CN101870151A - Manufacturing method of optical element and impressing mould - Google Patents

Manufacturing method of optical element and impressing mould Download PDF

Info

Publication number
CN101870151A
CN101870151A CN 200910301879 CN200910301879A CN101870151A CN 101870151 A CN101870151 A CN 101870151A CN 200910301879 CN200910301879 CN 200910301879 CN 200910301879 A CN200910301879 A CN 200910301879A CN 101870151 A CN101870151 A CN 101870151A
Authority
CN
Grant status
Application
Patent type
Prior art keywords
alignment mark
plurality
imprint mold
substrate
provided
Prior art date
Application number
CN 200910301879
Other languages
Chinese (zh)
Inventor
余泰成
Original Assignee
鸿富锦精密工业(深圳)有限公司;鸿海精密工业股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00009Production of simple or compound lenses
    • B29D11/00278Lenticular sheets
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method
    • G02B3/0031Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0037Arrays characterized by the distribution or form of lenses
    • G02B3/0056Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/34Feeding the material to the mould or the compression means
    • B29C2043/3488Feeding the material to the mould or the compression means uniformly distributed into the mould
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • B29C2043/5833Measuring, controlling or regulating movement of moulds or mould parts, e.g. opening or closing, actuating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/30Mounting, exchanging or centering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/30Mounting, exchanging or centering
    • B29C33/303Mounting, exchanging or centering centering mould parts or halves, e.g. during mounting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00Optical elements, e.g. lenses, prisms
    • B29L2011/0016Lenses

Abstract

The invention provides a manufacturing method of an optical element, which comprises the following steps of: providing an impressing mould which is provided with a first align mark and a second align mark, respectively; providing a substrate which is provided with a surface, wherein the surface is divided into a plurality of impressing subareas arranged in an array, a third align mark corresponding to the second align mark is arranged at the boundary of each impressing subarea, each impressing subarea can be divided into a plurality of forming areas, and each forming area is provided with a fourth align mark corresponding to the first align mark; coating forming material in each forming area on the substrate; pressing the impressing module to the forming material downwards and curing the forming material after aligning the align marks of the impressing mould and the substrate, respectively; repeating the steps to form a plurality lens optical parts corresponding to a plurality of microstructures of the impressing mould in each impressing area, thereby obtaining the optical element. The invention further provides an impressing mould for implementing the method.

Description

光学元件的制造方法及压印模具 A method for manufacturing an optical element of the imprint mold and

技术领域 FIELD

[0001] 本发明涉及一种光学元件的制造方法,尤其是涉及一种分区压印形成光学元件的制造方法及压印模具。 [0001] The present invention relates to a method for producing an optical element, particularly to a partition and the print nip forming mold manufacturing method of the optical element.

背景技术 Background technique

[0002] 晶圆级封装(wafer level package,WLP)制程是目前新发展的相机镜头模组制作方式,其是采用与半导体制程相整合的镜片堆栈方式或者压印方式。 [0002] The wafer-level package (wafer level package, WLP) camera module manufacturing process is the new development of the current production methods, which is an imprint method or use of the lens stack manner with semiconductor process integration. 主要是利用压印模具的压印技术,利用非球面镜片压印模具在基板上的成型材料上压印出非球面镜片,然后再利用热固化或者UV光固化,使非球面镜片定型,并且与后段影像处理器封装制程整合,其制程之优点在于可大量生产光学镜头模组。 Imprint technique is the use of the imprint mold, the imprint mold aspherical lens embossed on the molded aspheric lens material on the substrate, and then cured by heat or UV-curable, non-spherical lens shape, and with after the packaging process section integrated image processor, which processes the advantage in that mass production of optical lens module.

[0003] 压印过程中,压印模具的制作精度较高,如果将压印模具的尺寸做成与基板尺寸相当,会很困难,成本也很高,因此通常采用分区步进(stepper)压印的方式,将基板划分为若干区域,使用较小的压印模具循环步进压印。 [0003] The embossing process, high manufacturing accuracy of the imprint mold, if the size of the imprint mold and the substrate is made of comparable dimensions, will be very difficult and costly, and therefore usually partition step (Stepper) pressure printing manner, the substrate is divided into several regions, a smaller circular imprint mold imprinting step. 但是,在分区步进压印过程中,较难保证在每个压印分区内均实现压印模具与基板的对准。 However, during the partition step embossing, imprinting effect the alignment difficult to guarantee both the mold and the substrate in each partition imprint.

发明内容 SUMMARY

[0004] 有鉴于此,有必要提供一种压印过程中,每个压印分区内压印模具与基板均能对准的光学元件的制造方法及压印模具。 [0004] In view of this, it is necessary to provide an imprint process, a method of manufacturing the optical element, and an imprint mold imprinting each partition can imprint mold and the substrate are aligned.

[0005] 一种光学元件的制造方法,其包括以下步骤:提供一个压印模具,其包括一个成型面,该成型面上设有预定图案的多个微结构,围绕每个微结构设置有第一对位标记,该成型面的边界处设置有第二对位标记;提供一个基板,该基板具有一个表面,该表面划分为阵列排布的多个压印分区,每个压印分区的边界处设置有与第二对位标记相对应的第三对位标记,每个压印分区内可划分为多个成型区,每个成型区设置有第四对位标记,该第四对位标记与第一对位标记相对应;于基板上的每个成型区内涂覆成型材料;将该压印模具的第一对位标记、第二对位标记分别与基板的其中一个压印分区的第四对位标记、第三对位标记对准后,将压印模具的成型面朝向成型材料压下并固化该成型材料,在该压印分区上形成与压印模具的多个微结构相对应的多个镜片 [0005] A method for manufacturing an optical element, comprising the steps of: providing an imprinting mold comprising a molding surface, the molding surface with a predetermined pattern of microstructures, each microstructure is provided around the first a pair of bit mark at the boundary of the molding surface provided with a second alignment mark; a substrate, the substrate having a surface, the platen surface is divided into a plurality of partitions arranged in an array, the boundaries of each partition imprint at provided with a third alignment mark and the second alignment mark corresponding to each of the platen can be divided into a plurality of partition forming area, each forming zone provided with a fourth alignment mark, the alignment mark fourth corresponding to the first alignment mark; on a substrate coated with the molding material each forming zone; the imprint mold of the first alignment mark, a second alignment mark and the substrate, respectively, wherein a partition of the platen a fourth alignment mark, the alignment mark aligned with the third pair, the molding surface of the imprint mold is depressed toward the molding material and curing the molding material formed on the partition and a plurality of microstructures imprint mold imprinting phase corresponding to the plurality of lenses 光学部;相对移动压印模具和基板,使得压印模具逐一与其余的压印分区相对,重复以上步骤,在每个压印分区均形成与压印模具的多个微结构相对应的多个镜片光学部,即得到光学元件。 The optical portion; relatively moving the substrate and the imprint mold so that the imprint mold imprinting partitions one by one relative to the rest, repeat the above steps, the imprint mold and a plurality of microstructures corresponding to each of the plurality of partitions are formed imprint The optical lens unit, to obtain an optical element.

[0006] 一种用于实施上述的光学元件的制造方法的压印模具,其包括一个成型面,该成型面上设有预定图案的多个微结构,围绕每个微结构设置有第一对位标记,该成型面的边界处设置有第二对位标记。 Each microstructure [0006] A method of manufacturing a mold for imprint embodiment of the optical element, which comprises a molding surface, the molding surface provided with a plurality of predetermined pattern microstructures, disposed around the first pair of bit flag, a boundary of the molding surface provided with a second alignment mark.

[0007] 相较于现有技术,由于压印模具分别设有第一对位标记、第二对位标记,基板上的每个压印分区分别设有与第一对位标记和第二对位标记相对应的第四对位标记和第三对位标记,可保证压印过程中,每个压印分区均能实现压印模具和基板的对准,且每个压印分区内的每个成型区均能与压印模具上对应的微结构对准,可提高光学元件的成型质量和尺寸精度。 [0007] Compared to the prior art, since the imprint mold are provided with a first alignment mark, a second alignment mark, each partition embossing on the substrate are provided with a first alignment mark and a second pair bit flag corresponding to a fourth alignment mark and the third alignment mark, ensures embossing process, each partition can achieve alignment of the imprint mold imprinting and the substrate, and each imprint each partition a forming zone can corresponding to the imprinting mold microstructure aligned, improve molding quality and dimensional accuracy of the optical element. 附图说明 BRIEF DESCRIPTION

[0008] 图1是本发明实施例提供的光学元件的制造方法的流程图。 [0008] FIG. 1 is a flowchart of a method for manufacturing an optical element according to an embodiment of the present invention.

[0009] 图2至图10是本发明实施例提供的光学元件的制造方法的过程示意图。 [0009] FIGS. 2 to 10 is a procedure of a method for producing an optical element according to an embodiment of the present invention. FIG.

具体实施方式 detailed description

[0010] 下面将结合附图,对本发明实施例作进一步的详细说明。 [0010] conjunction with the accompanying drawings below, embodiments of the present invention will be further described in detail.

[0011] 请参阅图1,其为本发明实施例中光学元件的制造方法的流程图。 [0011] Referring to FIG. 1, a flowchart of a method for manufacturing the optical element in which the embodiment of the present invention. 该方法包括以下步骤: The method comprises the steps of:

[0012] 提供一个压印模具,其包括一个成型面,该成型面上设有预定图案的多个微结构, 围绕每个微结构设置有第一对位标记,该成型面的边界处设置有第二对位标记; [0012] The imprint provides a mold comprising a molding surface, the molding surface with a predetermined pattern of microstructures, each microstructure is provided around the first alignment mark, a boundary of the molding surface is provided with The second alignment mark;

[0013] 提供一个基板,该基板具有一个表面,该表面划分为阵列排布的多个压印分区,每个压印分区的边界处设置有与第二对位标记相对应的第三对位标记,每个压印分区内可划分为多个成型区,每个成型区设置有第四对位标记,该第四对位标记与第一对位标记相对应; [0013] providing a substrate, the substrate having a surface, the platen surface is divided into a plurality of partitions arranged in an array, the boundaries of each partition is provided with embossing a second alignment mark corresponding to the third alignment tag, each nip can be divided into a plurality of partition forming area, each forming zone is provided with a fourth alignment mark, the alignment mark and the fourth alignment mark corresponding to the first;

[0014] 于基板上的每个成型区内涂覆成型材料; [0014] in each forming region on the substrate coated with the molding material;

[0015] 将该压印模具的第一对位标记、第二对位标记分别与基板的其中一个压印分区的第四对位标记、第三对位标记对准后,将压印模具的成型面朝向成型材料压下并固化该成型材料,在该压印分区上形成与压印模具的多个微结构相对应的多个镜片光学部; [0015] The imprint mold of the first alignment mark, a second alignment mark and the substrate, respectively, wherein the fourth alignment mark an impression partition, after the third alignment mark is aligned, the imprint mold pressed toward the molding surface the molding material and curing the molding material, forming a plurality of lens optical portion and the imprint mold is a plurality of microstructures corresponding partition on the platen;

[0016] 相对移动压印模具和基板,使得压印模具逐一与其余的压印分区相对,重复以上步骤,在每个压印分区均形成与压印模具的多个微结构相对应的多个镜片光学部,即得到光学元件。 [0016] The relative movement of the imprint mold and the substrate, such that the imprint mold imprinting partitions one by one relative to the rest, repeat the above steps, the imprint mold and a plurality of microstructures corresponding to each of the plurality of partitions are formed imprint The optical lens unit, to obtain an optical element.

[0017] 下面结合图2至图10对本发明实施例中光学元件的制造方法进行详细说明。 [0017] below with reference to FIGS. 2 to 10 in the method of manufacturing the optical element will be described in detail embodiments of the present invention.

[0018] 请一并参阅图2和图3,首先提供一个压印模具100。 [0018] Referring to FIGS. 2 and 3, a first imprint mold 100. 该压印模具100包括一个成型面110。 The imprint mold 100 includes a molding surface 110. 该成型面110上设有预定图案的多个微结构120。 A plurality of microstructures with a predetermined pattern on the molding surface 110,120. 该多个微结构120用于成型光学元件。 The plurality of microstructures 120 for molding the optical element. 该微结构120可以为内凹或外凸的球面或非球面形状。 The microstructures 120 may be concave or convex spherical or aspherical shape. 在本实施例中,该微结构120为内凹的非球面形状。 In the present embodiment, the microstructures 120 is an aspheric concave shape. 围绕每个微结构120设置有两个第一对位标记130,两个第一对位标记130以每个微结构120的中心呈对称分布。 120 is provided around each microstructure has two first alignment mark 130, two first alignment mark 130 as a center of each microstructure 120 symmetrically. 当然,第一对位标记130的数量和排布方式并不局限于本实施例,其取决于对加工精度和对位精度的要求。 Of course, the first alignment mark number and arrangement of the embodiment 130 of the present embodiment is not limited to the embodiment, depending on the machining accuracy and precision alignment requirements. 该成型面110的边界处设置有两个第二对位标记140,两个第二对位标记140以该成型面110的几何中心呈对称分布。 Boundary of the molding surface 110 is provided with two second alignment mark 140, two second alignment mark 140 with the geometric center of the forming surface 110 symmetrically. 在本实施例中,两个第二对位标记140设置在一水平线上。 In the present embodiment, two second alignment mark 140 is disposed in a horizontal line. 该第一对位标记130为十字形、T形、I形、F形或E形。 The first cross-shaped alignment mark 130, T-shaped, I-shaped, F-shaped or E-shaped. 该第二对位标记140也可以为十字形、T形、I形、F 形或E形。 The second alignment mark 140 may also be cross-shaped, T-shaped, I-shaped, F-shaped or E-shaped. 第一对位标记130和第二对位标记140最好形状相同,例如均为十字形。 The same alignment mark 130 and second alignment mark 140 is preferably a first pair of shape, such as cruciform both. 该第一对位标记130可以凸出形成或凹陷形成于该成型面110。 The first alignment mark 130 may be formed projections or depressions formed in the molding surface 110. 该第二对位标记140也可以凸出形成或凹陷形成于该成型面110。 The second alignment mark 140 may be formed convex or concave molding surface 110 is formed on the. 在本实施例中,该第一对位标记130和第二对位标记140均凸出形成于该成型面110。 In the present embodiment, the first alignment mark 130 and second alignment mark 140 are formed to protrude to the molding surface 110.

[0019] 请一并参阅图4和图5,提供一个基板200。 [0019] Referring to FIGS. 4 and 5, a substrate 200 is provided. 该基板200具有一个表面210,该表面210划分为阵列排布的四个压印分区220(图中以虚线示意),每个压印分区220的边界处设置有与第二对位标记140相对应的两个第三对位标记240,且与第二对位标记140形状相同。 The substrate 200 having a surface 210, the surface 210 is divided into an array of partitions arranged in four platen 220 (FIG schematically in phantom), at the boundary of each platen is provided with a partition 220 and a second alignment mark 140 corresponding to two third alignment mark 240, 140 and have the same shape and the second alignment mark. 每个压印分区220内又可划分为多个成型区222 (图中以虚线示意),每个成型区222 设置有两个第四对位标记230,该第四对位标记230与第一对位标记130相对应,且形状相同。 Each partition within the nip 220 can be divided into a plurality of shaped regions 222 (FIG schematically in dashed lines), each forming a fourth area 222 is provided with two alignment marks 230, the fourth and the first alignment mark 230 corresponding to the alignment mark 130, and the same shape. 当第一对位标记130和第二对位标记140均凸出形成于成型面110时,该第三对位标记240和第四对位标记230均凹陷形成于该表面210。 When the first alignment mark 130 and second alignment mark 140 are formed on the convex molding surface 110, the third 240 and the fourth alignment mark alignment mark 230 are formed on the surface of the recess 210. 在本实施例中,该第三对位标记240 和第四对位标记230均为十字形。 In the present embodiment, the third and fourth alignment marks 240 are cross-shaped alignment mark 230. 以上第一对位标记130、第二对位标记140、第三对位标记240和第四对位标记230均可以通过光刻技术形成。 Above the first alignment mark 130, the second alignment mark 140, the third 240 and the fourth alignment mark alignment mark 230 can be formed by a photolithography technique.

[0020] 请参阅图6,在基板200的表面210上的每个成型区222内,利用点胶装置注入液态或熔融态的成型材料300。 [0020] Referring to FIG. 6, the upper surface 210 of each substrate 200 forming zone 222 by injecting a molding material dispensing means 300 in a liquid or molten state. 该材料可以为环氧树脂、丙烯酸系树脂、聚氨基甲酸酯或聚硅氧树脂。 The material may be an epoxy resin, an acrylic resin, a polyurethane or silicone resin.

[0021] 请参阅图7,将该压印模具100的第一对位标记130、第二对位标记140分别与基板200的其中一个压印分区220的第四对位标记230、第三对位标记240对准。 [0021] Referring to FIG. 7, the imprint mold of the first alignment mark 100 130, the second alignment mark 140, respectively, wherein the fourth alignment mark and a partition 220 of the platen 230 of the substrate 200, a third pair of alignment mark 240 aligned.

[0022] 请参阅图8,将压印模具100的成型面110朝向成型材料300压下后进行紫外线固化。 [0022] Referring to FIG 8, the molded surface of the impression 110 of mold 100 towards molding material 300 is depressed after the ultraviolet curing.

[0023] 请参阅图9,固化完成后,脱去压印模具100,在基板200的其中一个压印分区200 形成多个镜片光学部260。 [0023] Referring to FIG. 9, after curing is complete, removing the imprint mold 100, a plurality of optical lens portion 260 in which a substrate 200 embossed partition 200. 相对移动压印模具100和基板200,使得压印模具100逐一与其余的压印分区220相对,朝向成型材料300压下,并进行紫外线固化,从而如图10所示,在每个压印分区220均形成与压印模具100的多个微结构120相对应的多个镜片光学部260, 即光学元件400。 Relatively movable mold platen 100 and the substrate 200, 100 one by one so that the imprint mold imprinting pressure and the remaining opposing partition 220, 300 toward the molding material, and the ultraviolet curing, thus shown in Figure 10, each partition platen 220 were 260, i.e. the optical element 400 is formed with a plurality of optical lenses imprint mold portions 100 of the plurality of microstructures 120 corresponds.

[0024] 在形成每一个压印分区220的多个镜片光学部260的过程中,要控制好紫外光线, 避免其他未形成镜片光学部260的压印分区220的成型材料被固化。 [0024] In the process of forming a plurality of optical lenses each embossed portion 260 of partition 220, to control the ultraviolet light, an optical lens to avoid other portion of the molding material 260 embossed partition 220 is not formed is cured.

[0025] 相较于现有技术,由于压印模具100分别设有第一对位标记130、第二对位标记140,基板上的每个压印分区220分别设有与第一对位标记130和第二对位标记140相对应的第四对位标记230和第三对位标记240,可保证压印过程中,每个压印分区220内均能实现压印模具100和基板220的对准,且每个压印分区220内的每个成型区222均能与压印模具100上对应的微结构120对准,可提高光学元件400的成型质量和尺寸精度。 [0025] Compared to the prior art, since the imprint mold 100 are respectively provided with a first alignment mark 130, the second alignment mark 140, each partition embossed on the substrate 220 are provided with a first alignment mark 130 and the second alignment mark 140 corresponding to the fourth alignment mark 230 and the third alignment mark 240, the imprinting process can be guaranteed, can achieve the imprint mold 100 and the substrate 220 within the platen 220 of each partition aligned, and each imprint area each forming a partition in the corresponding 220,222 can imprint mold 100 and the upper 120 is aligned microstructures can improve the molding quality and dimensional accuracy of the optical element 400.

[0026] 另外,对于本领域的普通技术人员来说,可以根据本发明的技术方案和技术构思做出其他各种相应的变化,而所有这些变化都应属于本发明权利要求的保护范围。 [0026] Further, those of ordinary skill in the art, may be made of other appropriate techniques and variations According to the concept of the invention, and all such variations are within the scope of protection of the claims of the invention.

Claims (8)

  1. 一种光学元件的制造方法,其包括以下步骤:提供一个压印模具,其包括一个成型面,该成型面上设有预定图案的多个微结构,围绕每个微结构设置有第一对位标记,该成型面的边界处设置有第二对位标记;提供一个基板,该基板具有一个表面,该表面划分为阵列排布的多个压印分区,每个压印分区的边界处设置有与第二对位标记相对应的第三对位标记,每个压印分区内可划分为多个成型区,每个成型区设置有第四对位标记,该第四对位标记与第一对位标记相对应;于基板上的每个成型区内涂覆成型材料;将该压印模具的第一对位标记、第二对位标记分别与基板的其中一个压印分区的第四对位标记、第三对位标记对准后,将压印模具的成型面朝向成型材料压下并固化该成型材料,在该压印分区上形成与压印模具的多个微结构相对应的多个镜片光学 A method for manufacturing an optical element, comprising the steps of: providing an imprinting mold comprising a molding surface, the molding surface with a predetermined pattern of the plurality of microstructures, the microstructures is provided around each of the first pair of bit mark at the boundary of the molding surface provided with a second alignment mark; a substrate, the substrate having a surface, the platen surface is divided into a plurality of partitions arranged in an array, the boundaries of each partition is provided with a platen the third alignment mark and second alignment mark corresponding to each of the platen can be divided into a plurality of partition forming area, each forming zone provided with a fourth alignment mark, the alignment mark of the first fourth corresponding to the alignment mark; in each forming region on the substrate coated with the molding material; imprint mold the first alignment mark, a second alignment mark and the substrate, respectively, wherein a fourth pair of nip partition bit flag, the third alignment mark is aligned, the molding surface of the imprint mold is depressed toward the molding material and curing the molding material formed on the partition and a plurality of microstructures imprint imprint mold corresponding to the multi optical lenses ;相对移动压印模具和基板,使得压印模具逐一与其余的压印分区相对,重复以上步骤,在每个压印分区均形成与压印模具的多个微结构相对应的多个镜片光学部,即得到光学元件。 ; Relatively moving the substrate and the imprint mold so that the imprint mold imprinting partitions one by one relative to the rest, repeat the above steps, a plurality of microstructures are formed in the imprint mold imprinting each partition corresponding to a plurality of optical lenses portion, i.e., to obtain an optical element.
  2. 2.如权利要求1所述的光学元件的制造方法,其特征在于,固化成型材料的步骤中是采用紫外线固化。 The method of manufacturing an optical element as claimed in claim 2, wherein the step of curing the molding material is a UV curing.
  3. 3.如权利要求1所述的光学元件的制造方法,其特征在于,该成型材料为环氧树脂、丙烯酸系树脂、聚氨基甲酸酯或聚硅氧树脂。 The method of manufacturing an optical element as claimed in claim 3, wherein the molding material is an epoxy resin, an acrylic resin, a polyurethane or silicone resin.
  4. 4. 一种用于实施如权利要求1所述的光学元件的制造方法的压印模具,其包括一个成型面,该成型面上设有预定图案的多个微结构,其特征在于,围绕每个微结构设置有第一对位标记,该成型面的边界处设置有第二对位标记。 4. The imprinting mold for implementing the method of manufacturing an optical element as claimed in claim, comprising a molding surface provided with a plurality of microstructures predetermined pattern on the molding surface, characterized in that, around each micro-structure is provided with a first alignment mark, a boundary of the molding surface provided with a second alignment mark.
  5. 5.如权利要求4所述的压印模具,其特征在于,围绕每个微结构设置的第一对位标记的数目为两个,两个第一对位标记以微结构的中心呈对称分布。 5. The imprint mold according to claim 4, characterized in that, around the first alignment mark of the number of each microstructure set is two, the two first alignment mark center symmetrically microstructure .
  6. 6.如权利要求4所述的压印模具,其特征在于,该第二对位标记的数目为两个,两个第二对位标记以该成型面的几何中心呈对称分布。 4 imprint mold according to claim 6, wherein the second alignment mark number is two, the two second alignment mark to the geometric center of the molding surface symmetrically.
  7. 7.如权利要求4所述的压印模具,其特征在于,该第一对位标记凸出形成或凹陷形成于该成型面。 7. The imprint mold according to claim 4, wherein the first alignment mark formed projections or depressions formed in the molding surface.
  8. 8.如权利要求4所述的压印模具,其特征在于,该第二对位标记凸出形成或凹陷形成于该成型面。 4 imprint mold according to claim 8, wherein the second alignment mark formed projections or depressions formed in the molding surface.
CN 200910301879 2009-04-27 2009-04-27 Manufacturing method of optical element and impressing mould CN101870151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200910301879 CN101870151A (en) 2009-04-27 2009-04-27 Manufacturing method of optical element and impressing mould

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN 200910301879 CN101870151A (en) 2009-04-27 2009-04-27 Manufacturing method of optical element and impressing mould
US12555880 US20100270692A1 (en) 2009-04-27 2009-09-09 Imprinting mold and method for making lens array
US13545928 US9272449B2 (en) 2009-04-27 2012-07-10 Method for making lens array

Publications (1)

Publication Number Publication Date
CN101870151A true true CN101870151A (en) 2010-10-27

Family

ID=42991393

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200910301879 CN101870151A (en) 2009-04-27 2009-04-27 Manufacturing method of optical element and impressing mould

Country Status (2)

Country Link
US (2) US20100270692A1 (en)
CN (1) CN101870151A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102621598A (en) * 2011-01-31 2012-08-01 美商豪威科技股份有限公司 Lens assembly and method for forming the same
CN102736139A (en) * 2011-04-08 2012-10-17 奇景光电股份有限公司 Wafer level lens module and method for manufacturing the wafer level lens module
CN103358572A (en) * 2012-03-31 2013-10-23 全球微型光学有限公司 Manufacturing method of optical lenses

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101850625B (en) * 2009-03-30 2013-06-05 鸿富锦精密工业(深圳)有限公司 Method for manufacturing optical components
WO2012028163A1 (en) * 2010-09-02 2012-03-08 Ev Group Gmbh Stamping tool, device and method for producing a lens wafer
WO2012055424A1 (en) 2010-10-26 2012-05-03 Ev Group Gmbh Method and device for producing a lens wafer
KR20130013439A (en) * 2011-07-28 2013-02-06 삼성전기주식회사 Lens imprinting device and lens imprinting method including the saem
KR101664507B1 (en) * 2011-12-08 2016-10-10 엘지이노텍 주식회사 Display
CN104364069B (en) * 2012-05-30 2016-07-06 Ev 集团 E·索尔纳有限责任公司 Method and apparatus for manufacturing a plurality of microlenses
KR20150082193A (en) * 2012-09-11 2015-07-15 헵타곤 마이크로 옵틱스 피티이. 리미티드 Manufacture of truncated lenses, of pairs of truncated lenses and of corresponding devices
US10048473B2 (en) * 2015-08-06 2018-08-14 Qualcomm Incorporated Submicron wafer alignment

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6156243A (en) * 1997-04-25 2000-12-05 Hoya Corporation Mold and method of producing the same
JP2000049447A (en) 1998-07-28 2000-02-18 Sony Corp Printed circuit board and manufacture thereof
US7094304B2 (en) * 2003-10-31 2006-08-22 Agilent Technologies, Inc. Method for selective area stamping of optical elements on a substrate
JP2006350177A (en) 2005-06-20 2006-12-28 Seiko Epson Corp Manufacturing method of optical sheet, optical sheet, planar lighting device, and electrooptical apparatus
US7878791B2 (en) 2005-11-04 2011-02-01 Asml Netherlands B.V. Imprint lithography
US7517211B2 (en) 2005-12-21 2009-04-14 Asml Netherlands B.V. Imprint lithography

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102621598A (en) * 2011-01-31 2012-08-01 美商豪威科技股份有限公司 Lens assembly and method for forming the same
US8630042B2 (en) 2011-01-31 2014-01-14 Visera Technologies Company Limited Lens assembly and method for forming the same
CN102621598B (en) 2011-01-31 2014-03-26 采钰科技股份有限公司 Lens assembly and method for forming the same
CN102736139A (en) * 2011-04-08 2012-10-17 奇景光电股份有限公司 Wafer level lens module and method for manufacturing the wafer level lens module
CN103358572A (en) * 2012-03-31 2013-10-23 全球微型光学有限公司 Manufacturing method of optical lenses

Also Published As

Publication number Publication date Type
US20100270692A1 (en) 2010-10-28 application
US9272449B2 (en) 2016-03-01 grant
US20120273981A1 (en) 2012-11-01 application

Similar Documents

Publication Publication Date Title
US20060144275A1 (en) Imprint lithography
Yang et al. High fill-factor microlens array mold insert fabrication using a thermal reflow process
US20040250945A1 (en) Method for and apparatus for bonding patterned imprint to a substrate by adhering means
US6432328B2 (en) Method for forming planar microlens and planar microlens obtained thereby
US20050162733A1 (en) Method of fabricating diffractive lens array and UV dispenser used therein
US20100072665A1 (en) Thermal imprinting device and thermal imprinting method
US20100015270A1 (en) Inner cavity system for nano-imprint lithography
CN101339364A (en) Method for manufacturing microlens array by soft mode impressing
US20060290024A1 (en) Method for fabricating soft mold
US20120081801A1 (en) Lens and method for manufacturing same
JP2003291159A (en) Resin curing method, manufacturing method for resin molding, etc., appliance used for them, and product to be obtained
CN103064136A (en) Combined microlens array for integrated imaging three-dimensional (3D) display and manufacturing method thereof
US20060113701A1 (en) Manufacturing micro-structured elements
JP2007223206A (en) Method of forming pattern
US20100270692A1 (en) Imprinting mold and method for making lens array
JP2008247022A (en) Method of forming micropattern, mold formed by this method of forming micropattern, transfer method and micropattern forming method using this mold
CN1478642A (en) Gas subfebrile temperature in pression shaping method
CN101144978A (en) Method for forming microlens array structure
US20100255139A1 (en) Micropattern transfer stamper and micropattern transfer device
US20090034088A1 (en) Mass production of Micro-Optical devices, corresponding tools, and resultant structures
CN101900936A (en) Impression mould and production method thereof
JP2005122047A (en) Pattern forming method and optical element
US20120200005A1 (en) Mold, imprint method, and method of manufacturing article
JP2005144717A (en) Resin curing method and manufacturing method of resin molded product or the like
KR20050010343A (en) Image sensor, fabrication method of an image sensor and mold for fabricating a micro condenser element array used in the same

Legal Events

Date Code Title Description
C06 Publication
C10 Request of examination as to substance
C12 Rejection of an application for a patent