CN108501361A - Nano-micro structure part rapid molding device and quick molding method - Google Patents
Nano-micro structure part rapid molding device and quick molding method Download PDFInfo
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- CN108501361A CN108501361A CN201710111778.3A CN201710111778A CN108501361A CN 108501361 A CN108501361 A CN 108501361A CN 201710111778 A CN201710111778 A CN 201710111778A CN 108501361 A CN108501361 A CN 108501361A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/756—Microarticles, nanoarticles
- B29L2031/7562—Nanoarticles
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Abstract
The invention discloses a kind of nano-micro structure part rapid molding device and quick molding methods.Nano-micro structure part rapid molding device includes pedestal, receives microdevice and light supply apparatus.Pedestal top is equipped at least one storage tank for holding light-sensitive emulsion；Microdevice of receiving is set to above pedestal, and it can move up and down, microdevice of receiving includes support portion and at least one below support portion receives micro- template, it is at least one receive micro- template respectively with above and below at least one storage tank to just, micro- template of receiving is made of clear material, and is received and be equipped with nano-micro structure below micro- template；Light supply apparatus, which is set to, to be received above micro- template, and light supply apparatus includes top plate and the light source below top plate, and the light-transmissive that light source is sent out receives micro- template and exposes to light-sensitive emulsion, makes photosensitive adhesive curing.It is short using the nano-micro structure part rapid molding device and quick molding method fabrication cycle of the present invention, it is at low cost.
Description
Technical field
The present invention relates to a kind of rapid molding devices and quick molding method making nano-micro structure.
Background technology
Due to the product with nano-micro structure in various fields with different characteristics, be product improvement or technological innovation
Many new breakthroughs are brought, more and more to the product requirement with nano-micro structure at present, especially each colleges and universities, research institute etc.
Demand of the unit to the sample with different micro-nano structures also presents a rapidly rising trend.
The method of traditional making nano-micro structure generally comprises following several：Chemical method, femtosecond laser method, ion beam
Method, single-point diamond processing, printing coining etc..On the whole, or these method periods are long, production capacity is low；It is of high cost,
Cause the expensive of nano-micro structure, therefore the above-mentioned various methods for making nano-micro structure, is limited to cost of manufacture or makes week
The reason of phase, it is difficult to meet general product demand.
Above- mentioned information is only used for reinforcing the understanding to the background of the disclosure disclosed in background technology part, therefore it can be with
Including not constituting the information to the prior art known to persons of ordinary skill in the art.
Invention content
To solve above problem of the prior art, the purpose of the present invention is to provide a kind of fabrication cycle is short, and can reduce
The nano-micro structure part rapid molding device and quick molding method of cost of manufacture.
According to an aspect of the present invention, a kind of nano-micro structure part rapid molding device, including pedestal, receive microdevice and light
Source device.The pedestal top is equipped at least one storage tank for holding light-sensitive emulsion；Microdevice of receiving is set to the pedestal
Top, and can moving up and down, the microdevice of receiving include support portion and at least one below the support portion receives micro- mould
Plate, it is at least one it is described receive micro- template respectively with above and below at least one storage tank to just, it is described to receive micro- template by transparent material
Material is made, and described receive is equipped with nano-micro structure below micro- template；Light supply apparatus be set to it is described receive above micro- template, it is described
Light supply apparatus includes top plate and the light source below the top plate, and micro- template of being received described in the light-transmissive that the light source is sent out is shone
It is incident upon the light-sensitive emulsion, makes the photosensitive adhesive curing.
According to another aspect of the present invention, a kind of nano-micro structure part quick molding method comprising following steps：
The pedestal of light-sensitive emulsion can be held by providing one；
One micro- template of receiving that is transparent and having nano-micro structure is provided；
One light source is provided；
Micro- template of being received described in making is pressed into the light-sensitive emulsion from top to bottom；
Using the light source penetrate described in receive micro- template and irradiate the light-sensitive emulsion and make its solidification, then it is described photosensitive after curing
The nano-micro structure to match with the nano-micro structure is presented on glue.
As shown from the above technical solution, advantages of the present invention and advantageous effects are：Nano-micro structure part of the present invention is fast
Fast molding machine by pedestal, receive microdevice and light supply apparatus forms, it is simple in structure, it is at low cost.It is equipped in storage tank in pedestal
Light-sensitive emulsion, microdevice of receiving include that there is the transparent of nano-micro structure to receive micro- template, are moved towards pedestal until saturating when receiving microdevice
It is bright receive the light-sensitive emulsion filling in micro- template indentation light-sensitive emulsion, then flowed receive micro- template concave portion and formed and corresponding receive micro- knot
Structure, then make photosensitive adhesive curing that can form required nano-micro structure part, simple for process, efficiency by the light irradiation of light supply apparatus
The overall cost of height, the nano-micro structure part of making is low.
Description of the drawings
Fig. 1 is stereochemical structure signal of one embodiment of nano-micro structure part rapid molding device of the present invention from an angle
Figure；
Fig. 2 is dimensional structure diagram of the nano-micro structure part rapid molding device shown in FIG. 1 from another angle.
In figure：1, pedestal；11, bottom plate；12, support plate；2, microdevice is received；21, micro- template is received；22, peripheral frame；3, light source fills
It sets；31, top plate；32, LED light；33, mounting plate；34, total reflection lens；4, support arm；5, guide post.
Specific implementation mode
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to embodiment set forth herein；On the contrary, thesing embodiments are provided so that the disclosure will
Fully and completely, and by the design of example embodiment comprehensively it is communicated to those skilled in the art.Identical attached drawing in figure
Label indicates same or similar structure, thus will omit their detailed description.
Heretofore described " nano-micro structure " refers to that size is nanoscale and/or micron-sized fine structure.
As depicted in figs. 1 and 2, nano-micro structure part rapid molding device of the present invention includes pedestal 1,2 light source of microdevice of receiving fills
Set 3 and support arm 4.1 side of pedestal such as right side and the side of light supply apparatus 3 such as right side are respectively arranged in support arm 4
Similar " C " character form structure is collectively formed by pedestal 1, light supply apparatus 3 and support arm 4 in this way in upper and lower end.
Pedestal 1 can be an overall structure, and the thicker metallic plate of an e.g. thickness is provided on the metallic plate top and is used for
Hold the storage tank of light-sensitive emulsion 100, it, usually can be depending on the thickness of the depth visual nano-micro structure to be made of storage tank
Within the scope of 0.1 millimeter~1.0 millimeters, such as 0.2 millimeter, 0.4 millimeter, 0.5 millimeter, 0.8 millimeter etc..The quantity of storage tank can be with
It is one, can also be multiple, the size of multiple storage tanks may be the same or different.The inner surface of storage tank is smooth
Surface, preferably optical mirror plane, the metal surface which can be obtained by Ultraprecision Machining, for example use
The optical surface with mirror effect that the materials such as copper, ambrose alloy, stainless steel or aluminium alloy obtain.
In other embodiments, pedestal 1 can also be the composite structure of multiple structures, such as pedestal 1 includes bottom plate 11
With support plate 12, in this case storage tank can be opened in support plate 12, then bottom plate 11 can be one have smooth upper table
The tabular in a face such as rectangular slab, support plate 12 are installed on the flat surface of bottom plate 11.Support plate 12 can pass through welding
Etc. modes be fixedly installed in bottom plate 11.In other embodiment, support plate 12 can also be to be removably installed in bottom
At this moment plate 11 can replace different size of support plate 12 according to factors such as the sizes for the nano-micro structure to be made.
In addition, the pedestal 1 of composite structure can also include one piece of bottom plate 11 and polylith support plate 12, polylith support plate 12
Size can be the same or different, and a storage tank is opened up in every piece of support plate 12.At this moment it can make simultaneously multiple identical
Size or various sizes of nano-micro structure, to further promote producing efficiency.
When using the pedestal 1 of composite structure, bottom plate 11 and support plate 12 may be used different materials and be made, such as prop up
Fagging 12 is made of copper, ambrose alloy, stainless steel, aluminium alloy or other metal materials, and bottom plate 11 can use plastic material, be conducive to
Reduce the cost of manufacture of the present invention.
Microdevice 2 of receiving is set to 1 top of pedestal, and can move up and down.Specifically, microdevice 2 of receiving include support portion and
Micro- template 21 is received below support portion, it is preferable that micro- template 21 of receiving is removably installed on support portion, to facilitate more
It changes, to make the nano-micro structure of different surface structures.Micro- template 21 of receiving is made of clear material, such as by glass, plastics, stone
English or the material of other light transmissions are made.It receives and is equipped with nano-micro structure (not shown) below micro- template 21.Wherein receive micro- template 21
On nano-micro structure can use photoetching technique, ion beam technology, femtosecond laser processing technology or Ultraprecision Machining
Etc. the prior arts obtain, this micro- template 21 of receiving with nano-micro structure can repeatedly use.Include more in pedestal 1
In the case of block support plate 12, correspondingly, microdevice 2 of receiving also includes multiple micro- templates 21 of receiving.
In this embodiment, the support portion of microdevice 2 received is received by the rectangle peripheral frame 22 that is formed by connecting of four edges head and the tail
Micro- template 21 is installed in peripheral frame 22.In some other embodiment, peripheral frame 22 is not limited to rectangle, can also be it is round,
The other shapes such as ellipse.In addition, receiving the support portion of microdevice 2 can also be replaced by other structures such as tablets.
Microdevice 2 of receiving includes support portion and receives micro- template 21 below support portion
The side of pedestal 1 is equipped with guide post 5 adjacent to support arm 4, and guide post 5 can be fixed on the support plate 12 of pedestal 1
Side for example right side, further, 5 vertical support plate 12 of guide post.Receiving the side of rectangle peripheral frame 22 of microdevice 2 passes through cunning
Dynamic counterpart such as sliding block is slidably mounted on guide post 5, and microdevice 2 of receiving can be moved down flexibly in guide post 5
It is dynamic, it can contact and combine closely with light-sensitive emulsion 100 well to ensure to receive micro- template 21.Since guide post 5 is perpendicular to branch
Fagging 12, so receiving microdevice 2 can keep parallel with support plate 12 during moving up and down and be unlikely to deflection.
Light supply apparatus 3, which is set to, receives the top of micro- template 21, and light supply apparatus 3 may include top plate 31 and below top plate 31
Light source, the light-transmissive that light source is sent out receives micro- template 21 and exposes to light-sensitive emulsion 100, and light-sensitive emulsion 100 is made to cure.Light supply apparatus 3
Light source preferably comprise multiple ultraviolet LED lamps 32 being evenly arranged, can be high-power can also be low-power, it is ultraviolet
The power of LED light 32 be within the scope of 0.5 watt~10 watts it is feasible, such as 1 watt, 3 watts, 4 watts, 7 watts, 8 watts etc..For light source
The direct currents such as battery had both may be used in the power supply of device 3, can also use AC power.The light intensity of light supply apparatus 3 can be with
It is easily adjusted, the output of different light intensity is obtained by the constant limitation of electric current, so as to adjust nano-micro structure is made
Production Time.
In one embodiment, light supply apparatus 3 further includes beam path alignment component, be set to light supply apparatus 3 top plate 31 with
It receives between microdevice 2.The beam path alignment component enable through beam path alignment component light uniformly and exiting parallel.Citing
For, beam path alignment component may include mounting plate 33 and be uniformly arranged on multiple with total reflection function on mounting plate 33
Total reflection lens (Total Internal Reflection, abbreviation TIR lens) 34, can after the collimation of total reflection lens 34
To obtain the very high ultraviolet light output of uniformity, such as uniformity can be obtained up to 95% or more uniform irradiation light beam, thus
The utilization ratio of light source is improved, while being conducive to be promoted the quality of made nano-micro structure.
In some embodiments, nano-micro structure part rapid molding device of the invention further includes control unit, the control
Unit is received micro- template 21 and is moved up and down for controlling, and/or control flows through the current strength of light source, and/or control ultraviolet source
Open and close, etc., to realize automatic forming, certainly in the case that without control unit, side manually can also be passed through
Formula makes nano-micro structure part.
Support arm 4 in the present invention can be made hollow, and the supply power supply of light supply apparatus 3, control unit etc. can be with
It is set in support arm 4, so that structure of the invention is compact, beautiful.
One embodiment of nano-micro structure part quick molding method of the present invention, includes the following steps：
The pedestal 1 of light-sensitive emulsion 100 can be held by providing one；
It is transparent and receive micro- template 21 with nano-micro structure to provide one；
One light source, such as ultraviolet source are provided；
The micro- template 21 that makes to receive is pressed into light-sensitive emulsion 100 from top to bottom, wherein pressure value can the newton of 10 newton~100 it
Between, such as 20 newton, 30 newton, 50 newton, 80 newton etc.；
Using light source through receive micro- template 21 irradiate light-sensitive emulsion 100 make its solidification, then cure after light-sensitive emulsion 100 on present
The nano-micro structure to match with the nano-micro structure.The light irradiation time of wherein light source irradiation light-sensitive emulsion 100 can be with 3 seconds~15 seconds
Between, intensity of illumination can be between 0.5 watt~10 watts, such as 1 watt, 2 watts, 5 watts, 8 watts etc..
It is made by the nano-micro structure part rapid molding device or nano-micro structure part quick molding method of the present invention
Nano-micro structure part can be flaky nano-micro structure part, or with nano-micro structure be in block-like nano-micro structure block, etc.
Deng, can be widely applied to general product or be used as laboratory sample.
Although the term of relativity, such as "upper" "lower" is used to describe a component of icon for another in this specification
The relativeness of one component, but these terms are in this manual merely for convenient, for example, with reference to the accompanying drawings in it is exemplary
Direction.It is appreciated that, if making it turn upside down the device overturning of icon, describing the component in "upper" will become
Component in "lower".When certain structure is in other structures "upper", it is possible to refer to that certain structural integrity is formed in other structures, or
Refer to " direct " setting of certain structure in other structures, or refers to certain structure and be arranged in other structures by the way that another structure is " indirect ".
Term " first ", " second " and " third " etc. is only used as label, is not the quantity limitation to its object.
In the claims, term "one", " one ", " " and "at least one" be indicating that there are one or more to want
Element/component part/etc.；Term "comprising", " comprising " and " having " are indicating the open meaning being included and be
Refer in addition to the element/component part/listed also may be present other than waiting other element/component part/etc..
It should be appreciated that the present invention is not limited in its application to the detailed construction and arrangement of the component of this specification proposition
Mode.The present invention can have other embodiment, and can realize and execute in many ways.Aforesaid deformation form and
Modification is fallen within the scope of the present invention.It should be appreciated that this disclosure and the present invention of restriction extend in text
And/or it is mentioned in attached drawing or all alternative combinations of two or more apparent independent features.It is all these different
Combination constitutes multiple alternative aspects of the present invention.The embodiment of this specification illustrates to become known for realizing the present invention most
Good mode, and those skilled in the art will be enable using the present invention.
Claims (13)
1. a kind of nano-micro structure part rapid molding device, which is characterized in that including：
Pedestal, the pedestal top are equipped at least one storage tank for holding light-sensitive emulsion；
It receives microdevice, is set to above the pedestal, and can move up and down, the microdevice of receiving includes support portion and is set to institute
State below support portion it is at least one receive micro- template, it is at least one it is described receive micro- template respectively at least one storage tank
Under to just, it is described to receive micro- template and be made of clear material, and described receive is equipped with nano-micro structure below micro- template；
Light supply apparatus, be set to it is described receive above micro- template, the light supply apparatus includes top plate and below the top plate
Light source, micro- template of receiving described in the light-transmissive that the light source is sent out exposes to the light-sensitive emulsion, makes the photosensitive adhesive curing.
2. nano-micro structure part rapid molding device as described in claim 1, which is characterized in that further include support arm, the bottom
The side of the top plate of seat side and the light supply apparatus is respectively arranged in the upper and lower end of the support arm.
3. nano-micro structure part rapid molding device as claimed in claim 2, which is characterized in that vertically pacify the side of the pedestal
Equipped with guide post, the side of the support portion for receiving microdevice is slidably mounted on the guide post.
4. nano-micro structure part rapid molding device as described in claim 1, which is characterized in that the pedestal includes bottom plate and peace
At least one piece of support plate loaded on the plate upper surface, at least one storage tank are opened at least one piece of branch respectively
On fagging.
5. nano-micro structure part rapid molding device as described in claim 1, which is characterized in that the support portion for receiving microdevice
Be by the peripheral frame that is formed by connecting of four edges head and the tail, it is described to receive micro- template and be installed in the peripheral frame.
6. nano-micro structure part rapid molding device as described in claim 1, which is characterized in that the light supply apparatus further includes light
Road collimator assembly is set to the light supply apparatus and described receives between microdevice so that through the light of the beam path alignment component
It can uniformly and exiting parallel.
7. nano-micro structure part rapid molding device as claimed in claim 6, which is characterized in that the beam path alignment component includes
Mounting plate and the multiple total reflection lens being uniformly arranged on the mounting plate.
8. nano-micro structure part rapid molding device as described in claim 1, which is characterized in that the light source packet of the light supply apparatus
Include multiple ultraviolet LED lamps.
9. nano-micro structure part rapid molding device as claimed in claim 8, which is characterized in that the power of the ultraviolet LED lamp
It is 0.5 watt~10 watts.
10. nano-micro structure part rapid molding device as described in claim 1, which is characterized in that the storage tank inner surface is
Optical surface.
11. nano-micro structure part rapid molding device as described in claim 1, which is characterized in that the depth of the storage tank is
0.1 millimeter~1.0 millimeters.
12. nano-micro structure part rapid molding device as described in claim 1, which is characterized in that further include：
Control unit, for control it is described receive micro- template and move up and down, and/or control flows through the current strength of the light source, and/
Or the control ultraviolet source opens and closes.
13. a kind of nano-micro structure part quick molding method, which is characterized in that include the following steps：
The pedestal of light-sensitive emulsion can be held by providing one；
One micro- template of receiving that is transparent and having nano-micro structure is provided；
One light source is provided；
Micro- template of being received described in making is pressed into the light-sensitive emulsion from top to bottom；
Using the light source penetrate described in receive micro- template and irradiate the light-sensitive emulsion and make its solidification, then on the light-sensitive emulsion after curing
The nano-micro structure to match with the nano-micro structure is presented.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710111778.3A CN108501361B (en) | 2017-02-28 | 2017-02-28 | Rapid forming device and rapid forming method for nano-micro structural part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710111778.3A CN108501361B (en) | 2017-02-28 | 2017-02-28 | Rapid forming device and rapid forming method for nano-micro structural part |
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| Publication Number | Publication Date |
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| CN108501361A true CN108501361A (en) | 2018-09-07 |
| CN108501361B CN108501361B (en) | 2021-03-05 |
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| CN201710111778.3A Active CN108501361B (en) | 2017-02-28 | 2017-02-28 | Rapid forming device and rapid forming method for nano-micro structural part |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115416275A (en) * | 2022-09-02 | 2022-12-02 | 广东工业大学 | Array micro-nano structure processing device and method of laser combination pulse sequence |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060145398A1 (en) * | 2004-12-30 | 2006-07-06 | Board Of Regents, The University Of Texas System | Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masks |
| US20060147820A1 (en) * | 2005-01-04 | 2006-07-06 | International Business Machines Corporation | Phase contrast alignment method and apparatus for nano imprint lithography |
| JP2007129238A (en) * | 2005-11-04 | 2007-05-24 | Asml Netherlands Bv | Imprint lithography |
| CN103926789A (en) * | 2014-02-07 | 2014-07-16 | 南方科技大学 | Nano-imprinting template, system thereof and imprinting method |
| CN104690969A (en) * | 2015-02-10 | 2015-06-10 | 西安交通大学 | Bionic irregular micro nano composite structure manufacturing process based on 3D ejection printing technique |
| CN104708800A (en) * | 2013-12-11 | 2015-06-17 | 中国科学院深圳先进技术研究院 | Soft imprinting method for manufacturing micro-nano structure in cycloalkene polymer micro-fluidic chip |
-
2017
- 2017-02-28 CN CN201710111778.3A patent/CN108501361B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060145398A1 (en) * | 2004-12-30 | 2006-07-06 | Board Of Regents, The University Of Texas System | Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masks |
| US20060147820A1 (en) * | 2005-01-04 | 2006-07-06 | International Business Machines Corporation | Phase contrast alignment method and apparatus for nano imprint lithography |
| JP2007129238A (en) * | 2005-11-04 | 2007-05-24 | Asml Netherlands Bv | Imprint lithography |
| CN104708800A (en) * | 2013-12-11 | 2015-06-17 | 中国科学院深圳先进技术研究院 | Soft imprinting method for manufacturing micro-nano structure in cycloalkene polymer micro-fluidic chip |
| CN103926789A (en) * | 2014-02-07 | 2014-07-16 | 南方科技大学 | Nano-imprinting template, system thereof and imprinting method |
| CN104690969A (en) * | 2015-02-10 | 2015-06-10 | 西安交通大学 | Bionic irregular micro nano composite structure manufacturing process based on 3D ejection printing technique |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115416275A (en) * | 2022-09-02 | 2022-12-02 | 广东工业大学 | Array micro-nano structure processing device and method of laser combination pulse sequence |
| CN115416275B (en) * | 2022-09-02 | 2023-08-18 | 广东工业大学 | Array micro-nano structure processing device and method for laser combined pulse sequence |
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| CN108501361B (en) | 2021-03-05 |
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