).
10. The method for producing a curved fly-eye lens according to claim 7, wherein the step S3 further comprises: the step of cleaning the photoresist comprises the following steps: soaking by using an acetone solution, and then putting the substrate (3) into a solution prepared by mixing concentrated sulfuric acid and hydrogen peroxide in a ratio of 3: 1 boiling the mixed preparation solution and finally washing the substrate (3) with clean water; use of C after washing4F8Passivating the substrate (3), and forming a passivation layer on the surface of the substrate (3).
11. The method for producing a curved fly-eye lens according to claim 8, wherein the step S4 further comprises: and (3) placing the polymer micro-lens array (7) in a mould, pouring PDMS (polydimethylsiloxane) pre-polymerization liquid, and placing the PDMS pre-polymerization liquid in a vacuum drying oven for heating and curing to obtain the PDMS film (8) with elastic deformation.
12. The method for preparing a curved fly-eye lens according to claim 11, wherein the pattern of the microlens array on the PDMS film (8) is opposite to the pattern of the polymer microlens array (7).
13. The method for preparing a curved fly-eye lens according to claim 8, wherein the PDMS film (8) is sealed in a sealed air-pumping chamber (9), and the PDMS film (8) is recessed after air-pumping; pouring photosensitive adhesive (11) in a concave spherical crown formed by the PDMS film (8), and placing quartz glass (10) above the photosensitive adhesive (11); and curing the mixture under an ultraviolet lamp to obtain the meniscus fly-eye lens (12).
CN202110465140.6A 2021-04-26 2021-04-26 Curved fly-eye lens and preparation method thereof Pending CN113126188A (en)

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