CN1570586A - Automatic detecting device for spike filter - Google Patents
Automatic detecting device for spike filter Download PDFInfo
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- CN1570586A CN1570586A CN 200410018086 CN200410018086A CN1570586A CN 1570586 A CN1570586 A CN 1570586A CN 200410018086 CN200410018086 CN 200410018086 CN 200410018086 A CN200410018086 A CN 200410018086A CN 1570586 A CN1570586 A CN 1570586A
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Abstract
This invention discloses an automatic detecting apparatus of narrow-band optical filter, which comprises workbench, light source, light signal-detecting instrument that is uniquely connected with computer and control device. The longitudinal movement and horizontal movement device is installed in the supporting platform of the workbench. The light signal incident collimating device is connected with the light source through incident fiber, while emergent collimating device is connected with light signal detecting instrument through emergent fiber and the control device is connected with the longitudinal movement and horizontal movement device. The detecting speed of small narrow-band optical filter can be greatly increased through the control device, light source and light signal detecting instrument controlled by the relevant procedures programmed on the computer.
Description
Technical field
The present invention relates to a kind of pick-up unit of optical element, especially relate to a kind of automatic detection device of narrow band pass filter.
Background technology
Development along with optical communication industry, close wavelength-division multiplex technology (DWDM) has become one of gordian technique wherein, and as channel-splitting filter and the wave multiplexer of forming dense wave division multiplexer, has the multiple technical scheme that can select, wherein one of proven technique scheme is the narrow-band-filter chip technology the most, also be the scheme that people are most widely used at present, this technology relates to crucial optical element---narrow band pass filter.The manufacturing of narrow band pass filter is very complicated, it need plate the nearly high-quality multilayer dielectric film more than hundred layers on the glass substrate of the thick bulk of 8～10mm, grind off most glass substrate then, bulk optical filter after will grinding again cuts into the little optical filter of polylith 1.4mm * 1.4mm, then under the situation of light with 0～5 degree angle incident, measure the transmittance curve of Small diaphragm-piece one by one, calculate the characteristic width of centre wavelength and transmittance curve, determine qualified product then.In this course, how little optical filter is detected fast and accurately to filter out qualified optical filter with guaranteeing both quality and quantity, for the output and the quality that guarantee product, and the cost of reduction product all has very important significance.The means of the little optical filter of existing detection are mainly still taked the artificial method that detects piecewise, the defective of this method is that detection speed is slow, accuracy of detection is low, an enterprise often needs a large amount of product testing staff, and the restriction of these factors makes and detects " bottleneck " that becomes large-scale industrial production.In addition, after the plated film of finishing the structural glass substrate, also need the bulk optical filter is carried out check and analysis in the distribution of the transmitance of central wavelength, promptly can grasp the distributed areas that transmitance meets the substrate of finished product standard well, so that can on purpose carry out cutting processing subsequently, improve yield rate as much as possible, also can analyze simultaneously the situation of plated film, so that, make coating process reach comparatively desirable state by technical conditions such as modification film systems.In order to address this problem, people are devoted to seek a kind of detection method fast and accurately, but fail to obtain comparatively desirable high precision device for fast detecting always.
Summary of the invention
Technical matters to be solved by this invention is the automatic detection device that a kind of narrow band pass filter is provided at above-mentioned prior art present situation, it can detect the bulk optical filter behind the plated film rapidly and accurately, also can detect the little optical filter after the cutting rapidly and accurately, can be applied in the suitability for industrialized production effectively.
The present invention solves the problems of the technologies described above the technical scheme that is adopted: a kind of automatic detection device of narrow band pass filter, comprise workbench, light source and optical signal detecting instrument, also comprise computing machine and controller, described light source, described optical signal detecting instrument and described the controller communication interface by separately respectively are connected with described computing machine, described workbench comprises base and brace table, described brace table rigidly fixes with an objective table and is connected, described brace table is provided with longitudinal moving mechanism and transverse moving mechanism, described base is provided with support, the upper end of described support is provided with the U type and visits arm, described spy arm is provided with light signal incident collimating apparatus and light signal outgoing collimating apparatus, described light signal incident collimating apparatus links to each other with described light source by incident optical, described light signal outgoing collimating apparatus links to each other with described optical signal detecting instrument by outgoing optical fiber, described light signal outgoing collimating apparatus receives the light of described light signal incident collimating apparatus outgoing, described controller is connected with described transverse moving mechanism with described longitudinal moving mechanism, described computer compilation has following function program: (1) output control signal controls described longitudinal moving mechanism and described transverse moving mechanism for described controller, (2) monochromatic light of the described light source output wavelength scope of control in 1200nm～1650nm scope, (3) receive and handle the signal that described optical signal detecting instrument detects.
Described longitudinal moving mechanism comprises first motor, longitudinal rail and longitudinal leadscrew, described first motor is connected with described controller, described controller is controlled described first motor rotation, the described longitudinal leadscrew rotation of described first driven by motor makes described brace table move along described longitudinal rail.
Described transverse moving mechanism comprises second motor, cross slide way and horizontal leading screw, described second motor is connected with described controller, described controller is controlled described second motor rotation, the described horizontal leading screw rotation of described second driven by motor makes described longitudinal rail move along described cross slide way.
Described spy arm and described support are connected and fixed by rotary actuator, and described rotary actuator is provided with angular adjustment knob and angle vernier adjustment knob.
Described light signal outgoing collimating apparatus is fixed on the described spy arm by being arranged on the outgoing anchor clamps on the holder, and described holder is provided with tilt adjustment knob and position adjustments knob.
Described light source can be tunable semiconductor laser, also can be the ASE wideband light source.
Described optical signal detecting instrument can be high precision, high-resolution spectroanalysis instrument, also can be to carry out the measuring light power light power meter continuously to the light of a certain frequency range.
Described computing machine has following function program: at first determine whether length scanning mode of the mode that detects after 1. starting; 2. if then input wavelength sweep limit boundary value and the adjacent mobile spacing value of the needed machinery in detection position are then imported centre wavelength if not the length scanning mode; 3. import the boundary value of mechanical moving range; 4. import the reference position value that machinery moves; 5. import mechanical translational speed; 6. send instruction code; 7. measure; 8. receive and handle the signal of optical signal detecting instrument; 9. judge to measure whether finish, be then print data and end, otherwise turn back to 7..
Compared with prior art, the invention has the advantages that by with computing machine and controller, light source and optical signal detecting instrument interconnect, the objective table that a brace table and one can move as vertical and horizontal with respect to brace table is set in workbench, longitudinal moving mechanism links to each other with controller with transverse moving mechanism, and the monochromatic light of light source output wavelength scope in 1200nm～1650nm scope, there is corresponding program to export control signal by establishment in computing machine and gives controller and light source respectively, can realize to the automatic detection of the wavelength transmitance of the certain limit of corresponding position on the narrow band pass filter that is used for dwdm system with to the automatic detection of corresponding wavelength value transmitance value at each point place on whole bulk optical filter, can improve detection speed thus greatly to the fritter narrow band pass filter, thereby in the production run of narrow band pass filter, improve the detection efficiency when judging specification product, and simultaneously can be on same pick-up unit the semi-manufacture optical filter of uncut bulk be still detected fast and accurately, not only can instruct valuably follow-up cutting work, and can help people to judge the situation of plated film well, so that revise every coating technique parameter with a definite target in view; Constitute travel mechanism with motor, guide rail and leading screw, can make mobile distance more accurate; And spy arm and support that light signal incident collimating apparatus and light signal outgoing collimating apparatus are set are connected and fixed by the rotary actuator that is provided with angular adjustment knob and angle vernier adjustment knob, can carry out the detection of the transmitance of any incident angle easily; And light signal outgoing collimating apparatus is fixed on and visits on the arm by being arranged on the outgoing anchor clamps on the holder that tilt adjustment knob and position adjustments knob arranged, then can be at the detection of the optical filter of different-thickness, suitably adjust light signal outgoing collimating apparatus so that the detection signal that receives has strong as far as possible energy, revise because the skew of the caused emergent ray of thickness of optical filter with this, simultaneously, when pick-up unit is initially adjusted, also can make the intensity of light signal of reception big as much as possible more easily, in addition, it also can be advantageously used in the interim correction in the pick-up unit use.
Description of drawings
Fig. 1 is the invention structural representation;
Fig. 2 is the structural representation of workbench of the present invention;
Fig. 3 is that the U type is visited the A of arm to view among Fig. 2;
Fig. 4 is that the B of objective table among Fig. 2 is to view;
Fig. 5 is computer program logic figure of the present invention.
Embodiment
Embodiment describes in further detail the present invention below in conjunction with accompanying drawing.
Embodiment one: as shown in the figure, a kind of automatic detection device of narrow band pass filter, comprise workbench 1, light source 2 and optical signal detecting instrument 3, controller 4 and computing machine 5, light source 2 is that the model that Canadian EXFO company produces is a FLS-2600 series tunable laser, optical signal detecting instrument 3 is spectroanalysis instruments of the model AQ6317B that produces of Japanese ANDO Electronics Co., Ltd., computing machine 5 by connecting line respectively with light source 2, the RS-232C communication interface of optical signal detecting instrument 3 and controller 4 is connected, light source 2 can the arbitrarily monochromatic light of output wavelength scope in 1200nm～1650nm, under the control of computer program, it can export the monochromatic light of determining wavelength, also can continuous sweep in a definite wavelength coverage, optical signal detecting instrument 3 can receive the light signal of detection, and the signal that receives is input to computing machine 5 carries out analyzing and processing, workbench 1 comprises base 11 and brace table 12, brace table 12 rigidly fixes with an objective table 13 and is connected, objective table 13 is provided with optical filter anchor clamps 14, base 11 is provided with support 15, the upper end of support 15 is provided with the U type and visits arm 16, visit arm 16 and be provided with light signal incident collimating apparatus 21 and light signal outgoing collimating apparatus 31, light signal incident collimating apparatus 21 is fixed on by incident anchor clamps 23 and visits on the arm 16, light signal outgoing collimating apparatus 31 is fixed on the spy arm 16 by the outgoing anchor clamps 36 that are arranged on the holder 33, light signal incident collimating apparatus 21 links to each other with light source 2 by incident optical 22, light signal outgoing collimating apparatus 31 links to each other with optical signal detecting instrument 3 by outgoing optical fiber 32, the light of light signal outgoing collimating apparatus 31 receiving optical signals incident collimating apparatuss 21 outgoing, controller 4 is connected with second motor 41, cross slide way 42 is fixedly installed on the base 11, longitudinal rail 43 is arranged on the cross slide way 42, laterally leading screw 44 is equipped with longitudinal rail 43, the axle of second motor 41 is connected with horizontal leading screw 44, when the horizontal leading screw 44 of second motor, 41 drives rotates, longitudinal rail 43 moves along cross slide way 42, controller 4 also is connected with first motor 45, brace table 12 is arranged on the longitudinal rail 43, longitudinal leadscrew 46 is equipped with brace table 12, the axle of first motor 45 is connected with longitudinal leadscrew 46, when first motor 45 drives longitudinal leadscrew 46 rotations, brace table 12 longitudinally guide rail 43 moves, controller 4 is by the programmed control of computing machine, the revolution that the control signal of its output makes second motor 41 and first motor 45 determine with the rotating speed rotation of determining, visit arm 16 and be connected and fixed by rotary actuator 17 with support 15, rotary actuator 17 is provided with angular adjustment knob 18 and angle vernier adjustment knob 19.The effect of angular adjustment knob 18 and angle vernier adjustment knob 19 is to make spy arm 16 do axial rotation, can adjust the incident angle of incident light like this with respect to the optical filter surface, in other words, can detect the light transmission rate of various incident angles exactly easily, light signal outgoing collimating apparatus 31 is fixed on the spy arm 16 by the outgoing anchor clamps 36 that are arranged on the holder 33, holder 33 is provided with tilt adjustment knob 34 and position adjustments knob 35, their effect is the optical filter at different-thickness, by adjusting tilt adjustment knob 34 and position adjustments knob 35, revise because the skew of the caused emergent ray of thickness of optical filter, simultaneously, when pick-up unit is initially adjusted, also can make the intensity of light signal of reception big as much as possible more easily, in addition, it also can be advantageously used in the interim correction in the pick-up unit use.Computing machine 5 has following control program: at first determine whether length scanning mode of the mode that detects after 1. starting; 2. if input wavelength sweep limit boundary value λ then
1, λ
2With the mobile spacing value Δ of the needed machinery in adjacent detection position X, Δ Y, if not length scanning mode input wavelength λ then
03. import the boundary value X of mechanical moving range
1, Y
1, X
2, Y
24. import the reference position value X that machinery moves
0, Y
05. import mechanical translational speed; 6. send instruction code; 7. measure; 8. receive and handle the signal of light power meter; 9. judge to measure whether finish, be then print data and end, otherwise turn back to 7..
Use the method for above-mentioned detection device to be divided into following two kinds of situations: one, when needs detect the semi-manufacture optical filter of bulk, optical filter is fixed on the optical filter anchor clamps 14, manual adjustment angular adjustment knob 18 and angle vernier adjustment knob 19, to determine to detect the incident angle of light, the light signal that receives when optical signal detecting instrument 3 less than the light signal of 0 degree angle incident 50% the time, computing machine sends warning signal, must adjust tilt adjustment knob 34 and position adjustments knob 35 this moment, revise because the skew of the caused emergent ray of thickness of optical filter, be defined as non-length scanning, the wavelength X that this moment, input was determined in computing machine
0, control light source 2 output fixed wave length are λ
0Light signal, the scope X that input machinery moves
1, Y
1And X
2, Y
2, the reference position X that input machinery moves
0, Y
0, the speed that moves of input machinery is clicked sense command or press enter key again, promptly enters automatic detection, controller 4 was just controlled first motor 45 and was rotated this moment, make brace table 12 longitudinally guide rail 43 move, finish from X
1To X
2Automation scanning, switch then and make 41 rotations of controller 4 controls second motor, longitudinal rail 43 is moved along cross slide way 42, finish from Y
1To Y
2Automation scanning, measure finish after, final computing machine is finished the data and the curve that can print detection after the detection; Two, when needs detect the narrow band pass filter finished product of fritter, the detection dish that is placed with polylith fritter optical filter is fixed on the optical filter anchor clamps 14, manual adjustment angular adjustment knob 18 and angle vernier adjustment knob 19, to determine to detect the incident angle of light, be defined as length scanning, at this moment input wavelength sweep limit λ in computing machine
1And λ
2, and import the interval delta X that the needed machinery in adjacent detection position moves, Δ Y, the scope X that input machinery moves
1, Y
1And X
2, Y
2, the reference position X that input machinery moves
0, Y
0, the mobile speed of input machinery is clicked sense command or is pressed enter key again, promptly enters detection automatically, and this moment, controller 4 control first motors 45 and 41 rotations of second motor made objective table move to reference position X
0, Y
0, light source 2 is at λ then
1And λ
2Between the scope interscan, finish the primary reflection long scan after, 45 rotations of controller 4 control first motor make brace table 12 guide rail 43 displacement Δ X longitudinally, go on successively, finish from X
1To X
2Automation scanning after, get back to reference position X
0, 41 rotations of controller 4 control second motor make longitudinal rail 43 along cross slide way 44 displacement Δ Y then, and after the repetitive cycling, after arriving bounds, final computing machine is finished the data and the curve that can print detection after the detection.
Embodiment two: as shown in the figure, a kind of automatic detection device of narrow band pass filter, comprise workbench 1, light source 2 and optical signal detecting instrument 3, controller 4 and computing machine 5, light source 2 is U.S. Agilent wideband light sources, model 83437A, optical signal detecting instrument 3 is that U.S. Newport company produces, model is the light power meter of 1830-C, computing machine 5 by connecting line respectively with light source 2, the RS-232C communication interface of optical signal detecting instrument 3 and controller 4 is connected, light source 2 can the output wavelength scope at the wide spectral light signal of 1200nm～1650nm, optical signal detecting instrument 3 can receive the light signal of detection, and the signal that receives is input to computing machine 5 carries out analyzing and processing, under the control of computer program, it can detect the monochromatic light of fixed wave length, also can continuous sweep in a definite wavelength coverage, workbench 1 comprises base 11 and brace table 12, brace table 12 rigidly fixes with an objective table 13 and is connected, objective table 13 is provided with optical filter anchor clamps 14, base 11 is provided with support 15, the upper end of support 15 is provided with the U type and visits arm 16, visit arm 16 and be provided with light signal incident collimating apparatus 21 and light signal outgoing collimating apparatus 31, light signal incident collimating apparatus 21 is fixed on by incident anchor clamps 23 and visits on the arm 16, light signal outgoing collimating apparatus 31 is fixed on the spy arm 16 by the outgoing anchor clamps 36 that are arranged on the holder 33, light signal incident collimating apparatus 21 links to each other with light source 2 by incident optical 22, light signal outgoing collimating apparatus 31 links to each other with optical signal detecting instrument 3 by outgoing optical fiber 32, the light of light signal outgoing collimating apparatus 31 receiving optical signals incident collimating apparatuss 21 outgoing, controller 4 is connected with second motor 41, cross slide way 42 is fixedly installed on the base 11, longitudinal rail 43 is arranged on the cross slide way 42, laterally leading screw 44 is equipped with longitudinal rail 43, the axle of second motor 41 is connected with horizontal leading screw 44, when the horizontal leading screw 44 of second motor, 41 drives rotates, longitudinal rail 43 moves along cross slide way 42, controller 4 also is connected with first motor 45, brace table 12 is arranged on the longitudinal rail 43, longitudinal leadscrew 46 is equipped with brace table 12, the axle of first motor 45 is connected with longitudinal leadscrew 46, when first motor 45 drives longitudinal leadscrew 46 rotations, brace table 12 longitudinally guide rail 43 moves, controller 4 is by the programmed control of computing machine, the revolution that the control signal of its output makes second motor 41 and first motor 45 determine with the rotating speed rotation of determining, visit arm 16 and be connected and fixed by rotary actuator 17 with support 15, rotary actuator 17 is provided with angular adjustment knob 18 and angle vernier adjustment knob 19.The effect of angular adjustment knob 18 and angle vernier adjustment knob 19 is to make spy arm 16 do axial rotation, can adjust the incident angle of incident light like this with respect to the optical filter surface, in other words, can detect the light transmission rate of various incident angles exactly easily, light signal outgoing collimating apparatus 31 is fixed on the spy arm 16 by the outgoing anchor clamps 36 that are arranged on the holder 33, holder 33 is provided with tilt adjustment knob 34 and position adjustments knob 35, their effect is the optical filter at different-thickness, by adjusting tilt adjustment knob 34 and position adjustments knob 35, revise because the skew of the caused emergent ray of thickness of optical filter, simultaneously, when pick-up unit is initially adjusted, also can make the intensity of light signal of reception big as much as possible more easily, in addition, it also can be advantageously used in the interim correction in the pick-up unit use.Computing machine 5 has following control program: at first determine whether length scanning mode of the mode that detects after 1. starting; 2. if input wavelength sweep limit boundary value λ then
1, λ
2With the mobile spacing value Δ of the needed machinery in adjacent detection position X, Δ Y, if not length scanning mode input wavelength λ then
03. import the boundary value X of mechanical moving range
1, Y
1, X
2, Y
24. import the reference position value X that machinery moves
0, Y
05. import mechanical translational speed; 6. send instruction code; 7. measure; 8. receive and handle the signal of optical signal detecting instrument; 9. judge to measure whether finish, be then print data and end, otherwise turn back to 7..
The method of the pick-up unit of use embodiment two is basic identical with the method for the pick-up unit that uses embodiment two, difference is, what light source 2 was exported is a high-power broadband spectral signal, and the computer control light power meter carries out the detection of fixed wave length or carries out length scanning.
Claims (10)
1, a kind of automatic detection device of narrow band pass filter, comprise workbench, light source and optical signal detecting instrument, it is characterized in that also comprising computing machine and controller, described light source, described optical signal detecting instrument and described the controller communication interface by separately respectively are connected with described computing machine, described workbench comprises base and brace table, described brace table rigidly fixes with an objective table and is connected, described brace table is provided with longitudinal moving mechanism and transverse moving mechanism, described base is provided with support, the upper end of described support is provided with the U type and visits arm, described spy arm is provided with light signal incident collimating apparatus and light signal outgoing collimating apparatus, described light signal incident collimating apparatus links to each other with described light source by incident optical, described light signal outgoing collimating apparatus links to each other with described optical signal detecting instrument by outgoing optical fiber, described light signal outgoing collimating apparatus receives the light of described light signal incident collimating apparatus outgoing, described controller is connected with described transverse moving mechanism with described longitudinal moving mechanism, described computer compilation has following function program: (1) output control signal controls described longitudinal moving mechanism and described transverse moving mechanism for described controller, (2) monochromatic light of the described light source output wavelength scope of control in 1200nm～1650nm scope, (3) receive and handle the signal that described optical signal detecting instrument detects.
2, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1, it is characterized in that described longitudinal moving mechanism comprises first motor, longitudinal rail and longitudinal leadscrew, described first motor is connected with described controller, described controller is controlled described first motor rotation, the described longitudinal leadscrew rotation of described first driven by motor makes described brace table move along described longitudinal rail.
3, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1, it is characterized in that described transverse moving mechanism comprises second motor, cross slide way and horizontal leading screw, described second motor is connected with described controller, described controller is controlled described second motor rotation, the described horizontal leading screw rotation of described second driven by motor makes described longitudinal rail move along described cross slide way.
4, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1 is characterized in that described spy arm and described support are connected and fixed by rotary actuator, and described rotary actuator is provided with angular adjustment knob and angle vernier adjustment knob.
5, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1, it is characterized in that described light signal outgoing collimating apparatus is fixed on the described spy arm by being arranged on the outgoing anchor clamps on the holder, described holder is provided with tilt adjustment knob and position adjustments knob.
6, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1 is characterized in that described light source is tunable semiconductor laser.
7, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1 is characterized in that described light source is the ASE wideband light source.
8, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1 is characterized in that described optical signal detecting instrument is a spectroanalysis instrument.
9, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1 is characterized in that described optical signal detecting instrument is a light power meter.
10, the automatic detection device of a kind of narrow band pass filter as claimed in claim 1 is characterized in that described computing machine has following function program: at first determine whether length scanning mode of the mode that detects after 1. starting; 2. if then input wavelength sweep limit boundary value and the adjacent mobile spacing value of the needed machinery in detection position are then imported centre wavelength if not the length scanning mode; 3. import the boundary value of mechanical moving range; 4. import the reference position value that machinery moves; 5. import mechanical translational speed; 6. send instruction code; 7. measure; 8. receive and handle the signal of optical signal detecting instrument; 9. judge to measure whether finish, be then print data and end, otherwise turn back to 7..
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410018086 CN1284963C (en) | 2004-04-30 | 2004-04-30 | Automatic detecting device for spike filter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410018086 CN1284963C (en) | 2004-04-30 | 2004-04-30 | Automatic detecting device for spike filter |
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|---|---|
| CN1570586A true CN1570586A (en) | 2005-01-26 |
| CN1284963C CN1284963C (en) | 2006-11-15 |
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| CN 200410018086 Expired - Fee Related CN1284963C (en) | 2004-04-30 | 2004-04-30 | Automatic detecting device for spike filter |
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