CN106353842A - Manufacturing method of microlens - Google Patents
Manufacturing method of microlens Download PDFInfo
- Publication number
- CN106353842A CN106353842A CN201611069237.0A CN201611069237A CN106353842A CN 106353842 A CN106353842 A CN 106353842A CN 201611069237 A CN201611069237 A CN 201611069237A CN 106353842 A CN106353842 A CN 106353842A
- Authority
- CN
- China
- Prior art keywords
- lenticule
- template
- microlens
- temperature
- expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
The invention discloses a manufacturing method of a microlens. The manufacturing method comprises the following steps of (1) manufacturing a microlens or a microlens array, and using as a template microlens; (2) pouring a polymer monomer onto the manufactured microlens or microlens array, and heating at certain temperature; (3) after the polymer is cured, cooling to room temperature, removing the template microlens, and obtaining the final microlens or microlens array on the polymer. The manufacturing method has the advantages that the manufacturing of the microlens by the heat expansion of material is proposed for the first time, the surface shape of the microlens is controlled according to the correlation of heat expansion volume change amount and temperature change amount of the material, and the microlenses with different focal lengths are obtained in a micro-copying technology; the manufacturing technology of the microlens is simplified, the repeatability of the technology is improved, the manufacturing cost of the microlens is reduced, and the manufacturing cycle of the microlens is shortened.
Description
Technical field
The present invention relates to the processing technique of micro-nano technology is and in particular to a kind of lenticular manufacture method.
Background technology
Lenticule and its array as important optical element, in bionic field, wavefront sensing, light cumulative, light shaping etc.
It is widely used in modern high and new technology.Developing rapidly with micro-electronic mechanical skill, occurs in that many new lenticulees
Array fabrication techniques, including (the ginseng such as nuda rice, photosensitive glass method for hot forming, photoetching ion exchange, compression molding method
Examine document bian, r., et al., ultralong focal length microlens array fabricated based
On su-8photoresist.appl opt, 2015.54 (16): p.5088-93. and hou, t., et al.,
fabrication,characterization,and applications of microlenses.appl opt,2015.54
(24):p.7366-76.).
In actual applications it is often necessary to the lenticule of different focal.Using existing process, often make a kind of the micro- of focal length
Lens, are required for first designing corresponding curved surface.Because, in manufacturing process, lenticular face shape is affected by process conditions etc., difficult
With precise control, so needing the curved surface according to design, carrying out substantial amounts of explorative experiment, exploring suitable process conditions and ginseng
Number.Further according to these parameters and process conditions, produce required lenticule.Transfer a pattern to finally by microreplicated technique
Stable material, realizes batch production.Traditional microreplicated technique is equal proportion duplication, duplicated lenticule curved surface and making
The lenticule curved surface going out is identical.
Therefore using traditional technique it is desirable to obtain the lenticule of different focal it is necessary to redesign parameter, explore real
Test condition (h ottevaere, r.c., h pherzig, t miyashita, k naessens, comparing glass and
plastic refractive microlenses fabricated with different technologies.).Due to
Traditional method makes lenticule and generally requires to carry out substantial amounts of explorative experiment, and fabrication cycle is long, complex technical process, and high cost
High, this develops further to lenticule and creates larger restriction.
Content of the invention
The purpose of the present invention is: the present invention proposes a kind of lenticular new method of making, and the thermal expansion using material is carried out
Lenticular making, according to the dependency of material thermal volume expansion variable quantity and temperature knots modification, controls lenticular face shape,
The lenticule of different focal is obtained in microreplicated technique.
The technical solution used in the present invention is: a kind of lenticular manufacture method, and the method step is:
Step 1) make lenticule or microlens array, as template lenticule；
Step 2) polymer is poured on the lenticule made or microlens array, carry out at a certain temperature adding
Heat；
Step 3) after polymer solidification, it is cooled to room temperature, sloughs template lenticule, obtain final micro- on polymer
Mirror or microlens array.(accompanying drawing 2)
Step 1 in this method) in template lenticule can be the lenticule that any materials are made, such as photoresist, metal
With glass etc..Simply when the material using belongs to high polymer, the change of curvature becomes apparent from.Because the knots modification of material volume with
The thermal coefficient of expansion of material is directly proportional, and is directly proportional to temperature knots modification.Compare other materials, the thermal coefficient of expansion of high polymer is relatively
Greatly, after being heated, volume change is big.But for the little material of thermal coefficient of expansion, the method for the present invention is still effective, simply curvature
Change relatively small.
Meanwhile, template lenticule can be concavees lens can also be convex lenss.If with concavees lens as template, micro- after expansion
The curved surface of mirror rises, and curvature increases.Temperature change is more, and mass expansion is more, and the curvature replicating the dimpling lens obtaining is bigger,
Focal length is longer；Temperature change is fewer, and mass expansion is fewer, and the curvature replicating the dimpling lens obtaining is relatively small, and focal length changes
Relatively small.If with convex lenss as template, in contrast, after expansion, curvature reduces, and temperature change is more, and curvature becomes to get over
Little, focal length becomes shorter.Therefore if desired for making concave mirror arrangements, can be with convex lens array as template；As needed convex lenss battle array
Row, can be with concave mirror arrangements as template.
Because the lenticule that the present invention makes has controllability, so template lenticule is as far as possible using having controllability
Technique makes.Template lenticular face shape is controlled, just makes that the lenticular curvature of template is accurate and controlled, and such present invention is to micro-
The control of the curvature of mirror and focal length is also just more meaningful.When template lenticule is unable to effective control face shape, still can measure
To template lenticular curved surface face shape, realize effectively controlling.
: negative photoresist is exposed and is heated to reflux, make template taking a kind of controllability good template lenticule as a example
Nick lens.Below the glass transition temperature less than uncrosslinked part photoresist, nick lens are heated again, photoresist
There is not glass transition, but thermal expansion occurs.The photoresist thermal coefficient of expansion of uncrosslinked part is big, and after being heated, volumetric expansion is relatively
Many, the photoresist thermal coefficient of expansion of crosslink part is little, and after being heated, volume is basically unchanged.Therefore lenticular curved surface rises, curvature
Increase.Nick lens curved surface now is replicated using microreplicated material, just obtains new dimpling lens.Photoresist heat is swollen
How much swollen, determined by temperature knots modification and thermal coefficient of expansion.After photoresist is selected, thermal coefficient of expansion no longer changes, this
Sample temperature just becomes the single factor changing photoresist swell increment.Temperature change is more, and photoresist expands more, to obtain dimplings
The curvature of lens is bigger, and focal length is longer；Temperature change is fewer, and photoresist expansion is fewer, and the curvature of the dimpling lens obtaining is relatively
Less, focal length is relatively short.Therefore, adjust the heating-up temperatures different to nick lens, photoresist will be made to have different degrees of
Expand, obtain different dimpling lens.Additionally, when the negative photoresist nick lens being obtained using above-mentioned technique are template, by
Different from uncrosslinked part thermal coefficient of expansion in crosslink part, the change of curved surface can become apparent from, and Curvature varying is bigger, and obtain is micro-
The curvature of convex lenss can be longer.(accompanying drawing 3, accompanying drawing 4)
Additionally, step 1) in using temperature, lenticular face shape is adjusted, the selection of temperature determines the micro- of formation
The face shape of lens.For amorphous substance, temperature should control not bringing it about below glass transition, for amorphous material, temperature
Degree should control below its fusing point.This ensure that material only occurs thermal expansion, there is no other changes.Otherwise on gravity and surface
In the presence of tension force, face shape can change, and still keep the face shape after changing, be so equivalent to template and there occurs not after cooling
Reversible change.
This method step 2) in can be using as the material of the in-situ polymerization such as pdms as microreplicated material.Such former
Position polymeric material, before there is not polyreaction, is existed with monomeric form, has good mobility, therefore can replicate completely
Go out complete curved surface face shape, after polymerization, form stable polymer, can be used as good duplicating material.To thermal coefficient of expansion etc.
There is no specific requirement, but when the thermal coefficient of expansion of thermal coefficient of expansion and template microlens material has significant difference, can more hold
Easily the lenticule finally giving is separated with template lenticule.This is because after cooling, template lenticule recovers room temperature, pattern is extensive
The multiple state under room temperature, and this polymer has replicated the lenticular pattern of template when expanding, now both patterns are not
It is completely superposed, separate such that it is able to light.
The thermal expansion of material is mainly utilized in the present invention, using the lenticule face shape of swelling state under polymer replication, when
Temperature drops back to room temperature, and template lenticule returns to the face shape before thermal expansion.Because being not related to the change such as melting, lenticule is simply sent out
The reversible physical change of life.Lenticule therefore next time makes, and is still with identical lenticule as template, heats up again swollen
Swollen, recording surface shape, will not there is any infringement to template lenticule, so template lenticule can be reused.Thermal expansion
And replicate that the time of curved surface is relatively short, the techniques such as exposure above need not be repeated, so fabrication cycle greatly shortens.
The principle of the present invention is: material thermal expansion is the change of the scantling and profile being caused due to temperature change
Change.Manufactured lenticule is heated, microlens material can occur thermal expansion, lenticular curved surface rises, curvature changes.
Lenticule face shape now is got off with another polymer replication, has just obtained new lenticule on the surface of this polymer.
Material thermal expansion number determined by the knots modification of temperature and thermal coefficient of expansion.Every kind of material has corresponding thermal coefficient of expansion,
After selecting a kind of material, thermal coefficient of expansion determines that.Change experiment in temperature it is possible to control thermal expansion number it is simply that
Lenticular curved surface is controlled.Therefore achieve in the present invention in microreplicated technique, for same lenticule, energy
Copy the lenticule of multiple curvature and focal length, and there is controllability.(accompanying drawing 1)
Compared with prior art, present invention firstly provides carrying out lenticular making using the thermal expansion of material, according to thing
Matter thermal volume expansion variable quantity and the dependency of temperature knots modification, control lenticular face shape it is achieved that in microreplicated technique
Obtain the lenticule of different focal.This invention simplifies lenticule processing technology, improve process repeatability, reduce micro- simultaneously
Lens cost of manufacture, shortens lenticule fabrication cycle.
Brief description
Fig. 1 is the present invention lenticular manufacture method schematic diagram；
Fig. 2 is the present invention lenticular manufacture method flow chart；
Fig. 3 is with negative photoresist concavees lens for producing principle figure during template；
Fig. 4 is with negative photoresist concavees lens for Making programme figure during template.
Specific embodiment
With reference to example, the detailed process of lenticule processing technology is illustrated further.
Example 1, the making of convex cylindrical lens array
The planar structure of convex cylindrical lens array is optical grating construction, can be by the selection of grating structural parameter, photoresist
Select and corresponding process conditions selection realizing the effective control to lenticule pattern.With array period for 180 microns
As a example, select su-8 negative photoresist and pdms to make convex cylindrical lens array.
Provide the size of planar structure first: the cycle is 180 microns of optical grating construction, dutycycle is 1:1, line length is
1 centimetre.
It is produced as follows:
1) according to the above-mentioned size providing, process corresponding optical mask；
2) clean si substrate, 180 degree thermal station dry 20 minutes, cold remove rear spin coating su-8 photoresist, with thermal station 65 degree bakings 5 points
Clock, then it is warmed up to 95 degree of bakings 20 minutes.The su-8 photoresist layer that thickness is 100 microns is obtained after cooling；
3) uv-exposure, i line, exposure dose 240mj/cm are carried out using the optical mask processing2；
4) sample thermal station is dried 5 minutes at 65 degree, then is warmed up to 95 degree of bakings 10 minutes, places natural cooling under room temperature；
5) prepare pdms, solvent is mixed by 10:1 volume ratio with firming agent.Pdms is poured on sample, at 35 degree
Dry 24 hours in thermal station.Take off from su-8 photoresist after pdms solidification, convex lenticule is obtained on pdms.
Using step instrument, to template, recessed cylindrical mirror and the convex cylindrical lens array being finally obtained measure: the recessed cylindrical mirror of template
Radius of curvature is 205 microns, and the radius of curvature of convex cylindrical mirror is 295 microns, illustrates to make different curvature based on the present invention
Lenticule；The radius of curvature difference of different convex cylindrical mirrors is less than 5%, illustrate to have based on present invention making lenticule very high
Process repeatability.
Example 2, the making of convex honeycomb lens arra
The planar structure of convex honeycomb lens arra is honeycomb texture, can pass through selection, the photoresist of honeycomb texture parameter
Selection and corresponding process conditions selection realizing the effective control to lenticule pattern.With array period for 55 microns
As a example, select su-8 negative photoresist and pdms to make convex honeycomb lens arra.
Provide the size of planar structure first: the cycle is 55 microns of honeycomb texture, in order to improve lens arra to light source
Utilization rate, the hem width degree of honeycomb texture is 5 microns.
It is produced as follows:
1) according to the above-mentioned size providing, process corresponding optical mask；
2) clean si substrate, 180 degree thermal station dry 20 minutes, cold remove rear spin coating su-8 photoresist, with thermal station 65 degree bakings 5 points
Clock, then it is warmed up to 95 degree of bakings 20 minutes.The su-8 photoresist layer that thickness is 100 microns is obtained after cooling；
3) uv-exposure, i line, exposure dose 240mj/cm are carried out using the optical mask processing2；
4) sample thermal station is dried 5 minutes at 65 degree, then is warmed up to 95 degree of bakings 10 minutes.Natural cooling is placed under room temperature；
5) prepare pdms, solvent is mixed by 10:1 volume ratio with firming agent.Pdms is poured on sample, at 50 degree
Dry 24 hours in thermal station.Take off from su-8 photoresist after pdms solidification, convex lenticule is obtained on pdms.
Using step instrument, template recessed honeycomb lens arra and finally prepared convex honeycomb lens arra are measured: template
The radius of curvature of recessed honeycomb lens is 24.19 microns, and the radius of curvature of convex honeycomb lens is 402 microns, illustrates to be based on the present invention
The lenticule of different curvature can be made；The radius of curvature difference of different convex honeycomb lens is less than 5%, illustrates to be based on system of the present invention
As lenticule, there is very high process repeatability.
Example 3, the making of recessed cylindrical lens array
Az9260 positive photoresist and pdms is selected to make recessed cylindrical lens array.Provide the chi of planar structure first
Very little: a diameter of 300 microns, the cycle is 600 microns of optical grating construction.
It is produced as follows:
1) according to the above-mentioned size providing, process corresponding optical mask；
2) clean si substrate, 180 degree thermal station dry 20 minutes, cold remove rear spin coating az9260 photoresist, with thermal station 65 degree bakings
90 minutes.The az9260 photoresist layer that thickness is 15 microns is obtained after cooling；
3) uv-exposure, i line, exposure dose 510mj/cm are carried out using the optical mask processing2；
4) development 200s in the developer solution preparing put into by sample, is rinsed using deionized water；
5) sample thermal station is dried 60 minutes at 75 degree, then is warmed up to 120 degree of bakings 50 minutes.Natural cooling is placed under room temperature
Afterwards, the convex cylindrical microlenses of template are obtained；
6) prepare pdms, solvent is mixed by 10:1 volume ratio with firming agent.Pdms is poured on sample, at 50 degree
Dry 24 hours in thermal station.Take off after pdms solidification, recessed lenticule is obtained on pdms.
Non-elaborated part of the present invention belongs to the known technology of those skilled in the art.
Claims (6)
1. a kind of lenticular manufacture method it is characterised in that: the method step is:
Step 1) make lenticule or microlens array, as template lenticule；
Step 2) polymer monomer is poured on the lenticule made or microlens array, carry out at a certain temperature adding
Heat；
Step 3) polymer solidification after, be cooled to room temperature, slough template lenticule, obtain on polymer final lenticule or
Microlens array.
2. a kind of lenticular manufacture method according to claim 1 it is characterised in that: step 1) in template lenticule can
To be the lenticule that any materials are made, photoresist, metal or glass can be selected.
3. a kind of lenticular manufacture method according to claim 1 it is characterised in that: step 1) in template lenticule can
Be concavees lens can also be convex lenss；If with concavees lens as template, after expansion, lenticular curved surface rises, and curvature increases；Temperature
Degree change is more, and mass expansion is more, and the curvature replicating the dimpling lens obtaining is bigger, and focal length is longer；Temperature changes fewer, thing
The curvature that matter expands the dimpling lens fewer, duplication obtains is relatively small, and focal length changes relatively small；If with convex lenss as mould
Plate, then in contrast, after expansion, curvature reduces, and temperature change is more, and curvature becomes less, and focal length becomes shorter；Therefore as needed
Concave mirror arrangements to be made, can be with convex lens array as template；As needed convex lens array, can be with concave mirror arrangements as mould
Plate.
4. a kind of lenticular manufacture method according to claim 1 it is characterised in that: step 1) in using temperature to micro-
The face shape of lens is adjusted, and the selection of temperature determines the lenticular face shape of formation；For amorphous substance, temperature should control
Do not bringing it about below glass transition, for amorphous material, temperature should control below its fusing point；This ensure that material
Only there is thermal expansion, there is no other changes；Otherwise in the presence of gravity and surface tension, face shape can change, after cooling
Still keep the face shape after changing, be so equivalent to template and there occurs irreversible change.
5. a kind of lenticular manufacture method according to claim 1 it is characterised in that: step 2) in as microreplicated
Material can use the material of in-situ polymerization, and in-situ polymerization material, before there is not polyreaction, is existed with monomeric form, has
Good mobility, therefore can copy complete curved surface face shape completely, form stable polymer after polymerization, can conduct
Good duplicating material；There is no specific requirement to thermal coefficient of expansion etc., but when thermal coefficient of expansion and template microlens material
When thermal coefficient of expansion has significant difference, can be easier to separate the lenticule finally giving with template lenticule；This is because it is cold
But, after, template lenticule recovers room temperature, the state under shape recovery to room temperature, and this polymer has replicated mould when expanding
The lenticular pattern of plate, now both patterns not exclusively overlap, separate such that it is able to light.
6. a kind of lenticular manufacture method according to claim 1 it is characterised in that: mainly utilize material in the method
Thermal expansion, using the lenticule face shape of swelling state under polymer replication, when temperature drops back to room temperature, template lenticule returns to
Face shape before thermal expansion, template lenticule can be reused.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611069237.0A CN106353842A (en) | 2016-11-29 | 2016-11-29 | Manufacturing method of microlens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611069237.0A CN106353842A (en) | 2016-11-29 | 2016-11-29 | Manufacturing method of microlens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106353842A true CN106353842A (en) | 2017-01-25 |
Family
ID=57862788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611069237.0A Pending CN106353842A (en) | 2016-11-29 | 2016-11-29 | Manufacturing method of microlens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106353842A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107934911A (en) * | 2017-11-14 | 2018-04-20 | 西安交通大学 | Liquid microarray preparation method based on template-mediated self assembly |
| CN108594596A (en) * | 2018-04-28 | 2018-09-28 | 广西民族大学 | A method of making dimpling lens using PDMS |
| CN111399092A (en) * | 2020-02-28 | 2020-07-10 | 上海大学 | Silicon wafer template for preparing micro-lens array structure, preparation method of micro-lens array structure and protective film |
| CN112034541A (en) * | 2020-10-15 | 2020-12-04 | 苏州苏纳光电有限公司 | Method and system for preparing silicon microlens product by photoresist hot melting method |
| CN113419301A (en) * | 2021-07-21 | 2021-09-21 | 上海芯物科技有限公司 | Preparation method of micro-lens array and wafer |
| CN114611221A (en) * | 2020-12-07 | 2022-06-10 | 长春理工大学 | Method for designing limit deviation of mold core and mold in precision glass molding process |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102967890A (en) * | 2012-11-20 | 2013-03-13 | 中国科学院大连化学物理研究所 | Simple preparation method and application of polydimethylsiloxane (PDMS) polymer microlens array |
| US20150035180A1 (en) * | 2013-08-02 | 2015-02-05 | Forward Optics Co., Ltd. | Method for fabricating an arrayed optical element |
-
2016
- 2016-11-29 CN CN201611069237.0A patent/CN106353842A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102967890A (en) * | 2012-11-20 | 2013-03-13 | 中国科学院大连化学物理研究所 | Simple preparation method and application of polydimethylsiloxane (PDMS) polymer microlens array |
| US20150035180A1 (en) * | 2013-08-02 | 2015-02-05 | Forward Optics Co., Ltd. | Method for fabricating an arrayed optical element |
Non-Patent Citations (1)
| Title |
|---|
| 童伟等: ""热调控变焦聚合物微透镜的设计与分析"", 《激光与光电子学进展》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107934911A (en) * | 2017-11-14 | 2018-04-20 | 西安交通大学 | Liquid microarray preparation method based on template-mediated self assembly |
| CN108594596A (en) * | 2018-04-28 | 2018-09-28 | 广西民族大学 | A method of making dimpling lens using PDMS |
| CN111399092A (en) * | 2020-02-28 | 2020-07-10 | 上海大学 | Silicon wafer template for preparing micro-lens array structure, preparation method of micro-lens array structure and protective film |
| CN111399092B (en) * | 2020-02-28 | 2021-10-15 | 上海大学 | Preparation method of micro-lens array structure and protective film |
| CN112034541A (en) * | 2020-10-15 | 2020-12-04 | 苏州苏纳光电有限公司 | Method and system for preparing silicon microlens product by photoresist hot melting method |
| CN114611221A (en) * | 2020-12-07 | 2022-06-10 | 长春理工大学 | Method for designing limit deviation of mold core and mold in precision glass molding process |
| CN114611221B (en) * | 2020-12-07 | 2024-05-24 | 长春理工大学 | Mold core and mold limit deviation design method in precision glass molding process |
| CN113419301A (en) * | 2021-07-21 | 2021-09-21 | 上海芯物科技有限公司 | Preparation method of micro-lens array and wafer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106353842A (en) | Manufacturing method of microlens | |
| CN101339364B (en) | Method for manufacturing microlens array by soft mode impressing | |
| CN102879845B (en) | Method for manufacturing nanoscale grating based on polydimethylsiloxane (PDMS) | |
| JP2022547391A (en) | Manufacturing method of diffraction grating waveguide for near-eye display | |
| Lian et al. | Rapid fabrication of semiellipsoid microlens using thermal reflow with two different photoresists | |
| JPH0750201B2 (en) | Microlens manufacturing method | |
| Wang et al. | A novel thermal reflow method for the fabrication of microlenses with an ultrahigh focal number | |
| CN103913784A (en) | Method for preparing polymer micro lens array | |
| CN112099140A (en) | Diffraction optical waveguide with uniform emergent brightness, manufacturing method and head-mounted display device | |
| CN102971138B (en) | There is optics and the correlation technique replicating refractive surface | |
| JPH03198003A (en) | Production of microlens array | |
| CN106405704A (en) | Method for regulating grating period change rate based on stretching of PDMS grating | |
| CN102959441B (en) | Method for manufacturing a two-dimensional polymer optical waveguide | |
| JP2945440B2 (en) | Method for manufacturing solid-state imaging device | |
| CN104614936B (en) | A kind of production method of lenticule | |
| Yang et al. | Fabrication of long hexagonal micro-lens array by applying gray-scale lithography in micro-replication process | |
| CN103809236A (en) | Manufacture method for high precision mesh point light guide plate based on MEMS (micro electro mechanical systems) | |
| JPH05228946A (en) | Manufacture of optical part and matrix for duplication of optical part | |
| Han et al. | Direct replication of a glass micro Fresnel zone plate array by laser irradiation using an infrared transmissive mold | |
| CN101570045B (en) | Manufacturing method for insert | |
| CN105700047A (en) | Artificial compound eye structure and manufacturing method thereof | |
| Pan et al. | Study of micro-lens array by reflow process | |
| Sayah et al. | Micro-replication of optical lenses in glass using a novel sol gel technology | |
| CN113759451B (en) | Curved surface grating processing device and preparation method | |
| Fan | Realization of Mass Production of Microlens Array by Hot Embossing on Silicon Substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170125 |
|
| RJ01 | Rejection of invention patent application after publication |