JP2005134690A - Optical element manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical element manufacturing method in which alignment of a substrate and a mold is simple and a region where a resin layer is formed can be utilized effectively. <P>SOLUTION: After fitting a substrate 1 into the hole 3 of a substrate holder 2, it is secured so that the substrate 1 is not displaced. Then, as shown in (b), an ultraviolet ray curing resin is injected between the lower surface of the substrate 1 and the upper surface of a protrusion 7 of a first mold 6. Prior to that, alignment of the substrate 1 and the first mold 6 is conducted by conducting the alignment of an alignment mark 5 of the substrate holder 2 and an alignment mark 8 of the first mold 6. As shown in (c), the top and bottom of the substrate holder 2 and the substrate 1 is reversed, and an ultraviolet ray curing resin is injected between the lower surface of the substrate 1 and the upper surface of a protrusion 12 of a second mold 11. Prior to that, alignment of the substrate 1 and the second mold 11 is conducted by conducting the alignment of the alignment mark 5 of the substrate holder 2 and an alignment mark 14 of the second mold 11. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention provides an optical element in which a resin layer is formed on both surfaces of a substrate transparent to light to be used with a resin transparent to light to be used, and optical characteristics are given by the shape of the resin layer. It relates to a manufacturing method.

  Recently, a method for forming a fine microlens array, a diffractive optical element such as a diffraction grating, and a Fresnel lens has been developed by applying a micromachining technology developed in the field of semiconductor manufacturing equipment. . As described in JP-A-9-008266 (Patent Document 1), the first method is to use a normal photomask, form a pattern corresponding to a microlens on the mask, The formed resin is exposed to light and developed to produce a three-dimensional rectangular pattern of the resin, and then the three-dimensional rectangular pattern of the resin is deformed into a lens (curved surface) shape by heat flow to form a microlens. . Furthermore, if necessary, the lens-shaped resin is etched as a resist together with the optical base material, thereby transferring the lens-shaped resist (resin) pattern onto the optical base material, and a microlens made of the optical base material Sometimes it forms.

  However, this method has a problem that it takes time to manufacture the optical element, resulting in high cost. As an alternative method, a method of developing a lens or diffractive optical element by forming a resin layer on one or both sides of the substrate on a flat plate and making the surface of the resin layer special is developed. Has been. This method is suitable for mass production because the surface shape of the resin layer can be formed by a mold, and has an advantage that an optical element can be manufactured at a low cost.

  An example of the microlens array thus manufactured is shown in FIG. 3A is a plan view, and FIG. 3B is an AA cross-sectional view in FIG. Resin layers 22 and 23 made of transparent resin are formed on both surfaces of a substrate 21 made of quartz or glass. Convex portions 22a and 23a are formed in the resin layers 22 and 23, respectively, so as to have the effect of a convex lens. The optical axes 24 of the convex portions 22a and 23a are coincident with each other, and the convex portions 22a and 23a are combined to serve as one convex lens.

  An example of a manufacturing method of such a microlens array is shown in FIG. First, the portion of the substrate 31 facing the first mold 32 (the lower surface in the figure) is subjected to silane coupling treatment to improve the adhesion to the ultraviolet curable resin. The protrusion 33 is subjected to a mold release treatment as necessary so that the peelability from the ultraviolet curable resin is improved. The first mold 32 may be formed of a transparent material such as quartz or glass, or may be formed of an opaque material such as metal.

  And, as shown in (a), between the lower surface of the substrate 31 and the upper surface of the convex portion 33 of the first mold 32 is held with an interval corresponding to the thickness of the resin layer to be formed, During that interval, a UV curable resin is injected using a dispenser. Thereafter, the ultraviolet curable resin is irradiated with ultraviolet rays through the substrate 31 to cure the ultraviolet curable resin. After curing, the ultraviolet curable resin is peeled from the first mold 32. The convex portion 33 of the first die 32 is formed with an alignment mark die 34 and a concave portion 35 which becomes a convex lens die. Therefore, the shape of these molds is transferred to the resin layer by the above process. The alignment mark mold 34 is a sharp mark machined or etched, and the center of the cross of the mark indicates the reference position.

  FIG. 4B shows a state in which the substrate 31 is turned upside down with the ultraviolet curable resin peeled from the first mold 32 and faced to the second mold 39 in that state. As shown in (b), on the upper surface side of the substrate 31, there is a first molding surface 36 made of an ultraviolet curable resin formed by the process shown in (a). An alignment mark 37 and a convex portion 38 are formed on the first molding surface 36 by transfer.

  The second mold 39 has a structure similar to that of the first mold 32, and is provided with a convex portion 40 corresponding to a portion where the resin layer is formed, and becomes a convex lens mold therein. A plurality of recesses 41 are provided. The protrusion 40 is provided with four alignment marks 42 at positions corresponding to the alignment marks 37 of the substrate 31. The alignment mark 42 is a sharp mark processed by machining or etching, and the center of the cross character indicates the reference position. The second mold 39 may be formed of a transparent material such as quartz or glass, or may be formed of an opaque material such as metal.

  First, the portion of the substrate 31 facing the second mold 39 (the lower surface in the figure) is subjected to silane coupling treatment to improve the adhesion to the ultraviolet curable resin. The convex portion 40 is treated with a release agent as necessary to improve the peelability from the ultraviolet curable resin. And, as shown in (b), between the lower surface of the substrate 31 and the upper surface of the convex portion 40 of the second mold 39 is held with an interval corresponding to the thickness of the resin layer to be formed, During that interval, a UV curable resin is injected using a dispenser. Before that, the alignment between the alignment mark 37 on the substrate 31 and the alignment mark 42 on the second mold 39 is performed, so that the alignment between the substrate 31 and the second mold 39 is performed. Since the substrate 31 is transparent, this alignment can be easily performed by means such as observation with an optical microscope from the substrate 31 side.

  This alignment may be performed at any timing before, during, or after the injection of the ultraviolet curable resin. Thereafter, the ultraviolet curable resin is irradiated with ultraviolet rays through the substrate 31 to cure the ultraviolet curable resin. After curing, the ultraviolet curable resin is peeled off from the second mold 39. Thereby, an optical element having a resin layer having a shape in which convex lens arrays are formed on both surfaces of the substrate 31 is completed.

  However, the above-described conventional optical element manufacturing method has the following problems. The first problem is that the alignment mark 37 of the substrate 31 is formed by transferring the alignment mark mold 34 formed on the first mold 32 to a resin, so that the alignment mark mold 34 has a sharp shape. However, the transferred alignment mark 37 has a rounded edge shape, and its position cannot be accurately confirmed when observed with an optical microscope or the like. For this reason, the center (optical axis) of the convex part 38 formed in the board | substrate 31 and the center of the recessed part 41 may shift | deviate, and there exists a possibility that the performance as a convex lens may deteriorate.

  Second, when alignment is performed with an optical microscope or the like, a resin may be interposed between the alignment mark 37 of the substrate 31 and the alignment mark 42 of the second mold 39, and the resin causes a focus blur. However, there is still a problem that accurate alignment is difficult.

  Thirdly, since the alignment mark 37 of the substrate 31 is formed on the resin molding surface, the region where the optical element can be formed becomes narrow accordingly, and the resin molding surface cannot be effectively used. Fourth, in the process of FIG. 4A, the alignment of the substrate 31 and the first mold 32 is not performed, so that the formation position of the alignment mark 37 on the substrate 31 varies every time it is manufactured. There is a problem that it takes time to find the position of the alignment mark 37 when performing alignment with a microscope or the like.

  The present invention was made in view of such circumstances, and when manufacturing an optical element of a method in which a resin layer is formed on the front and back surfaces of a substrate, the alignment between the substrate and the mold is easy, and It is an object of the present invention to provide a method for manufacturing an optical element capable of effectively using a region where a resin layer is formed.

  The first means for solving the above problems is a method of manufacturing an optical element in which a resin layer is formed on both surfaces of a transparent substrate, and the resin layer has a function as an optical element. The substrate is held by a holding member having a function of fixing and holding the substrate, and an alignment mark is formed on a portion other than the portion to which the substrate is fixed, and a resin layer is formed in that state. The first surface of the substrate held by the holding member is opposed to a first mold in which an alignment mark is formed at a place other than the portion to be faced through a predetermined space, and the alignment mark of the holding member Alignment is performed by matching the alignment marks of the first mold, and prior to, after, or simultaneously, the resin is injected into the space between the substrate and the first mold and cured. And then peeling the resin from the first mold, and subsequently holding the substrate held by the holding member on a second mold in which an alignment mark is formed at a place other than a portion where the resin layer is formed. The second surface of the holding member is opposed to each other through a predetermined space, and alignment is performed by matching the alignment mark of the holding member with the alignment mark of the second mold. A method of manufacturing an optical element, comprising: injecting a resin into a space between a substrate and a second mold and curing the resin, and then peeling the resin from the second mold (claim 1). It is.

  In this means, in the first mold and the second mold, the alignment mark is formed in a portion where the resin layer is not formed. Then, the substrate is held by a holding member in which an alignment mark is formed in a portion other than the portion to which the substrate is fixed, and the first and second mold alignment marks and the alignment mark of the holding member are Alignment is performed by matching.

  Therefore, unlike the case of performing alignment using the alignment mark transferred to the resin layer (molding surface) as in the prior art, the alignment mark has an accurate shape, so that alignment is performed accurately. be able to. In addition, when alignment is performed, the resin can be prevented from entering between the alignment marks, so that it is possible to prevent the occurrence of focus blur due to the influence of the resin, and the alignment can be performed accurately. it can. Furthermore, since the alignment mark can be formed in a part different from the part to be resin-molded, there is no waste in the molding region. In addition, since the positions of the alignment marks formed on the first mold and the second mold and the holding member are always fixed, it is easy to search for the alignment marks.

  A second means for solving the above problem is a method of manufacturing an optical element in which a resin layer is formed on both surfaces of a transparent substrate, and the resin layer has a function as an optical element. The substrate is held by a holding member having a function of fixing and holding the substrate, and the alignment mark is formed. In this state, the alignment mark is formed at a place other than the portion where the resin layer is formed. In addition, an alignment mark is formed at a location other than the portion where the first surface of the substrate held by the holding member faces the first mold through a predetermined space and the resin layer is formed. The second mold is caused to face the second surface of the substrate held by the holding member via a predetermined space, and an alignment mark of the holding member, an alignment mark of the first mold, and a second mold No Alignment Alignment is performed by matching the marks, and before, after, or simultaneously, resin is injected into the space between the substrate and the first mold and the space between the substrate and the second mold. A method of manufacturing an optical element, comprising: curing and then peeling the resin from the first mold and the second mold (Claim 2).

  This means is different from the first means in that the resin layers formed on the front and back surfaces of the substrate are formed at one time. However, the formation and use of the alignment mark is basically the first means. Therefore, the same effect as the first means can be obtained.

  As described above, according to the present invention, when manufacturing an optical element of a method in which a resin layer is formed on the front and back surfaces of a substrate, the alignment between the substrate and the mold is easy, and the resin layer is It is possible to provide a method of manufacturing an optical element that can effectively use a region to be formed.

  Hereinafter, an example of an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram for explaining an outline of a method for manufacturing an optical element according to the first embodiment of the present invention. FIG. 2A is a perspective view showing a substrate 1 and a substrate holder 2. The substrate 1 is made of a transparent material such as quartz or glass, and usually has a flat plate shape. In the figure, it is a thin rectangular parallelepiped shape.

  The substrate holder 2 is made of a metal material and has a hole 3 at the center thereof. In the figure, a bottom surface portion 3a having a smaller size than the upper portion of the hole portion 3 is formed at the bottom portion of the hole portion 3. When the substrate 1 is placed in the hole portion 3, the bottom surface of the substrate 1 is supported by the bottom surface portion 3a. It is supposed to be retained. The upper part of the hole 3 is processed to a dimension having a predetermined fitting accuracy with the substrate 1.

  The substrate holder 2 is provided with four pressing members 4. As will be described later, the substrate 1 is pressed and fixed in a state where the substrate 1 is accommodated in the hole 3. The substrate holder 2 is provided with alignment marks 5 at two locations. The alignment mark 5 is a sharp mark processed by machining or etching, and the center of the cross character indicates the reference position.

  FIG. 2B is a perspective view showing a state in which the substrate 1 is assembled in the substrate holder 2 and faced to the first mold 6. A convex portion 7 corresponding to a portion where the resin layer is formed is provided in the central portion of the first mold 6, and a plurality of concave portions 9 serving as a convex lens mold are provided therein. Two alignment marks 8 are provided at positions corresponding to the alignment marks 5 of the substrate holder 2, which are portions that are separated from the convex portions 7. The alignment mark 8 is a sharp mark processed by machining or etching, and the center of the cross character indicates the reference position. The first mold 6 may be formed of a transparent material such as quartz or glass, or may be formed of an opaque material such as metal. After the substrate 1 is fitted into the hole 3 of the substrate holder 2, the pressing member 4 is rotated, and is fixed so that the position of the substrate 1 does not shift due to its elastic force as shown in the figure. When it is necessary to fix more accurately, it may be temporarily fixed by brazing such as an adhesive or beeswax, and the adhesive or braze may be melted and peeled off after completion of the optical element.

  First, a portion of the substrate 1 facing the first mold 6 (the lower surface in the figure) is subjected to silane coupling treatment to improve the adhesion with the ultraviolet curable resin. The convex portion 7 is subjected to a mold release treatment as necessary so that the peelability from the ultraviolet curable resin is improved. And, as shown in (b), between the lower surface of the substrate 1 and the upper surface of the convex portion 7 of the first mold 6 is held with an interval corresponding to the thickness of the resin layer to be formed, During that interval, a UV curable resin is injected using a dispenser. Before that, alignment between the substrate 1 and the first mold 6 is performed by aligning the alignment mark 5 of the substrate holder 2 with the alignment mark 8 of the first mold 6. Since the alignment mark portion of the substrate holder 2 is transparent, this alignment can be easily performed by means such as observation with an optical microscope from the substrate holder 2 side.

  This alignment may be performed at any timing before, during, or after the injection of the ultraviolet curable resin. Thereafter, the ultraviolet curable resin is irradiated with ultraviolet rays through the substrate 1 to cure the ultraviolet curable resin, and after curing, the ultraviolet curable resin is peeled off from the first mold 6.

  (C) shows a state in which the substrate holder 2 and the substrate 1 are turned upside down with the ultraviolet curable resin peeled from the first mold 6 and faced to the second mold 11 in this state. As shown in (c), a first molding surface 10 made of an ultraviolet curable resin is formed on the upper surface side of the substrate 1. The second mold 11 has a structure similar to that of the first mold 6 and is provided with a convex portion 12 corresponding to a portion where the resin layer is formed, and becomes a convex lens mold therein. A plurality of recesses 13 are provided. Two alignment marks 14 are provided at positions corresponding to the alignment marks 5 of the substrate holder 2, which are portions away from the convex portions 12. The alignment mark 14 is a sharp mark processed by machining or etching, and the center of the cross character indicates the reference position. The second mold 11 may be formed of a transparent material such as quartz or glass, or may be formed of an opaque material such as metal.

  First, silane coupling treatment is performed on the portion of the substrate 1 that faces the second mold 11 (the lower surface in the figure) to improve the adhesion to the ultraviolet curable resin. The protrusion 12 is subjected to a mold release treatment as necessary so that the peelability from the ultraviolet curable resin is improved. And, as shown in (c), between the lower surface of the substrate 1 and the upper surface of the convex portion 12 of the second mold 11 is held with an interval corresponding to the thickness of the resin layer to be formed, During that interval, a UV curable resin is injected using a dispenser. Before that, alignment between the substrate 1 and the second mold 11 is performed by aligning the alignment mark 5 of the substrate holder 2 with the alignment mark 14 of the second mold 11. Since the alignment mark portion of the substrate holder 2 is transparent, this alignment can be easily performed by means such as observation with an optical microscope from the substrate holder 2 side.

  This alignment may be performed at any timing before, during, or after the injection of the ultraviolet curable resin. Thereafter, the ultraviolet curable resin is irradiated with ultraviolet rays through the substrate 1 to cure the ultraviolet curable resin, and after curing, the ultraviolet curable resin is peeled off from the second mold 11. Thereby, an optical element having a resin layer having a shape in which convex lens arrays are formed on both surfaces of the substrate 1 is completed.

  As described above, in this embodiment, any one of the alignment mark 5 formed on the substrate holder 2, the alignment mark 8 formed on the first mold 6, and the alignment mark 14 formed on the second mold. However, it is sharp because it is formed by machining or etching, and its center position can be observed with high accuracy. Also, since any alignment mark is provided at a position away from the portion where the resin layer is formed, it is not necessary to provide an alignment mark at the portion where the resin layer is formed, and that portion is formed as an optical element. Can be used.

  Further, when the alignment mark is optically aligned, the resin does not enter between the alignment marks, so that it is possible to prevent the image from being blurred by the resin. Each alignment mark is provided at a fixed position on the substrate holder 2, the first mold 6, and the second mold 11, so that the alignment mark is placed under the microscope at the time of alignment. When searching, you can easily put it in the field of view.

  FIG. 2 is a diagram for explaining the outline of the optical element manufacturing method according to the second embodiment of the present invention. 2, the same components as those shown in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted. The substrate 1, substrate holder 2, first mold 6, and second mold 11 in FIG. 2 are the same as those described in the embodiment in FIG. However, in the second embodiment shown in FIG. 2, one of the first mold 6 and the second mold 11 must be transparent. In this example, the first mold 6 is transparent. It is assumed that

  First, the substrate 1 is fitted into the substrate holder 2 and is fixed by being pressed by the pressing member 4 as in the first embodiment. Then, silane coupling treatment is performed on the upper and lower surfaces of the substrate 1 to improve the adhesion to the ultraviolet curable resin. On the other hand, the convex portion 7 of the first mold 6 and the convex portion 12 of the second mold 11 are subjected to mold release treatment as necessary so that the releasability from the ultraviolet curable resin is improved. .

  And as shown in FIG. 2, while keeping the space | interval only corresponding to the thickness of the resin layer formed between the upper surface of the board | substrate 1 and the lower surface of the convex part 7 of the 1st type | mold 6, Between the lower surface of the board | substrate 1 and the upper surface of the convex part 12 of the 2nd type | mold 11, the space | interval only corresponding to the thickness of the resin layer formed is opened and hold | maintained. Then, UV curing is performed using a dispenser between the upper surface of the substrate 1 and the lower surface of the convex portion 7 of the first mold 6 and between the lower surface of the substrate 1 and the upper surface of the convex portion 12 of the second mold 11. Inject mold resin. Before that, the alignment mark 5 of the substrate holder 2, the alignment mark 8 of the first mold 6 and the alignment mark 14 of the second mold 11 are aligned, so that the substrate 1 and the first mold 6 are aligned. Alignment with the second mold 11 is performed. Since the first mold 6 and the substrate holder 2 are transparent, this alignment can be easily performed by means such as observation with an optical microscope from the first mold 6 side.

  This alignment may be performed at any timing before, during, or after the injection of the ultraviolet curable resin. Thereafter, the ultraviolet curable resin is cured by irradiating the ultraviolet curable resin with ultraviolet rays through the first mold 6, and after curing, the ultraviolet curable resin is used as the first mold 6 and the second mold 11. Peel from. Thereby, an optical element having a resin layer having a shape in which convex lens arrays are formed on both surfaces of the substrate 1 is completed.

  That is, the second embodiment is different from the first embodiment in that a resin layer is formed on both surfaces of the substrate 1 at one time. For this reason, the alignment mark is used to align the substrate 1, the first die 6, and the second die 11 at a time. However, the substrate holder 2, the first die 6, and the second die 11 are aligned at a time. The effect of using the mold 11 is the same as that of the first embodiment.

It is a figure for demonstrating the outline | summary of the manufacturing method of the optical element which is the 1st Embodiment of this invention. It is a figure for demonstrating the outline | summary of the manufacturing method of the optical element which is the 2nd Embodiment of invention. It is a figure which shows the example of the optical element (micro lens array) in which the resin layer was formed on both surfaces of the board | substrate. It is a figure which shows an example of the conventional method of manufacturing an optical element as shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Board | substrate, 2 ... Board | substrate holder, 3 ... Hole part, 3a ... Bottom surface part, 4 ... Holding member, 5 ... Alignment mark, 6 ... 1st type | mold, 7 ... Convex part, 8 ... Alignment mark, 9 ... Concave part, DESCRIPTION OF SYMBOLS 10 ... 1st shaping | molding surface, 11 ... 2nd type | mold, 12 ... Convex part, 13 ... Concave part, 14 ... Alignment mark

Claims (2)

A method of manufacturing an optical element in which a resin layer is formed on both surfaces of a transparent substrate, and the resin layer has a function as an optical element, and has a function of fixing and holding the substrate. The substrate is held by a holding member in which an alignment mark is formed in a portion other than the portion to which the substrate is fixed, and in this state, the alignment mark is formed in a location other than the portion where the resin layer is formed. Alignment is performed by causing the first surface of the substrate held by the holding member to face one mold through a predetermined space and aligning the alignment mark of the holding member with the alignment mark of the first die. Prior to or after or simultaneously with injecting a resin into the space between the substrate and the first mold and curing the resin from the first mold Next, the second surface of the substrate held by the holding member is placed on a second mold in which an alignment mark is formed at a place other than the portion where the resin layer is formed, through a predetermined space. Align the alignment mark of the holding member and the alignment mark of the second mold so that they face each other, and before, after, or simultaneously, the resin is placed in the space between the substrate and the second mold A method for manufacturing an optical element, comprising the steps of injecting and curing, and then peeling the resin from the second mold. A method of manufacturing an optical element in which a resin layer is formed on both surfaces of a transparent substrate, and the resin layer has a function as an optical element, and has a function of fixing and holding the substrate. The substrate is held by a holding member in which an alignment mark is formed in a portion other than the portion to which the substrate is fixed, and in this state, the alignment mark is formed in a location other than the portion where the resin layer is formed. An alignment mark is placed on a first surface of one mold that faces the first surface of the substrate held by the holding member through a predetermined space and other than a portion where the resin layer is formed. The second surface of the substrate held by the holding member is opposed to the formed second die through a predetermined space, and the alignment mark of the holding member, the alignment mark of the first die, Of type 2 Alignment is performed by aligning the alignment marks, and before, after, or simultaneously, resin is injected into the space between the substrate and the first mold and the space between the substrate and the second mold. And a step of peeling the resin from the first mold and the second mold, and then curing the optical element.

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