CN106405704A - Method for regulating grating period change rate based on stretching of PDMS grating - Google Patents
Method for regulating grating period change rate based on stretching of PDMS grating Download PDFInfo
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- CN106405704A CN106405704A CN201611138716.3A CN201611138716A CN106405704A CN 106405704 A CN106405704 A CN 106405704A CN 201611138716 A CN201611138716 A CN 201611138716A CN 106405704 A CN106405704 A CN 106405704A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
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- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
The invention relates to a method for regulating a grating period change rate based on stretching of a PDMS grating, and a PDMS-based variable-period grating is manufactured. The method includes the steps of manufacturing a female template grating through photoetching or mechanical etching; transferring a grating pattern on the manufactured female template grating to a PDMS thin film; stretching the manufactured PDMS-based variable-period grating: flatly placing and clamping the manufactured PDMS thin film on a one-dimensional translational stretching table with one end of the thin film being fixed and the other end being clamped on a movable platform, and stretching the grating by a certain length along a direction vertical to a grating line in a PDMS elastic range; detecting the stretched period-variable grating: detecting the linear density of the stretched PDMS thin film, in a middle area of the thin film, distribution of the linear density of the grating changing linearly; and adjusting the base angle of the PDMS thin film in an isosceles trapezoid shape and stretching at a same load, thereby obtaining distribution of different linearly-changing grating linear density. The method for regulating the grating period change rate based on stretching of the PDMS grating is simple in technology, high in controllability, low in manufacturing cost, and short in period.
Description
Technical field
The present invention relates to a kind of variable period preparing grating technology, particularly to a kind of based on stretching PDMS grating regulation and control grating
The method of mechanical periodicity rate.
Background technology
Grating as a kind of very important beam splitter, be widely used in integrated optical circuit, optic communication, at optical information
In the fields such as reason, optical measurement.The pitch of variable period grating changes according to certain rule, has self-focusing, aberration correction, height
Some properties such as resolution ratio, flat focal field, in laser controlled nuclear fusion device, synchrotron radiation PES, space probe, aviation
Have important in the hard-core technologies such as aerospace craft and be widely applied.
PDMS（Polydimethylsiloxane, dimethyl silicone polymer, commonly known as organosilicon）It is a kind of high score
Sub- organo-silicon compound, have good elasticity, optical characteristics, low vitrification point, low-surface-energy, highly-breathable, splendid
Insulating properties, chemical stability and heat endurance.It is a kind of thick liquid in liquid, and referred to as silicone oil, is that one kind has not
Polyorganosiloxane mixture with degree of polymerization chain structure；It is a kind of silica gel in solid-state, nontoxic, hydrophobic inert substance,
And be non-flammable, transparent elastomer.After generally being mixed with certain proportion with curing agent with host in laboratory, using taking out
The mode of vacuum makes the bubble in mixed liquor floating to surface to rupture, then makes it solid after baking certain time at a certain temperature
Change, the ratio of host and curing agent, heating-up temperature, heat time isoparametric difference will produce the PDMS of different hardness.
The preparation method predominantly organic tool delineation of variable period grating and two kinds of holographic lithography.Mechanical scratching is suitable in metal
Surface makes the variable period grating with blaze structure, and the Changing Pattern due to grating space is produced by computer controls,
Therefore do not limited by making the light path in holographic grating, shortcoming is to be limited by cutter, and grating space is not consecutive variations, but
It is spliced by the equidistant grating of segment, and make efficiency is low, have ghost line, veiling glare is relatively more；Holographic lithography makes variable period
The advantage of grating is screen periods consecutive variations（Interfered by light path and form）And make efficiency is higher, be suitable for make heavy caliber,
The variable period grating of high linear density.But the Changing Pattern of the grating space that holographic lithography makes is limited by optical interference circuit, has
Shi Buneng obtains actually required some Changing Patterns, and such as grating space is the grating of linear change.
Content of the invention
The present invention be directed to the complex manufacturing technology of existing variable period grating, time-consuming, and controllability is not high, cost of manufacture
High problem it is proposed that a kind of based on stretching PDMS grating regulate and control screen periods rate of change method, process is simple, controllability
Height, low manufacture cost, fabrication cycle is short.
The technical scheme is that：A kind of method that screen periods rate of change is regulated and controled based on stretching PDMS grating, specifically
Step is as follows：
1）Make the variable period grating based on PDMS：
A:Make master mold version grating with photoetching or mechanical quarterization；
B:The grating pattern on master mold version grating that step A is made is transferred on PDMS film,
Concrete steps：A, by prepolymer and curing agent according to 20：1 volume proportion, the PDMS mixing liquid is placed on vacuum
In drying box, till keeping vacuumizing state bubble-free in the liquid；B, the PDMS liquid having taken out vacuum is poured on grating mould
Plate surface, and be heating and curing at 100 DEG C 1 hour, then cool down；C, PDMS film is stripped down from optical grating mold plate, press
The PDMS film cutting out different masses according to the isosceles-trapezium-shaped with different base angles is standby；
2）Stretched based on the variable period grating of PDMS to after making：By step 1）After making, PDMS film is smooth is being clamped in
On one-dimensional translation drawing stand, film one end is fixed, and the other end is clamped on moveable platform, along the side perpendicular to grating grid
To stretching certain length in PDMS elastic range；
3）Detected based on the variable period grating of PDMS to after stretching：The line density of the PDMS film after detection stretching, thin
In film zone line, the distribution of grating line density linearly changes；
4）Regulating step 2）The base angle of isosceles trapezoid PDMS film, then carry out step 3）Detection, obtain different linear changes
The distribution of the grating line density changed.
The beneficial effects of the present invention is：The variable period preparing grating method based on PDMS for the present invention, technological process is simple,
Low manufacture cost and have higher controllability.
Brief description
Total type variogram is stretched on the rectangular configuration grating that Fig. 1-1 makes for the inventive method；
Equivalent strain figure is stretched on the rectangular configuration grating that Fig. 1-2 makes for the inventive method；
Equivalent stress figure is stretched on the rectangular configuration grating that Fig. 1-3 makes for the inventive method；
Total type variogram is stretched on the trapezium structure grating that Fig. 2-1 makes for the inventive method；
Equivalent strain figure is stretched on the trapezium structure grating that Fig. 2-2 makes for the inventive method；
Equivalent stress figure is stretched on the trapezium structure grating that Fig. 2-3 makes for the inventive method；
Fig. 3 is screen periods distribution when tensile load is identical on the trapezium structure grating of present invention difference base angle.
Specific embodiment
The method regulating and controlling screen periods rate of change based on stretching PDMS grating, step is as follows：
1st, make the variable period grating based on PDMS：
1）Make master mold version grating with photoetching or mechanical quarterization；
2）The grating pattern on master mold version grating that will make in upper step is transferred on PDMS film.Specifically：A, by pre-polymerization
Thing and curing agent are according to 20：1 volume proportion, the PDMS mixing liquid is placed in vacuum drying chamber, keeps vacuumizing shape
Till state bubble-free in the liquid；B, the PDMS liquid having taken out vacuum is poured on optical grating mold plate surface, and heats at 100 DEG C
Solidification 1 hour, then cools down；C, PDMS film is stripped down from optical grating mold plate, according to the ladder with different bases angle
The PDMS film that shape or rectangular shape cut out different masses is standby；
2nd, stretched based on the variable period grating of PDMS to after making：
After step 1 is made PDMS film smooth be clamped in one-dimensional translation drawing stand on, film one end is fixed, the other end clamp
On moveable platform, stretch certain length in PDMS elastic range along perpendicular to the direction of grating grid；
3rd, detected based on the variable period grating of PDMS to after stretching：The line density of the PDMS film after detection stretching, due to
In the stretching direction the width of various location film different so that the pulling force being subject to is different, film deformation is different, thus not
Different with the screen periods at position.In region between in the film, the pulling force due to being subject to is essentially identical, the change of screen periods
Depend primarily on the width of film, distribution of grating line density therefore in the range of this linearly changes.
Above step reflects us by the detection of line density and is become by stretching the PDMS film of replica
The grating in cycle, and the period profile of grating is affected linear change profile by trapezoidal film side.
Using ANSYS finite element analysis software come analog simulation, the grating that the PDMS material of given shape is produced,
In the case of stress stretching, the uneven change that screen periods produce with material stress difference, thus obtained variable period
The structure of grating：
The PDMS of rectangular configuration makes grating, stretches in deformation range：From ANSYS Finite element analysis results, such as
Fig. 1-1 stretches total type variogram in rectangular configuration, and various location deformation quantity is different, and the change of deformation quantity affects the week of grating
Phase, knowable to 1-2 equivalent strain figure, 1-3 equivalent stress figure, the equivalent strain in the zone line of rectangular configuration is uniform
, be change the screen periods in region change be always.
Fig. 2 stretches on trapezium structure, type variogram as total in Fig. 2-1, and deformation quantity change on trapezoidal high direction, from 2-
2 equivalent strain figures, 2-3 equivalent stress figure understand, the even variation on trapezoidal high direction of the equivalent strain on trapezium structure, and
Change is affected by the slope of trapezoidal side edges, and the slope changing trapezoidal side edges can obtain different variable period light in a stretched state
Grid structure.
As Fig. 3 screen periods distribution when identical for tensile load on the trapezium structure grating of present invention difference base angle.Figure is right
Upper angle is base angle angle, as can be seen from Figure the trapezium structure grating stretching at different base angles, and the regulation and control to screen periods are different, its change
Law is related to trapezoidal base angle, and base angle is less, changes faster.
Claims (1)
1. a kind of method based on stretching PDMS grating regulation and control screen periods rate of change is it is characterised in that comprise the following steps that：
1）Make the variable period grating based on PDMS：
A:Make master mold version grating with photoetching or mechanical quarterization；
B:The grating pattern on master mold version grating that step A is made is transferred on PDMS film,
Concrete steps：A, by prepolymer and curing agent according to 20：1 volume proportion, the PDMS mixing liquid is placed on vacuum
In drying box, till keeping vacuumizing state bubble-free in the liquid；B, the PDMS liquid having taken out vacuum is poured on grating mould
Plate surface, and be heating and curing at 100 DEG C 1 hour, then cool down；C, PDMS film is stripped down from optical grating mold plate, press
The PDMS film cutting out different masses according to the isosceles-trapezium-shaped with different base angles is standby；
2）Stretched based on the variable period grating of PDMS to after making：By step 1）After making, PDMS film is smooth is being clamped in
On one-dimensional translation drawing stand, film one end is fixed, and the other end is clamped on moveable platform, along the side perpendicular to grating grid
To stretching certain length in PDMS elastic range；
3）Detected based on the variable period grating of PDMS to after stretching：The line density of the PDMS film after detection stretching, thin
In film zone line, the distribution of grating line density linearly changes；
4）Regulating step 2）The base angle of isosceles trapezoid PDMS film, then carry out step 3）Detection, obtain different linear changes
The distribution of the grating line density changed.
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| CN201611138716.3A CN106405704A (en) | 2016-12-12 | 2016-12-12 | Method for regulating grating period change rate based on stretching of PDMS grating |
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| CN201611138716.3A CN106405704A (en) | 2016-12-12 | 2016-12-12 | Method for regulating grating period change rate based on stretching of PDMS grating |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108490524A (en) * | 2018-04-04 | 2018-09-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method and system of high linear density grating mask |
| CN108761600A (en) * | 2018-05-04 | 2018-11-06 | 西安交通大学 | A kind of method that prestressing force aided nano press makes high density diffraction grating |
| CN108802880A (en) * | 2017-05-05 | 2018-11-13 | 上海理工大学 | A kind of adjustable transmission grating of dimensional tensile flute profile and its preparation method and application |
| CN108957611A (en) * | 2018-07-13 | 2018-12-07 | 歌尔股份有限公司 | A kind of manufacturing method of lenticular lenses, lenticular lenses and display equipment |
| CN112782795A (en) * | 2021-01-29 | 2021-05-11 | 鲁东大学 | Method for preparing submicron grating with half period |
| CN113970803A (en) * | 2021-10-22 | 2022-01-25 | 福州高意光学有限公司 | Method for manufacturing grating assemblies with different linear densities |
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| US20150024177A1 (en) * | 2013-07-19 | 2015-01-22 | Industry-Academic Cooperation Foundation, Yonsei University | Method of fabricating single crystal colloidal monolayer on substrate and display device comprising the substrate |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108802880A (en) * | 2017-05-05 | 2018-11-13 | 上海理工大学 | A kind of adjustable transmission grating of dimensional tensile flute profile and its preparation method and application |
| CN108802880B (en) * | 2017-05-05 | 2021-05-04 | 上海理工大学 | Two-dimensional stretching groove-shaped adjustable transmission grating and preparation method and application thereof |
| CN108490524A (en) * | 2018-04-04 | 2018-09-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method and system of high linear density grating mask |
| CN108490524B (en) * | 2018-04-04 | 2020-04-10 | 中国科学院长春光学精密机械与物理研究所 | Method and system for preparing high linear density grating mask |
| CN108761600A (en) * | 2018-05-04 | 2018-11-06 | 西安交通大学 | A kind of method that prestressing force aided nano press makes high density diffraction grating |
| CN108761600B (en) * | 2018-05-04 | 2020-08-04 | 西安交通大学 | Method for manufacturing high-density diffraction grating by prestress-assisted nanoimprint lithography |
| CN108957611A (en) * | 2018-07-13 | 2018-12-07 | 歌尔股份有限公司 | A kind of manufacturing method of lenticular lenses, lenticular lenses and display equipment |
| CN108957611B (en) * | 2018-07-13 | 2021-05-14 | 歌尔股份有限公司 | Manufacturing method of grating sheet, grating sheet and display device |
| CN112782795A (en) * | 2021-01-29 | 2021-05-11 | 鲁东大学 | Method for preparing submicron grating with half period |
| CN112782795B (en) * | 2021-01-29 | 2022-06-07 | 鲁东大学 | Method for preparing submicron grating with half period |
| CN113970803A (en) * | 2021-10-22 | 2022-01-25 | 福州高意光学有限公司 | Method for manufacturing grating assemblies with different linear densities |
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Application publication date: 20170215 |