CN104708800A - Soft imprinting method for manufacturing micro-nano structure in cycloalkene polymer micro-fluidic chip - Google Patents
Soft imprinting method for manufacturing micro-nano structure in cycloalkene polymer micro-fluidic chip Download PDFInfo
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Abstract
The invention provides a soft imprinting method for manufacturing a micro-nano structure in a cycloalkene polymer micro-fluidic chip. The method at least comprises the following steps: manufacturing a hard template, forming a first imprinted pattern on one side of the hard template; painting liquid polydimethyl siloxane on the patterned side of the hard template, baking the hard template to cure the polydimethyl siloxane, separating the cured polydimethyl siloxane from the hard template so as to obtain a soft template with a second imprinted pattern, which is complementary with the first imprinted pattern; and carrying out hot imprinting on a thermoplastic material on the soft template so as to obtain a micro-fluidic chip with a first imprinted pattern. The provided soft imprinting method has the advantages of low cost, high precision, short period, simple technology, easy control, and rapid and massive production, and is capable of fully satisfying the needs.
Description
Technical field
The present invention relates to Material Field, particularly relate to a kind of soft impression method making micro-nano structure in cycloolefin polymer micro-fluidic chip.
Background technology
Microfluidic chip technology is a kind of technology with far-reaching influence power grown up the nineties in 20th century, and through the development of more than ten years, micro-fluidic chip is widely applied at biochemical analysis field.At present, the making material of micro-fluidic chip mainly contains silicon, glass, plastics, pottery and silicon rubber etc., and cycloolefin polymer (Cyclic Olefin Copolymer or Polymer, COC or COP) due to features such as its mechanicalness is excellent, good heat resistance, stable chemical performance, high optics light transmittances, the making of micro-fluidic chip has more advantage.
The method making polymeric micro-fluidic chip mainly contains the multiple methods such as hot moulding, micromachined method, injection moulding, laser ablation and LIGA technology.Wherein hot moulding technology changes the advantages such as convenient, machine-shaping is simple, with short production cycle with its moulding material, becomes the process technology having application potential.It is crucial that the manufacture of mould in hot moulding technology, traditional mould mainly comprises silicon mould, metal die and glass mold.Wherein the quality of silicon mould is more crisp, and be easy to break in mold pressing, thus service life is not long; And by metal die prepared by micro-electromechanical processing technology, the processes cycle is long, cost is high, precision is little, and the adhesion of the epoxy negativity used in its electroforming preparation technology marking glue and substrate is poor, easily come off in the process of electroforming, and after electroforming, during the demoulding, mark glue be difficult to remove thoroughly, easily damage is formed to die surface; Glass mold, owing to being limited to glass machining technique, can not make darker mould, and glass mold is due to glass isotropic etch, is difficult to accurate control structure.
Summary of the invention
For the problems referred to above, the object of the present invention is to provide a kind of soft impression method making micro-nano structure in cycloolefin polymer micro-fluidic chip, it utilizes dimethyl silicone polymer as the mould of hot moulding, manufacture the micro-fluidic chip with micro-nano structure, in described making cycloolefin polymer micro-fluidic chip the soft impression method of micro-nano structure have make cheap, precision is high, the cycle is short, operation is simple and be easy to the advantages such as control, meets instructions for use.
In order to solve the problems of the technologies described above, the invention provides a kind of soft impression method making micro-nano structure in cycloolefin polymer micro-fluidic chip, it at least comprises the steps:
Make hard template, the side of described hard template forms the first coining pattern;
Liquid dimethyl silicone polymer is applied in the first coining pattern side of described hard template, toast and solidify described liquid polydimethylsiloxane and obtain dimethyl silicone polymer, the dimethyl silicone polymer of solidification is separated with described hard template, obtain soft template, described soft template has the second coining pattern with the first coining pattern complementation; And
Described soft template carries out hot padding to thermoplastic, thus obtains the micro-fluidic chip with the first coining pattern.
Wherein, described first coining pattern and the second coining pattern comprise micro-nano structure, and the size of described micro-nano structure is more than or equal to 50 nanometers and is less than or equal to 1 millimeter.
Wherein, the preparation method of described hard template comprises:
Substrate layer is provided;
Imprinting layer is formed on described substrate layer surface; And
Described imprinting layer is etched, forms the first coining pattern, obtain described hard template.
Wherein, the material of described imprinting layer is photoresist, and the material of described substrate layer is silicon, and carrying out etching method to described imprinting layer is electron beam lithography, photoetching process or wet etching method.
Wherein, after described making hard template, also comprise and silanization treatment is carried out to described hard template, to reduce described liquid dimethyl silicone polymer to the adhesion of described hard template.
Wherein, described liquid dimethyl silicone polymer is mixed by silicones and curing agent and carries out the process of vacuum degassing bubble after stirring and obtains.
Wherein, described curing agent is silane coupler.
Wherein, described vacuum degassing bubble is treated to, and the silicones after fully stirring and curing agent mixture is placed in vacuum tank, vacuumizes rear leaving standstill.
Wherein, described thermoplastic is cycloolefin polymer.
The soft impression method of micro-nano structure in the making cycloolefin polymer micro-fluidic chip that the embodiment of the present invention provides, the imprinting layer of described hard template defines the first coining pattern of micro-nano size, and apply liquid dimethyl silicone polymer by the first coining pattern side at described hard template, toast and obtain the soft template had with the second coining pattern of the first coining pattern complementation after solidifying, finally in described soft template, hot padding is carried out to thermoplastic, thus obtain the micro-fluidic chip with the first coining pattern.The soft impression method of micro-nano structure in the making cycloolefin polymer micro-fluidic chip that the embodiment of the present invention provides, have make cheap, precision is high, the cycle is short, operation is simple, be easy to control and the advantage such as can prepare by rapid batch, meets instructions for use.
Accompanying drawing explanation
In order to be illustrated more clearly in technical scheme of the present invention, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic flow sheet of the soft impression method of micro-nano structure in the making cycloolefin polymer micro-fluidic chip that provides of the embodiment of the present invention.
Fig. 2 is the schematic diagram of the making hard template that the embodiment of the present invention provides.
Fig. 3 is the structural representation of the soft template that the embodiment of the present invention provides.
Fig. 4 is the structural representation of the micro-fluidic chip that the embodiment of the present invention provides.
Fig. 5 is the local micrograph of the micro-fluidic chip shown in Fig. 4.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
See also Fig. 1 and Fig. 2, the embodiment of the present invention provides a kind of soft impression method making micro-nano structure in cycloolefin polymer micro-fluidic chip, and it at least comprises the steps.
S101, make hard template 30, the side of described hard template 30 forms the first coining pattern.
In the present embodiment, the preparation method of described hard template 30 comprises the steps:
First, substrate layer 10 is provided.Wherein, described substrate layer 10 can be silicon chip, and it can be described hard template 30 and provides support.
Then, imprinting layer 20 is formed on described substrate layer 10 surface.Wherein, described imprinting layer 20 can be photoresist, and described photoresist is coated on a side of described substrate layer 10.
Finally, described imprinting layer 20 is etched, forms the first coining pattern, obtain described hard template 30.Wherein, carrying out etching method to described imprinting layer 20 is electron beam lithography, photoetching process or wet etching method.In an embodiment of the present invention, the method that the light-sensitive emulsion photoetching in photoetching process, electron beam inscription or FIB can be adopted directly to write defines described first coining pattern in described imprinting layer 20.
S102, carries out silanization treatment to described hard template 30.
See also Fig. 3, owing to needing liquid polydimethylsiloxane (Polydimethylsiloxane when making soft template 40, PDMS) be coated on described hard template 30, in order to reduce described liquid PDMS to described hard template 30 adhesion, then need to carry out silanization treatment to described hard template 30 surface, be specially, described hard template 30 is placed in glass dish, there is at described hard template 30 trim,ethylchlorosilane of side dropping 2 ~ 4 microlitres of the first coining pattern, cover glass dish lid, place about 3 minutes.
S103, at the described liquid PDMS of the first coining pattern side coating of described hard template 30, toast and solidify the PDMS that described liquid PDMS obtains solidification, the PDMS of solidification is separated with described hard template 30, obtain described soft template 40, described soft template 40 has the second coining pattern with the first coining pattern complementation.
Described liquid PDMS can be steeped process obtain by mixing and carrying out vacuum degassing after stirring by silicones and curing agent, and the mass ratio of described silicones and described curing agent can be 10:1.Wherein, described silicones is for having highly cross-linked cancellated polysiloxane, and described curing agent is silane coupler.Because described silicones and described curing agent itself may contain bubble, or in whipping process, be mixed into bubble, these bubbles can affect the precision of the last coining pattern formed when making described soft template 40, thus need to carry out the process of vacuum degassing bubble, be specially, silicones after mixing also fully being stirred and curing agent are placed in vacuum tank, are evacuated to vacuum tank internal pressure and leave standstill about 5 minutes to lower than after 110Pa.Afterwards the liquid PDMS through the process of vacuum degassing bubble is coated on the side that described hard template 30 has the first coining pattern, then the hard template 30 being coated with liquid PDMS is put into constant temperature oven, constant temperature oven temperature is set and is roughly 80 DEG C, the PDMS solidified can be obtained after predetermined baking time.The PDMS of solidification is separated with described hard template 30, obtains described soft template 40, and described soft template 40 has the second coining pattern with described first coining pattern complementation.
S104, described soft template 40 carries out hot padding to thermoplastic, thus obtains having the micro-fluidic chip 50 identical with the first coining pattern.
See also Fig. 4, be specially, thermoplastic and described soft template 40 are clipped on heat pressing forming machines, predetermined imprint temperature, pressure and imprint time are set, because described thermoplastic will be will soften higher than time its glass transition temperature (Tg), the temperature of heat pressing forming machines is added to the Tg temperature higher than described thermoplastic, apply certain pressure simultaneously, then the surface of described thermoplastic will form the coining pattern with the second coining pattern complementation in described soft template 40, i.e. described first coining pattern.After predetermined imprint time, reduce temperature and thermoplastic is separated with described soft template 40, the micro-fluidic chip 50 with the first coining pattern can be obtained.Wherein, described thermoplastic can be cycloolefin polymer (Cyclic OlefinCopolymer or Polymer, COC or COP), and described imprint temperature is 80 DEG C ~ 150 DEG C, and described imprint time is 30 seconds ~ 5 minutes.See also Fig. 5, Fig. 5 is the local micrograph of described micro-fluidic chip 50, and in an embodiment of the present invention, described micro-fluidic chip 50 has the micro-nano structures such as fluid channel, the size of described micro-nano structure is more than or equal to 50nm and is less than or equal to 1 millimeter.
In sum, embodiments provide a kind of soft impression method making micro-nano structure in cycloolefin polymer micro-fluidic chip, in described making cycloolefin polymer micro-fluidic chip, the soft impression method of micro-nano structure defines the first coining pattern of micro-nano size in the imprinting layer 10 of described hard template 30, and apply liquid PDMS by the first coining pattern side at described hard template 30, toast and obtain the soft template 40 had with the second coining pattern of the first coining pattern complementation after solidifying, finally in described soft template 40, hot padding is carried out to thermoplastic, thus obtain the micro-fluidic chip 50 with the first coining pattern.The soft impression method of micro-nano structure in the making cycloolefin polymer micro-fluidic chip that the embodiment of the present invention provides, have cheap, precision is high, the cycle is short, operation is simple, be easy to control and the advantage such as can prepare by rapid batch, meets instructions for use.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (9)
1. make a soft impression method for micro-nano structure in cycloolefin polymer micro-fluidic chip, it is characterized in that, in described making cycloolefin polymer micro-fluidic chip, the soft impression method of micro-nano structure at least comprises the steps:
Make hard template, the side of described hard template forms the first coining pattern;
Liquid dimethyl silicone polymer is applied in the first coining pattern side of described hard template, toast and solidify described liquid polydimethylsiloxane and obtain dimethyl silicone polymer, the dimethyl silicone polymer of solidification is separated with described hard template, obtain soft template, described soft template has the second coining pattern with the first coining pattern complementation; And
Described soft template carries out hot padding to thermoplastic, thus obtains the micro-fluidic chip with the first coining pattern.
2. the soft impression method of micro-nano structure in making cycloolefin polymer micro-fluidic chip according to claim 1, it is characterized in that, described first coining pattern and the second coining pattern comprise micro-nano structure, and the size of described micro-nano structure is more than or equal to 50 nanometers and is less than or equal to 1 millimeter.
3. the soft impression method of micro-nano structure in making cycloolefin polymer micro-fluidic chip according to claim 1, it is characterized in that, the preparation method of described hard template comprises:
Substrate layer is provided;
Imprinting layer is formed on described substrate layer surface; And
Described imprinting layer is etched, forms the first coining pattern, obtain described hard template.
4. the soft impression method of micro-nano structure in making cycloolefin polymer micro-fluidic chip according to claim 3, it is characterized in that, the material of described imprinting layer is photoresist, the material of described substrate layer is silicon, and carrying out etching method to described imprinting layer is electron beam lithography, photoetching process or wet etching method.
5. the soft impression method of micro-nano structure in making cycloolefin polymer micro-fluidic chip according to claim 1, it is characterized in that, after described making hard template, also comprise and silanization treatment is carried out to described hard template, to reduce described liquid dimethyl silicone polymer to the adhesion of described hard template.
6. the soft impression method of micro-nano structure in making cycloolefin polymer micro-fluidic chip according to claim 1, it is characterized in that, described liquid dimethyl silicone polymer is mixed by silicones and curing agent and carries out the process of vacuum degassing bubble after stirring and obtains.
7. the soft impression method of micro-nano structure in making cycloolefin polymer micro-fluidic chip according to claim 6, it is characterized in that, described curing agent is silane coupler.
8. the soft impression method of micro-nano structure in making cycloolefin polymer micro-fluidic chip according to claim 6, it is characterized in that, described vacuum degassing bubble is treated to, and the silicones after fully stirring and curing agent mixture is placed in vacuum tank, vacuumizes rear leaving standstill.
9. the soft impression method of micro-nano structure in making cycloolefin polymer micro-fluidic chip according to claim 1, it is characterized in that, described thermoplastic is cycloolefin polymer.
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| CN107840941A (en) * | 2017-12-14 | 2018-03-27 | 哈尔滨工业大学 | A kind of method of preparation method and microarray the hydrophily regulation and control of hydrophily shape memory epoxy resin and its microarray |
| CN108499620A (en) * | 2018-04-26 | 2018-09-07 | 浙江大学 | A method of manipulating micro-nano particle indirectly based on nanometer embossing |
| CN108501361A (en) * | 2017-02-28 | 2018-09-07 | 香港理工大学 | Nano-micro structure part rapid molding device and quick molding method |
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Application publication date: 20150617 |