CN105700047A

CN105700047A - Artificial compound eye structure and manufacturing method thereof

Info

Publication number: CN105700047A
Application number: CN201410701709.4A
Authority: CN
Inventors: 方端
Original assignee: Individual
Current assignee: Individual
Priority date: 2014-11-28
Filing date: 2014-11-28
Publication date: 2016-06-22

Abstract

The invention provides an artificial compound eye structure and a manufacturing method thereof. The method comprises steps that the micromachining technology is utilized to manufacture a planar micro lens array structure as a sub eye array of the compound eye structure; the soft lithography technology is utilized to carry out model turning for the sub eye array, and the flexible template containing the sub eye array is acquired, and the flexible substrate can be bent at any degree; the printing technology is utilized to transfer the sub eye array structure on the flexible template to a spherical crown substrate, and the artificial compound eye structure is acquired. The artificial compound eye structure comprises a substrate and a sub eye structure on a curved surface of the substrate, wherein the substrate is a spherical crown substrate, and the sub eye structure is a micro lens array structure. Through the method, the manufacturing process is simple, no expensive equipment and instrument are required for the formation process, manufacturing efficiency is high, and curved-surface micro array elements can be effectively manufactured through the method.

Description

A kind of artificial compound eye structure and preparation method thereof

Technical field

The present invention relates to a kind of preparation method, refer in particular to a kind of artificial compound eye structure and preparation method thereof。

Background technology

Optical imagery and detection system are widely used in the fields such as biology, industry and Military Application at present, and their performance indications be it is also proposed higher requirement by this。Wherein the angle of visual field is as an important indicator of optical detection system, and its performance is also suddenly waited to improve。Traditional optical imaging system owing to simply carrying out optimization design on one-dimensional optical axis direction, so that the increase of its angle of visual field is extremely limited。Further, the eyeglass number that this traditional optical imaging system generally adopts is many, and volume is big, and structure is complicated, it is difficult to realize and the integrated of various miniaturized systems and fusion。

At present, artificial compound eye structure is all conducted extensive research by a lot of research groups both domestic and external, but these research major parts rest in theoretical and the research of method for designing。In order to this artificial compound eye structure is really applied in each imaging system, it is necessary to study the forming technique of a kind of artificial compound eye structure that can be practical。But owing to this structure is made up of the sub-eye array being distributed on curved surface, and traditional technology of preparing is shaped all in the plane, and its preparation is just proposed significantly high challenge by this。Some group adopts sextuple translating device to carry out the preparation of artificial compound eye structure in conjunction with direct-writing device in the world at present, this preparation method needs complicated accurate mobile adjustment device, and need to be equipped with expensive direct write head, cost is very high, and preparation efficiency is low, be not a kind of can the method for wide popularization and application。

Summary of the invention

The present invention is directed to prior art above shortcomings, controlled artificial compound eye lens of a kind of curvature and preparation method thereof is provided, by introducing new material, develops new technique, micro Process, soft lithographic, reproduction technology are combined, has ultimately formed the curved surface microarray element technology of preparing of a set of uniqueness。

The preparation method that it is an object of the invention to provide a kind of artificial compound eye structure。

The present invention provides a kind of artificial compound eye structure, it is characterised in that including the sub-ocular structure on substrate and base curvature, wherein, substrate is spherical crown substrate, and sub-ocular structure is microlens array structure。

The preparation method that the present invention provides a kind of artificial compound eye structure, it is characterised in that comprise the following steps:

(1) micro-processing technology is utilized to prepare planar microlens array structure as the sub-eye array in compound eye structural；

(2) utilize soft lithography that above-mentioned sub-eye array is carried out overmolded, it is thus achieved that comprising the preparation of the Flexible formwork assembly of sub-eye array structure, this Flexible formwork assembly can bend with any flexibility；

(3) reproduction technology is utilized to realize transferring in spherical crown substrate the sub-eye array structure on Flexible formwork assembly。

Above-mentioned steps (1) includes mobile mask means and prepares microlens array structure and hot melt prepares two steps of micro lens array。

Flexible formwork assembly described in above-mentioned steps (2) is polydimethylsiloxane, i.e. PDMS；The proportioning of PDMS and firming agent thereof is: 10:1。

Reproduction technology described in above-mentioned steps (3) is by utilizing ultraviolet-curable materials NOA68 to carry out replicating transfer and then completing the molding of artificial compound eye structure of figure。,

Accompanying drawing illustrates:

Accompanying drawing 1 is the various micro lens array figure of the present invention；

Accompanying drawing 2 is the micro lens array figure that hot melt manufacturing cycle is 40 μm (a mask graph, b prepares result, c imaging results) of the present invention；

Accompanying drawing 3 is artificial compound eye structure photo and the electromicroscopic photograph figure thereof of the present invention。

Detailed description of the invention:

Below by specific embodiment, technical scheme is described in further detail, but the present invention is not limited to these embodiments。

(1) Micrometer-Nanometer Processing Technology is utilized to complete the preparation of the various micro lens array as sub-ocular structure, as shown in Figure 1, give the preparation result in cycle 1500 μm, cycle 100 μm, cycle 5 μm, respectively as shown in Fig. 1 (a) ~ (c)。

(2) owing to the cycle of biology compound eye structure is about 40 μm, therefore in the preparation process of artificial compound eye structure, the technology of preparing of the micro lens array that the cycle is 40 μm of micro lens array is selected to be specifically described。In view of the construction features of this micro lens array, select hot melt to carry out it and prepare。

It is prepared for the mask arrangement as shown in Fig. 2 (a) first with laser writing technology。Dark circular portion in this mask is alternatively non-transparent part, and all the other are light transmission part。The diameter of alternatively non-transparent part is 35 μm, and the cycle is 40 μm。

Utilize dust technology to soak substrate, then utilize ultra-pure water that it is rinsed, utilize acetone and ethanol to be carried out afterwards, put into and make substrate thoroughly dry after 160 DEG C of baking ovens toast 2h。Selecting AZ9260 photoresist to utilize photoresist spinner that photoresist is spin-coated on substrate surface as graphic recording carrier is distant, spin speed is 4500 turns/s, and spin-coating time is 25s。Then putting it in baking oven and toast, to remove solvent in photoresist and moisture, baking temperature is 80 DEG C, and baking time is 1h。The thickness measuring the photoresist of acquisition after cooling is 10 μm。Mask plate is positioned over photoresist surface so that it is photoresist is exposed by the mercury lamp being in close contact Yuan Liyong wavelength 365ns with photoresist, and time of exposure is 60s。Exposing complete being put in developer solution by substrate afterwards to develop, developing time is 2min。After development, in corresponding mask, the photoresist of light transmission part is washed off, and the photoresist of alternatively non-transparent part is retained, and namely forms diameter about 35 μm, the highly about cylindrical photoresist structure of 10 μm on substrate。Being put into by substrate in baking oven afterwards and carry out high temperature hot melt, hot melting temperature is 115 DEG C, and hot molten time is 10min。Photoresist structure cylindrical after hot melt can be changed into required domed microlens array structure。As shown in Fig. 2 (b) distant while, in order to verify the imaging effect of this micro lens array, utilize "+" carrying out imaging as object, imaging results is such as shown in Fig. 2 (c), it can be seen that utilize this micro lens array that object can become the picture that clear Yao is complete。

(3) by analyzing the relation between Other substrate materials and various material, select polydimethylsiloxane and PDMS material as the material of molding Flexible formwork assembly, there is relatively low molecular force between this material and photoresist and quartz substrate, can completely strip from photoresist and various substrate surface。By analyzing the proportion relation between PDMS and firming agent thereof, proportioning 10:1 is selected to prepare PDMS solution。This solution is cast to the micro lens array surface of above-mentioned molding, is then placed in baking oven and solidifies, and solidification temperature is 70 DEG C, and hardening time is 1h。After solidification, it is taken out from baking oven, PDMS layer is peeled off from substrate surface, obtain and carry that the Flexible formwork assembly material of concave mirror arrangements is distant is placed in obturator surface by this Flexible formwork assembly, then utilize air pump that it is bled, make this device negative pressure, it is thus achieved that be distributed in the concavees lens array structure on ball bowl structure surface。Ultraviolet-curable materials NOA68 is selected to have low molecular force between this material and PDMS as the material of final molding artificial compound eye is distant, it is possible to be completely stripped from its surface by PDMS and do not damage this Flexible formwork assembly。NOA68 solution is poured in PDMS ball bowl, under 365nm ultraviolet light, solidify 30min (light intensity I is 8mW/cm2), make the full cross-linked solidification of NOA68 material。Afterwards PDMS is peeled off, it is thus achieved that artificial compound eye structure as shown in Figure 3。This structure spherical crown basal diameter 2cm, is highly 0.5cm。Wherein contain more than 20000 sub-ocular structures。

Claims

1. an artificial compound eye structure, it is characterised in that include the sub-ocular structure on substrate and base curvature, wherein, substrate is spherical crown substrate, and sub-ocular structure is microlens array structure。

2. the preparation method of an artificial compound eye structure, it is characterised in that comprise the following steps:

3. the preparation method of a kind of artificial compound eye structure according to claim 2, it is characterised in that step (1) includes mobile mask means and prepares microlens array structure and hot melt prepares two steps of micro lens array。

4. the preparation method of a kind of artificial compound eye structure according to claim 2, it is characterised in that the Flexible formwork assembly described in step (2) is polydimethylsiloxane, i.e. PDMS；The proportioning of PDMS and firming agent thereof is: 10:1。

5. the preparation method of a kind of artificial compound eye structure according to claim 2, it is characterised in that the reproduction technology described in step (3) is by utilizing ultraviolet-curable materials NOA68 to carry out replicating transfer and then completing the molding of artificial compound eye structure of figure。