CN101221358A - Curved substrate multi-phase micro-optical element processing method based on flexible ultraviolet die mold - Google Patents
Curved substrate multi-phase micro-optical element processing method based on flexible ultraviolet die mold Download PDFInfo
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- CN101221358A CN101221358A CNA2008100639838A CN200810063983A CN101221358A CN 101221358 A CN101221358 A CN 101221358A CN A2008100639838 A CNA2008100639838 A CN A2008100639838A CN 200810063983 A CN200810063983 A CN 200810063983A CN 101221358 A CN101221358 A CN 101221358A
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Abstract
The invention relates to a method for processing curved-surface substrate multi-phrase micro optical elements and a technique of manufacturing the micro optical elements based on a flexible UV pressing die; the method has an additional step which takes a polymer structure as a mask and uses a dry etching technique to form an embossed structure on a substrate to complete the graph transmission form a fine structure to the surface of a hard substrate; a stamping step in which a flexible pressing die creates elastic deformation with external prestress applied during the stamping process to bend into a shape similar to a surface being processed, with the deflection worked out by a method of FEM ( finite element method) simulation; and a step for making a motherboard, in which the shape and size of a fine structure on the surface of a pressing die motherboard is designed according to the deflection for compensation. The method can be used to realize the processing and manufacture of micro optical elements which have a curved-surface substrate of single material and are made of non-polymer hard materials.
Description
Technical field
The invention belongs to the micro optical element method for making, relate to a kind of curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold.
Background technology
Microstructure Optics element based on the curved surface substrate has better optical imagery characteristic than the diffraction optical element based on planar substrates, in optical system, use the integrated level that curved surface substrate Microstructure Optics can improve optical system greatly, and can increase the Design for optical system degree of freedom, reduce volume, cost squeeze, reduction design of Optical System difficulty, make the performance of optical system realize maximization.
Traditional optical lithography method is difficult to be applicable to the microtexture processing of curved surface substrate, what the processing of present existing curved surface substrate Microstructure Optics element was mainly adopted is the method for laser direct-writing, as 1. Daniela Radtke, Uwe D.Zeitner.Laser-lithography on non-planar surfaces.Optics Express.Vol.15:1167～1174 (2007); 2. Yoniun Xie, Zhenwu Lu, Fengyou Li, Jingli Zhao, ZhichengWeng.Lithographic fabrication of large diffractive optical elements on aconcave lens surface.Optics Express.Vol.10:1043～1047 (2002) etc., mainly be by High Accuracy Control to work piece space three-dimensional moving displacement amount, adjustment writes hot spot, in the mode of pointwise exposure, realize the processing and fabricating of curved surface substrate diffraction optical element.These class methods depend on extremely complicated multiple degrees of freedom high-precise motion control system, and are with high costs, mechanism is complicated, and have that working (machining) efficiency is low, speed slow, be not suitable for shortcomings such as processing and fabricating in batches.
Ultraviolet stamping technology based on flexible pressing mold is development on the basis of soft lithographic, and application flexibility material pressing mold can be realized the processing less than the microtexture of 30nm in the nano impression process.Flexible pressing mold is a kind of elasticity colloid substance that has, and can bend to arbitrary shape as required, as cylinder, sphere even aspheric surface, makes the microtexture of non-planar substrate be processed into possibility.Compare with the ultraviolet stamping technology based on the rigidity pressing mold, advantage such as flexible ultraviolet die mold has low, the easy making of cost, the life-span is long, speed is fast can once realize the processing and fabricating of microtexture need not repeatedly repeating impression in the substrate of 150mm diameter.
The method that at present discloses based on flexible pressing mold ultraviolet stamping fabrication techniques curved surface substrate Microstructure Optics element, as 1. Younan Xia, George M.Whitesides.Soft Lithography.Angew.Chem.Int.Ed.Vol 37:550～575 (1998) are Xia YN 2., Kim E, Zhao XM, Rogers JA, Prentiss M, Whitesides GM.Complex optical surfaces formed by replica moldingagainst elastomeric masters.SCIENCE 273 (5273): 347～349 (1996) etc., by using flexible making ide PDMS, microtexture processing such as blazed grating on the photoresist polymkeric substance of face of cylinder substrate, have been realized, this method can not realize that to structured material be silicon, the processing and fabricating of hard optical materials such as glass, have very big material selection limitation, use very limited.
Do not see that at present it is the research report of the curved surface substrate micro optical element of visible light such as silicon, quartz or infrared band hard optical material that application flexibility pressing mold ultraviolet stamping fabrication techniques structured material is arranged.
Summary of the invention
The objective of the invention is to design a kind of curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold, application flexibility ultraviolet die mold stamping technique, by the flexible pressing mold of bending to required shape face, as cylinder, sphere and aspheric surface, can realize the processing and the making of curved surface substrate micro optical element.
Technical solution of the present invention is: a kind of curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet mould specifically may further comprise the steps: 1. use the Micrometer-Nanometer Processing Technology preparation and be used for processing curve substrate multi-phase or the required microtexture pressing mold motherboard of continuous relief structure micro-optical element; 2. using the injection moulding reproduction technology copies to the motherboard surface relief structure on the soft making ide surface; 3. using the ultraviolet stamping technology is impressed into the embossment structure on the soft pressing mold on the polymkeric substance on curved substrate surface; It is characterized in that, this method is further comprising the steps of, 4. with the polymer architecture mask, use dry etching technology and on substrate, obtain embossment structure, finish the figure transmission of microtexture to the hard substrate surface, and step 3. in, elastic deformation takes place and bends to the shape close with surface to be machined in soft making ide under the precompression effect that moulding process added, and the big I of deflection calculates by the method for finite element simulation, the pattern of the pressing mold motherboard surface fine structure of step in 1. and size need be used the processing and fabricating that this method can realize homogenous material curved surface substrate non-polymer hard optical material micro optical element at the size of this deformation quantity to compensating design.
Described curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold is characterized in that processed substrate surface is the curved-surface structure such as sphere, aspheric surface, cylinder.
Described curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold is characterized in that, die material is the flexible die material of transmissive ultraviolet light, as dimethyl silicone polymer (PDMS).
Described curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold is characterized in that, Micrometer-Nanometer Processing Technology comprises cover lithography, laser direct-writing technology, direct electronic beam writing technology.
Described curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold is characterized in that the micro optical element material comprises glass, quartz (SiO
2), silicon (Si), germanium (Ge), sapphire (Al
2O
3), gallium arsenide (GaAs), magnesium fluoride (MgF
2), lithium fluoride (LiF), barium fluoride (BaF
2), kalzit (CaCO
3), zinc sulphide (ZnS).
Novelty of the present invention is:
The present invention proposes a kind of curved substrate multi-phase micro-optical element processing method based on flexible ultraviolet die mold.The basic thought of this method is the elastic deformation that utilizes flexible pressing mold, realize that microtexture is by the imprinting and copying of planar substrates to the curved surface substrate, amount of elastic deformation can be calculated emulation by the Young modulus of die material and draw, and also can carry out Compensation Design about amount of elastic deformation to the hard stamp motherboard of plane base by l-G simulation test.Use this method and can avoid the dependence of traditional diamond-making technique for multiple degrees of freedom, high precision rapid movement control system.This method by make the pressing mold motherboard, generate flexible pressing mold, flexible pressing mold impression, and in conjunction with steps such as dry etchings, realized the processing and fabricating of curved surface substrate hard optical material Microstructure Optics element, compare with additive method, processing step is simple more, making is easier, processing cost is lower, be easier to realize that rapid processing is made in batches.
Superiority of the present invention is:
1, the present invention can the microtexture of machining feature size below 10nm, can satisfy embossment structure processing requests multiple dimensioned, different resolving powers, and can realize the processing and fabricating of the suprabasil surface relief structure of various curved surfaces.
2, than traditional laser direct-writing process technology, the present invention has advantages such as processing technology is simple, process velocity is fast, realizability is good, precision is high, processing cost is low.
3, the present invention does not have the limitation of duplicating material, surface profile can be copied to such as in the materials such as quartz, monocrystalline silicon and sapphire.Have advantages such as high strength, high rigidity, high radiation preventing damage threshold, high chemical stability, wide transmitted spectrum scope compared to this type of material of polymkeric substance.
4, the present invention has that technology is simple, speed is fast, good reproducibility, expense is low, the life-span is long, the productive rate advantages of higher, can realize batch process.
Description of drawings
Fig. 1 is for making the process flow diagram of pressing mold motherboard and soft making ide.
(a) e-beam direct-writing exposure;
(b) develop;
(c) dry etching;
(d) injection moulding is duplicated.
Fig. 2 is for making the process flow diagram of many steps of spherical substrate binary optical lenses.
(a) injection moulding is duplicated;
(b) sphere gluing;
(c) sphere ultraviolet stamping;
(d) demoulding;
(e) dry etching.
Fig. 3 is the process flow diagram of the binary optical elements of the many steps of making cylinder substrate.
(a) injection moulding is duplicated;
(b) cylinder gluing;
(c) cylinder ultraviolet stamping;
(d) demoulding;
(e) dry etching.
Fig. 4 is for making the process flow diagram of aspheric surface substrate continuous relief Fresnel Lenses.
(a) injection moulding is duplicated;
(b) aspheric surface gluing;
(c) aspheric surface ultraviolet stamping;
(d) demoulding;
(e) dry etching.
Embodiment
Embodiment 1:
As shown in Figure 2, make the diffraction optical lens of sphere Quito step micro relief profile, element material is a glass, and die material is PDMS, and the required polymkeric substance of ultraviolet stamping is ultra-violet curing glue OG154, and concrete technological process is as follows:
1, as shown in Figure 1, use the laser direct-writing fabrication techniques and have the quartzy motherboard of the surface relief identical with object construction.
2, shown in Fig. 2 (a), use microstructure injection moulding reproduction technology, the microtexture of motherboard is copied to the PDMS material surface.
3, shown in Fig. 2 (b), 2 (c), to use the PDMS pressing mold and on the sphere substrate, implement ultraviolet stamping, the PDMS pressing mold bends to the curved surface pattern similar to processed spherical face under the effect of external force.
4, shown in Fig. 2 (d), be the sphere based polyalcohol micro relief profile after the process demoulding.
5, shown in Fig. 2 (e), application response ion etching technology obtains many steps micro relief profile on glass substrate.
Embodiment 2:
As shown in Figure 3, make the binary optical elements of the many ledge structures of cylinder substrate, element material is a monocrystalline silicon, and the material of pressing mold is PDMS, and polymkeric substance is selected ultraviolet organic photo solvent PAK01 for use.Concrete technological process is as follows:
1, as shown in Figure 1, applying electronic bundle direct writing technology is made and is had the quartzy motherboard identical with object construction.
2, shown in Fig. 3 (a), use microstructure injection moulding reproduction technology, the microtexture of motherboard is copied to the PDMS material surface.
3, shown in Fig. 3 (b), 3 (c), use the PDMS pressing mold and on the cylinder substrate, implement ultraviolet stamping,, the PDMS pressing mold bends under the effect of external force and the similar curved surface pattern in processed cylinder surface.
4, shown in Fig. 3 (d), be the cylinder based polyalcohol micro relief profile after the process demoulding.
5, shown in Fig. 3 (e), use dry etching technology, on quartz substrate, obtain many steps micro relief profile.
Embodiment 3:
As shown in Figure 4, make the Fresnel Lenses with continuous relief structure, element material is a sapphire, and die material is PDMS, and polymkeric substance is selected ultraviolet organic photo solvent PAK01 for use, and concrete technological process is as follows:
1, as shown in Figure 1, applying electronic bundle direct writing technology is made the quartzy motherboard of the continuous relief structure identical with object construction.
2, shown in Fig. 4 (a), use microstructure injection moulding reproduction technology, the microtexture of motherboard is copied to the PDMS material surface.
3, shown in Fig. 4 (b), 4 (c), to use the PDMS pressing mold and on aspheric base sheet, implement ultraviolet stamping, the PDMS pressing mold bends to the curved surface pattern similar to processed non-spherical surface under the effect of external force.
4, shown in Fig. 4 (d), be the aspheric surface based polyalcohol micro relief profile after the process demoulding.
5, shown in Fig. 4 (e), use dry etching technology, on sapphire substrate, obtain many steps micro relief profile.
Claims (5)
1. the curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet mould specifically may further comprise the steps: 1. use the Micrometer-Nanometer Processing Technology preparation and be used for processing curve substrate multi-phase or the required microtexture pressing mold motherboard of continuous relief structure micro-optical element; 2. using the injection moulding reproduction technology copies to the motherboard surface relief structure on the soft making ide surface; 3. using the ultraviolet stamping technology is impressed into the embossment structure on the soft pressing mold on the polymkeric substance on curved substrate surface; It is characterized in that, this method is further comprising the steps of, 4. with the polymer architecture mask, use dry etching technology and on substrate, obtain embossment structure, finish the figure transmission of microtexture to the hard substrate surface, and step 3. in, elastic deformation takes place and bends to the shape close with surface to be machined in soft making ide under the precompression effect that moulding process added, and the big I of deflection calculates by the method for finite element simulation, the pattern of the pressing mold motherboard surface fine structure of step in 1. and size need be used the processing and fabricating that this method realizes homogenous material curved surface substrate non-polymer hard optical material micro optical element at the size of this deformation quantity to compensating design.
2. the curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold according to claim 1 is characterized in that processed substrate surface is the curved-surface structure such as sphere, aspheric surface, cylinder.
3. the curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold according to claim 1 is characterized in that the ultraviolet stamping die material is flexible die material, as dimethyl silicone polymer (PDMS).
4. the curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold according to claim 1 is characterized in that Micrometer-Nanometer Processing Technology comprises cover lithography, laser direct-writing technology, direct electronic beam writing technology.
5. the curved substrate multi-phase micro-optical element method for processing based on flexible ultraviolet die mold according to claim 1 is characterized in that the micro optical element material comprises glass, quartz (SiO
2), silicon (Si), germanium (Ge), sapphire (Al
2O
3), gallium arsenide (GaAs), magnesium fluoride (MgF
2), lithium fluoride (LiF), barium fluoride (BaF
2), kalzit (CaCO
3), zinc sulphide (ZnS).
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|---|---|---|---|
| CNA2008100639838A CN101221358A (en) | 2008-02-04 | 2008-02-04 | Curved substrate multi-phase micro-optical element processing method based on flexible ultraviolet die mold |
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| CN101881925A (en) * | 2010-06-02 | 2010-11-10 | 中国科学院长春光学精密机械与物理研究所 | Method for copying micro-nano structure on any three-dimensional curve |
| CN102183878A (en) * | 2011-05-06 | 2011-09-14 | 中丰田光电科技(珠海)有限公司 | Microstructural stereoscopic anaglyph image-text platemaking method and device |
| CN102306219A (en) * | 2011-08-24 | 2012-01-04 | 西安理工大学 | Method for estimating normal stiffness of combining part |
| CN102515091A (en) * | 2011-12-22 | 2012-06-27 | 哈尔滨工业大学 | Plastic functional micro-structured surface soft-lithography duplicating method used in plastic functional micro-structured surface batch production |
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| CN101881925A (en) * | 2010-06-02 | 2010-11-10 | 中国科学院长春光学精密机械与物理研究所 | Method for copying micro-nano structure on any three-dimensional curve |
| CN101881925B (en) * | 2010-06-02 | 2012-06-13 | 中国科学院长春光学精密机械与物理研究所 | Method for copying micro-nano structure on any three-dimensional curve |
| CN102183878A (en) * | 2011-05-06 | 2011-09-14 | 中丰田光电科技(珠海)有限公司 | Microstructural stereoscopic anaglyph image-text platemaking method and device |
| CN102306219A (en) * | 2011-08-24 | 2012-01-04 | 西安理工大学 | Method for estimating normal stiffness of combining part |
| CN102515091A (en) * | 2011-12-22 | 2012-06-27 | 哈尔滨工业大学 | Plastic functional micro-structured surface soft-lithography duplicating method used in plastic functional micro-structured surface batch production |
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| CN105008138A (en) * | 2012-11-02 | 2015-10-28 | 罗灵光学有限公司 | Method for manufacturing of printed product micro features and arrangement for continuous production of such a product. |
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| CN105008138B (en) * | 2012-11-02 | 2016-11-16 | 罗灵光学有限公司 | The high speed manufacture of the micro-feature of print product |
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| CN104708800A (en) * | 2013-12-11 | 2015-06-17 | 中国科学院深圳先进技术研究院 | Soft imprinting method for manufacturing micro-nano structure in cycloalkene polymer micro-fluidic chip |
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| CN108319113A (en) * | 2018-01-31 | 2018-07-24 | 宁波大学 | The distortion correcting method of processing micro structure in a kind of capillary glass tube |
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| CN111239879A (en) * | 2020-02-18 | 2020-06-05 | 中山大学 | Method for realizing multi-step diffraction micro-optical element by utilizing single photoetching and thermal reflow |
| CN111983752A (en) * | 2020-10-14 | 2020-11-24 | 歌尔股份有限公司 | Optical waveguide manufacturing method and optical waveguide |
| CN114563842A (en) * | 2020-11-27 | 2022-05-31 | 深南电路股份有限公司 | Refractive index gradient polymer waveguide and manufacturing method thereof |
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