CN102967890A - Simple preparation method and application of polydimethylsiloxane (PDMS) polymer microlens array - Google Patents
Simple preparation method and application of polydimethylsiloxane (PDMS) polymer microlens array Download PDFInfo
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- CN102967890A CN102967890A CN201210470418XA CN201210470418A CN102967890A CN 102967890 A CN102967890 A CN 102967890A CN 201210470418X A CN201210470418X A CN 201210470418XA CN 201210470418 A CN201210470418 A CN 201210470418A CN 102967890 A CN102967890 A CN 102967890A
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Abstract
The invention discloses a simple preparation method and an application of a polydimethylsiloxane (PDMS) polymer microlens array. The preparation method comprises the following steps of: exposing a graph designed by a lithography method on an SU8 photoresist, developing the graph by employing a developing solution, and controlling the developing time, so that the unexposed SU8 photoresist part is removed; baking the unexposed SU8 photoresist part in an oven, so that the bottom is in an arc shape; taking the unexposed SU8 photoresist part out, cooling to room temperature, and performing secondary exposure, so that the SU8 is completely cured and is manufactured into a template for manufacturing a PDMS polymer lens; and pouring the non-cured PDMS polymer solution to the template, heating and curing the PDMS polymer solution, and stripping a PDMS chip to manufacture the PDMS polymer microlens array. The prepared PDMS can be applied to optical imaging; and the method is simply and rapidly operated, is low in experimental cost and can be integrated with other technologies.
Description
Technical field
The invention belongs to the optical lens preparation field, a kind of preparation method and application of easy PDMS Polymer microlenses arrays are provided especially.
Background technology
Microlens array is the important optical element of a class in the array optical device, it be a series of apertures several microns to the microminiature lens of hundreds of micron by the array that necessarily rearranges, micro lens array has the advantages such as size is little, lightweight, easy of integration, plays an important role in every field such as military affairs, scientific researches.Method for fabricating microlens array mainly contains: technique of gray-scale mask; the laser direct-writing technology, ion exchange process, fotoceram method for hot forming, melting photoresist method, sol-gel process, little spray impact system, die or the methods such as soft mode impressing technology, photovoltaic reaction etching, focused-ion-beam lithography and sedimentation, chemical meteorology deposition method.In the last few years, along with discovery and the application of various polymkeric substance in chemistry, physics, biology and medical science, people find some polymkeric substance such as photoresist, PMMA(polymethyl methacrylate wherein, polymethylmethacrylate gradually), PDMS etc. unifies at micro-optic, micro-electro-mechanical systems good application prospect in micro-fluidic.And the micro polymer lens have also obtained people's extensive attention because of advantages such as its low cost, easily making, high-performance.Wherein PDMS has following advantage for the making of microlens array: it is a kind of resilient material for (1), can satisfy the requirement of substrate surface large tracts of land Cheng Mo and with substrate the good contact consistance be arranged, and can be used for the high precision preparation of lens; (2) the one-tenth mould interfacial free energy of PDMS is lower and chemical inertness is arranged, and the absorption substrate surface process in the patternmaking process is reversible, and the demoulding is simple; (3) PDMS is isotropic, and has well optical characteristics, can be applicable to multiple Systems for optical inspection; (4) PDMS has good flexibility, insulativity, thermotolerance and permanance and low price.Having had research institution to adopt PDMS both at home and abroad is that material prepares lens arra, but mostly adopts the positive photoresist hot melt, turns over method of module by twice and just can obtain lens arra, and step is comparatively loaded down with trivial details, and the height of lens is uncontrollable.
Invent in sum a kind of simple, fast, easy operating, be easy to integrated, what controllability was strong and cheap PDMS polymer lens array is of great significance.
Summary of the invention
The object of the present invention is to provide a kind of preparation method and application of easy PDMS Polymer microlenses arrays, the method has solved the complicated operation that exists in the manufacture craft in the past, the problem such as expensive.
The invention provides a kind of preparation method of easy PDMS Polymer microlenses arrays, the concrete steps of the method are as follows:
(1) adopt litho machine under mask, SU-8 polymer glass sheet to be exposed exposure intensity 100 ~ 500mW/cm
2, the time shutter is between 10 ~ 200s, forms exposure area and unexposed area;
(2) adopt the developer solution ethyl lactate that SU8 is developed, the control development time was removed unexposed area part at 1 ~ 20 minute;
(3) glass sheet is placed in 60 ~ 100 degree (the preferred 80 degree) baking oven, make unexposed SU8 polymkeric substance generation hot melt, the surface becomes the concavees lens shape;
SU-8 polymer template behind the hot melt is carried out whole uv-exposure 10 ~ 300 seconds (preferred 120 seconds), make SU8 microlens array template;
(5) uncured PDMS polymer solution is poured on the SU8 microlens array template, 80-90 degree centigrade be heating and curing 20 ~ 120 minutes (preferred 60 minutes) are peeled off and are obtained the PDMS polymer lens array.
The preparation method of easy PDMS Polymer microlenses arrays provided by the invention, the photoengraving form of described method for making.
The preparation method of easy PDMS Polymer microlenses arrays provided by the invention, described polymkeric substance is that PDMS polymkeric substance or other have flexible transparent polymer.
The preparation method of easy PDMS Polymer microlenses arrays provided by the invention, formed micron is to other lens arra of centimetre-sized in the method, and the size of lens and arrangement mode can design as required.
The preparation method of easy PDMS Polymer microlenses arrays provided by the invention, the height of the middle lens of formed lens arra can be regulated by regulating the time of developing in the method, and development time is longer, and the height of lens is larger.
The present invention also provides the application of PDMS Polymer microlenses arrays, and the PDMS polymer lens that uses method provided by the invention to make can be used for optical imagery.
The method for preparing the PDMS Polymer microlenses arrays provided by the invention, its advantage is:
1, need not expensive etching apparatus;
2, simple to operate, quick;
3, experimental cost is cheap;
4, can be integrated with other technology.
Description of drawings
The PDMS Polymer microlenses arrays method flow diagram of Fig. 1 for making, wherein: 1 gluing, 2 exposures, 3 develop, 4 hot melts, 5 hot melts, 6 cast PDMS, 7 peel off PDMS and template, make the PDMS Polymer microlenses arrays;
Fig. 2 rear glass substrate hot melt principle schematic of developing, wherein: 1 is the state before the heating, and 2 are the state after the heating;
The SU8 template photo of Fig. 3 preparation, wherein: 1 is PDMS polymer lens array photo, and 2 is PDMS polymer lens microgram;
The PDMS micro polymer lens photo of Fig. 4 preparation;
Fig. 5 development time is 1 minute PDMS Polymer microlenses arrays microgram;
Fig. 6 development time is 2 minutes PDMS Polymer microlenses arrays microgram;
Fig. 7 development time is 3 minutes PDMS Polymer microlenses arrays microgram;
Fig. 8 development time is 4 minutes PDMS Polymer microlenses arrays microgram;
Fig. 9 development time is 5 minutes PDMS Polymer microlenses arrays microgram;
Figure 10 development time is 10 minutes PDMS Polymer microlenses arrays microgram;
Figure 11 diameter 50 μ m circular microlens images;
Figure 12 diameter 40 μ m circular microlens images;
Figure 13 diameter 30 μ m circular microlens images;
Figure 14 diameter 20 μ m circular microlens images.
Embodiment
The following examples will be further described the present invention, but not thereby limiting the invention.
The preparation of embodiment 1PDMS polymer lens array
Utilize optical etching technology to make the SU-8 polymer template, it is 50 microns round template circular aperture that template contains diameter.Whole PDMS polymer lens array preparation flow is applied to the SU-8 photoresist on the clean glass sheet as shown in Figure 1, thick regulate as required (100 microns ~ 1 millimeter) of glue, and 95 degrees centigrade of heating made the interior solvent evaporates of photoresist in 1 hour; Putting the mask that designs exposed 60 seconds under ultraviolet; Place in the developer solution ethyl lactate and develop, development time is regulated (1 ~ 15 minute) as required, then, 80 ℃ of lower heating 5 minutes, makes remaining unexposed SU8 photoresist generation hot melt, and the schematic diagram before and after the hot melt as shown in Figure 2; Under the ultraviolet photolithographic machine, exposed 120 seconds at last, make the SU8 template (as shown in Figure 3) that contains circular micropore.PDMS(10:1 is mixed) be poured on the SU-8 template, after the vacuum stripping, 80 ℃ of lower heating 60 minutes.After the cooling, with the PDMS lift-off stencil of solidifying, just make PDMS Polymer microlenses arrays (as shown in Figure 4).
The preparation of embodiment 2 differing heights PDMS polymer lens arrays
Be 1 minute by the control development time, 2 minutes, 3 minutes, 4 minutes, 5 minutes, 10 minutes, increase to remove gradually the amount of unexposed SU8 photoresist, realize the control to the micropore degree of depth in the SU8 template.Adopt the PDMS polymer lens array of different condition template preparation shown in Fig. 5-10.
The imaging research of embodiment 3PDMS polymer lens array
This process adopts optical microscope to realize, PDMS Polymer microlenses arrays in preparation is transferred an image, by adjusting the height of lens and image, seek suitable focal length, then can observe the picture that in certain area lens of each on the microlens array can both demonstrate this object, the image of this experiment adopts the alphabetical A that prints.Adopt simultaneously the lens of different size to realize the imaging (imaging effect is shown in Figure 11-14) vary in size.
Claims (9)
1. the preparation method of an easy PDMS Polymer microlenses arrays, it is characterized in that: the concrete steps of the method are as follows:
(1) adopts litho machine under mask, SU-8 polymer glass sheet to be exposed, form exposure area and unexposed area;
(2) adopt developer solution that SU8 is developed, the control development time is removed unexposed area part;
(3) glass sheet is placed in 60 ~ 100 degree baking ovens, make unexposed SU8 polymkeric substance generation hot melt, the surface becomes the concavees lens shape;
(4) the SU-8 polymer template behind the hot melt is carried out whole uv-exposure 10 ~ 300 seconds, make SU8 microlens array template;
(5) uncured PDMS polymer solution is poured on the SU8 microlens array template, 80-90 degree centigrade was heating and curing 20 ~ 120 minutes, peeled off and obtained the PDMS polymer lens array.
2. according to the preparation method of the described easy PDMS Polymer microlenses arrays of claim 1, it is characterized in that: described polymkeric substance is that PDMS polymkeric substance or other have flexible transparent polymer.
3. according to the preparation method of the described easy PDMS Polymer microlenses arrays of claim 1, it is characterized in that: the conditions of exposure of described step (1) is: exposure intensity 100 ~ 500mW/cm2, the time shutter is 10 ~ 200s.
4. according to the preparation method of the described easy PDMS Polymer microlenses arrays of claim 1, it is characterized in that: described developer solution is ethyl lactate.
5. according to the preparation method of the described easy PDMS Polymer microlenses arrays of claim 1, it is characterized in that: described development time is 1 ~ 20 minute.
6. according to the preparation method of the described easy PDMS Polymer microlenses arrays of claim 1, it is characterized in that: the height of lens is regulated by regulating the time of developing in the described microlens array, and development time is longer, and the height of lens is larger.
7. according to the preparation method of the described easy PDMS Polymer microlenses arrays of claim 1, it is characterized in that: the uv-exposure time of described step (4) is 120 seconds.
8. according to the preparation method of the described easy PDMS Polymer microlenses arrays of claim 1, it is characterized in that: monomer and hardening agent proportioning are 10:1 in the described uncured PDMS polymer solution.
9. the easy PDMS Polymer microlenses arrays of the described method preparation of claim 1 is applied to optical imagery.
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| CN103913784A (en) * | 2014-03-26 | 2014-07-09 | 中国科学院长春光学精密机械与物理研究所 | Method for preparing polymer micro lens array |
| CN104614936A (en) * | 2015-02-15 | 2015-05-13 | 中国科学技术大学 | Manufacturing method of micro lens |
| CN105334553A (en) * | 2015-10-30 | 2016-02-17 | 电子科技大学 | Manufacturing method for magnetron micro-lens array based on PDMS-magnetic nanoparticle composite thin film |
| CN106353842A (en) * | 2016-11-29 | 2017-01-25 | 中国科学技术大学 | Manufacturing method of microlens |
| CN108117987A (en) * | 2016-11-26 | 2018-06-05 | 中国科学院大连化学物理研究所 | Application of the high-throughput micro-array chip in the induction differentiation of stem cell class cardiac muscular tissue |
| CN108121161A (en) * | 2016-11-26 | 2018-06-05 | 中国科学院大连化学物理研究所 | A kind of preparation method of high-throughput micro-array chip for forming embryoid body and application |
| CN108117985A (en) * | 2016-11-26 | 2018-06-05 | 中国科学院大连化学物理研究所 | The preparation method of micro-array chip and its application in stem cell class brain growth |
| CN108148750A (en) * | 2016-12-05 | 2018-06-12 | 中国科学院大连化学物理研究所 | A kind of preparation method for the multifunctional microflow control chip for being formed in situ embryoid body |
| CN108594596A (en) * | 2018-04-28 | 2018-09-28 | 广西民族大学 | A method of making dimpling lens using PDMS |
| CN108584867A (en) * | 2018-06-05 | 2018-09-28 | 中国科学技术大学 | A kind of processing method of microlens array |
| CN113156552A (en) * | 2021-04-22 | 2021-07-23 | 西北农林科技大学 | Method for manufacturing bifocal fly-eye lens with large field of view |
| CN113199683A (en) * | 2021-04-28 | 2021-08-03 | 桂林电子科技大学 | Micro-nano structure for improving solar cell surface light energy capture and preparation method thereof |
| CN113406731A (en) * | 2021-05-19 | 2021-09-17 | 广东工业大学 | Preparation method and application of polymer array structure membrane |
| CN113985505A (en) * | 2021-10-21 | 2022-01-28 | 浙江大学 | Method for preparing micro-lens array based on hydrogel microstructure template |
| CN116224476A (en) * | 2023-03-22 | 2023-06-06 | 苏州汉骅半导体有限公司 | Microlens array and method for manufacturing same |
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| CN103913784A (en) * | 2014-03-26 | 2014-07-09 | 中国科学院长春光学精密机械与物理研究所 | Method for preparing polymer micro lens array |
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| CN104614936A (en) * | 2015-02-15 | 2015-05-13 | 中国科学技术大学 | Manufacturing method of micro lens |
| CN105334553A (en) * | 2015-10-30 | 2016-02-17 | 电子科技大学 | Manufacturing method for magnetron micro-lens array based on PDMS-magnetic nanoparticle composite thin film |
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| CN108117987A (en) * | 2016-11-26 | 2018-06-05 | 中国科学院大连化学物理研究所 | Application of the high-throughput micro-array chip in the induction differentiation of stem cell class cardiac muscular tissue |
| CN108121161A (en) * | 2016-11-26 | 2018-06-05 | 中国科学院大连化学物理研究所 | A kind of preparation method of high-throughput micro-array chip for forming embryoid body and application |
| CN108117985A (en) * | 2016-11-26 | 2018-06-05 | 中国科学院大连化学物理研究所 | The preparation method of micro-array chip and its application in stem cell class brain growth |
| CN106353842A (en) * | 2016-11-29 | 2017-01-25 | 中国科学技术大学 | Manufacturing method of microlens |
| CN108148750A (en) * | 2016-12-05 | 2018-06-12 | 中国科学院大连化学物理研究所 | A kind of preparation method for the multifunctional microflow control chip for being formed in situ embryoid body |
| CN108594596A (en) * | 2018-04-28 | 2018-09-28 | 广西民族大学 | A method of making dimpling lens using PDMS |
| CN108584867A (en) * | 2018-06-05 | 2018-09-28 | 中国科学技术大学 | A kind of processing method of microlens array |
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| CN113199683A (en) * | 2021-04-28 | 2021-08-03 | 桂林电子科技大学 | Micro-nano structure for improving solar cell surface light energy capture and preparation method thereof |
| CN113406731A (en) * | 2021-05-19 | 2021-09-17 | 广东工业大学 | Preparation method and application of polymer array structure membrane |
| CN113985505A (en) * | 2021-10-21 | 2022-01-28 | 浙江大学 | Method for preparing micro-lens array based on hydrogel microstructure template |
| CN116224476A (en) * | 2023-03-22 | 2023-06-06 | 苏州汉骅半导体有限公司 | Microlens array and method for manufacturing same |
| CN116224476B (en) * | 2023-03-22 | 2024-03-08 | 苏州汉骅半导体有限公司 | Microlens array and method for manufacturing same |
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