CN109269778A - A kind of high precision measurement method of deep cut-off narrow band filter - Google Patents
A kind of high precision measurement method of deep cut-off narrow band filter Download PDFInfo
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- CN109269778A CN109269778A CN201811301039.1A CN201811301039A CN109269778A CN 109269778 A CN109269778 A CN 109269778A CN 201811301039 A CN201811301039 A CN 201811301039A CN 109269778 A CN109269778 A CN 109269778A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
The invention belongs to optical technical fields, more particularly to a kind of high precision measurement method of deep cut-off narrow band filter, this method is based on spectrophotometer and tests optical filter, and using the test parameter of spectrophotometer as variable, the method for multiple linear regression is introduced into the evaluation of filter performance.By the multiple linear regression to multi-group data, determines the crucial test number for influencing filter performance, obtain the test error of optical filter.This method has universality for the design of Optical System Design and optical thin film element.
Description
Technical field
The invention belongs to optical technical fields, and in particular to a kind of high precision measurement method of deep cut-off narrow band filter.
Background technique
Narrow band filter is the important component of optical imaging system, with the continuous development of space technology, narrowband filter
Mating plate is widely used in resource detection, hydrospace detection, climatological observation military affairs investigation, astronomical observation etc., can be effectively reduced
Ambient noise signal influences, and improves the signal-to-noise ratio for receiving signal, plays the effect that do not replace.Recent years, with lightning
The fast development of the technologies such as detection, high-resolution imaging, it is more and more narrow to the bandwidth requirement of optical filter.Such as in lightning detection
In, since background radiation is far longer than lightning signal, lightning signal is often submerged in powerful background radiation, in optics
It needs to filter off background radiation while obtaining lightning Characteristics peak-to-peak signal using ultra-narrow band pass filter (bandwidth~1nm) in system,
It is the effective means for improving lightning detection signal-to-noise ratio.In engineering development, end narrow band filter deeply during plated film, by
The influence of the factors such as deposition method, sedimentary condition and deposition parameter can introduce various errors, so that it surveys spectral signature parameter
And there are deviations for Theoretical Design, thus need to test its spectral characteristic after the completion of optical filter preparation, these spectral characteristics
Parameter includes central wavelength, bandwidth, transmittance, inhibition bandwidth etc., can usually pass through the spectral transmission for testing optical filter
Than being calculated these parameters.
Currently, spectrophotometer is the most frequently used equipment for carrying out the test of filter spectral transmittance, but super for deep cut-off
There is also the non-normal incidences very to problem, such as when testing ultra-narrow band pass filter due to light to introduce for narrow-band-filter built-in testing
Wavelength angle drift error, time of integration length will affect spectral transmittance, data break will affect spectral waveform etc., in order to accurately divide
Ultra-narrow band pass filter spectral characteristic and its difference are analysed, the Performance Testing Technology for carrying out ultra-narrow band pass filter need to be studied.
In conclusion under the demand of high-precision optical element development, especially for deep cut-off, ultra-narrow band light filter film
Application be background, the performance of deep cut-off narrow band filter how precisely test using spectrophotometer, becomes high-performance and filters
The Pinch technology problem of piece manufacture.
Summary of the invention
(1) technical problems to be solved
The technical problem to be solved by the present invention is how to realize the property to deep cut-off narrow band filter based on spectrophotometer
It can evaluation.
(2) technical solution
In order to solve the above technical problems, the present invention provides a kind of high precision measurement method of deep cut-off narrow band filter,
Include the following steps:
Step 1: the test parameter of selection spectrophotometer m-1 first is denoted as variable x respectively1、x2、……xm-1；
Step 2: different parameters is selected under each variable, total n parameter then defines the matrix X of test parameter variable
It is as follows:
Step 3: the performance indicator Y of optical filteriCentral wavelength, peak transmittance, bandwidth and rejection zone depth are examined, herein
Y is used in definition respectively1、Y2、Y3And Y4It indicates；
Step 4: above-mentioned relationship is characterized as below, the method for the multiple linear regression based on mathematics, and matrix β is that needs are polynary
The matrix of recurrence:
Step 5: using the method for experimental design, determining the relevant parameter of test experiments, the parameter of design is carried out respectively
Experiment test；
Step 6: variance analysis, verification test result Y are carried out to above-mentioned multiple linear regressioniIt is between test parameter X
No there are significant linear relationships, construct test statistics by the method for null hypothesis, under given level of significance α,
Determine the conspicuousness of linear regression relation；
Step 7: the inspection of further progress partial regression coefficient proposes to influence inapparent parameter x to y value, final to determine
YiWith the multiple linear regression equations of X；For the test of cut-off narrow band filter deeply, parameter b0It is exactly YiEstimated value,
Remaining parameter is then the error for influencing test result.
Wherein, in the step 1, test parameter includes: that the time of integration, light intensity attenuation ratio, the aperture of the diaphragm and slit are wide
Degree.
(3) beneficial effect
Compared with prior art, the present invention provides a kind of survey of deep cut-off narrow-band-filter film based on spectrophotometer
Method for testing, it is characterised in that using test parameter as the variable for influencing test result, being determined by multiple linear regression influences to survey
The key parameter of test result, this method can be used for degree of cut-off below 1%, bandwidth 2nm deep light cutoff filter film below
Test.
Detailed description of the invention
Fig. 1 is first group of test result schematic diagram of deep cut-off narrow-band-filter film.
Fig. 2 is second group of test result schematic diagram of deep cut-off narrow-band-filter film.
Fig. 3 is the third group test result schematic diagram of deep cut-off narrow-band-filter film.
Fig. 4 is the 4th group of test result schematic diagram of deep cut-off narrow-band-filter film.
Fig. 5 is the 5th group of test result schematic diagram of deep cut-off narrow-band-filter film.
Fig. 6 is the 6th group of test result schematic diagram of deep cut-off narrow-band-filter film.
Fig. 7 is the 7th group of test result schematic diagram of deep cut-off narrow-band-filter film.
Fig. 8 is the 8th group of test result schematic diagram of deep cut-off narrow-band-filter film.
Fig. 9 is the 9th group of test result schematic diagram of deep cut-off narrow-band-filter film.
Specific embodiment
To keep the purpose of the present invention, content and advantage clearer, with reference to the accompanying drawings and examples, to of the invention
Specific embodiment is described in further detail.
In order to solve the above technical problems, the present invention provides a kind of high precision measurement method of deep cut-off narrow band filter,
Include the following steps:
Step 1: the test parameter of selection spectrophotometer m-1 first is denoted as variable x respectively1、x2、……xm-1；
Step 2: different parameters is selected under each variable, total n parameter then defines the matrix X of test parameter variable
It is as follows:
Step 3: the performance indicator Y of optical filteriMain examination central wavelength, peak transmittance, bandwidth and rejection zone depth,
It defines herein and uses Y respectively1、Y2、Y3And Y4It indicates, the relevant document for defining reference optical diaphragm principle；
Step 4: above-mentioned relationship is characterized as below, the method for the multiple linear regression based on mathematics, and matrix β is that needs are polynary
The matrix of recurrence:
Step 5: using the method for experimental design, determining the relevant parameter of test experiments, the parameter of design is carried out respectively
Experiment test；
Step 6: variance analysis, verification test result Y are carried out to above-mentioned multiple linear regressioniIt is between test parameter X
No there are significant linear relationships, construct test statistics by the method for null hypothesis, under given level of significance α,
Determine the conspicuousness of linear regression relation；
Step 7: the inspection of further progress partial regression coefficient proposes to influence inapparent parameter x to y value, final to determine
YiWith the multiple linear regression equations of X；For the test of cut-off narrow band filter deeply, parameter b0It is exactly YiEstimated value,
Remaining parameter is then the error for influencing test result.
Wherein, in the step 1, test parameter includes: that the time of integration, light intensity attenuation ratio, the aperture of the diaphragm and slit are wide
Degree.
Embodiment 1
Example: the test result of deep cut-off narrow band filter
1, the sample deposition of deep light cutoff filter film on a quartz substrate, is surveyed using lambda-900 spectrophotometer
Examination；
2, select the test parameter of spectrophotometer for slit width, light intensity attenuation ratio, the aperture of the diaphragm and integral first
Time etc. is denoted as variable x respectively1、x2、x3And x4；
3、x1The parameter selection of variable are as follows: 0.2nm, 0.5nm and 1nm；x2The parameter selection of variable are as follows: 1%, 10% and
100%；x3The parameter selection of variable are as follows: 2mm, 5mm and 10mm；x4The parameter selection of variable are as follows: 0.05s, 0.1s and 0.2s；
4, test parameter matrix X is constructed:
5, test result matrix Y: wherein the unit of central wavelength is nm, bandwidth unit nm；
6, the multiple linear regression analysis result of central wavelength: multiple regression equation is as follows:
yCentral wavelength=765.3493+0.15646 × x1-0.01501×x2+0.020748×x3+1.2381×x4
By variance analysis, related coefficient 0.97215 shows that regression variable is high to the fitting degree at sample number strong point；
Residual standard deviation is 0.041794, wherein x3And x4For highly significant, x1To be significant, x2It is not significant.Therefore it does and is further biased back to
Return the inspection of coefficient, the partial regression coefficient of four variables is respectively 0.43425,0.05645,0.57586 and 0.64939, explanation
To yCentral wavelengthThe sequencing for influencing size is respectively x4、x3And x1.This just illustrates that the central wavelength of light filter film is 765.3nm,
The time of integration of test, the incident aperture of the diaphragm and slit width are the key parameters for influencing filter center wavelength measurement.
7, the multiple linear regression analysis result of peak transmittance: multiple regression equation is as follows:
yPeak transmittance=95.8201-22.6453 × x1-1.5091×x2-1.1643×x3-1.5263×x4
By variance analysis, related coefficient 0.99553 shows that regression variable is high to the fitting degree at sample number strong point；
Residual standard deviation is 1.1999, wherein x1And x3For highly significant, x2And x4It is not significant.Therefore further partial regression coefficient is done
Inspection, the partial regression coefficient of four variables is respectively 0.88247,0.079659,0.45371 and 0.011241, is illustrated pair
yPeak transmittanceThe sequencing for influencing size is respectively x1And x3.This just illustrates that the peak transmittance of light filter film is 95.82%, surveys
The slit width of examination and the incident aperture of the diaphragm are the key parameters for influencing the test of optical filter peak transmittance.
8, the multiple linear regression analysis result of bandwidth: multiple regression equation is as follows:
yBandwidth=0.92872+0.29582 × x1-0.005005×x2+0.02449×x3-0.14286×x4
By variance analysis, related coefficient 0.96837 shows that regression variable is high to the fitting degree at sample number strong point；
Residual standard deviation is 0.049114, wherein x1And x3For highly significant, x2And x4It is not significant.Therefore further partial regression system is done
Several inspections, the partial regression coefficient of four variables are respectively 0.74408,0.017047,0.61579 and 0.067884, are illustrated pair
yBandwidthThe sequencing for influencing size is respectively x1And x3.This just illustrates that the bandwidth of light filter film is 0.93nm, and the slit of test is wide
Degree and the incident aperture of the diaphragm are the key parameters for influencing optical filter bandwidth test.
9, the multiple linear regression analysis result of rejection zone depth: multiple regression equation is as follows:
yRejection zone minimum transmitance=-2.3766 × 10-4+9.5558×10-4×x1-1.8428×10-4×x2-3.0585×10-5
×x3+2.8876×10-3×x4
By variance analysis, related coefficient 0.94889 shows that regression variable is high to the fitting degree at sample number strong point；
Residual standard deviation is 1.9248 × 10-4, wherein x1For highly significant, x4For significant, x2And x3It is not significant.Therefore it does further
The inspection of partial regression coefficient, the partial regression coefficient of four variables are respectively 0.77559,0.20261,0.24824 and 0.44292,
Illustrate to yRejection zone minimum transmitanceThe sequencing for influencing size is respectively x1And x4.This just illustrates the slit width of test and the time of integration
It is the key parameter for influencing optical filter rejection zone depth test.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvement and deformations can also be made, these improvement and deformations
Also it should be regarded as protection scope of the present invention.
Claims (2)
1. a kind of high precision measurement method of deep cut-off narrow band filter, which is characterized in that it includes the following steps:
Step 1: the test parameter of selection spectrophotometer m-1 first is denoted as variable x respectively1、x2、……xm-1；
Step 2: select different parameters under each variable, total n parameter, then the matrix X for defining test parameter variable is as follows:
Step 3: the performance indicator Y of optical filteriCentral wavelength, peak transmittance, bandwidth and rejection zone depth are examined, is defined herein
Y is used respectively1、Y2、Y3And Y4It indicates；
Step 4: above-mentioned relationship is characterized as below, and the method for the multiple linear regression based on mathematics, matrix β is to need multiple regression
Matrix:
Step 5: using the method for experimental design, determining the relevant parameter of test experiments, the parameter of design is tested respectively
Test；
Step 6: variance analysis, verification test result Y are carried out to above-mentioned multiple linear regressioniIt whether there is between test parameter X
Significant linear relationship constructs test statistics by the method for null hypothesis, under given level of significance α, determines line
The conspicuousness of property regression relation；
Step 7: the inspection of further progress partial regression coefficient proposes to influence inapparent parameter x to y value, finally determines YiAnd X
Multiple linear regression equations；For the test of cut-off narrow band filter deeply, parameter b0It is exactly YiEstimated value, remaining ginseng
It is several, it is the error for influencing test result.
2. the high precision measurement method of deep cut-off narrow band filter as described in claim 1, which is characterized in that the step 1
In, test parameter includes: the time of integration, light intensity attenuation ratio, the aperture of the diaphragm and slit width.
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