CN106092974A - Extraordinary edge filter transmittance graph high precision testing device and method - Google Patents
Extraordinary edge filter transmittance graph high precision testing device and method Download PDFInfo
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- CN106092974A CN106092974A CN201610375987.4A CN201610375987A CN106092974A CN 106092974 A CN106092974 A CN 106092974A CN 201610375987 A CN201610375987 A CN 201610375987A CN 106092974 A CN106092974 A CN 106092974A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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Abstract
The invention discloses a kind of extraordinary edge filter transmittance graph high precision testing device and method, wide spectral laser device, collimating lens, extraordinary edge filter, condenser lens and the spectrogrph set gradually including common optical axis, all devices are the most contour relative to substrate, i.e. the most contour relative to optical table or instrument base.The laser beam that wide spectral laser device sends, first collimated collimated, then focused on focal point by condenser lens, the spectrum R of spectrometer measurement laser instrument1(λ), then special type edge filter is placed on turntable, inserts in light path, between collimating lens and condenser lens, rotate extraordinary edge filter, change laser light incident angle, measure the laser spectrum curve R under different incidence angles degree2(λ).Precision of the present invention is higher, can reach 0.02nm, and experimental provision is simple, and cost is relatively low.
Description
Technical field
The present invention relates to spectral measurement and sharp combiner field, be specifically related to a kind of extraordinary edge filter transmittance graph
High precision testing device and method.
Background technology
Along with the raising of the Performance And Reliability of optical fiber laser in recent years, the application of optical fiber laser has penetrated into respectively
Individual ambit, defines a huge application network and covers.It is steady that optical fiber laser has efficiency height, good reliability, performance
The advantages such as fixed, life-span length, are widely applied to Materialbearbeitung mit Laserlicht, laser intelligence process, laser biology and medical science, laser
Printing, communication, laser chemistry, laser detection are led with metering, laser isotope separation, laser remanufacturing and national defense safety etc.
Territory, is greatly promoted technology and the industry development in these fields.High-power semiconductor laser processing is as a kind of advanced manufacture
Technology, has become as the national economy such as automobile, metallurgy, electronics, aviation, electrical equipment, machine-building and supports the irreplaceable skill of industry
One of art, it is improving production rate, process automation, environmental nonpollution and the aspect such as reduce cost consumption has huge
Advantage.Although it is 10kW that American I PG company the most successfully have developed First power in 2009, beam quality factor M2
< single mode fiber laser of 1.5, but due to accumulated heat and the existence of nonlinear effect, power to be developed is higher, M2The factor is still
High-energy laser close to 1 also exists huge technical problem.Therefore to it is industrial and military to make laser preferably to meet
Demand, swash combiner technology be directed initially into and conduct in-depth research.
Conventional conjunction bundle technology includes that the methods such as bundle, polarization coupling and spectrum beam combination are closed in coherently combined, space.Wherein light
Spectrum closes bundle due to device simply, and the reasons such as conjunction bundle efficiency is high, low cost become present study hotspot.And extraordinary the cut-off filters
Mating plate greatly, needs for this to carry out it as the key element of spectrum beam combination, its transmittance graph involutory bundle efficiency impact
Accurately measure.Conventional measuring method uses spectrophotometer to measure filter transmission curve, but its wavelength resolution
Rate is only capable of reaching 0.2nm, far from meeting actual demand.
Chinese patent CN201510941431.2 propose one " optical filter high accuracy transmitance test system and
Method of testing ", use photomodulator and the mode of operation of lock-in amplifier, the high-acruracy survey absorbance of optical filter, but its
Device is more complicated, and external condition disturbance is bigger.
Summary of the invention
It is an object of the invention to provide a kind of extraordinary edge filter transmittance graph high precision testing device and method,
Certainty of measurement is high, and experimental provision is simple, low cost.
The technical solution realizing the object of the invention is: a kind of extraordinary edge filter transmittance graph high precision measurement
Device, wide spectral laser device, collimating lens, extraordinary edge filter, condenser lens and the spectrum set gradually including common optical axis
Instrument, all devices are the most contour relative to substrate, i.e. the most contour relative to optical table or instrument base.
The laser beam that wide spectral laser device sends, first collimated collimated, then focused on focal point, light by condenser lens
The spectrum R of spectrometer Laser Measurement device1(λ), then special type edge filter is placed on turntable, inserts in light path, between collimation thoroughly
Between mirror and condenser lens, rotate extraordinary edge filter, change laser light incident angle, measure the laser light under different incidence angles degree
Spectral curve R2(λ)。
Described spectrogrph is placed in the focal point of condenser lens；Wide spectral laser device is positioned at the front focus of collimating lens.
The diameter D=25mm of described extraordinary edge filter, thickness is 6mm, and the plane of incidence is plane, plates cut film, with
2.5 ° of incident angles, absorbance is less than 2nm from the steepness of 0.1% to 99.9%；The plane of incidence and the rough surface of exit facet
Degree: Ra=0.5nm；Transmission wavefront PV < λ/10 (λ=632.8nm；The depth of parallelism: 10 "；Damage threshold: continuous light 20MW/cm2, even
Continuous action time > 10s, for 10ns width pulse: 0.1J/cm2；Edge is provided with protectiveness chamfering.
Described extraordinary edge filter is with 2.5 ° of angle of incidence, from air incidence, to wavelength between 1010nm's～1082nm
Laser reflectivity is more than 99.99%, is 50% to visible reflectance；With 2.5 ° of angle incidences, from the plane of incidence to exit facet, to ripple
The long laser absorbance between 1084～1100nm is more than 99.9%, is 50% to transmission of visible light.
Above-mentioned collimating lens and condenser lens all use double glued achromatic lens.
Described spectrometer wavelength resolution is 0.02nm, and wavelength repeatability is 0.005nm, measurement scope be 600～
1700nm。
A kind of method of testing using extraordinary edge filter transmittance graph high precision testing device, method step is such as
Under:
The wide spectral laser Shu Jinhang that wide spectral laser device sends is collimated and focuses on by step 1, use collimating lens；
Step 2, spectrogrph is placed in the focal point of condenser lens, measures the spectrum R of wide spectrum light source1(λ)；
Step 3, special type edge filter is arranged between collimating lens and condenser lens, rotates extraordinary light cutoff filter
Sheet, changes laser light incident angle, measures the laser spectrum curve R under different incidence angles degree2(λ)；
Step 4, the curve of spectrum according to gained, the transmittance graph of extraordinary edge filter
In above-mentioned steps 2 and step 3, spectrogrph, during measuring, needs position before and after continuous mobility spectrum instrument probe,
Guarantee that laser coupling efficiency reaches the highest, i.e. curve of spectrum peak value is the highest.
Compared with prior art, its remarkable advantage is the present invention: wide spectral laser device spectrum halfwidth used by the present invention
For 45nm so that the measurement scope of experimental provision is relatively big, and used by device, spectrometer wavelength resolution is 0.02nm, and commonly uses simultaneously
It is only 0.2nm in the spectrophotometric wavelength resolution measuring filter transmission curve, so experimental provision certainty of measurement
Higher, and simple in construction, cost is relatively low.
Accompanying drawing explanation
Fig. 1 is the structural representation of special type edge filter transmittance graph high precision testing device of the present invention.
Fig. 2 is the flow chart of special type edge filter transmittance graph high precision measurement method of the present invention.
Fig. 3 is experimental result picture in the embodiment of the present invention 1.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further detail.
In conjunction with Fig. 1, a kind of extraordinary edge filter transmittance graph high precision testing device, set gradually including common optical axis
Wide spectral laser device 1, collimating lens 2, extraordinary edge filter 3, condenser lens 4 and spectrogrph 5, all devices are relative to base
The end, is the most contour, i.e. the most contour relative to optical table or instrument base.
The laser beam that wide spectral laser device 1 sends, first collimated lens 2 collimate, then are focused on focus by condenser lens 4
Place, is then placed at the back focus of condenser lens 4 by spectrogrph probe, the spectrum R of Laser Measurement device 11(λ)；Again special type is cut
Only optical filter 3 is placed on turntable, inserts in light path, between collimating lens 2 and condenser lens 4, rotates extraordinary light cutoff filter
Sheet 3, changes laser light incident angle, measures the laser spectrum curve R under different incidence angles degree2(λ)。
Described spectrogrph 5 is placed in the focal point of condenser lens 4；Wide spectral laser device 1 is positioned at the front focus of collimating lens 2
Place.
The diameter D=25mm of described extraordinary edge filter 3, thickness is 6mm, and the plane of incidence is plane, plates cut film, with
2.5 ° of incident angles, absorbance is less than 2nm from the steepness of 0.1% to 99.9%；The plane of incidence and the rough surface of exit facet
Degree: Ra=0.5nm；Transmission wavefront PV < λ/10 (λ=632.8nm；The depth of parallelism: 10 "；Damage threshold: continuous light 20MW/cm2, even
Continuous action time > 10s, for 10ns width pulse: 0.1J/cm2；Edge is provided with protectiveness chamfering.
Described extraordinary edge filter 3 is with 2.5 ° of angle of incidence, from air incidence, to wavelength between 1010nm's～1082nm
Laser reflectivity is more than 99.99%, is 50% to visible reflectance；With 2.5 ° of angle incidences, from the plane of incidence to exit facet, to ripple
The long laser absorbance between 1084～1100nm is more than 99.9%, is 50% to transmission of visible light.
Above-mentioned collimating lens 2 and condenser lens 4 all use double glued achromatic lens.
Described spectrogrph 5 wavelength resolution is 0.02nm, and wavelength repeatability is 0.005nm, measurement scope be 600～
1700nm。
In conjunction with Fig. 2, a kind of method of testing using extraordinary edge filter transmittance graph high precision testing device, method
Step is as follows:
Step 1, the wide spectral laser Shu Jinhang using collimating lens 2 to send wide spectral laser device 1 collimate and focus on.
Step 2, spectrogrph 5 is placed in the focal point of condenser lens 4, measures the spectrum R of wide spectrum light source1(λ)。
Step 3, special type edge filter 3 is arranged between collimating lens 2 and condenser lens 4, rotates special type cut-off filter
Mating plate 3, changes laser light incident angle, measures the laser spectrum curve R under different incidence angles degree2(λ)。
Step 4, the curve of spectrum according to gained, the transmittance graph of extraordinary edge filter 3
In above-mentioned steps 2 and step 3, spectrogrph 5, during measuring, needs position before and after continuous mobility spectrum instrument 5 probe
Put, it is ensured that laser coupling efficiency reaches the highest, i.e. curve of spectrum peak value is the highest.
Embodiment 1
A kind of extraordinary edge filter transmittance graph high precision testing device, the wide spectrum set gradually including common optical axis
Laser instrument 1, collimating lens 2, extraordinary edge filter 3, condenser lens 4 and spectrogrph 5, all devices are coaxial etc. relative to substrate
Height, i.e. the most contour relative to optical table or instrument base.
The laser beam that wide spectral laser device 1 sends, first collimated lens 2 collimate, then are focused on focus by condenser lens 4
Place, is then placed at the back focus of condenser lens 4 by spectrogrph probe, the spectrum R of Laser Measurement device 11(λ)；Again special type is cut
Only optical filter 3 is placed on turntable, inserts in light path, between collimating lens 2 and condenser lens 4, rotates extraordinary light cutoff filter
Sheet 3, changes laser light incident angle, measures the laser spectrum curve R under different incidence angles degree2(λ)。
Described spectrogrph 5 is placed in the focal point of condenser lens 4；Wide spectral laser device 1 is positioned at the front focus of collimating lens 2
Place.
A kind of method of testing using extraordinary edge filter transmittance graph high precision testing device, method step is such as
Under:
Step 1, the wide spectral laser Shu Jinhang using collimating lens 2 to send wide spectral laser device 1 collimate and focus on.
Step 2, spectrogrph 5 is placed in the focal point of condenser lens 4, measures the spectrum R of wide spectrum light source1(λ)。
Step 3, special type edge filter 3 is arranged between collimating lens 2 and condenser lens 4, rotates special type cut-off filter
Mating plate 3, changes laser light incident angle, measures the laser spectrum curve R under different incidence angles degree2(λ)。
Step 4, the curve of spectrum according to gained, the transmittance graph of extraordinary edge filter 3
Experimental result is as it is shown on figure 3, it is that the optical filter under 1.5 °, 2.5 ° and 5.5 ° is saturating that the present invention measures angle of incidence respectively
Penetrate rate curve, as seen from the figure filter transmission from 0.1% to 99.9% steepness be 1.4nm, this refers to filter designs
Mark is consistent, and along with the increase of incident angle, filter transmission curve can move to shortwave direction.Can by this experimental result
Knowing, this measurement device precision is high, and result is accurate.
Claims (8)
1. an extraordinary edge filter transmittance graph high precision testing device, it is characterised in that: include that common optical axis sets successively
Wide spectral laser device (1), collimating lens (2), extraordinary edge filter (3), condenser lens (4) and the spectrogrph (5) put, all
Device is the most contour relative to substrate, i.e. the most contour relative to optical table or instrument base；
The laser beam that wide spectral laser device (1) sends, first collimated lens (2) collimation, then focused on focus by condenser lens (4)
Place, the spectrum R of spectrogrph (5) Laser Measurement device (1)1(λ), then special type edge filter (3) is placed on turntable, inserts light path
In, between collimating lens (2) and condenser lens (4), rotate extraordinary edge filter (3), change laser light incident angle, measure
Laser spectrum curve R under different incidence angles degree2(λ)。
Extraordinary edge filter transmittance graph high precision testing device the most according to claim 1, it is characterised in that: institute
State spectrogrph (5) and be placed in the focal point of condenser lens (4)；Wide spectral laser device (1) is positioned at the front focus of collimating lens (2).
Extraordinary edge filter transmittance graph high precision testing device the most according to claim 1, it is characterised in that: institute
Stating the diameter D=25mm of extraordinary edge filter (3), thickness is 6mm, and the plane of incidence is plane, plates cut film, with 2.5 ° of angle of incidence
Incidence, absorbance is less than 2nm from the steepness of 0.1% to 99.9%；The plane of incidence and the surface roughness of exit facet: Ra=
0.5nm；Transmission wavefront PV < λ/10 (λ=632.8nm；The depth of parallelism: 10 "；Damage threshold: continuous light 20MW/cm2, continuous action
Time > 10s, for 10ns width pulse: 0.1J/cm2；Edge is provided with protectiveness chamfering.
Extraordinary edge filter transmittance graph high precision testing device the most according to claim 3, it is characterised in that: institute
State extraordinary edge filter (3) with 2.5 ° of angle of incidence, from air incidence, to wavelength between the laser-bounce of 1010nm～1082nm
Rate is more than 99.99%, is 50% to visible reflectance；With 2.5 ° of angle incidences, from the plane of incidence to exit facet, to wavelength between
The laser absorbance of 1084～1100nm is more than 99.9%, is 50% to transmission of visible light.
Extraordinary edge filter transmittance graph high precision testing device the most according to claim 1, it is characterised in that on:
State collimating lens (2) and condenser lens (4) all uses double glued achromatic lens.
Extraordinary edge filter transmittance graph high precision testing device the most according to claim 1, it is characterised in that: institute
Stating spectrogrph (5) wavelength resolution is 0.02nm, and wavelength repeatability is 0.005nm, and measurement scope is 600～1700nm.
7. the test side using extraordinary edge filter transmittance graph high precision testing device as claimed in claim 1
Method, it is characterised in that method step is as follows:
Step 1, the wide spectral laser Shu Jinhang using collimating lens (2) to send width spectral laser device (1) collimate and focus on；
Step 2, spectrogrph (5) is placed in the focal point of condenser lens (4), measures the spectrum R of wide spectrum light source1(λ)；
Step 3, special type edge filter (3) is arranged between collimating lens (2) and condenser lens (4), rotates special type cut-off
Optical filter (3), changes laser light incident angle, measures the laser spectrum curve R under different incidence angles degree2(λ)；
Step 4, the curve of spectrum according to gained, the transmittance graph of extraordinary edge filter (3)
The test side using extraordinary edge filter transmittance graph high precision testing device the most according to claim 7
Method, it is characterised in that: in above-mentioned steps 2 and step 3, spectrogrph (5), during measuring, needs continuous mobility spectrum instrument (5) to visit
Position before and after Tou, it is ensured that laser coupling efficiency reaches the highest, i.e. curve of spectrum peak value is the highest.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110108449A (en) * | 2019-06-26 | 2019-08-09 | 深圳市楠轩光电科技有限公司 | A kind of optics module test macro and method |
| CN111076901A (en) * | 2019-12-12 | 2020-04-28 | 河北汉光重工有限责任公司 | Device for measuring influence of light incidence angle on performance of optical filter |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110108449A (en) * | 2019-06-26 | 2019-08-09 | 深圳市楠轩光电科技有限公司 | A kind of optics module test macro and method |
| CN110108449B (en) * | 2019-06-26 | 2022-05-10 | 深圳市楠轩光电科技有限公司 | Optical module testing system and method |
| CN111076901A (en) * | 2019-12-12 | 2020-04-28 | 河北汉光重工有限责任公司 | Device for measuring influence of light incidence angle on performance of optical filter |
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Application publication date: 20161109 |